Research on Large Depth Diameter Ratio Ultra-precision Aspheric Grinding System

In this paper, the factors of affecting surface roughness and profiles accuracy of the machined larege depth diamter ratio aspheric surfaces in ultra-precision grinding process are analyzed theoretically. An ultra-precision aspheric grinding system is then designed and manufactured. Aerostatic form is adopted to build the spindle of the workpiece, transverse guideway, longitudinal guideway and the spindle of the grinder in this system. The following specification is achieved, such as the turning accuracy of the spindle of the workpiece is 0.05 μm, radial rigidity of the spindle is GE 220N/μm, axial rigidity is GE 160 N/μm, radial rigidity of the guideway is GE 200N/μm, the highest rotational speed of the grinder is 80 000 rev/min and its turning accuracy is 0.1 μm, the resolution of linear displacement of the transverse and longitudinal guideway is 4.9 nm. Adjusting range of this adjusting mechanism is 2 mm in the Y direction, the adjusting accuracy of the precise adjusting mechanism is 0.1 μm. Micro displacement measuring system of this ultra-precision aspheric grinding adopts two-backfeed strategy, and angle displacement back-feed is realized by photoelectric encoder, it’s resolution is 655 360 pulse/rev. after 4 frequency multiplication, it’s angle displacement resolution is achieved 2 621 440 pulse/rev. Straight-line displacement is monitored by single frequency laser interferometer (DLSTAX LTM-20B, made in Japan). This CNC system adopts inimitable bi-arc step length flex CN interpolation algorithm, it’s CN system resolution is 5 nm.So this aspheric grinding system ensures profile accuracy of the machined part. The resolution of this interferometer is 5 nm. Finally, lots of ultra-precision grinding experiments are carried out on this grinding system. Some optical aspheric parts, with profiles accuracy of 0.3 μm, surface roughness less than 0.01 μm, are obtained.

Design of Ultra-Precision CNC Grinding Machine and Its Application in Machining Large Aspheric Mirrors

Large aspheric mirrors are needed for the remote sensing and ground based telescope optical systems,these mirrors are made of hard and brittle materials which require ultra-precision grinding process to guarantee the high profile accuracy and machining efficiency. The ultra-precision aspheric CNC grinding machine( UAG900) is presented by this paper,as well as its grinding capability. The hydrostatic bearings of high accuracy and stiffness are adopted by the linear and rotary motions to guarantee the mirror accuracy,material removal rate and subsurface damage. Disk type grinding wheel with arc edge is used. The material removal rate can be up to 360 mm3/ min to guarantee the machining efficiency during rough grinding using D180 diamond grinding wheel while the fine grinding is performed using D15 grinding wheel. It indicates that the grinding wheel radius measuring error is proportional to the profile error induced by the grinding path. The grinding step size is better to be 0. 01 mm for the reduction of the grinding movement accelerations and program length. The grinding path is planned and expressed based on the grinding mode according to the mirror shape. One540 mm×450 mm× 100 mm zerodur mirror is ground and re-ground using the measuring data acquired by the Leitz CMM. The final surface accuracy of P-V value is less than 5 μm after compensation grinding.

Precision Grinding of Reaction Bonded Silicon Carbide Using Coarse Grain Size Diamond Wheels

Reaction bonded SiC（RBSiC） is attractive for optical application because of its favorable properties and low fabrication cost. However, the difficultness and cost involved in RBSiC grinding limit its application. The investigation on high efficient and low-cost machining with good grinding quality is desired. Generally, high efficient machining for RBSiC is realized by using coarse grain size grinding wheels, but serious grinding damage is inevitable. In this paper, monolayer nickel electroplated coarse grain size diamond grinding wheels with grain sizes of 46 μm, 91 μm, and 151 μm were applied to the grinding of RBSiC. An electrolytic in-process dressing（ELID） assisted conditioning technique was first developed by using cup shape copper bonded conditioning wheels with grain sizes of 15 μm and 91 μm to generate the conditioned coarse grain size wheels with minimized wheel run-out error within 2 μm, constant wheel peripheral envelop as well as top-flattened diamond grains. Then, the grinding experiments on RBSiC were carried out to investigate the grinding performance and material removal mechanism. The experimental results indicate that the developed conditioning technique is applicable and feasible to condition the coarse grain size diamond wheels under optimal conditioning parameters, and the material removal mechanism involved in RBSiC grinding is the combination of brittle fracture and ductile deformation to generate smooth ground surface. This research is significant for the high efficient and low-cost precision grinding of RBSiC with good ground surface quality.

Active vibration control of spindle in ultra-precision turning machine

In order to minimize vibration and improve rotary precision of spindle, we apply active vibration control technique to ultra-precision turning machine based on the analysis of vibration characteristic of aerostatic bearing spindle. Using aerostatic bearing itself as actuator, the vibration of spindle is controlled by adjusting admission pressure respectively and by changing pressure distribution in the bearing. The experiments and simulations prove that this method can minimize the vibration of spindle effectively.

Sensor-Based Inspection of the Formation Accuracy in Ultra-Precision Grinding （UPG） of Aspheric Surface Considering the Chatter Vibration

This paper proposes an experimental approach for monitoring and inspection of the formation accuracy in ultra-precision grinding （UPG） with respect to the chatter vibration. Two factors related to the grinding progress, the grinding speed of grinding wheel and spindle, and the oil pressure of the hydrostatic bearing are taken into account to determining the accuracy. In the meantime, a mathematical model of the radius deviation caused by the micro vibration is also established and applied in the experiments. The results show that the accuracy is sensitive to the vibration and the forming accuracy is much improved with proper processing parameters. It is found that the accuracy of aspheric surface can be less than 4 μm when the grinding speed is 1400r/min and the wheel speed is 100 r/min with the oil pressure being 1.1 MPa.

Interference and grinding characteristics in ultra-precision grinding of thin-walled complex structural component using a ball-end grinding wheel

As for ultra-precision grinding of difficult-to-process thin-walled complex components with ball-end grinding wheels,interference is easy to occur.According to screw theory and grinding kinematics,a mathematical model is established to investigate the interference and grinding characteristics of the ball-end wheel.The relationship between grinding wheel inclination angle,C axis rotation angle,grinding position angle and grinding wheel wear are analyzed.As the grinding wheel inclination angle increases,the C axis rotatable range decreases and the grinding position angle increases.The grinding position angle and wheel radius wear show a negative correlation with the C axis rotation angle.Therefore,a trajectory planning criteria for increasing grinding speed as much as possible under the premise of avoiding interference is proposed to design the grinding trajectory.Then grinding point distribution on the ball-end wheel is calculated,and the grinding characteristics,grinding speed and maximum undeformed chip thickness,are investigated.Finally,a complex structural component can be ground without interference,and surface roughness and profile accuracy are improved to 40.2 nm and 0.399 lm,compared with 556 nm and 3.427 lm before ultra-precision grinding.The mathematical model can provide theoretical guidance for the analysis of interference and grinding characteristics in complex components grinding to improve its grinding quality.

Manufacturing technologies toward extreme precision

Precision is one of the most important aspects of manufacturing.High precision creates high quality,high performance,exchangeability,reliability,and added value for industrial products.Over the past decades,remarkable advances have been achieved in the area of high-precision manufacturing technologies,where the form accuracy approaches the nanometer level and surface roughness the atomic level.These extremely high precision manufacturing technologies enable the development of high-performance optical elements,semiconductor substrates,biomedical parts,and so on,thereby enhancing the ability of human beings to explore the macroand microscopic mysteries and potentialities of the natural world.In this paper,state-of-the-art high-precision material removal manufacturing technologies,especially ultraprecision cutting,grinding,deterministic form correction polishing,and supersmooth polishing,are reviewed and compared with insights into their principles,methodologies,and applications.The key issues in extreme precision manufacturing that should be considered for future R&D are discussed.

Theoretical Study on Non-transmission High Efficient Parallel Camber Grinding Machine

Be directed against the development trend of modern CNC grinding machine towards high precision and high efficiency, some general weaknesses of existing camber grinding machine are analyzed in detail. In order to develop new type CNC camber grinding machine that can grind complex die, and genuinely achieved accurate feed and high efficient grinding, a new type camber grinding machine is put forward, called non-transmission virtual-shaft CNC camber grinding machine. Its feed system is a parallel mechanism that is directly driven by linear step motor. Therefore, traditional transmission types, such as the ball lead-screw mechanisms, the gears, the hydraulic transmission system, etc. are cancelled, and the feed system of new type CNC camber grinding machine can truly possess non-creep, good accuracy retentiveness a wide range of feed-speed change, high kinematical accuracy and positioning precision, etc. In order to realize that the cutting motion is provided with high grinding speed, step-less speed variation, high rotational accuracy, good dynamic performance, and non-transmission, the driving technology of hollow rotor motor is applied to drive the spindle of new type grinding machine,thus leading to the elimination of the transmission parts of cutting motion. The principle structure model of new type camber grinding machine is advanced. The selection, control gist and driving circuit line of the linear step motor are expounded. The main technology characteristics and application advantages of non-transmission virtual-shaft CNC camber grinding machine are introduced.

Study on Wheel and Workpiece Position Error Influence on Surface Shape Accuracy during Ceramic Ball Grinding

The reasons for bringing surface accuracy error in ultra-precision grinding ceramic ball joint were analyzed,and the influences wheel position error and shaft run-out error on the ball joint surface accuracy were discussed.Through establishing three-dimensional grinding model,the mathematical relationship between the position error and surface accuracy was derived,and the distance from any point on spherical surface to the ideal center was calculated when position error existed,and a precise surface shape was got,and theoretical support was provided to improve the surface accuracy during the grinding process.Using self-developed ultraprecision grinding machine to do the ceramic ball grinding experiment,the surface accuracy PV value of ceramic spherical joint is 4.8μm.

Clarification of abrasive jet precision finishing with wheel as restraint mechanisms and experimental verification

According to the critical size ratio for the characteristic particle size to film thickness between grinding wheel and work, the machining mechanisms in abrasive jet precision finishing with grinding wheel as restraint can be categorized into four states, namely, two-body lapping, three-body polishing, abrasive jet machining and fluid hydrodynamic shear stress machining. The critical transition condition of two-body lapping to three-body polishing was analyzed. The single abrasive material removal models of two-body lapping, three-body polishing, abrasive jet finishing and fluid hydrodynamic shear stress machining were proposed. Experiments were performed in the refited plane grinding machine for theoretical modes verification. It was found that experimental results agreed with academic modes and the modes validity was verified.

复杂曲面机器人磨抛技术研究现状与趋势展望综述

在航空、能源、交通、军工等国家战略领域中,针对复杂曲面零件的自动化、高质量和高效率磨抛需求,对近年来国内外工业机器人磨抛加工关键技术及集成系统的研究和应用进展进行了综述。首先,从复杂曲面机器人磨抛机理及工艺优化、磨抛运动轨迹规划、磨削力控制等方面总结了复杂曲面机器人磨抛技术的研究成果;然后,介绍了国内外机器人磨抛集成系统应用现状;最后,分析了复杂曲面机器人磨抛技术的主要问题以及发展趋势,为该技术的发展提供了重要的指导和方向。研究结果表明:当前该技术存在的主要问题包括磨抛机理不够清晰,数学模型不够准确,复杂曲面机器人磨抛轨迹规划效率不高,磨抛力的控制仍不够精准等;另外,磨抛工艺参数优化、机器人力位混合控制、机器人高精度标定与误差补偿、基于数字孪生的机器人磨抛在线监控、机器人磨抛细分应用场景等方面的研究和实践将极大地推动机器人磨抛技术的发展和应用。

基于ELID磨削技术的陶瓷材料精密磨削加工技术优化

为解决陶瓷材料的精密磨削加工容易产生裂纹、材料不耐高温的问题,提出基于ELID磨削技术的陶瓷材料精密磨削加工技术优化方法,基于强塑性变形受力的原理,通过公式计算优化陶瓷材料破坏性控制,通过改变磨削深度优化陶瓷材料破坏性控制。使用3种方法进行对比实验,结果表明基于ELID磨削技术样品的磨削表面粗糙度小于3.2 nm,属于加工痕迹不可见范围,优于传统的高速磨削和预应力磨削。

液体静压运动副的四轴联动精密加工机床结构设计

大口径平面、球面、非球面光学元件广泛应用于光刻机、高能激光器、高分相机等高端装备的光学系统中,尺寸大于400 mm×400 mm、表面轮廓精度均方根值(root mean square,RMS)优于1μm等技术指标是大口径光学元件在磨削加工阶段的目标精度要求。磨削工艺主要面临如何实现高平滑的表面轮廓加工以及控制亚表面损伤层深度等问题。根据已有的实验研究,磨削机床采用高精度的液体静压运动副,可以有效地提高光学元件抛光后表面轮廓的平滑程度以及降低亚表面损伤层的厚度。具备上述特性的高性能磨削机床国外对中国禁运,而国内尚无成熟的商品。因此,文章研制了一种采用液体静压运动副的四轴联动精密加工机床,分析了机床的主要构型,进行了机床主要运动部件的精度分配,完成了基于液体静压运动副的X/Y/Z/C四轴的设计方案,最后进行了光学元件磨削加工工艺实验,实现了380 mm×541 mm口径微晶玻璃磨削面形精度±0.471μm(RMS值)、表面粗糙度Ra0.3μm的加工目标。

风电轴承大尺寸钢球光球加工技术

针对国内现有风电轴承大尺寸钢球光球机加工精度低,加工效率低的问题,对钢球在光球机动、静磨盘沟道内的运动规律、受力特点和磨削机理进行分析,光球时钢球受到的磨削力与动、静磨盘沟道深度比有关,并基于ADAMS仿真得到最佳动、静磨盘沟道深度比为7∶3,去两极和环带、成形、走圆工序最佳动磨盘转速分别为90,120,90 r/min。样机试验结果表明,改进后光球机的光球效率提高了30%,球形误差至少提高了0.2 mm,表面粗糙度Ra值至少减小了0.03 mm。

修形斜齿轮成形磨削中齿廓精度补偿方法

建立了斜齿轮齿廓修形的坐标方程与成形磨削砂轮修整的几何算法,优化出齿廓修形后的砂轮截面廓形;通过数值模拟分析,得到了机床位置误差与齿廓偏差之间的耦合关系;编制了成形磨削齿廓精度调整软件,计算出斜齿轮修形与之对应的成形砂轮廓形和齿廓精度调整参数。通过修形斜齿轮的成形磨削试验,验证了砂轮廓形修整的正确性和齿廓精度调整的有效性。

Hemispherical resonator with low subsurface damage machined by small ball-end fine diamond grinding wheel:A novel grinding technique

As for the ultra-precision grinding of the hemispherical fused silica resonator,due to the hard and brittle nature of fused silica,subsurface damage(SSD)is easily generated,which enormously influences the performance of such components.Hence,ultra-precision grinding experiments are carried out to investigate the surface/subsurface quality of the hemispherical resonator machined by the small ball-end fine diamond grinding wheel.The influence of grinding parameters on the surface roughness(SR)and SSD depth of fused silica samples is then analyzed.The experimental results indicate that the SR and SSD depth decreased with the increase of grinding speed and the decrease of feed rate and grinding depth.In addition,based on the material strain rate and the maximum undeformed chip thickness,the effect of grinding parameters on the subsurface damage mechanism of fused silica samples is analyzed.Furthermore,a multi-step ultra-precision grinding technique of the hemispherical resonator is proposed based on the interaction influence between grinding depth and feed rate.Finally,the hemispherical resonator is processed by the proposed grinding technique,and the SR is improved from 454.328 nm to 110.449 nm while the SSD depth is reduced by 94%from 40μm to 2.379μm.The multi-step grinding technique proposed in this paper can guide the fabrication of the hemispherical resonator.

大口径碳化硅机器人柔性磨削去除特性研究

我国空间遥感、深空探测、空间战略装备等国家重大工程的快速实施,对大口径复杂曲面光学元件的高效制造提出了要求。为了提高光学加工中研磨阶段的效率,提出了基于工业机器人的柔性磨削技术。分析并比较柔性磨削技术与传统刚性磨削、传统研磨技术的差异,提出了等体积去除模型并验证其正确性。研究了磨削去除体积与驻留时间、压力以及转速的关系。实验条件下,柔性磨削去除效率为0.59mm^(3)/s,高于传统小磨头研磨效率8.4×10^(-2)mm^(3)/s。论文提出的柔性磨削技术为大口径碳化硅空间反射镜高效磨削提供一条新技术途径。

超精密磨削YAG晶体的脆塑转变临界深度预测

钇铝石榴石(YAG)晶体是制造固体激光器的重要材料,超精密磨削是加工YAG晶体等硬脆材料零件的重要方法,研究硬脆材料加工表面的微观变形、脆塑转变机理对超精密磨削加工具有重要的指导作用。为了实现YAG晶体低损伤磨削加工,获得高质量表面,基于弹塑性接触理论和压痕断裂力学,通过分析单磨粒划擦作用下材料表面的变形过程,考虑材料的弹性回复、微观下力学性能的尺寸效应,建立了脆塑转变临界深度的预测模型,并计算得到YAG晶体的脆塑转变临界深度为66.7 nm。在此基础上,通过不同粒度砂轮超精密磨削YAG晶体试验对建立的脆塑转变临界深度预测模型进行验证,并计算不同粒度砂轮在相应工艺条件下的磨粒切深。结果表明,磨粒切深高于脆塑转变临界深度时,YAG晶体磨削表面材料以脆性方式被去除,磨削表面损伤严重;磨粒切深低于脆塑转变临界深度时,磨削表面材料以塑性方式被去除,能够获得高质量磨削表面,加工表面粗糙度达到1 nm。建立的脆塑转变临界深度预测模型能够为YAG晶体的低损伤超精密磨削加工提供理论指导。

非球面碳化钨模具超精密斜轴磨削原理及工艺参数对面形精度影响规律

玻璃模压是一种快速大批量生产非球面光学玻璃透镜的方法,无结合剂碳化钨作为一种优异的模具材料被广泛应用于玻璃模压。碳化钨模具的表面质量直接决定了非球面光学玻璃透镜产品的品质。为了提高碳化钨非球面模具超精密磨削加工的表面质量,针对非球面碳化钨模具超精密斜轴磨削,通过分析超精密斜轴磨削原理,研究了进给距离、工件转速、进给速度和磨削深度等参数,对非球面碳化钨模具斜轴磨削面形精度的影响规律,得到了碳化钨斜轴磨削的合理工艺参数范围。最后通过磨削优化实验研究,得到了碳化钨斜轴磨削的最优工艺方案,从而完成了碳化钨模具超精密斜轴磨削实验。实验结果表明,磨削面形PV值和RMS值分别为0.279 7μm和0.041 9μm,具有良好的工程应用意义。

斜面、圆弧精密成型磨削工艺与加工方法研究

在高精密链接器模具零件制造中,精密成型磨削是一种不可取代的传统加工方法。这类零件精度高且形状复杂,在进行斜面、圆弧加工时需要操作者有较高的技能水平和工艺能力,在生产加工中利用合理的工艺及方法完成加工,能有效地提高零件精度、产能及效率。