Analysis and Design of an Accelerometer Fabricated with Porous Silicon as Sacrificial Layer

A piezoresistive silicon accelerometer fabricated by a selective,self-stopping porous silicon (PS) etching method using an epitaxial layer for movable microstructures is described and analyzed.The technique is capable of constructing a microstructure precisely.PS is used as a sacrificial layer,and releasing holes are etched in the film.TMAH solution with additional Si powder and (NH_4)_2S_2O_8 is used to remove PS through the small releasing holes without eroding uncovered Al.The designed fabrication process is full compatible with standard CMOS process.

Fabrication of Silicon Condenser Microphone Using Oxidized Porous Silicon as Sacrificial Layer

A new technique to fabricate silicon condenser microphone is presented.The technique is based on the use of oxidized porous silicon as sacrificial layer for the air gap and the heavy p+-doping silicon of approximately 15μm thickness for the stiff backplate.The measured sensitivity of the microphone fabricated with this technique is in the range from -45dB(5.6mV/Pa) to -55dB(1.78mV/Pa) under the frequency from 500Hz to 10kHz,and shows a gradual increase at higher frequency.The cut-off frequency is above 20kHz.

A New Self-assembly Metal CMG Discriminator by Multi-exposure LiGA Like Process and Sacrificial Layer Process

The counter-meshing gears （CMG） discriminator is a mechanically coded lock, which is used to prevent the occurrence of High Consequence Events. This paper advanced a new kind of self-assembly metal CMG discriminator based on multi-exposure LiGA like process and sacrificial layer process. The new CMG discriminator has the following characters except low cost： 1） it has only discrimination teeth sections; 2） the thickness of each gear layer exceeds one hundred micrometers; 3） it is axially driven by a separate dectronic magnetic micromotor directly; 4） its CMG is made of metal and is batch fabricated in the assembled state; 5） it is prevented from rotating in the opposite direction by pawl/ratchet wheel mechanism; 6） it has simpler structure. This device has better strength and reliability in abnormal environment compared to the existing surface micro machining （SMM） discriminator.

A novel method for sacrificial layer release in MEMS devices fabrication

During the forming process of the free-standing structure or the functional cavity when releasing the high aspect ratio sacrificial layer, such structures tend to stick to the substrate due to capillary force. This paper describes the application of pull-in length conception as design rules to a novel ＇dimpled＇ method in releasing sacrificial layer. Based on the conception of pull-in length in adhering Phenomenon, the fabrication and releasing sacrificial layer methods using micro bumps based on the silicon substrate were presented. According to the thermal isolation performances of one kind of micro electromechanical system device thermal shear stress sensor, the sacrificial layers were validated to be successfully released.

Combining two-photon lithography with laser ablation of sacrificial layers:A route to isolated 3D magnetic nanostructures

Three-dimensional(3D)nanostructured functional materials are important systems allowing new means for intricate control of electromagnetic properties.A key problem is realising a 3D printing methodology on the nanoscale that can yield a range of functional materials.In this article,it is shown that two-photon lithography,when combined with laser ablation of sacrificial layers,can be used to realise such a vision and produce 3D functional nanomaterials of complex geometry.Proof-of-principle is first shown by fabricating planar magnetic nanowires raised above the substrate that exhibit controlled domain wall injection and propagation.Secondly,3D artificial spin-ice(3DASI)structures are fabricated,whose complex switching can be probed using optical magnetometry.We show that by careful analysis of the magneto-optical Kerr effect signal and by comparison with micromagnetic simulations,depth dependent switching information can be obtained from the 3DASI lattice.The work paves the way for new materials,which exploit additional physics provided by non-trivial 3D geometries.

A generalized synthesis method for freestanding multiferroic twodimensional layered supercell oxide films via a sacrificial buffer layer

Multiferroics are an intriguing family of materials due to the simultaneous presence of two ferroic orderings,namely,ferroelectricity and ferromagnetism.They are scientifically and technologically important and have numerous potential applications,such as four-state logic memories and multiferroic tunneling junctions.However,the growth of epitaxial singlephase multiferroic thin films typically requires single crystalline oxide substrates,which hinders their future integration with Sibased devices.In this study,we report a generalized synthesis method that uses the polydimethylsiloxane(PDMS)-assisted wetetching method with an Sr_(3)Al_(2)O_(6)(SAO)sacrificial layer to transfer freestanding single-phase multiferroic Bi_(2)NiMnO_(6)(BNMO)films from conventional SrTiO_(3)(STO)substrates onto a Si wafer.The structures and properties of the films have been characterized before and after the transfer.These transferred films possess good multiferroic properties on Si wafers,indicating full compatibility with modern Si technology.This method can be generally applicable to other Bi-based multiferroic materials as well.Lastly,the original STO substrates after the transfer process have been recycled for preparing new batches of freestanding BNMO films,indicating a low-cost and sustainable method for manufacturing large-volume freestanding complex oxide thin films.

Poly-Silicon Micromachined Switch

By using LPCVD SiO 2 and poly silicon as sacrificial layer and cantilever respectively,a poly silicon micromachined RF MEMS(radio frequency microelectronic mechanical system) switch is fabricated.During the fabrication process,the stress of poly silicon is released to prevent poly silicon membrane from bending,and the issue of compatibility between RF switch and IC process technology is also resolved.The low residual tensile stress poly silicon cantilever is obtained by the optimization.The switch is tested,and the preliminary test results show:the pull down voltage is 89V,and the switch speed is about 5μs.The switch provides the potential to build a new fully monolithic integrated RF MEMS for radar and communications applications.

Design of a Silicon Beam Resonator for a Novel Gas Sensor

A new silicon beam resonator design for a novel gas sensor based on simultaneous conductivity and mass change measurement is investigated. High selectivity and sensitivity in gas detection can be obtained by measuring the charge-to-mass ratio of gas molecules. Structures of silicon beam resonators are designed, simulated, and optimized. This gas sensor is fabricated using sacrificial layer microelectronmechanical system technology, and the resonant frequency of the microbeam is measured.

A Proposed Core Catcher System and Thermite Experimental Results

To prevent direct contact of the melt and basemat concrete of the cavity in a postulated core melt accident, a core catcher concept is suggested. Upon ablation of the sacrificial layer on top of the core catcher while molten core material is discharged, a mixture of water and gas is injected from below. It is expected that a simultaneous injection of water and gas could prevent a possible steam explosion/spike and also suppress the rapid release of steam which might result in fast over-pressurization of the containment. A test facility for the core catcher using a thermite reaction technique for the generation of the melt was designed and constructed at Korea Atomic Energy Research Institute （KAERI）. The first series of tests were performed by using a mixture of Al, Fe2O3, and CaO as a stimulant. As a first try, only water was injected from the bottom of the melt through five water injection nozzles when the melt front reached the water injection nozzles. A description of the test facility for the core catcher, the thermite composition, and the methods of experiment is included. The test results are discussed.

In situ synergistic strategy of sacrificial intermedium for scalablemanufactured and controllable layered double hydroxide film

Layered double hydroxides(LDHs),a class of two-dimensional(2D)brucite-like layers,have been effectively applied in diverse fields.However,the current synthesis methods restrict the in situ scaling-up and tunable production of LDH-based materials.Inspired by the growing characteristic of“Bryophyllum pinnatum”,a sacrificial co-sputtered Zn-Al transition layer was introduced for the first time to in situ grow a scalable-manufactured and thickness-controllable LDH film on arbitrary substrate materials with flexible shapes through“partial dissolution”and“solution infiltration”processes.Diverse LDH films could be tailored by the creative regulation of the component,structure and surface state of the transition layer.Results showed that the as-prepared LDH film had strong mechanical robustness under harsh abrasion conditions due to its large thickness and multi-level microstructure.Moreover,a series of galvanic couple model experiments based on Zn/Al single-metal transition layers were designed to solve the real-time monitoring issue in the complex hydrothermal solution.This work not only develops a new strategy to design and grow in situ LDH films with multifaceted features,but also reveals sophisticated LDH formation mechanisms.Hence,the findings of this study may broaden the practical application of LDH-based materials toward advanced and smart devices.

High-resolution, full-color quantum dot light-emitting diode display fabricated via photolithography approach

Displays play an extremely important role in modern information society,which creates a never-ending demand for the new and better products and technologies.The latest requirements for novel display technologies focus on high resolution and high color gamut.Among emerging technologies that include organic light-emitting diode(OL ED),micro light-emiting diode(micro-LED),quantum dot light-emitting diode(QLED),laser display,holographic display and others,QLED is promising owing to its intrinsic high color gamut and the possibility to achieve high resolution with photolithography approach.However,previously demonstrated photolthography techniques suffer from reduced device performance and color Impurities in subpixels from the process.In this study,we demonstrated a sacrificial layer assisted patterming(SLAP)approach,which can be applied in conjunction with photolithography to fabricate high-resolution,full-colo quantum dot(QD)patterns.In this approach,the negative photoresist(PR)and sacrificial layer(SL)were uilized to determine the pixels for QD deposition,while at the same time the SL helps protect the QD layer and keep it intact(named PR-SL approach).To prove this method's viability for QLED display manufacture,a 500-ppi,full-color passive matrix(PM)-QLED prototype was fabricated via this process.Results show that there were no color impurities in the subpixels,and the PM-QL ED has a high color gamut of 114%National Television Standards Committee(NTSC).To the best of our knowledge,this is the first ull-olor QLED prototype with such a high resolution.We anticipate that this innovative patteming technique will open a new horizon for future display technologies and may lead to a disruptive and innovative change in display industry.

Photomechanical meta-molecule array for real-time terahertz imaging

Real-time terahertz(THz)imaging offers remarkable application possibilities,especially in the security and medical fields.However,most THz detectors work with scanners,and a long image acquisition time is required.Some thermal detectors can achieve realtime imaging by using a focal plane array but have the drawbacks of low sensitivity due to a lack of suitable absorbing materials.In this study,we propose a novel photomechanical meta-molecule array by conveniently assembling THz meta-atom absorbers and bi-material cantilevers together,which can couple THz radiation to a mechanical deflection of the meta-molecules with high efficiency.By optically reading out the mechanical deflections of all of the meta-molecules simultaneously,real-time THz imaging can be achieved.A polyimide sacrificial layer technique was developed to fabricate the device on a glass wafer,which facilitates the transmission of a readout light while the THz wave radiates onto the meta-molecule array directly from the front side.THz images and video of various objects as well as infrared images of the human body were captured successfully with the fabricated metamolecule array.The proposed photomechanical device holds promise in applications in single and broadband THz as well as infrared imaging.

High-yield fabrication of perpendicularly magnetised synthetic antiferromagnetic nanodiscs

Synthetic antiferromagnetic (SAF) particles with perpendicular anisotropy display a number of desirable characteristics for applications in biological and other fluid environments. We present an efficient and effective method for the patterning of ultrathin Ruderman-Kittel-Kasuya-Yoshida coupled, perpendicularly magnetised SAFs using a combination of nanosphere lithography and ion milling. A Ge sacrificial layer is utilised, which provides a clean and simple lift-off process, as well as maintaining the key magnetic properties that are beneficial to target applications. We demonstrate that the method is capable of producing a particularly high yield of well-defined, thin film based nanoparticles.

A new fabrication process for the SOI-based miniature electric field sensor

This paper presents a new fabrication process for the SOI-based novel miniature electric field sensor. This new process uses polyimide film to release the SiO_2 layer.Compared with the CO_2 critical point release method,it significantly improves the device surface cleanliness and shortens the process flow.The impurity on the base layer is analyzed.The problem of peak and butterfly-type contamination occurring on the base layer of the SOI wafer during the DRIE process is discussed and solved by thickening the photoresist layer and coating with polyimide film twice.This new process could fabricate MEMS sensors and actuators such as SOI-based electric field sensors,gyroscopes,and micro mirrors and can be an alternative fabrication process compared to commercial SOIMUMPS fabrication processes.