A Simple and Rapid Method for the Detection of Non-Ionic Surfactants

A spectrophotometric approach for the detection of non-ionic surfactant (Triton X-100) has been proposed in this paper. This method does not involve extraction of the ion-associate with harmful solvents, but employs adhesion of the ion-association of potassium/non-ionic surfactants complex and tetraphenylporphyrin tetrasulfonic acid obtained by vigorous shaking. The adhered ion-associate was dissolved with water and its absorbance was measured. The sensitivity for Triton X-100 was determined to be 0.146 (expressed as absorbance of 1 mg/L solution). The adhesion tendency of ion-associate was found to be dependent on the water contact angle, which in turn was influenced by a high adhesion of the ion-associate and by low blank values. In this respect, a tetrafluo-roethylene vessel was found to be the most suitable for the detection of non-ionic surfactants. This spectrophotometrical method is simply and rapidly performed by a procedure based on mechanical shaking and can be employed to detect non-ionic surfactants containing more than 7 polyethylene oxide units.

Synthesis of Y_2O_3 Nano-Powder from Yttrium Oxalate under Ambient Temperature

High purity Y_2O_3 nano-powders was synthesized directly from solution ofindustrial YCl_3 by method of oxalate precipitation through super-micro-reactors made by complexnon-ionic surfactant. The purity and diameter of Y_2O_3 particles were controlled by such processingparameters as concentration of YCl_3 and oxalic acid and complex non-ionic surfactant etc. TEMphotomicrographs show that Y_2O_3 particles are spherical in shape, with an average diameter of lessthan 30 nm. Test results certify that the purity and particle diameter as well as the dispersion ofY_2O_3 nano-powder depend on the concentrations of YCl_3, oxalic acid and complex non-ionicsurfactant. The optimum ranges of the concentrations for YCl_3 and complex non-ionic surfactant whenthe diameter of Y_2O_3 particles is smaller than 100 nm are 0.43 ～1.4 mol ? L^(-1) and0.031～0.112 mol·L^(-1) respectively, while the mass fraction range of oxalic acid is 10% ～18% .The purity of Y_2O_3 nano-powder tested by ICP-AES analysis is 99.99% .

Effect of FA/O complexing agents and H_2O_2 on chemical mechanical polishing of ruthenium in weakly alkaline slurry

This paper investigated the effect of FA/O and hydrogen peroxide （H2O2） on ruthenium （Ru） removal rate （RR） and static etching rate （SER）. It was revealed that Ru RR and SER first linearly increased then slowly decreaseed with the increasing H2O2 probably due to the formation of uniform Ru oxides on the surface during polishing. Their corrosion behaviors and states of surface oxidation were analyzed. In addition, FA/O could chelate Ru oxides （such as （RuO4）2- and RUO4- changed into soluble amine salts [R（NH3）4] （RuO4）2） and enhance Ru RR. The non-ionic surfactant AD was used to improve the Ru CMP performance. In particular, the addition of AD can lead to significant improvement of the surface roughness.