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Control of arsenic Pollution from waste gases during fabrication of semiconductor 被引量:1
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作者 Wen Ruimei Liang Junwu +1 位作者 Deng Lisheng Peng Yongqing(Institute of Semiconductors, Chinese Academy of Sciences Beijing 100083,China) 《Journal of Environmental Sciences》 SCIE EI CAS CSCD 1994年第1期123-127,共5页
The abatement technology of toxic arsenic pollution during fabrication of semiconductormaterials and devices has been studied.
关键词 semiconductoro ARSENIC POLLUTION abatement.
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