Quadrant photodetector is a new type position detector, which has already been applied to many fields such as measurement, target tracking, control, laser collimation, guidance, etc. System performance is related to l...Quadrant photodetector is a new type position detector, which has already been applied to many fields such as measurement, target tracking, control, laser collimation, guidance, etc. System performance is related to laser spot area received by the quadrant photodetector. The optimum linear output signal of system is gotten only when the size of laser dispersion spot is well-proportioned to the detector photosensitive area. A method to measure the mini-spot received by detector and to adjust it in real time is presented, which is based on the quadrant geometrical and optical structure, making use of tilting mirror scanning, the sequence output signal of detector is gotten, then measurement model is built with rate of signal change as characteristic variable, the radius of the laser dispersion spot and adjustable value of dispersion are calculated. The experiment result shows that the maximum error is 0.58μm in measurement range of 0.5mm±0.1mm.展开更多
A precise two-degree-of-freedom measuring system (2DMS) is developed based on single-mode optical fiber, LD, cube corner retroreflector and four-quadrant photodetector (4-Q), and the simultaneous on-line measurement o...A precise two-degree-of-freedom measuring system (2DMS) is developed based on single-mode optical fiber, LD, cube corner retroreflector and four-quadrant photodetector (4-Q), and the simultaneous on-line measurement of lateral and vertical direction straightness errors of the linear stage is carried out. The moving part is wireless, which eliminates any errors introduced by pushing and pulling the wires. The sensitivity of the straightness error measurement can be improved by a factor of 2 with the cube corner retroreflector. This fiber-based optically aligned beam is used to establish a reference line for the straightness measurement of any mechanical system. 4-Q detector is used to receive the laser beam. A chip microcomputer is developed to conduct all data acquisition and signal processing. The beam drift influence can be removed in the greatest extent from the system. The experiments on the measurement system stability, repeatability and its comparison with the HP5528 double-frequency laser interferometer are carried out.展开更多
基金National Natural Science Foundation of China(60276037) National Defense Technology Rebuilding ResearchFoundation of China
文摘Quadrant photodetector is a new type position detector, which has already been applied to many fields such as measurement, target tracking, control, laser collimation, guidance, etc. System performance is related to laser spot area received by the quadrant photodetector. The optimum linear output signal of system is gotten only when the size of laser dispersion spot is well-proportioned to the detector photosensitive area. A method to measure the mini-spot received by detector and to adjust it in real time is presented, which is based on the quadrant geometrical and optical structure, making use of tilting mirror scanning, the sequence output signal of detector is gotten, then measurement model is built with rate of signal change as characteristic variable, the radius of the laser dispersion spot and adjustable value of dispersion are calculated. The experiment result shows that the maximum error is 0.58μm in measurement range of 0.5mm±0.1mm.
文摘A precise two-degree-of-freedom measuring system (2DMS) is developed based on single-mode optical fiber, LD, cube corner retroreflector and four-quadrant photodetector (4-Q), and the simultaneous on-line measurement of lateral and vertical direction straightness errors of the linear stage is carried out. The moving part is wireless, which eliminates any errors introduced by pushing and pulling the wires. The sensitivity of the straightness error measurement can be improved by a factor of 2 with the cube corner retroreflector. This fiber-based optically aligned beam is used to establish a reference line for the straightness measurement of any mechanical system. 4-Q detector is used to receive the laser beam. A chip microcomputer is developed to conduct all data acquisition and signal processing. The beam drift influence can be removed in the greatest extent from the system. The experiments on the measurement system stability, repeatability and its comparison with the HP5528 double-frequency laser interferometer are carried out.
