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Selective Heating of Transition Metal Usings Hydrogen Plasma and Its Application to Formation of Nickel Silicide Electrodes for Silicon Ultralarge-Scale Integration Devices 被引量:4
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作者 Tetsuji Arai Hiroki Nakaie +8 位作者 Kazuki Kamimura Hiroyuki Nakamura Satoshi Ariizumi Satoki Ashizawa Keisuke Arimoto Junji Yamanaka Tetsuya Sato Kiyokazu Nakagawa Toshiyuki Takamatsu 《Journal of Materials Science and Chemical Engineering》 2016年第1期29-33,共5页
We developed an apparatus for producing high-density hydrogen plasma. The atomic hydrogen density was 3.1 × 1021 m<sup>?3</sup> at a pressure of 30 Pa, a microwave power of 1000 W, and a hydrogen gas ... We developed an apparatus for producing high-density hydrogen plasma. The atomic hydrogen density was 3.1 × 1021 m<sup>?3</sup> at a pressure of 30 Pa, a microwave power of 1000 W, and a hydrogen gas flow rate of 10 sccm. We confirmed that the temperatures of transition-metal films increased to above 800<sup>。</sup>C within 5 s when they were exposed to hydrogen plasma formed using the apparatus. We applied this phenomenon to the selective heat treatment of nickel films deposited on silicon wafers and formed nickel silicide electrodes. We found that this heat phenomenon automatically stopped after the nickel slicidation reaction finished. To utilize this method, we can perform the nickel silicidation process without heating the other areas such as channel regions and improve the reliability of silicon ultralarge-scale integration devices. 展开更多
关键词 selective heating Nickel Silicide Electrode Hydrogen Plasma Microwave Plasma
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Incorporating metal nanoparticles in porous materials via selective heating effect using microwave
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作者 Yingyu Zhou Jiacheng Liu +8 位作者 Fuyuan Sun Junchen Ouyang Ruifa Su Fanchen Meng Yongqi Luo Cheng Xu Weina Zhang Suoying Zhang Fengwei Huo 《Nano Research》 SCIE EI CSCD 2024年第4期3175-3179,共5页
Metal nanoparticle@porous material composites have attracted increasing attention due to their excellent synergistic catalytic performance.However,it is a challenge to introduce metal nanoparticles into cavities of po... Metal nanoparticle@porous material composites have attracted increasing attention due to their excellent synergistic catalytic performance.However,it is a challenge to introduce metal nanoparticles into cavities of porous materials without agglomeration on the exterior.Despite the progress achieved,a universal approach that can integrate different kinds of metal nanoparticles and porous materials is still highly desirable.Here we report a facile and general approach to fabricating metal nanoparticle@porous materials by microwave-triggered selective heating.The microwave can pass through the non-polar solvent and act on the polar solvent in the porous materials,causing the polar solvent to be heated,vaporized,and away from the pores of porous materials.The local void produced by the escape of polar solvent facilitates non-polar solvent containing metallic precursor to be dragged into the narrow pores,followed by further reduction,resulting in the complete encapsulation of nanoparticles.A series of metal nanoparticles@porous materials,ranging from metal-organic frameworks(MOFs)to zeolites,are successfully prepared by this method and show excellent size selectivity in catalytic reactions. 展开更多
关键词 porous material nanoparticle encapsulation microwave synthesis selective heating effect selective catalysis
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Roles of rare earth oxide additives in millimeter-wave sintering of AlN 被引量:2
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作者 Yukio Makino Takashi Yoshioka +2 位作者 Hiromi Nakano Toshiyuki Ueno Shoji Miyake 《Journal of Rare Earths》 SCIE EI CAS CSCD 2008年第2期141-145,共5页
Roles of rare earth oxide (RE2O3) additives in millimeter-wave(MM) sintering of AIN were investigated from the standpoints of phase diagram, heating characteristics of rare earth oxides, and morphology of intergra... Roles of rare earth oxide (RE2O3) additives in millimeter-wave(MM) sintering of AIN were investigated from the standpoints of phase diagram, heating characteristics of rare earth oxides, and morphology of intergranular oxide phase. In the millimeter-wave sintering of AIN, densification temperature decreased with the decrease of the ionic radius of rare earth ion and was closely related with the eutectic temperature in the RE2Oa-Al2O3 binary system. The lowest densification temperature in the millimeter-wave sintering of AIN with Yb2O3 additive was attributed to the largest heating rate of Yb2O3-Al2O3 binary oxide under millimeter-wave radiation. Furthermore, the lowest densification temperature could be attained while selecting the Yb2O3 content so as to form the intergranular phase with the eutectic composition in the Yb2O3-Al2O3 binary system. The result showed good agreement with the above mentioned during the sintering of Si3N4 with Yb2O3-Al2O3 additive. From TEM observation, it was verified that film-like intergranular oxide phase formed under millimeter-wave radiation was favorable for attaining high thermal conductivity in the Yb2O3 added AINs. 展开更多
关键词 MILLIMETER-WAVE rare earth oxide AIN Si3N4 rapid densification selective heating heating rate thermal conductivity morphology
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The Capacitive Coupling Modalities for Oncological Hyperthermia 被引量:1
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作者 Andras Szasz 《Open Journal of Biophysics》 2021年第3期252-313,共62页
The local-regional oncological hyperthermia has various electromagnetic methods for energy-transfer. The differences involve conceptual considerations and technical solutions. The most frequently applied energy transf... The local-regional oncological hyperthermia has various electromagnetic methods for energy-transfer. The differences involve conceptual considerations and technical solutions. The most frequently applied energy transfer is capacitive coupling, concentrating the electric field to be the active heating component. The realization of the capacitive coupling set-up is divided into two different categories based on their goals for heating: 1) the homogeneous (conventional) heating, using isothermal conditions for dosing, and 2) the selective heterogeneous heating, using cellularly absorbed energy for dosing. The homogeneous heating utilizes plane-wave matching, absorbing the wave for energy transfer. The heterogenic heating uses impedance matching, selecting the malignant cells by their electromagnetic specialties, like their heterogenic impedance, higher membrane-raft density, and different spatio-temporal (pathologic pattern) arrangements. This article’s objective is to compare and discuss the details of the two kinds of capacitive coupling techniques. 展开更多
关键词 Plane-Wave Matching Impedance Matching Apoptosis DAMP ICD selective heating Electromagnetic Heterogeneity Membrane Raft
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Selection of organic Rankine cycle working fluid based on unit-heat-exchange-area net power 被引量:1
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作者 郭美茹 朱启的 +2 位作者 孙志强 周天 周孑民 《Journal of Central South University》 SCIE EI CAS CSCD 2015年第4期1548-1553,共6页
To improve energy conversion efficiency, optimization of the working fluids in organic Rankine cycles(ORCs) was explored in the range of low-temperature heat sources. The concept of unit-heat-exchange-area(UHEA) net p... To improve energy conversion efficiency, optimization of the working fluids in organic Rankine cycles(ORCs) was explored in the range of low-temperature heat sources. The concept of unit-heat-exchange-area(UHEA) net power, embodying the cost/performance ratio of an ORC system, was proposed as a new indicator to judge the suitability of ORC working fluids on a given condition. The heat exchange area was computed by an improved evaporator model without fixing the minimum temperature difference between working fluid and hot fluid, and the flow pattern transition during heat exchange was also taken into account. The maximum UHEA net powers obtained show that dry organic fluids are more suitable for ORCs than wet organic fluids to recover low-temperature heat. The organic fluid 1-butene is recommended if the inlet temperature of hot fluid is 353.15-363.15 K or443.15-453.15 K, heptane is more suitable at 373.15-423.15 K, and R245 ca is a good option at 483.15-503.15 K. 展开更多
关键词 organic Rankine cycle(ORC) working fluid selection net power heat exchange area
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Optimization of Selecting Air Conditioning Cold/Heat Sources with Grey Relation Analysis
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作者 曹国庆 涂光备 《Transactions of Tianjin University》 EI CAS 2006年第3期229-234,共6页
Selection of air conditioning(AC) cold/heat sources generally concerns about certain aspects and cannot reveal the whole profile of the problems. Grey relation analysis (GRA) is a data processing method to categor... Selection of air conditioning(AC) cold/heat sources generally concerns about certain aspects and cannot reveal the whole profile of the problems. Grey relation analysis (GRA) is a data processing method to categorize the correlation extent of compared sequences and a certain reference sequence in a system with uncertain information. It is applied to evaluating and selecting AC cold/heat sources from four main aspects, which are technology, economy, reliability, and operation and management. Case study shows that the result for selecting AC cold/heat sources with the GRA method can be more reasonable and convincible. Thus it offers a new approach for designers in heating, ventilating and air conditioning field to compare and evaluate different AC cold/heat sou rces. 展开更多
关键词 air conditioning cold/heat sources: design scheme: optimal selection: grey relation analysis evaluation factor
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The Status of the Isotope Separation by PSP
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作者 Yuri A. Muromkin 《Journal of Energy and Power Engineering》 2013年第2期306-317,共12页
Experiments, prqiects and patents, concerning practical usage of a separation method, based on ICR (ion cyclotron resonance) in plasma, carried out in the 2000s in USA, EU and in Russia, are discussed in this articl... Experiments, prqiects and patents, concerning practical usage of a separation method, based on ICR (ion cyclotron resonance) in plasma, carried out in the 2000s in USA, EU and in Russia, are discussed in this article. It was planned to use ICR method for production of isotopically enriched burnable poisons for nuclear reactor fuel, and also to use this method for extraction of neutron-excess isotopes for the purpose of observation of neutrinoless double beta decay (ββ0v). One more application of this method can be a nuclear waste treatment technology. Current situation with realization of these plans is considered. 展开更多
关键词 ICR (ion cyclotron resonance) selective ICR heating of ions in plasma isotope separation.
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Additive manufacturing of composite materials and functionally graded structures using selective heat melting technique 被引量:1
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作者 Kalaimani Markandan Ruijing Lim +6 位作者 Pawan Kumar Kanaujia Ian Seetoh Muhammad Raziq bin Mohd Rosdi Zhi Huey Tey Jun Seng Goh Yee Cheong Lam Changquan Lai 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2020年第12期243-252,共10页
The feasibility of using selective heat melting(SHM) to fabricate composite materials and functionally graded structures was investigated.We report,for the first time,the successful 3 D printing of copper(Cu)-polyethy... The feasibility of using selective heat melting(SHM) to fabricate composite materials and functionally graded structures was investigated.We report,for the first time,the successful 3 D printing of copper(Cu)-polyethylene(PE) composite,iron(Fe)-polyethylene(PE) composite and functionally graded CuO foams using the SHM technique.It was found that a low feed rate,high airflow rate and high airflow temperature were required for efficient delivery of heat from the emitted hot air to the powder bed,so that the PE binder particles can melt and form dense composites with smooth surfaces.The best mechanical properties were exhibited by composites with 80 vol.% PE,as lower PE concentrations led to deficient binding of the metal particles,while higher PE concentrations meant that very few metal particles were available to strengthen the composite.The strength exhibited by Cu-PE composites was comparable to engineering plastics such as polycarbonate,with the added advantage of being electrically conductive.The average conductivity of the samples,0.152±0.28 S/m,was on par with physically crosslinked graphene assemblies.By subjecting a Cu-PE composite,with Cu concentration graded from 10 vol.% to 30 vol.%,to a high temperature debinding and sintering treatment in air,CuO foam with graded porosity can be obtained.This CuO foam was observed to fail in a layer-by-layer manner under mechanical compression,which is a characteristic of functionally graded materials.Our study shows that,compared to existing 3 D printing techniques,SHM can be cheaper,have wider material compatibility,occupy a smaller footprint and potentially induce less residual stresses in the fabricated parts.Therefore,it could be a valuable complement to current additive manufacturing techniques for fabricating mechanically strong composite materials and functionally graded structures. 展开更多
关键词 selective heat melting Functionally graded materials Additive manufacturing Multimaterial
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