Investigation of a Pressure Sensor with Temperature Compensation Using Two Concentric Wheatstone-Bridge Circuits

This study presents a silicon-based pressure sensor with temperature compensation. The eight piezoresistors were designed on the polycrystalline silicon membrane and constructed by two concentric Wheatstone-bridge circuits to perform two sets of sensors. The sensor in the central circuit measures the membrane deflection caused by the combined effects of pressure and temperature, while the outer one measures only the deflection caused by the working temperature. From this arrangement, it is reliable and accurate to measure the pressure by comparing the output signals from the two concentric Wheatstone-bridge circuits. The optimal positions of the eight piezoresistors were simulated by simulation software ANSYS. The investigated pressure sensor was fabricated by the micro electro-mechanical systems (MEMS) techniques. The measuring performance and an indication of the conventional single Wheatstone-bridge pressure sensor is easily affected under variation of different working temperature and causes a maximum absolute error up to 45.5%, while the double Wheatstone-bridge pressure sensor is able to compensate the error, and reduces it down to 1.13%. The results in this paper demonstrate an effective temperature compensation performance, and have a great performance and stability in the pressure measuring system as well.

Wireless contactless pressure measurement of an LC passive pressure sensor with a novel antenna for high-temperature applications

In this paper, a novel antenna is proposed for high-temperature testing, which can make the high-temperature pressure characteristics of a wireless passive ceramic pressure sensor demonstrated at up to a temperature of 600℃. The design parameters of the antenna are similar to those of the sensor, which will increase the coupling strength between the sensor and testing antenna. The antenna is fabricated in thick film integrated technology, and the properties of the alumina ceramic and silver ensure the feasibility of the antenna in high-temperature environments. The sensor, coupled with the ceramic antenna, is investigated using a high-temperature pressure testing platform. The experimental measurement results show that the pressure signal in a harsh environment can be detected by the frequency diversity of the sensor.

Influence of Temperature on the Inter-pressure of Soil Water Tension with Correcting Method

When the electronic temperature sensor was incorporated into a system of soil water tension and the insidetube temperature was monitored in real time, it is concluded that the inside temperature increased by 26.9 ℃ and the inside pressure changed about 14.6 Kpa, when the pottery soil was replaced by the sealing plug. When the soil water was relatively stable in the experimental salvers, the in-side pressure stil varied regularly with the temperature. When the inside temperature increased by 22.2 ℃, the inside pressure varied about 7.4 Kpa. Through com-pensation calculation of the inside tension, the temperature in the warming and cooling periods was compensated, which was useful to correct the tension measurement errors induced from the changing temperature. When the measuring interval was 4 hours and the temperature difference was 18.1 ℃, the tension difference of both points was only 0.278 Kpa, compared to the difference up to 6.5 Kpa before compensation.

A Novel Wireless PassiveTemperature-Pressure SAW-based Sensor

A novel wireless and passive surface acoustic wave(SAW)sensor is developed for measuring temperature and pressure.The sensor has two single-port resonators on a substrate.One resonator,acting as the temperature sensor,is located at the fixed end without pressure deformation,and the other one,acting as the pressure sensor,is located at the free end to detect pressure changes due to substrate deformation.Pressure at the free end bends the cantilever,causing a relative change in the acoustic propagation characteristics of the SAW traveling along the surface of the substrate and a relative change in the resonant frequency of the resulting signal.The temperature acts on the entire substrate,affecting the propagation speed of the SAW on the substrate and directly affecting the resonant frequency characteristic parameters.The temperature and pressure performance of this new antenna-connected sensor is tested by using a network analyzer,a constant temperature heating station,and a force gauge.A temperature sensitivity of 1.5015 kHz/℃and a pressure sensitivity of 10.6 kHz/gf at the ambient temperature have been observed by wireless measurements.This work should result in practical engineering applications for high-temperature devices.

Study on Temperature Modulation Techniques for Micro Gas Sensors

The sensitivity and selectivity of gas sensors are related with not only sensing material,but also their operating temperatures.Applying this property,temperature modulation technique has been proposed to improve the selectivity of gas sensors.With a newly developed alumina based micro gas sensor,the sensitivity to CO and CH_4 at different operating temperatures was investigated.By modulating the temperature of the sensor at pulse and sine wave modes with different frequencies and amplitudes,the dynamic responses of the sensor were measured and processed.Results show that the modulating waveshape plays an important role in the improvement of selectivity,while the influence of frequency is small at the suitable sampling frequency in the range of 25 mHz～200 mHz.

FBG Temperature and Pressure Sensing System for Hot Water Pipeline of Petrochemical Factory

A spatial and wavelength division multi- plexing fiber Bragg grating （FBG） sensing system is reported for monitoring the temperature and the pressure （T-P） of hot water pipeline in petrochemieal factory. The FBG sensing system has 72 channels independently, and it provides the capability to monitor large number sensors at same time. A resolution of 0.1℃ and 0.01 MPa with a measurement bandwidth of 150 Hz has been achieved.

Application and analysis of functionally graded piezoelectrical rotating cylinder as mechanical sensor subjected to pressure and thermal loads

The exact thermoelastic analysis of a functionally graded piezoelectrical （FGP） rotating cylinder is investigated analytically. The cylinder is subjected to a com- bination of electrical, thermal, and mechanical loads simultaneously. The structure is a simplified model of a rotational sensor or actuator. The basic governing differential equation of the system is obtained by using the energy method. A novel term, named as the additional energy, is introduced to exact the evaluation of the energy functional. The solution to the governing differential equation is presented for two types of boundary conditions including free rotating and rotating cylinders exposed to the inner pressure. The effect of the angular velocity is investigated on the radial distribution of various components. The mentioned structure can be considered as a sensor for measuring the angular velocity of the cylinder subjected to the pressure and temperature. The obtained results indicate that the electrical potential is proportional to the angular velocity.

Multifunctional disk device for optical switch and temperature sensor

A multifunctional surface plasmon polariton disk device coupled by two metal-insulator-metal（MIM） waveguides is proposed and investigated numerically with finite-difference time-domain simulation. It can be used as optical switch and temperature sensor by filling disk with liquid crystal and ethanol, respectively. The simulation results demonstrate that the transmission characteristics of an optical switch can be manipulated by adjusting the radius of disk and the slit width between disk and MIM waveguides. The transmittance and modulation depth of optical switch at 1550 nm are up to 64.82% and 17.70 d B, respectively. As a temperature sensor, its figure of merit can reach 30.46. In this paper, an optical switch with better efficiency and a temperature sensor with better sensitivity can be achieved.

Design of Na-K Alloy Differential Pressure Sensor with On-line Monitoring Function

Because the melting point of the alkalis is very high and the metal activity is strong, the common pressure sensor can＇t be used to measure pressure of liquid metal. In this paper, a differential transformer differential pressure sensor for measuring liquid alkalis pressure is designed, the working principle and specific design plan of the sensor are introduced, the standard current signal （ 4 -20 mA） or digital communication RS485 can be output according to the needs, and the functions of remote monitoring and data optimization can be realized through the LAN interface.

Tire Pressure Monitoring System Using SoC and Low Power Design

This paper presents the tire pressure monitoring system (TPMS) by using the system on chip (SoC) mixed signals with the help of Bluetooth transmission and in advantage of low power consumption design. This is to monitor the variations in temperature and pressure of the vehicle’s tire, and the TPMS system is involved. It improves the driver’s safety by automatically detecting the tire pressure and temperature and then warning signal is sent to driver to take a measure, which prevents from accident. The proposed system of tire pressure monitoring system using SoC increases the speed of indication time to the driver by using mixed signals. The inflation of the tire can be avoided by preventing from high temperature and high pressure. Limitation of temperature and pressure in the previous system is also elongated i.e. temperature from 40℃ to 125℃ and pressure from 0 to 750 Kpa. Sensors, wireless communication (Bluetooth dongle) and SoC unit are used to design the low power TPMS. Quantitative results are taken and the analogy between temperature and pressure is also verified. The tested results proved by need of the practical system. Signal conditioning voltage and SoC unit is the trace for low power design TPMS. Finally, the performance of the system is tested and executed by using proteus software given as a real time application.

高灵敏度SiC动态高温压力传感器仿真研究

为了提高碳化硅(SiC)动态高温压力传感器的灵敏度,采用p型SiC材料,同时对传感器的敏感单元的不同结构———方膜和圆膜,利用Ansys软件进行了静力学仿真与分析,并完成了敏感芯片的尺寸设计。仿真结果表明:优化后的传感器输出灵敏度为14.2μV/(V·kPa)。在100~600℃内非线性误差小于1.53%。动态仿真表明:传感器的固有频率为481kHz,传感器可以在160kHz高频环境中安全工作,该结果为进一步制备SiC高温压力传感器奠定了理论支撑。

Universal Spectral Modulation Sensors:(Ⅱ)Applications

In part (Ⅰ),the theory and structure of a universal spectral modulation sensor system are described.In part (Ⅱ),the applications of a universal spectral modulation sensor are given.The applications are included in the pressure,temperature,pH,gas density,and chemical species sensors.

Temperature Compensation Fiber Bragg Grating Pressure Sensor Based on Plane Diaphragm

Pressure sensors are the essential equipments in the field of pressure measurement. In this work, we propose a temperature compensation fiber Bragg grating （FBG） pressure sensor based on the plane diaphragm. The plane diaphragm and pressure sensitivity FBG （PS FBG） are used as the pressure sensitive components, and the temperature compensation FBG （TC FBG） is used to improve the temperature cross-sensitivity. Mechanical deformation model and deformation characteristics simulation analysis of the diaphragm are presented. The measurement principle and theoretical analysis of the mathematical relationship between the FBG central wavelength shift and pressure of the sensor are introduced. The sensitivity and measure range can be adjusted by utilizing the different materials and sizes of the diaphragm to accommodate different measure environments. The performance experiments are carried out, and the results indicate that the pressure sensitivity of the sensor is 35.7pm/MPa in a range from 0MPa to 50MPa and has good linearity with a linear fitting correlation coefficient of 99.95%. In addition, the sensor has the advantages of low frequency chirp and high stability, which can be used to measure pressure in mining engineering, civil engineering, or other complex environment.

基于高温压力传感器的耐高温金属体系

从制约高温压力传感器发展的耐高温金属体系研究出发,采用钨/氮化钽/铂(W/TaN/Pt)作为金属布线的电传导层,开发出适用于500 ℃高温环境下稳定工作的金属薄膜,实现电信号稳定传输,有效避免相邻金属层之间相互扩散或合金导致的电性能失效。对500 ℃高温前后的压力传感器进行带电测试,并对非线性、迟滞性、灵敏度、重复性等8项指标做了测试对比,高温压力传感器性能稳定,各性能指标均满足使用要求,证明该金属体系的可行性。

Development of Zr/ZrO_2 high temperature and high pressure sensors for in-situ measuring chemical parameters of deep-sea water

In order to in situ measure chemical parameters of deep-sea water and hydrothermal fluids at midocean ridge(MOR), it is necessary to use high temperature and high pressure chemical sensors.Developing new sensors is essential to measure in-situ pH and other chemical parameters(dissolved H2, dissolved H2S) of deep-sea water and hydrothermal fluids in a wide temperature range(2℃―400℃) at MOR vents.The YSZ(Yttria Stabilized Zirconia, 9%Y2O3) ceramic-based(HgO/Hg) chemical sensors possess excellent electrochemical properties at high temperatures, which have been used to measure chemical parameters of hydrothermal fluids above 200℃.A novel Zr/ZrO2 oxidation/reduction electrode was constructed by oxidation of Zr wire in Na2CO3 melt.This Zr/ZrO2 electrode has good chemical stability while measuring pH of high-temperature aqueous solutions, combined with a Ag/AgCl reference electrode.Potentials of the Zr/ZrO2 sensor in association with a Ag/AgCl reference electrode vary linearly with pH over a wide pH range, as tested by various NaCl-HCl-H2O solutions(NaOH-NaCl-H2O for basic solutions), at temperatures in the range of 20℃―200℃.Thus, the Zr/ZrO2 sensors can be utilized in monitoring the fluids over the temperature range of 2℃―200℃.The Zr/ZrO2 electrode combined with Ag/AgCl, Ag/Ag2S, and Au electrodes has been used to measure pH and other chemical parameters(dissolved H2, dissolved H2S) of aqueous fluids from low to high temperatures and high pressures in the laboratory and to monitor those parameters of deep-sea water in South China Sea.

地铁气体灭火系统气瓶微变形监测技术研究

市场上使用的部分消防气瓶已远超年限,存在潜在的安全隐患,容易发生气瓶爆炸事故。因此,为保障消防气瓶安全,研究开发了以检测消防气瓶微变形为基础的安全监测技术,采取在气瓶表面缠绕线型传感器的方法检测变形。通过气瓶爆破试验,验证了该技术可有效探测高压气瓶的微变形,并利用以太网将信息传输至大数据平台集中管理,实现主动监管功能。

Alumina Ceramic Based High-Temperature Performance of Wireless Passive Pressure Sensor

A wireless passive pressure sensor equivalent to inductive-capacitive （LC） resonance circuit and based on alumina ceramic is fabricated by using high temperature sintering ceramic and post-fire metallization processes. Cylindrical copper spiral reader antenna and insulation layer are designed to realize the wireless measurement for the sensor in high temperature environment. The high temperature performance of the sensor is analyzed and discussed by studying the phase-frequency and amplitude-frequency characteristics of reader antenna. The average frequency change of sensor is 0.68 kHz/℃ when the temperature changes from 27℃ to 700℃ and the relative change of twice measurements is 2.12%, with high characteristic of repeatability. The study of temperature-drift characteristic of pressure sensor in high temperature environment lays a good basis for the temperature compensation methods and insures the pressure signal readout accurately.

All-SiC Fiber-Optic Sensor Based on Direct Wafer Bonding for High Temperature Pressure Sensing

This paper presents an all-SiC fiber-optic Fabry-Perot(FP)pressure sensor based on the hydrophilic direct bonding technology for the applications in the harsh environment.The operating principle,fabrication,interface characteristics,and pressure response test of the proposed all-SiC pressure sensor are discussed.The FP cavity is formed by hermetically direct bonding of two-layer SiC wafers,including a thinned SiC diaphragm and a SiC wafer with an etched cavity.White light interference is used for the detection and demodulation of the sensor pressure signals.Experimental results demonstrate the sensing capabilities for the pressure range up to 800 kPa.The all-SiC structure without any intermediate layer can avoid the sensor failure caused by the thermal expansion coefficient mismatch and therefore has a great potential for pressure measurement in high temperature environments.

Temperature characteristics research of SOI pressure sensor based on asymmetric base region transistor

Based on the asymmetric base region transistor, a pressure sensor with temperature compensation circuit is proposed in this paper. The pressure sensitive structure of the proposed sensor is constructed by a C-type silicon cup and a Wheatstone bridge with four piezoresistors（R_1, R_2, R_3 and R_4/locating on the edge of a square silicon membrane. The chip was designed and fabricated on a silicon on insulator（SOI） wafer by micro electromechanical system（MEMS） technology and bipolar transistor process. When the supply voltage is 5.0 V, the corresponding temperature coefficient of the sensitivity（TCS） for the sensor before and after temperature compensation are -1862 and -1067 ppm/℃, respectively. Through varying the ratio of the base region resistances r_1 and r_2, the TCS for the sensor with the compensation circuit is -127 ppm/℃. It is possible to use this compensation circuit to improve the temperature characteristics of the pressure sensor.

A novel SOI pressure sensor for high temperature application

The silicon on insulator（SOI） high temperature pressure sensor is a novel pressure sensor with highperformance and high-quality. A structure of a SOI high-temperature pressure sensor is presented in this paper.The key factors including doping concentration and power are analyzed. The process of the sensor is designed with the critical process parameters set appropriately. The test result at room temperature and high temperature shows that nonlinear error below is 0.1%, and hysteresis is less than 0.5%. High temperature measuring results show that the sensor can be used for from room temperature to 350℃ in harsh environments. It offers a reference for the development of high temperature piezoresistive pressure sensors.