Layered Surface Acoustic Wave (SAW) devices with an InO_x/SiN_u/36°YX LiTaO_3 structure were investigated for sensing low concentrations of hydrogen (H_2) and ozone (O_3) at different operating temperatures.The s...Layered Surface Acoustic Wave (SAW) devices with an InO_x/SiN_u/36°YX LiTaO_3 structure were investigated for sensing low concentrations of hydrogen (H_2) and ozone (O_3) at different operating temperatures.The sensor consists of a 1μm thick silicon nitride (SiN_y) intermediate layer deposited by electron beam evaporation on a 36°Y-cut X-propagating piezoelectric lithium tantalate (LiTaO_3) substrate and a 100 nm thin indium oxide (InO_x) sensing layer deposited by R.F.magnetron sputtering.The device fabrication is described and the performance of the sensor is analyzed in terms of response magnitude as a function of operating temperature.Large frequency shifts of 360 kHz for 600μg/g of H_2 and 92 kHz for 40 ng/g O_3 were recorded.In addition,the surface morphology of the deposited films were investigated by Atomic Force Microscopy (AFM) and the chemical composition by X-Ray Photoelectron Spectroscopy (XPS) to correlate gas-sensing behavior to structural characteristics of the thin film.展开更多
Decane is one of the volatile organic compounds （VOCs） in human breath. Successful detection of decane in human breath has vast prospects for early lung cancer diagnosis. In this paper, a novel detecting device base...Decane is one of the volatile organic compounds （VOCs） in human breath. Successful detection of decane in human breath has vast prospects for early lung cancer diagnosis. In this paper, a novel detecting device based on a filter surface acoustic wave （SAW） gas sensor is presented. SAW sensors coated with a thin oxidized graphene film were used to detect decane in parts per million （ppm） concentrations. Control and signal detection circuits were designed using a vector network analyzer with a detection resolution of insertion loss down to 0.0001 dB. The results showed that the SAW sensor could respond quickly with great sensitivity when exposed to 0.2 ppm decane. This device shows tremendous potential in medical diagnosis and environmental assessment.展开更多
文摘Layered Surface Acoustic Wave (SAW) devices with an InO_x/SiN_u/36°YX LiTaO_3 structure were investigated for sensing low concentrations of hydrogen (H_2) and ozone (O_3) at different operating temperatures.The sensor consists of a 1μm thick silicon nitride (SiN_y) intermediate layer deposited by electron beam evaporation on a 36°Y-cut X-propagating piezoelectric lithium tantalate (LiTaO_3) substrate and a 100 nm thin indium oxide (InO_x) sensing layer deposited by R.F.magnetron sputtering.The device fabrication is described and the performance of the sensor is analyzed in terms of response magnitude as a function of operating temperature.Large frequency shifts of 360 kHz for 600μg/g of H_2 and 92 kHz for 40 ng/g O_3 were recorded.In addition,the surface morphology of the deposited films were investigated by Atomic Force Microscopy (AFM) and the chemical composition by X-Ray Photoelectron Spectroscopy (XPS) to correlate gas-sensing behavior to structural characteristics of the thin film.
文摘Decane is one of the volatile organic compounds （VOCs） in human breath. Successful detection of decane in human breath has vast prospects for early lung cancer diagnosis. In this paper, a novel detecting device based on a filter surface acoustic wave （SAW） gas sensor is presented. SAW sensors coated with a thin oxidized graphene film were used to detect decane in parts per million （ppm） concentrations. Control and signal detection circuits were designed using a vector network analyzer with a detection resolution of insertion loss down to 0.0001 dB. The results showed that the SAW sensor could respond quickly with great sensitivity when exposed to 0.2 ppm decane. This device shows tremendous potential in medical diagnosis and environmental assessment.
