The role of pulse parameters on nanoparticle property is investigated self-consistently based on a couple of fluid model and aerosol dynamics model in a capacitively coupled parallel-plate acetylene（C2H2） discharge....The role of pulse parameters on nanoparticle property is investigated self-consistently based on a couple of fluid model and aerosol dynamics model in a capacitively coupled parallel-plate acetylene（C2H2） discharge. In this model, the mass continuity equation, momentum balance equation, and energy balance equation for neutral gas are taken into account.Thus, the thermophoretic force arises when a gas temperature gradient exists. The typical results of this model are positive and negative ion densities, electron impact collisions rates, nanoparticle density, and charge distributions. The simulation is performed for duty ratio 0.4/0.7/1.0, as well as pulse modulation frequency from 40 kHz to 2.7 MHz for pure C2H2 discharges at a pressure of 500 mTorr. We find that the pulse parameters, especially the duty ratio, have a great affect on the dissociative attachment coefficient and the negative density. More importantly, by decreasing the duty ratio, nanoparticles start to diffuse to the wall. Under the action of gas flow, nanoparticle density peak is created in front of the pulse electrode,where the gas temperature is smaller.展开更多
The generation of a very strong peak current in the first period(PCFP)in a pulse-modulated microwave discharge has been discussed in previous studies.In this paper we focus on the transition process from a pulsed disc...The generation of a very strong peak current in the first period(PCFP)in a pulse-modulated microwave discharge has been discussed in previous studies.In this paper we focus on the transition process from a pulsed discharge to a fully continuous one driven by the pulsed microwave power source by means of a kinetic model.The computational results show that by increasing the duty cycle or voltage modulation rate(VMR).the discharge eventually becomes fully continuous and PCFP can no longer he observed.In the transition process,the distributions of the electric field,electron energy probability function(EEPF)and plasma density are discussed according to the simulation data,showing different discharge structures.The simulations indicate that many high-energy electrons with electron energy larger than 20eV and low-energy electrons with electron energy less than 3eV could he generated in a pulsed microwave discharge,together with a reversal electric field formed in the anode sheath when PCFP occurs.However,only medium-energy electrons could be observed in a fully continuous discharge.Therefore,by investigating the transition process the pulse-modulated microwave discharges can be further optimized for plasma applications at atmospheric pressure.展开更多
基金Project supported by the Natural Science Foundation of Heilongjiang Province,China(Grant Nos.A2015011 and A2015010)the Postdoctoral Scientific Research Developmental Fund of Heilongjiang Province,China(Grant No.LBH-Q14159)+1 种基金the National Natural Science Foundation of China(Grant No.11404180)the Program for Young Teachers Scientific Research in Qiqihar University,China(Grant No.2014k-Z11)
文摘The role of pulse parameters on nanoparticle property is investigated self-consistently based on a couple of fluid model and aerosol dynamics model in a capacitively coupled parallel-plate acetylene（C2H2） discharge. In this model, the mass continuity equation, momentum balance equation, and energy balance equation for neutral gas are taken into account.Thus, the thermophoretic force arises when a gas temperature gradient exists. The typical results of this model are positive and negative ion densities, electron impact collisions rates, nanoparticle density, and charge distributions. The simulation is performed for duty ratio 0.4/0.7/1.0, as well as pulse modulation frequency from 40 kHz to 2.7 MHz for pure C2H2 discharges at a pressure of 500 mTorr. We find that the pulse parameters, especially the duty ratio, have a great affect on the dissociative attachment coefficient and the negative density. More importantly, by decreasing the duty ratio, nanoparticles start to diffuse to the wall. Under the action of gas flow, nanoparticle density peak is created in front of the pulse electrode,where the gas temperature is smaller.
文摘The generation of a very strong peak current in the first period(PCFP)in a pulse-modulated microwave discharge has been discussed in previous studies.In this paper we focus on the transition process from a pulsed discharge to a fully continuous one driven by the pulsed microwave power source by means of a kinetic model.The computational results show that by increasing the duty cycle or voltage modulation rate(VMR).the discharge eventually becomes fully continuous and PCFP can no longer he observed.In the transition process,the distributions of the electric field,electron energy probability function(EEPF)and plasma density are discussed according to the simulation data,showing different discharge structures.The simulations indicate that many high-energy electrons with electron energy larger than 20eV and low-energy electrons with electron energy less than 3eV could he generated in a pulsed microwave discharge,together with a reversal electric field formed in the anode sheath when PCFP occurs.However,only medium-energy electrons could be observed in a fully continuous discharge.Therefore,by investigating the transition process the pulse-modulated microwave discharges can be further optimized for plasma applications at atmospheric pressure.
