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Ultrahigh-performance planar β-Ga2O3 solar-blind Schottky photodiode detectors 被引量:2
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作者 LIU Zeng ZHI YuSong +9 位作者 ZHANG ShaoHui LI Shan YAN ZuYong GAO Ang ZHANG ShiYu GUO DaoYou WANG Jun WU ZhenPing LI PeiGang TANG WeiHua 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2021年第1期59-64,共6页
The low dark current, high responsivity and high specific detectivity could be preferably achieved in detectors based on junctions, owing to the efficient constraint of carriers. Compared with the other junctions, pla... The low dark current, high responsivity and high specific detectivity could be preferably achieved in detectors based on junctions, owing to the efficient constraint of carriers. Compared with the other junctions, planar Schottky junctions have simple structures and technological demands and are easy integrated. Herein, in this work, we prepared the β-Ga_(2)O_(3) thin film by metalorganic chemical vapor deposition method to construct planar Ti/β-Ga2O3/Ni Schottky photodiode detectors with different onstate resistances. Fortunately, all the devices exhibit state-of-the-art performances, such as responsivity of 175–1372 A W^(-1),specific detectivity of 10^(14) Jones and external quantum efficiency of 85700%–671500%. In addition, the dependences of device performances on the on-state resistances indicate that the higher dark currents, photocurrents and photoresponsivities may well be obtained when on-state resistance is smaller, due to the less external power is used to overcome the impendence and condensance at the Ti/β-Ga_(2)O_(3) and Ni/β-Ga_(2)O_(3) interfaces, but contributing to higher electric current flow both in the dark and under illuminations. 展开更多
关键词 β-Ga2O3 schotttky photodiode solar-blind device scale on-state resistance
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