Numerical simulation of turbulent mixing process of polydisperse quartz particle(particle size distribution in the range of 0.1-0.4 mm)flow with Ar and Ar-H2 plasma generated by radio frequency inductively coupled pla...Numerical simulation of turbulent mixing process of polydisperse quartz particle(particle size distribution in the range of 0.1-0.4 mm)flow with Ar and Ar-H2 plasma generated by radio frequency inductively coupled plasma(RF-ICP)torch has been made.An approximate two-stage approach has been proposed to calculate the spatial-temporal distributions of temperature and resulting thermal stress in quartz particles during dynamic heating in polydisperse plasma flow.The influence of working gas compositions,particle size distributions,injection angle and flow rate of carrier gas on the thermal destruction conditions of quartz particles has been determined under different particle feed rates.It is found that all the solid quartz particles(0.1-0.4 mm)could be thermal destructed without overheating in RF-ICP torch system,when the hydrogen volume fraction in working gases is more than 1.5%-2%and particle feed rate is in a certain range.The values of the maximum and minimum feed rates have been determined under different hydrogen volume fractions.An optimal particle injection angle and flow rate of carrier gas is found around 50°-60°and 160-220 slpm,under which the value of maximum equivalent thermal stress in quartz particles is highest.展开更多
Hα（Balmer-alpha）, Hβ （Balmer-beta） and Hγ （Balmer-gamma） spectral line inten- sities in atomic hydrogen plasma are investigated by using a high-power RF source. The intensities of the Hα, Hβ and Hγ spectra...Hα（Balmer-alpha）, Hβ （Balmer-beta） and Hγ （Balmer-gamma） spectral line inten- sities in atomic hydrogen plasma are investigated by using a high-power RF source. The intensities of the Hα, Hβ and Hγ spectral lines are detected by increasing the input power （0-6 kW） of ICPs （inductively coupled plasmas）. With the increase of net input power, the intensity of Hα im- proves rapidly （0-2 kW）, and then reaches its dynamic equilibrium; the intensities of Hβ can be divided into three processes： obvious increase （0-2 kW）, rapid increase （2-4 kW）, almost constant （4-6 kW）; while the intensities of Hγ increase very slowly. The energy levels of the excited hydro- gen atoms and the splitting energy levels produced by an obvious Stark effect play an important role in the results.展开更多
CrN films have been synthesized on Si（100） wafer by inductively coupled plasma （ICP）-enhanced radio frequency （RF） magnetron sputtering. The effects of ICP power on microstructure, crystal orientation, nanohardn...CrN films have been synthesized on Si（100） wafer by inductively coupled plasma （ICP）-enhanced radio frequency （RF） magnetron sputtering. The effects of ICP power on microstructure, crystal orientation, nanohardness and stress of the CrN films have been investigated. With the increase of ICP power, the current density at substrate increases and the films exhibit denser structure, while the DC self-bias of target and the deposition rate of films decrease. The films change from crystal structure to amorphous structure with the increase of ICP power. The measured nanohardness and the compressive stress of films reach the topmost at ICP power of 150 W and 200 W, respectively. The mechanical properties of films show strong dependence on the crystalline structure and the density influenced by the ICP power.展开更多
Experimental results of a direct current enhanced inductively coupled plasma（DCE-ICP） source which consists of a typical cylindrical ICP source and a plate-to-grid DC electrode are reported.With the use of this new ...Experimental results of a direct current enhanced inductively coupled plasma（DCE-ICP） source which consists of a typical cylindrical ICP source and a plate-to-grid DC electrode are reported.With the use of this new source,the plasma characteristic parameters,namely,electron density,electron temperature and plasma uniformity,are measured by Langmuir floating double probe.It is found that DC discharge enhances the electron density and decreases the electron temperature,dramatically.Moreover,the plasma uniformity is obviously improved with the operation of DC and radio frequency（RF） hybrid discharge.Furthermore,the nonlinear enhancement effect of electron density with DC？＋？RF hybrid discharge is confirmed.The presented observation indicates that the DCE-ICP source provides an effective method to obtain high-density uniform plasma,which is desirable for practical industrial applications.展开更多
文摘Numerical simulation of turbulent mixing process of polydisperse quartz particle(particle size distribution in the range of 0.1-0.4 mm)flow with Ar and Ar-H2 plasma generated by radio frequency inductively coupled plasma(RF-ICP)torch has been made.An approximate two-stage approach has been proposed to calculate the spatial-temporal distributions of temperature and resulting thermal stress in quartz particles during dynamic heating in polydisperse plasma flow.The influence of working gas compositions,particle size distributions,injection angle and flow rate of carrier gas on the thermal destruction conditions of quartz particles has been determined under different particle feed rates.It is found that all the solid quartz particles(0.1-0.4 mm)could be thermal destructed without overheating in RF-ICP torch system,when the hydrogen volume fraction in working gases is more than 1.5%-2%and particle feed rate is in a certain range.The values of the maximum and minimum feed rates have been determined under different hydrogen volume fractions.An optimal particle injection angle and flow rate of carrier gas is found around 50°-60°and 160-220 slpm,under which the value of maximum equivalent thermal stress in quartz particles is highest.
基金supported by the National Magnetic Confinement Fusion Science Program of China(Nos.2011GB108011 and 2010GB103001)the Major International(Regional) Project Cooperation and Exchanges(No.11320101005)
文摘Hα（Balmer-alpha）, Hβ （Balmer-beta） and Hγ （Balmer-gamma） spectral line inten- sities in atomic hydrogen plasma are investigated by using a high-power RF source. The intensities of the Hα, Hβ and Hγ spectral lines are detected by increasing the input power （0-6 kW） of ICPs （inductively coupled plasmas）. With the increase of net input power, the intensity of Hα im- proves rapidly （0-2 kW）, and then reaches its dynamic equilibrium; the intensities of Hβ can be divided into three processes： obvious increase （0-2 kW）, rapid increase （2-4 kW）, almost constant （4-6 kW）; while the intensities of Hγ increase very slowly. The energy levels of the excited hydro- gen atoms and the splitting energy levels produced by an obvious Stark effect play an important role in the results.
文摘CrN films have been synthesized on Si（100） wafer by inductively coupled plasma （ICP）-enhanced radio frequency （RF） magnetron sputtering. The effects of ICP power on microstructure, crystal orientation, nanohardness and stress of the CrN films have been investigated. With the increase of ICP power, the current density at substrate increases and the films exhibit denser structure, while the DC self-bias of target and the deposition rate of films decrease. The films change from crystal structure to amorphous structure with the increase of ICP power. The measured nanohardness and the compressive stress of films reach the topmost at ICP power of 150 W and 200 W, respectively. The mechanical properties of films show strong dependence on the crystalline structure and the density influenced by the ICP power.
基金supported by National Natural Science Foundation of China (Grant No.11475038.)
文摘Experimental results of a direct current enhanced inductively coupled plasma（DCE-ICP） source which consists of a typical cylindrical ICP source and a plate-to-grid DC electrode are reported.With the use of this new source,the plasma characteristic parameters,namely,electron density,electron temperature and plasma uniformity,are measured by Langmuir floating double probe.It is found that DC discharge enhances the electron density and decreases the electron temperature,dramatically.Moreover,the plasma uniformity is obviously improved with the operation of DC and radio frequency（RF） hybrid discharge.Furthermore,the nonlinear enhancement effect of electron density with DC？＋？RF hybrid discharge is confirmed.The presented observation indicates that the DCE-ICP source provides an effective method to obtain high-density uniform plasma,which is desirable for practical industrial applications.
