The aim of this paper is to model the steady-state condition of a rotary shaft seal (RSS) system. For this, an iterative thermal-mechanical algorithm was developed based on incremental finite element analyzes. The beh...The aim of this paper is to model the steady-state condition of a rotary shaft seal (RSS) system. For this, an iterative thermal-mechanical algorithm was developed based on incremental finite element analyzes. The behavior of the seal’s rubber material was taken into account by a large-strain viscoelastic, so called generalized Maxwell model, based on Dynamic Mechanical Thermal Analyses (DMTA) and tensile measurements. The pre-loaded garter spring was modelled with a bilinear material model and the shaft was assumed to be linear elastic. The density, coefficient of thermal expansion and the thermal conductance of the materials were taken into consideration during simulation. The friction between the rotary shaft seal and the shaft was simplified and modelled as a constant parameter. The iterative algorithm was evaluated at two different times, right after assembly and 1 h after assembly, so that rubber material’s stress relaxation effects are also incorporated. The results show good correlation with the literature data, which state that the permissible temperature for NBR70 (nitrile butadiene rubber) material contacting with ~80 mm shaft diameter, rotating at 2600/min is 100°C. The results show 107°C and 104°C for the two iterations. The effect of friction induced temperature, changes the width of the contact area between the seal and the shaft, and significantly reduces the contact pressure.展开更多
Compared with traditional mechanical seals,magnetic fluid seals have unique characters of high airtightness,minimal friction torque requirements,pollution-free and long life-span,widely used in vacuum robots.With the ...Compared with traditional mechanical seals,magnetic fluid seals have unique characters of high airtightness,minimal friction torque requirements,pollution-free and long life-span,widely used in vacuum robots.With the rapid development of Integrate Circuit（IC）,there is a stringent requirement for sealing wafer-handling robots when working in a vacuum environment.The parameters of magnetic fluid seals structure is very important in the vacuum robot design.This paper gives a magnetic fluid seal device for the robot.Firstly,the seal differential pressure formulas of magnetic fluid seal are deduced according to the theory of ferrohydrodynamics,which indicate that the magnetic field gradient in the sealing gap determines the seal capacity of magnetic fluid seal.Secondly,the magnetic analysis model of twin-shaft magnetic fluid seals structure is established.By analyzing the magnetic field distribution of dual magnetic fluid seal,the optimal value ranges of important parameters,including parameters of the permanent magnetic ring,the magnetic pole tooth,the outer shaft,the outer shaft sleeve and the axial relative position of two permanent magnetic rings,which affect the seal differential pressure,are obtained.A wafer-handling robot equipped with coaxial twin-shaft magnetic fluid rotary seals and bellows seal is devised and an optimized twin-shaft magnetic fluid seals experimental platform is built.Test result shows that when the speed of the two rotational shafts ranges from 0-500 r/min,the maximum burst pressure is about 0.24 MPa.Magnetic fluid rotary seals can provide satisfactory performance in the application of wafer-handling robot.The proposed coaxial twin-shaft magnetic fluid rotary seal provides the instruction to design high-speed vacuum robot.展开更多
文摘The aim of this paper is to model the steady-state condition of a rotary shaft seal (RSS) system. For this, an iterative thermal-mechanical algorithm was developed based on incremental finite element analyzes. The behavior of the seal’s rubber material was taken into account by a large-strain viscoelastic, so called generalized Maxwell model, based on Dynamic Mechanical Thermal Analyses (DMTA) and tensile measurements. The pre-loaded garter spring was modelled with a bilinear material model and the shaft was assumed to be linear elastic. The density, coefficient of thermal expansion and the thermal conductance of the materials were taken into consideration during simulation. The friction between the rotary shaft seal and the shaft was simplified and modelled as a constant parameter. The iterative algorithm was evaluated at two different times, right after assembly and 1 h after assembly, so that rubber material’s stress relaxation effects are also incorporated. The results show good correlation with the literature data, which state that the permissible temperature for NBR70 (nitrile butadiene rubber) material contacting with ~80 mm shaft diameter, rotating at 2600/min is 100°C. The results show 107°C and 104°C for the two iterations. The effect of friction induced temperature, changes the width of the contact area between the seal and the shaft, and significantly reduces the contact pressure.
基金supported by National Natural Science Foundation of China (Grant No. 50675027)
文摘Compared with traditional mechanical seals,magnetic fluid seals have unique characters of high airtightness,minimal friction torque requirements,pollution-free and long life-span,widely used in vacuum robots.With the rapid development of Integrate Circuit（IC）,there is a stringent requirement for sealing wafer-handling robots when working in a vacuum environment.The parameters of magnetic fluid seals structure is very important in the vacuum robot design.This paper gives a magnetic fluid seal device for the robot.Firstly,the seal differential pressure formulas of magnetic fluid seal are deduced according to the theory of ferrohydrodynamics,which indicate that the magnetic field gradient in the sealing gap determines the seal capacity of magnetic fluid seal.Secondly,the magnetic analysis model of twin-shaft magnetic fluid seals structure is established.By analyzing the magnetic field distribution of dual magnetic fluid seal,the optimal value ranges of important parameters,including parameters of the permanent magnetic ring,the magnetic pole tooth,the outer shaft,the outer shaft sleeve and the axial relative position of two permanent magnetic rings,which affect the seal differential pressure,are obtained.A wafer-handling robot equipped with coaxial twin-shaft magnetic fluid rotary seals and bellows seal is devised and an optimized twin-shaft magnetic fluid seals experimental platform is built.Test result shows that when the speed of the two rotational shafts ranges from 0-500 r/min,the maximum burst pressure is about 0.24 MPa.Magnetic fluid rotary seals can provide satisfactory performance in the application of wafer-handling robot.The proposed coaxial twin-shaft magnetic fluid rotary seal provides the instruction to design high-speed vacuum robot.
