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Cu在CoN和CoSiN薄膜中的扩散研究 被引量:1
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作者 张在玉 陈秀华 《怀化学院学报》 2013年第5期27-32,共6页
利用磁控溅射的方法在n型硅基底制备了Cu/CoN/Si(100)和Cu/CoSiN/Si(100)薄膜,并对它们进行了不同温度的退火.用原子力显微镜观察了它们的表面形貌.用扫描透射电镜能谱分析法得到了在不同退火温度下铜在上面两种薄膜中浓度... 利用磁控溅射的方法在n型硅基底制备了Cu/CoN/Si(100)和Cu/CoSiN/Si(100)薄膜,并对它们进行了不同温度的退火.用原子力显微镜观察了它们的表面形貌.用扫描透射电镜能谱分析法得到了在不同退火温度下铜在上面两种薄膜中浓度与表面距离的分布,然后利用菲克第二定律对Cu/CoN/Si和Cu/CoSiN/Si体系中cu的扩散进行了计算和分析,得出中温条件(300℃-700℃)下Cu在CoN和CoSiN两种薄膜中的扩散系数表达式分别为8.98×10^-13exp(-0.45eV/kT)cHf/s和5.39×10^-11exp(-0.49eV/kT)Cm2/s. 展开更多
关键词 磁控溅射 热退火 CU CON si(100)和Cu CosiN si(100)薄膜 扩散系数
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Studies on the structure and microstructure of lead strontium titanate thin films
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作者 HAN Ya-nan ZHAI Xue-liang +1 位作者 SHEN Yu-shuang AI Dong-zhao 《Journal of Chemistry and Chemical Engineering》 2009年第12期42-44,共3页
Pb1-xSrxTiO3 (0≤x≤0.9) thin films on Si (100) substrate were prepared by the sol-gel process and their characteristics were investigated as a function of strontium content(x). With increasing of the strontium ... Pb1-xSrxTiO3 (0≤x≤0.9) thin films on Si (100) substrate were prepared by the sol-gel process and their characteristics were investigated as a function of strontium content(x). With increasing of the strontium content, the tetragonality (c/a) was slightly decreased, the splitting peaks become less prominent and the splitting peaks tend to merge into a single peak. Furthermore, the grain size of the films was systematically reduced with the increase in strontium content. 展开更多
关键词 lead strontium titanate thin films SOL-GEL
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A direct atomic layer deposition method for growth of ultra-thin lubricant tungsten disulfide films 被引量:2
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作者 SUN YongFeng CHAI ZhiMin +1 位作者 LU XinChun HE DanNong 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2017年第1期51-57,共7页
We describe a direct atomic layer deposition method to grow lubricant tungsten disulfide (WS2) films. The WS2 films were deposited on a Si (100) substrate and a zinc sulfide (ZnS) film coated the Si (100) subs... We describe a direct atomic layer deposition method to grow lubricant tungsten disulfide (WS2) films. The WS2 films were deposited on a Si (100) substrate and a zinc sulfide (ZnS) film coated the Si (100) substrate using tungsten hexacarbonyl and hydrogen sulfide as precursors. The ZnS film served as an intermediate layer to facilitate the nucleation and growth of the WS2 films. The thickness of the WS2 films was measured via scanning electron microscope, the microstructure was probed with an X-ray diffractometer and a transmission electron microscope. The friction coefficient was measured with a ball-on-disk tester under dry nitrogen. The results reveal that the WS2 films deposited on both substrates are N175 nm and have (002) and (101) crystal orientations. The WS2 film deposited on the ZnS coated Si substrate exhibits a stronger (002) orientation and a denser crystal structure than that deposited on the Si substrate. The WS2 films on both substrates have low friction coefficients. How- ever, due to the stronger (002) orientation and denser crystal structure, the friction coefficient of the WS2 film deposited on ZnS coated Si substrate is smaller with longer wear life. 展开更多
关键词 atomic layer deposition tungsten disulfide crystal orientation FRICTION
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Structure and magneto-electrical properties of Fe-C films prepared by magnetron sputtering 被引量:3
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作者 MA Lei LIU ZhongWu +3 位作者 ZENG DeChang YU HongYa ZHONG XiaPing ZHANG XiaoZhong 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS 2012年第9期1594-1598,共5页
Fe-doped amorphous FexCl~ granular films were prepared on n-Si (100) substrates by d.c. magnetron sputtering. The structur- al properties of FexC1-x films were investigated by X-ray diffraction (XRD), atomic force... Fe-doped amorphous FexCl~ granular films were prepared on n-Si (100) substrates by d.c. magnetron sputtering. The structur- al properties of FexC1-x films were investigated by X-ray diffraction (XRD), atomic force microscope (AFM) and Raman spec- troscopy. The results show that the iron and carbon of as-deposited films are in amorphous state, and the FexC1-x films are di- amond-like carbon (DLC) films. After doping iron into the DLC films, a smooth surface morphology of the FexC1-x films has been obtained with the surface roughness Ra of about 0.231 nm for x=18at%. The FexC1-x films have good soft magnetic prop- erties with the coercivity of approximately 20 Oe. A high positive magnetoresistance (MR) up to 93% with x=lat% was ob- served in a FexCl-x granular film at 300 K. The resistance characteristic of Fe-C films is changed at about 230 K and the positive MR effect can be understood by the p-n heterojunction theory. 展开更多
关键词 carbon films Fe-doped DLC films MAGNETOREsiSTANCE magnetron sputtering
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