A rectangular bimorph will vibrate in bending mode under alternating current （AC） electric field. If two opposite tips along longitudinal direction are both clamped, the maximum magnitude of bending displacement occ...A rectangular bimorph will vibrate in bending mode under alternating current （AC） electric field. If two opposite tips along longitudinal direction are both clamped, the maximum magnitude of bending displacement occurs on the short center line. Using bimorpb type vibrators forementioned as actuators, an invention of simple traveling machine based on stick-slip principle is presented. The machine can not only move along both x and y direction within horizontal working plane, furthermore, excellent bearing ability and agile response as well as stable step are also proved. In addition, the machine can work on stepping mode and scanning mode at the same time, hence the contradiction between long stroke and high precise positioning is solved. Therefore, it meets the needs of micro/nanometer precise positioning under long stroke and is desired to be used as carrying stage for micro-assembling system and locomotive mechanism for miniature robot system.展开更多
In this paper, a micro water dissolution machining （MWDM） principle is proposed for machining potassium dihydrogen phosphate （KDP） crystal using water-in-oil micro-emulsion as an abrasive-free polishing fluid. In ...In this paper, a micro water dissolution machining （MWDM） principle is proposed for machining potassium dihydrogen phosphate （KDP） crystal using water-in-oil micro-emulsion as an abrasive-free polishing fluid. In addition, two instances of the application of this principle to ultra-precision machining of KDP crystals are presented. Computer-controlled optical surfacing （CCOS） and diamond wire cutting （DWC） process were carried out according to the MWDM principle. In the case of the CCOS technology, it is found that the micro-waviness was removed completely by following the MWDM principle. The surface undulation decreased from 40 nm to less than 10 nm, and the surface root-mean-square （rms） roughness obviously reduced from 8.147 to 2.660 nm. In the case of the DWC process, the surface rms roughness reduced from 8.012 to 2.391 gm, and the cutting efficiency was improved. These results indicate that the MWDM principle can efficiently improve the machining quality of KDP optical crystal and has a great potential to machine water-soluble materials.展开更多
基金This project is supported by National Hi-tech Research and Development Program of China (863 Program, No. 2002AA423150)National Natural Science Foundation of China (No. 50475010).
文摘A rectangular bimorph will vibrate in bending mode under alternating current （AC） electric field. If two opposite tips along longitudinal direction are both clamped, the maximum magnitude of bending displacement occurs on the short center line. Using bimorpb type vibrators forementioned as actuators, an invention of simple traveling machine based on stick-slip principle is presented. The machine can not only move along both x and y direction within horizontal working plane, furthermore, excellent bearing ability and agile response as well as stable step are also proved. In addition, the machine can work on stepping mode and scanning mode at the same time, hence the contradiction between long stroke and high precise positioning is solved. Therefore, it meets the needs of micro/nanometer precise positioning under long stroke and is desired to be used as carrying stage for micro-assembling system and locomotive mechanism for miniature robot system.
基金supported by the National Natural Science Foundation of China(Grant No.51135002)Science Fund for Creative Research Groups(Grant No.51321004)
文摘In this paper, a micro water dissolution machining （MWDM） principle is proposed for machining potassium dihydrogen phosphate （KDP） crystal using water-in-oil micro-emulsion as an abrasive-free polishing fluid. In addition, two instances of the application of this principle to ultra-precision machining of KDP crystals are presented. Computer-controlled optical surfacing （CCOS） and diamond wire cutting （DWC） process were carried out according to the MWDM principle. In the case of the CCOS technology, it is found that the micro-waviness was removed completely by following the MWDM principle. The surface undulation decreased from 40 nm to less than 10 nm, and the surface root-mean-square （rms） roughness obviously reduced from 8.147 to 2.660 nm. In the case of the DWC process, the surface rms roughness reduced from 8.012 to 2.391 gm, and the cutting efficiency was improved. These results indicate that the MWDM principle can efficiently improve the machining quality of KDP optical crystal and has a great potential to machine water-soluble materials.
