利用等效1 MeV中子和γ射线对1200 V SiC功率MOSFET进行辐射,研究了电离损伤和位移损伤对器件的影响,并分析了辐射后器件栅氧长期可靠性。结果表明:中子辐射后器件导通电阻发生明显退化,与辐射引入近界面缺陷降低载流子寿命和载流子迁...利用等效1 MeV中子和γ射线对1200 V SiC功率MOSFET进行辐射,研究了电离损伤和位移损伤对器件的影响,并分析了辐射后器件栅氧长期可靠性。结果表明:中子辐射后器件导通电阻发生明显退化,与辐射引入近界面缺陷降低载流子寿命和载流子迁移率有关。时间依赖的介质击穿(TDDB)结果表明,栅泄漏电流呈现先增加后降低趋势,与空穴捕获和电子捕获效应有关。中子辐射后栅漏电演化形式未改变,但氧化层击穿时间增加,这是中子辐射缺陷增加了Fowler-Nordheim(FN)隧穿势垒的缘故。总剂量辐射在器件氧化层内引入陷阱电荷,使得器件阈值电压负向漂移。随后的TDDB测试表明,与中子辐射一致,总剂量辐射未改变栅漏电演化形式,但氧化层击穿时间提前。这是总剂量辐射在氧化层内引入额外空穴陷阱和中性电子陷阱的缘故。展开更多
The synergistic effect of total ionizing dose(TID) and single event gate rupture(SEGR) in SiC power metal–oxide–semiconductor field effect transistors(MOSFETs) is investigated via simulation. The device is found to ...The synergistic effect of total ionizing dose(TID) and single event gate rupture(SEGR) in SiC power metal–oxide–semiconductor field effect transistors(MOSFETs) is investigated via simulation. The device is found to be more sensitive to SEGR with TID increasing, especially at higher temperature. The microscopic mechanism is revealed to be the increased trapped charges induced by TID and subsequent enhancement of electric field intensity inside the oxide layer.展开更多
Different switching frequencies are required when SiC metal-oxide-semiconductor field-effect transistors(MOSFETs)are switching in a space environment.In this study,the total ionizing dose(TID)responses of SiC power MO...Different switching frequencies are required when SiC metal-oxide-semiconductor field-effect transistors(MOSFETs)are switching in a space environment.In this study,the total ionizing dose(TID)responses of SiC power MOSFETs are investigated under different switching frequencies from 1 kHz to 10 MHz.A significant shift was observed in the threshold voltage as the frequency increased,which resulted in premature failure of the drain-source breakdown voltage and drain-source leakage current.The degradation is attributed to the high activation and low recovery rates of traps at high frequencies.The results of this study suggest that a targeted TID irradiation test evaluation method can be developed according to the actual switching frequency of SiC power MOSFETs.展开更多
自2017年报道SiC(碳化硅)功率金属-氧化物半导体场效应晶体管(MOSFET)技术进展以来,针对器件比导通电阻(RON,SP)高等问题不断优化器件结构设计,本课题组改进关键加工工艺,使1200 V SiC MOSFET的RON,SP从8 mΩ·cm^2降低到4.8 mΩ...自2017年报道SiC(碳化硅)功率金属-氧化物半导体场效应晶体管(MOSFET)技术进展以来,针对器件比导通电阻(RON,SP)高等问题不断优化器件结构设计,本课题组改进关键加工工艺,使1200 V SiC MOSFET的RON,SP从8 mΩ·cm^2降低到4.8 mΩ·cm^2。与此同时,本课题组采用新一代SiC MOSFET设计和工艺技术研制出6.5 kV、10 kV以及15 kV等高压低导通电阻SiC MOSFET,其中10 kV和15 kV器件的比导通电阻分别为144 mΩ·cm^2和204 mΩ·cm^2,接近单极型SiC器件的理论极限。展开更多
利用SiC MOSFET能简化电路拓扑、提高电源的功率密度和效率.为推动大功率等离子体电源的升级换代,提出了一种采用新型SiC功率器件的全桥谐振变换器.该谐振变换器的主电路采用LLC Zero Voltage Switching(ZVS)拓扑结构,可将谐振换流频率...利用SiC MOSFET能简化电路拓扑、提高电源的功率密度和效率.为推动大功率等离子体电源的升级换代,提出了一种采用新型SiC功率器件的全桥谐振变换器.该谐振变换器的主电路采用LLC Zero Voltage Switching(ZVS)拓扑结构,可将谐振换流频率范围增大至260～310 kHz.设计的高频高压全桥LLC ZVS谐振变换器样机的额定输出功率为8 kW,输出电压为270 V.对所研制的8 kW级SiC MOSFET全桥LLC ZVS谐振变换器样机的驱动性能、换流过程、温升以及效率进行了测试,结果表明,研制的谐振软开关等离子体电源性能优良,工作稳定可靠,效率和功率密度均优于使用传统Si MOSFET的LLC谐振变换器.展开更多
文摘利用等效1 MeV中子和γ射线对1200 V SiC功率MOSFET进行辐射,研究了电离损伤和位移损伤对器件的影响,并分析了辐射后器件栅氧长期可靠性。结果表明:中子辐射后器件导通电阻发生明显退化,与辐射引入近界面缺陷降低载流子寿命和载流子迁移率有关。时间依赖的介质击穿(TDDB)结果表明,栅泄漏电流呈现先增加后降低趋势,与空穴捕获和电子捕获效应有关。中子辐射后栅漏电演化形式未改变,但氧化层击穿时间增加,这是中子辐射缺陷增加了Fowler-Nordheim(FN)隧穿势垒的缘故。总剂量辐射在器件氧化层内引入陷阱电荷,使得器件阈值电压负向漂移。随后的TDDB测试表明,与中子辐射一致,总剂量辐射未改变栅漏电演化形式,但氧化层击穿时间提前。这是总剂量辐射在氧化层内引入额外空穴陷阱和中性电子陷阱的缘故。
基金Project supported by the National Natural Science Foundation of China(Grant No.12004329)Open Project of State Key Laboratory of Intense Pulsed Radiation Simulation and Effect(Grant No.SKLIPR2115)+1 种基金Postgraduate Research and Practice Innovation Program of Jiangsu Province(Grant No.SJCX22_1704)Innovative Science and Technology Platform Project of Cooperation between Yangzhou City and Yangzhou University,China(Grant Nos.YZ202026301 and YZ202026306)。
文摘The synergistic effect of total ionizing dose(TID) and single event gate rupture(SEGR) in SiC power metal–oxide–semiconductor field effect transistors(MOSFETs) is investigated via simulation. The device is found to be more sensitive to SEGR with TID increasing, especially at higher temperature. The microscopic mechanism is revealed to be the increased trapped charges induced by TID and subsequent enhancement of electric field intensity inside the oxide layer.
基金supported by the National Natural Science Foundation of China under Grant No.11975305the West Light Foundation of The Chinese Academy of Sciences,Grant No.2017-XBQNXZ-B-008。
文摘Different switching frequencies are required when SiC metal-oxide-semiconductor field-effect transistors(MOSFETs)are switching in a space environment.In this study,the total ionizing dose(TID)responses of SiC power MOSFETs are investigated under different switching frequencies from 1 kHz to 10 MHz.A significant shift was observed in the threshold voltage as the frequency increased,which resulted in premature failure of the drain-source breakdown voltage and drain-source leakage current.The degradation is attributed to the high activation and low recovery rates of traps at high frequencies.The results of this study suggest that a targeted TID irradiation test evaluation method can be developed according to the actual switching frequency of SiC power MOSFETs.
