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Design and Fabrication of Hybrid Piezomotor Applied in Precision Positioning Devices 被引量:2
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作者 CHENG Dong-ming DUAN Zhi-yong MA Feng-ying GONG Qiao-xia 《Semiconductor Photonics and Technology》 CAS 2007年第1期25-32,共8页
The motor’s configuration is designed and the dynamic analysis equations based on its simplified model are deduced. A testing system utilizing grating is set up to test this new motor, and the theoretical movement pr... The motor’s configuration is designed and the dynamic analysis equations based on its simplified model are deduced. A testing system utilizing grating is set up to test this new motor, and the theoretical movement principle for the motor is proved by experiments. The pulse waveforms are applied to drive the motor to move in steps. The motor has a displacement resolution of 10 nm and a maximum velocity of 0.6 mm/s. It can drive a 200 g slider whose range is 20 mm. A one-dimensional precision positioning platform is fabricated by using the new hybrid piezoelectric motor. The prototype is made up of two servomotors and two piezoelectric motors, which are controlled automatically by a computer. The positioning range of the platform is 10 cm. 展开更多
关键词 hybrid piezoelectric motors precision positioning devices micro-machining systems dynamic analysis
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