The effect of a quartz plate (window) on the silicon wafer temperature is studied in the conditions of the combined thermal transfer in a lamp-based chamber for the rapid thermal treatment (RTP) set up. The chamber fo...The effect of a quartz plate (window) on the silicon wafer temperature is studied in the conditions of the combined thermal transfer in a lamp-based chamber for the rapid thermal treatment (RTP) set up. The chamber for RTP is simulated by a radiative-closed thermal system including the influence of quartz window as a spectral filter of lamp emission and a source of emitted thermal radiation. Energy equations for thermal fluxes involved in the heat input and output from the working wafer and quartz window are solved in spectral approximation. The transfer characteristics that are defined by the temperature dependencies of the silicon wafer and the quartz window on the temperature of the heater are accounted. It is shown that temperature bistability in the silicon wafer initiates an induced bistability into the quartz window that does not reveal bistable behavior because of the linear temperature dependence of its total optical characteristics. A possibility for simulation of the quartz window by spectral restriction of the heater radiation is confirmed. The availability of the weak bistable effect in the mode of zero effective heat exchange coefficient of a non-radiative component of the thermal flux removed from the working wafer has been obtained.展开更多
The temperature-dependent absorption coefficient and thermal conductivity of a quartz window are obtained through experimental tests at a wide range of temperatures.A Fourier transform infrared spectrometer with a hea...The temperature-dependent absorption coefficient and thermal conductivity of a quartz window are obtained through experimental tests at a wide range of temperatures.A Fourier transform infrared spectrometer with a heated cavity is used for performing the transmittance measurements.The spectral absorption coefficient of the quartz window is inverted by the transmittance information at different temperatures using a genetic algorithm.Then,a quartz window-graphite plate-quartz window multilayer structure is designed,and the transient response of the structure subjected to high-temperature heating is recorded by a self-designed setup.Cooperating with the above absorption coefficient,a non-gray radiative-conductive heat transfer model is built for the multilayer structure,and the intrinsic thermal conductivity of the quartz window is identified.Finally,the effects of the temperature-dependent absorption coefficient and spectral selective features of the medium on the heat transfer characteristics are discussed.The results show that the absorption coefficient gradually increases with temperature.The intrinsic thermal conductivity of the quartz window varies from 1.35 to 2.52 W/(m·K)as the temperature rises,while the effective thermal conductivity is higher than the intrinsic thermal conductivity due to thermal radiation,specifically 26.4%higher at 1100 K.In addition,it is found that the influence of the temperature-dependent absorption coefficient on temperature of unheated side shows a trend of first increasing and then decreasing.When the absorption coefficient varies greatly with wavelength,a non-gray radiative-conductive heat transfer model should be built for the semitransparent materials.展开更多
文摘The effect of a quartz plate (window) on the silicon wafer temperature is studied in the conditions of the combined thermal transfer in a lamp-based chamber for the rapid thermal treatment (RTP) set up. The chamber for RTP is simulated by a radiative-closed thermal system including the influence of quartz window as a spectral filter of lamp emission and a source of emitted thermal radiation. Energy equations for thermal fluxes involved in the heat input and output from the working wafer and quartz window are solved in spectral approximation. The transfer characteristics that are defined by the temperature dependencies of the silicon wafer and the quartz window on the temperature of the heater are accounted. It is shown that temperature bistability in the silicon wafer initiates an induced bistability into the quartz window that does not reveal bistable behavior because of the linear temperature dependence of its total optical characteristics. A possibility for simulation of the quartz window by spectral restriction of the heater radiation is confirmed. The availability of the weak bistable effect in the mode of zero effective heat exchange coefficient of a non-radiative component of the thermal flux removed from the working wafer has been obtained.
基金supported by the National Natural Science Foundation of China(No.51806046)the China Postdoctoral Science Foundation(2020T130145)。
文摘The temperature-dependent absorption coefficient and thermal conductivity of a quartz window are obtained through experimental tests at a wide range of temperatures.A Fourier transform infrared spectrometer with a heated cavity is used for performing the transmittance measurements.The spectral absorption coefficient of the quartz window is inverted by the transmittance information at different temperatures using a genetic algorithm.Then,a quartz window-graphite plate-quartz window multilayer structure is designed,and the transient response of the structure subjected to high-temperature heating is recorded by a self-designed setup.Cooperating with the above absorption coefficient,a non-gray radiative-conductive heat transfer model is built for the multilayer structure,and the intrinsic thermal conductivity of the quartz window is identified.Finally,the effects of the temperature-dependent absorption coefficient and spectral selective features of the medium on the heat transfer characteristics are discussed.The results show that the absorption coefficient gradually increases with temperature.The intrinsic thermal conductivity of the quartz window varies from 1.35 to 2.52 W/(m·K)as the temperature rises,while the effective thermal conductivity is higher than the intrinsic thermal conductivity due to thermal radiation,specifically 26.4%higher at 1100 K.In addition,it is found that the influence of the temperature-dependent absorption coefficient on temperature of unheated side shows a trend of first increasing and then decreasing.When the absorption coefficient varies greatly with wavelength,a non-gray radiative-conductive heat transfer model should be built for the semitransparent materials.
