According to the theory of laser triangulation measurement,it can be used to test not only plane but also curving surface profile. As a non-contact measurement of optic-electro on a single spot,its advantages are high...According to the theory of laser triangulation measurement,it can be used to test not only plane but also curving surface profile. As a non-contact measurement of optic-electro on a single spot,its advantages are high measurement speed,high precision,great anti-jamming,small measurement spot,easy operation,wide application range and so on. Laser triangulation measurement based on PSD makes system perfect with small volume,high sensitivity,low noise,high resolution. The system’s precision is above 0.5%. It shows that with simpler specified PSD software it can be found a convenient way to optimize system design,improve reliability,shrink volume,reduce power and shorten exploitation period.展开更多
This paper presents a coherent resolved heterodyne interferometer used for recognition of surfaces of optical systems with resort to a short coherence length light source and a position sensitive detection(PSD), and i...This paper presents a coherent resolved heterodyne interferometer used for recognition of surfaces of optical systems with resort to a short coherence length light source and a position sensitive detection(PSD), and its special features of surface sensitivity, high resolution and short measuring time.展开更多
文摘According to the theory of laser triangulation measurement,it can be used to test not only plane but also curving surface profile. As a non-contact measurement of optic-electro on a single spot,its advantages are high measurement speed,high precision,great anti-jamming,small measurement spot,easy operation,wide application range and so on. Laser triangulation measurement based on PSD makes system perfect with small volume,high sensitivity,low noise,high resolution. The system’s precision is above 0.5%. It shows that with simpler specified PSD software it can be found a convenient way to optimize system design,improve reliability,shrink volume,reduce power and shorten exploitation period.
文摘This paper presents a coherent resolved heterodyne interferometer used for recognition of surfaces of optical systems with resort to a short coherence length light source and a position sensitive detection(PSD), and its special features of surface sensitivity, high resolution and short measuring time.
