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IMPROVED FABRICATION METHOD FOR CARBON NANOTUBE PROBE OF ATOMIC FORCE MICROSCOPY(AFM) 被引量:1
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作者 XU Zongwei DONG Shen +1 位作者 GUO Liqiu ZHAO Qingliang 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2006年第3期373-375,共3页
An improved arc discharge method is developed to fabricate carbon nanotube probe of atomic force microscopy (AFM) here. First, silicon probe and carbon nanotube are manipulated under an optical microscope by two hig... An improved arc discharge method is developed to fabricate carbon nanotube probe of atomic force microscopy (AFM) here. First, silicon probe and carbon nanotube are manipulated under an optical microscope by two high precision microtranslators. When silicon probe and carbon nanotube are very close, several tens voltage is applied between them. And carbon nanotube is divided and attached to the end of silicon probe, which mainly due to the arc welding function. Comparing with the arc discharge method before, the new method here needs no coat silicon probe with metal film in advance, which can greatly reduce the fabrication's difficulty. The fabricated carbon nanotube probe shows good property of higher aspect ratio and can more accurately reflect the true topography of silicon grating than silicon probe. Under the same image drive force, carbon nanotube probe had less indentation depth on soft triblock copolymer sample than silicon probe. This showed that carbon nanotube probe has lower spring constant and less damage to the scan sample than silicon probe. 展开更多
关键词 Carbon nanotube (CNT) atomic force microscope (AFM) probe Fabrication
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Three-dimensional atomic force microscopy based on tailored cantilever probe with flared tip
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作者 ZHANG Rui WU Sen +3 位作者 XIAO Sha-sha HU Xiao-dong SHI Yu-shu FU Xing 《Journal of Measurement Science and Instrumentation》 CAS CSCD 2020年第4期388-396,共9页
In order to meet the requirements of nondestructive testing of true 3D topography of micro-nano structures,a novel three-dimensional atomic force microscope(3D-AFM)based on flared tip is developed.A high-precision sca... In order to meet the requirements of nondestructive testing of true 3D topography of micro-nano structures,a novel three-dimensional atomic force microscope(3D-AFM)based on flared tip is developed.A high-precision scanning platform is designed to achieve fast servo through moving probe and sample simultaneously,and several combined nanopositioning stages are used to guarantee linearity and orthogonality of displacement.To eliminate the signal deviation caused by AFM-head movement,a traceable optical lever system is designed for cantilever deformation detection.In addition,a method of tailoring the cantilever of commercial probe with flared tip is proposed to reduce the lateral force applied on the tip in measurement.The tailored probe is mounted on the 3D-AFM,and 3D imaging experiments are conducted on different samples by use of adaptive-angle scanning strategy.The results show the roob-mean-square value of the vertical displacement noise(RMS)of the prototype is less than 0.1 nm and the high/width measurement repeatability(peak-to-peak)is less than 2.5 nm. 展开更多
关键词 three-dimensional atomic force microscope(3D-AFM) flared tip SCANNER optical lever vector scanning
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THEORETICAL ANALYSIS AND EXPERIMENTAL STUDY OF CARBON NANOTUBE PROBE AND CONVENTIONAL ATOMIC FORCE MICROSCOPY PROBE ON SURFACE ROUGHNESS
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作者 WANG Jinghe WANG Hongxiang XU Zongwei DONG Shen WANG Shiqian ZHANG Huali 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2008年第5期62-64,共3页
In this paper, three different tips are employed, i.e., the carbon nanotube tip, monocrystalline silicon tip and silicon nitride tip. Resorting to atomic force microscope (AFM), they are used for measuring the surfa... In this paper, three different tips are employed, i.e., the carbon nanotube tip, monocrystalline silicon tip and silicon nitride tip. Resorting to atomic force microscope (AFM), they are used for measuring the surface roughness of indium tin oxide (ITO) film and the immunoglobulin G (IgG) proteins within the scanning area of 10 μm×10 μm and 0.5 μm×0.5 μm, respectively. Subsequently, the scanned surface of the ITO film and IgG proteins are analyzed by using fractal dimension. The results show that the ffactal dimension measured by carbon nanotube tip is biggest with the highest frequency components and the most microscopic information. Therefore, the carbon nanotube tip is the ideal measuring tool for measuring super-smooth surface, which will play a more and more important role in the high-resolution imaging field. 展开更多
关键词 atomic force microscope Carbon nanotube probes Fractal dimension
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Carbon nanotubes as tips for atomic force microscopy
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作者 国立秋 徐宗伟 +3 位作者 赵铁强 赵清亮 张飞虎 董申 《Journal of Harbin Institute of Technology(New Series)》 EI CAS 2004年第2期223-227,共5页
Ordinary AFM probes'characters prevent the AFM' s application in various scopes. Carbon nanotubes represent ideal AFM probe materials for their higher aspect ratio, larger Young's modulus, unique chemical ... Ordinary AFM probes'characters prevent the AFM' s application in various scopes. Carbon nanotubes represent ideal AFM probe materials for their higher aspect ratio, larger Young's modulus, unique chemical structure, and well-defined electronic property. Carbon nanotube AFM probes are obtained by using a new method of attaching carbon nanotubes to the end of ordinary AFM probes, and are then used for doing AFM experiments. These experiments indicated that carbon nanotube probes have higher elastic deformation, higher resolution and higher durability. And it was also found that carbon nanotube probes ean accurately reflect the morphology of deep narrow gaps, while ordinary probes can not reflect. 展开更多
关键词 carbon nanotube atomic force microscope (AFM) probe
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原子力显微镜-扫描电子显微镜共定位表征系统的研发与应用
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作者 蔡蕊 万鹏 +2 位作者 徐强 吕天明 孙智广 《分析测试技术与仪器》 CAS 2024年第1期53-57,共5页
微纳加工过程中,常有样品需要进行聚焦离子束(FIB)溅射、切割,扫描电子显微镜(SEM)以及原子力显微镜(AFM)表征,而这三类仪器都需要将样品固定在样品台上才可测试,固定不佳会影响表征结果.但固定好的样品在不同仪器之间转移、拆卸、再固... 微纳加工过程中,常有样品需要进行聚焦离子束(FIB)溅射、切割,扫描电子显微镜(SEM)以及原子力显微镜(AFM)表征,而这三类仪器都需要将样品固定在样品台上才可测试,固定不佳会影响表征结果.但固定好的样品在不同仪器之间转移、拆卸、再固定的过程中极易受到破坏.基于以上问题,设计了AFM-SEM-FIB样品共定位系统,可实现样品在此三种仪器之间的无损转移及共定位,避免珍贵样品破坏及目标丢失,以及解决AFM扫描无法控制方向、迅速调整位点等问题.在微纳表征中有优异的表现,系统已被开发成产品并量产销售. 展开更多
关键词 共定位系统 原子力显微镜 扫描电子显微镜 聚焦离子束 微纳表征
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Micro-galvanic corrosion behaviour of Mg-(7,9)Al-1Fe-xNd alloys
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作者 Kai-xuan FENG Tao LAI +6 位作者 Yang CHEN Zheng YIN Zhi-qin WU Hong YAN Hong-gun SONG Chao LUO Zhi HU 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2024年第9期2828-2848,共21页
The localized micro-galvanic corrosion process and the kinetic information of Mg-(7,9)Al-1Fe-x Nd alloys were investigated by in situ observation under electrochemical control and in situ atomic force microscopy(AFM)i... The localized micro-galvanic corrosion process and the kinetic information of Mg-(7,9)Al-1Fe-x Nd alloys were investigated by in situ observation under electrochemical control and in situ atomic force microscopy(AFM)in an electrolyte environment.The results revealed that the formation of the Nd-rich phase in alloys resulted in a decrease in the Volta potential difference from~400 m V(AlFe3/α-Mg)to~220 mV(Nd-rich/α-Mg),reducing the corrosion products around the cathodic phase and corrosion current density of the microscale area.The addition of Nd significantly improved the corrosion resistance,mainly due to the suppression of the micro-galvanic corrosion between the second phases and substrate.Finally,the corrosion mechanism of Mg-(7,9)Al-1Fe-x Nd alloys was discussed based on in situ observations and electrochemical results. 展开更多
关键词 magnesium alloy scanning Kelvin probe force microscope micro-galvanic corrosion in situ observation atomic force microscopy
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A novel colloid probe preparation method based on chemical etching technique
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作者 XU Hui XU Guo-hua AN Yue 《Journal of Zhejiang University-Science B(Biomedicine & Biotechnology)》 SCIE CAS CSCD 2006年第4期304-309,共6页
Several fundamental problems in hydrophobic force measurements using atomic force microscope (AFM) are dis-cussed in this paper. A novel method for colloid probe preparation based on chemical etching technology is pro... Several fundamental problems in hydrophobic force measurements using atomic force microscope (AFM) are dis-cussed in this paper. A novel method for colloid probe preparation based on chemical etching technology is proposed, which is specially fit for the unique demands of hydrophobic force measurements by AFM. The features of three different approaches for determining spring constants of rectangular cantilevers, including geometric dimension, Cleveland and Sader methods are com-pared. The influences of the sizes of the colloids on the measurements of the hydrophobic force curves are investigated. Our experimental results showed that by selecting colloid probe with proper spring constant and tip size, the hydrophobic force and the complete hydrophobic interaction force curve can be measured by using AFM. 展开更多
关键词 Hydrophobic force atomic force microscope (AFM) Colloid probe Chemical etching
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Atomic-level characterization of liquid/solid interface
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作者 Jiani Hong Ying Jiang 《Chinese Physics B》 SCIE EI CAS CSCD 2020年第11期25-36,共12页
The detailed understanding of various underlying processes at liquid/solid interfaces requires the development of interface-sensitive and high-resolution experimental techniques with atomic precision.In this perspecti... The detailed understanding of various underlying processes at liquid/solid interfaces requires the development of interface-sensitive and high-resolution experimental techniques with atomic precision.In this perspective,we review the recent advances in studying the liquid/solid interfaces at atomic level by electrochemical scanning tunneling microscope(EC-STM),non-contact atomic force microscopy(NC-AFM),and surface-sensitive vibrational spectroscopies.Different from the ultrahigh vacuum and cryogenic experiments,these techniques are all operated in situ under ambient condition,making the measurements close to the native state of the liquid/solid interface.In the end,we present some perspectives on emerging techniques,which can defeat the limitation of existing imaging and spectroscopic methods in the characterization of liquid/solid interfaces. 展开更多
关键词 liquid/solid interface atomic scale scanning tunneling microscope(STM) atomic force microscopy(AFM)
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An improved fabrication method for carbon nanotube probe
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作者 徐宗伟 国立秋 +1 位作者 董申 赵清亮 《Journal of Harbin Institute of Technology(New Series)》 EI CAS 2008年第5期690-693,共4页
An improved arc discharge method is developed to fabricate the carbon nanotube probe. In this method, the silicon probe and the carbon nanotube were manipulated under an optical microscope. When the silicon probe and ... An improved arc discharge method is developed to fabricate the carbon nanotube probe. In this method, the silicon probe and the carbon nanotube were manipulated under an optical microscope. When the silicon probe and the carbon nanotube were very close, 30-60 V dc or ae was applied between them, and the carbon nanotube was divided and attached to the end of the silicon probe. Comparing with the arc discharge method, the new method need not coat the silicon probe with metal in advance, which can greatly reduce the fabrication difficulty and cost. The fabricated carbon nanotube probe exhibits the good property of high aspect ratio and can reflect the true topography more accurately than the silicon probe. 展开更多
关键词 carbon nanotube (CNT) atomic force microscope (AFM) probe FABRICATION
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铜含量对Al-Zn-Mg-(Cu)合金晶间腐蚀和剥落腐蚀敏感性的影响 被引量:2
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作者 张梦晗 刘胜胆 +1 位作者 蒋靖宇 韦卫昌 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2023年第7期1963-1976,共14页
通过电化学试验和浸泡试验,使用电子背散射衍射、光学显微镜、扫描电镜和扫描透射电镜及扫描开尔文探针原子力显微镜,研究铜含量对Al-Zn-Mg-(Cu)合金晶间腐蚀和剥落腐蚀敏感性的影响。结果表明,铜含量从0增加至2.6%(质量分数),晶间腐蚀... 通过电化学试验和浸泡试验,使用电子背散射衍射、光学显微镜、扫描电镜和扫描透射电镜及扫描开尔文探针原子力显微镜,研究铜含量对Al-Zn-Mg-(Cu)合金晶间腐蚀和剥落腐蚀敏感性的影响。结果表明,铜含量从0增加至2.6%(质量分数),晶间腐蚀敏感性增高;而剥落腐蚀敏感性先增高后降低,铜含量为1%时的剥落腐蚀敏感性最高。随着Cu含量的增加,再结晶分数增加,再结晶晶粒的长宽比先减小后增大;晶界析出相与基体的伏打电势差提高,使晶界析出相更易被腐蚀。根据晶界析出相的形貌特征、晶粒组织和晶界析出相与基体的伏打电势差,对晶间腐蚀和剥落腐蚀的萌生和扩展进行讨论。 展开更多
关键词 晶间腐蚀 剥落腐蚀 AL-ZN-MG-CU合金 扫描开尔文探针原子力显微镜
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二氧化钛表面接触电位差测试设计与分析
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作者 穆磊磊 王康谊 《传感器与微系统》 CSCD 北大核心 2023年第1期34-37,42,共5页
作为光催化剂模型材料的金红石型二氧化钛(110)结构,同时针对金红石型二氧化钛(110)提出了接触电位差(CPD)的2种测试方法,包括二次扫描法与原子追踪2D测试法。基于超高真空超低温调频原子力显微镜与开尔文探针力显微镜(UHV-ULT-NC-AFM/K... 作为光催化剂模型材料的金红石型二氧化钛(110)结构,同时针对金红石型二氧化钛(110)提出了接触电位差(CPD)的2种测试方法,包括二次扫描法与原子追踪2D测试法。基于超高真空超低温调频原子力显微镜与开尔文探针力显微镜(UHV-ULT-NC-AFM/KPFM)测试技术,通过对探针的修饰,完成了金红石型二氧化钛(110)表面CPD的表征。实验发现由于Smoluchowski效应,二氧化钛(110)表面台阶上CPD可减少0.2 V,同时研究了CPD减少与光催化活性的关系。为后期相关研究实验奠定了基础。 展开更多
关键词 光催化剂 接触电位差 超高真空 调频原子力显微镜 开尔文探针力显微镜
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AFM probe for measuring~10^(−5)ultra-low friction coefficient:Design and application 被引量:1
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作者 Yushan CHEN Liang JIANG Linmao QIAN 《Friction》 SCIE EI CAS CSCD 2024年第1期64-73,共10页
Superlubricity provides a novel approach to addressing friction and wear issues in mechanical systems.However,little is known regarding improving the atomic force microscope(AFM)friction coefficient measurement resolu... Superlubricity provides a novel approach to addressing friction and wear issues in mechanical systems.However,little is known regarding improving the atomic force microscope(AFM)friction coefficient measurement resolution.Accordingly,this study established the theoretical formula for the AFM friction coefficient measurement and deduced the measurement resolution.Then,the formula was applied to the AFM probe with a rectangular cross-section cantilever.The measurement resolution is associated with the dimensional properties of the AFM probe,the mechanical properties of the cantilever material,the properties of the position-sensitive detector(PSD),and probably the anti-vibration performance of the AFM.It is feasible to make the cantilever as short as possible and the tip as high as possible to improve the measurement resolution.An AFM probe for measuring an ultra-low friction coefficient was designed and fabricated.The cantilever’s length,width,and thickness are 50,35,and 0.6μm,respectively.The tip height is 23μm.The measurement resolution can reach 7.1×10^(−6) under the maximum normal force.Moreover,the AFM probe was applied to measure the superlubricity between graphene layers.The friction coefficient is 0.00139 under 853.08 nN.This work provides a promising method for measuring a~10^(−5) friction coefficient of superlubricity. 展开更多
关键词 atomic force microscope(AFM) SUPERLUBRICITY friction coefficientμ probe
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真空调频原子力显微镜高精度扫描器设计与校准
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作者 温阳 陈纵横 +8 位作者 王博 冯婕 舒鹏丽 郭强 温焕飞 唐军 菅原康弘 马宗敏 刘俊 《电子显微学报》 CAS CSCD 北大核心 2023年第3期316-324,共9页
原子力显微镜(AFM)是一种表征样品表面的物理化学信息的精密仪器,AFM高精度扫描器是整个测量与表征系统的核心部件,其性能直接影响整个测量系统的性能,因此对原子力显微镜高精度扫描器的研究具有重要意义。介绍了调频原子力显微镜(FM-A... 原子力显微镜(AFM)是一种表征样品表面的物理化学信息的精密仪器,AFM高精度扫描器是整个测量与表征系统的核心部件,其性能直接影响整个测量系统的性能,因此对原子力显微镜高精度扫描器的研究具有重要意义。介绍了调频原子力显微镜(FM-AFM)、AFM精密扫描平台以及扫描器的基本原理,提出了更为精确的扫描器设计模型,并将根据真空FM-AFM实际需要设计的扫描器搭载到自主研发的超高真空AFM系统中进行测试,结果表明了设计模型的精确性。随后,根据实验测试结果进行了相应的校准,提出了一种基于图像进行非线性校准的简易方法。最后,对云母样品表面形貌进行了测量,得到了云母台阶。 展开更多
关键词 调频原子力显微镜 AFM精密扫描平台 压电扫描器 滞后效应 非线性校准
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电力变压器用绝缘纸热老化的微观结构及形貌研究 被引量:42
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作者 廖瑞金 唐超 +2 位作者 杨丽君 孙才新 张昀 《中国电机工程学报》 EI CSCD 北大核心 2007年第33期59-64,共6页
对绝缘纸在热老化过程中微观形貌、纸纤维的结构以及其超微结构等的变化发展进行研究。通过对比绝缘纸样品的原子力显微镜图片,发现初始绝缘纸纤维素的原子排列致密而有序,但经过加速热老化后葡萄糖单体的六边形结构受到破坏。此外,通... 对绝缘纸在热老化过程中微观形貌、纸纤维的结构以及其超微结构等的变化发展进行研究。通过对比绝缘纸样品的原子力显微镜图片,发现初始绝缘纸纤维素的原子排列致密而有序,但经过加速热老化后葡萄糖单体的六边形结构受到破坏。此外,通过扫描电镜照片可以发现纤维素的细胞壁在老化过程中逐渐破裂,同时纤维素的长度及粗度均有减小。通过X光衍射分析显示绝缘纸样品的结晶度及晶粒尺寸在老化过程中逐渐减小,但仍保持原有的纤维素晶型和两相共存的微细结构。试验证明,绝缘纸老化的微观结构研究对进一步了解绝缘纸纤维老化的发展过程及其老化机理有很好的帮助。 展开更多
关键词 绝缘纸 热老化 原子力显微镜 扫描电镜 X光 衍射
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原子力显微镜及其应用 被引量:26
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作者 刘小虹 颜肖慈 +1 位作者 罗明道 李伟 《自然杂志》 北大核心 2002年第1期36-40,共5页
本文简要介绍了原子力显微镜的发展史 ,评述了原子力显微镜的工作原理、工作模式及技术 。
关键词 原子力显微镜 针尖 微悬臂 扫描探针显微镜
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基于聚焦离子束铣削的复杂微纳结构制备 被引量:13
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作者 徐宗伟 房丰洲 +2 位作者 张少婧 韩涛 李建明 《天津大学学报》 EI CAS CSCD 北大核心 2009年第1期91-94,共4页
聚焦离子束铣削是一种灵活且高精度的微加工方法,探索通过聚焦离子来铣削进行复杂微纳米结构的加工过程.通过聚焦离子束铣削加工,利用灰度值精确控制离子束加工时间,实现闪耀光栅以及正弦结构等复杂微纳结构的加工过程.同时,利用聚焦离... 聚焦离子束铣削是一种灵活且高精度的微加工方法,探索通过聚焦离子来铣削进行复杂微纳米结构的加工过程.通过聚焦离子束铣削加工,利用灰度值精确控制离子束加工时间,实现闪耀光栅以及正弦结构等复杂微纳结构的加工过程.同时,利用聚焦离子束对原子力显微镜纳米管探针的长度进行高精度调控,其长度控制精度可以小于50nm.聚焦离子束铣削技术为制备在各种科学工程领域应用的多种复杂微结构提供了有效途径. 展开更多
关键词 聚焦离子束 微加工 铣削 碳纳米管探针 原子力显微镜
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纳米孔阵列阳极氧化铝膜的制备和表征(英文) 被引量:7
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作者 杨文彬 朱世富 +4 位作者 赵北君 叶军 倪经 甄万宝 陈兴明 《无机化学学报》 SCIE CAS CSCD 北大核心 2003年第4期366-370,共5页
本文通过在0℃、0.5mol·L-1的草酸溶液中阳极氧化高纯铝片的方法制得了阳极氧化铝(AAO)膜,并用扫描电子显微镜(SEM)和原子力显微镜(AFM)对AAO膜的形貌和结构进行了表征。结果表明,阻挡层AAO膜中大小一致的膜胞在铝/氧化铝界面上排... 本文通过在0℃、0.5mol·L-1的草酸溶液中阳极氧化高纯铝片的方法制得了阳极氧化铝(AAO)膜,并用扫描电子显微镜(SEM)和原子力显微镜(AFM)对AAO膜的形貌和结构进行了表征。结果表明,阻挡层AAO膜中大小一致的膜胞在铝/氧化铝界面上排成六方形阵列;有孔层AAO膜中含有高度有序的纳米孔阵列和膜胞阵列,并且孔的直径和膜胞的尺寸都具有较窄的分布。另外,考察了阳极氧化电压对膜胞尺寸、孔径大小、孔密度和膜胞密度的影响,表明在一定的电压范围内,膜胞和孔径都随电压的升高而增大,而孔密度和膜胞密度却随电压的升高而减小。 展开更多
关键词 纳米孔阵列 制备 扫描电子显微镜 原子力显微镜 阳极氧化铝膜 表征 形貌 结构
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扫描探针显微镜系列及其应用综述 被引量:16
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作者 田文超 贾建援 《西安电子科技大学学报》 EI CAS CSCD 北大核心 2003年第1期108-112,共5页
扫描探针显微镜将人类带入原子世界,使人类不仅能够观察到物质表面原子的排布情况,而且能够按照人类的意图实现原子操纵.回顾了扫描探针显微镜的历史,介绍了目前国际上各种系列的扫描探针显微镜基本原理、主要特点、研究现状和最新应用... 扫描探针显微镜将人类带入原子世界,使人类不仅能够观察到物质表面原子的排布情况,而且能够按照人类的意图实现原子操纵.回顾了扫描探针显微镜的历史,介绍了目前国际上各种系列的扫描探针显微镜基本原理、主要特点、研究现状和最新应用情况,重点介绍了原子操纵和生命科学、信息科学领域的应用,提出了扫描探针显微镜目前的研究方向. 展开更多
关键词 扫描探针显微镜 扫描隧道显微镜 原子力显微镜 原子操纵 纳米技术 PDM NSOM SPM
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扫描探针显微术的应用(综述) 被引量:5
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作者 蔡继业 曾洁铭 +1 位作者 王煜 曾耀英 《暨南大学学报(自然科学与医学版)》 CAS CSCD 2001年第3期91-95,共5页
扫描探针显微镜 (SPM)是扫描隧道显微镜 (STM)、原子力显微镜 (AFM)、近场光学显微镜(SNOM)等近几年发展起来的新型显微镜的总称 .SPM的发展使得在纳米尺度上研究物质的特性和相互作用成为可能 ,它为生物。
关键词 扫描探针显微镜 原子力显微镜 扫描隧道显微镜 近场光学显微镜 纳米科学技术
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扫描探针显微术在巯醇自组装单分子膜纳米刻蚀中的应用 被引量:5
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作者 赵健伟 阚蓉蓉 +1 位作者 章岩 陈洪渊 《物理化学学报》 SCIE CAS CSCD 北大核心 2006年第1期124-130,共7页
介绍了近十年来扫描探针显微术(SPM)在巯醇自组装单分子膜纳米刻蚀中的应用.依据扫描探针的工作原理,依次讨论了扫描隧道显微镜、原子力显微镜和导电原子力显微镜的工作特点和适用范围.同时也讨论了自组装单分子膜纳米刻蚀术在生物分子... 介绍了近十年来扫描探针显微术(SPM)在巯醇自组装单分子膜纳米刻蚀中的应用.依据扫描探针的工作原理,依次讨论了扫描隧道显微镜、原子力显微镜和导电原子力显微镜的工作特点和适用范围.同时也讨论了自组装单分子膜纳米刻蚀术在生物分子传感器、超高密度信息存储等领域的应用前景. 展开更多
关键词 扫描探针显微术 自组装膜 扫描隧道显微镜 原子力显微镜 纳米刻蚀
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