阐述650 V/50 A SiC JBS结构二极管的设计与测试。通过优化有源区元胞设计、结终端设计、离子注入工艺,器件反向耐压VR达到873V,器件具有良好高温特性,正向导通压降VF为1.39 V(@IF=50A),器件结电容Cj为286pF,经过240h高温反偏(HTRB)试验...阐述650 V/50 A SiC JBS结构二极管的设计与测试。通过优化有源区元胞设计、结终端设计、离子注入工艺,器件反向耐压VR达到873V,器件具有良好高温特性,正向导通压降VF为1.39 V(@IF=50A),器件结电容Cj为286pF,经过240h高温反偏(HTRB)试验,器件性能未退化。展开更多
4H silicon carbide(4H-SiC) junction barrier Schottky(JBS) diode with breakdown voltage higher than 2.7 kV and active area of 2.8 mm2 has been successfully fabricated.The design,the fabrication,and the electrical c...4H silicon carbide(4H-SiC) junction barrier Schottky(JBS) diode with breakdown voltage higher than 2.7 kV and active area of 2.8 mm2 has been successfully fabricated.The design,the fabrication,and the electrical characteristics are reported.Numerical simulations have been performed to select the doping level and thickness of the drift layer and the effectiveness of the edge termination technique.The epilayer properties of the N-type are 18μm with a doping of 3.5×1015 cm-3.The diodes are fabricated with a floating guard rings edge termination.The on-state voltage is 2.15 V at Jf=350 A·cm-2.展开更多
文摘阐述650 V/50 A SiC JBS结构二极管的设计与测试。通过优化有源区元胞设计、结终端设计、离子注入工艺,器件反向耐压VR达到873V,器件具有良好高温特性,正向导通压降VF为1.39 V(@IF=50A),器件结电容Cj为286pF,经过240h高温反偏(HTRB)试验,器件性能未退化。
文摘4H silicon carbide(4H-SiC) junction barrier Schottky(JBS) diode with breakdown voltage higher than 2.7 kV and active area of 2.8 mm2 has been successfully fabricated.The design,the fabrication,and the electrical characteristics are reported.Numerical simulations have been performed to select the doping level and thickness of the drift layer and the effectiveness of the edge termination technique.The epilayer properties of the N-type are 18μm with a doping of 3.5×1015 cm-3.The diodes are fabricated with a floating guard rings edge termination.The on-state voltage is 2.15 V at Jf=350 A·cm-2.