低压Si MOSFETs对SiC/Si级联器件短路特性的影响

由低压硅金属-氧化物-半导体场效应晶体管(Silicon Metal-Oxide-Semiconductor Field-Effect Transistor, Si MOSFET)和碳化硅结型场效应晶体管(Silicon Carbon Junction Field-Effect Transistor, SiC JFET)构成的SiC/Si级联(Cascode)器件,兼具了低压Si MOSFET易于驱动、SiC JFET高耐压低损耗等优点。该文采用实验和数值模拟的方式研究了低压Si MOSFET对SiC/Si级联器件短路特性的影响,结果表明,在短路过程中SiC/Si级联器件中的SiC JFET最高温度比单独的SiC JFET短路时的最高温度低,SiC/Si级联器件的短路失效时间得到了延长,并且随着Si MOSFET额定电压的增加,SiC/Si级联器件短路失效延长的时间也在增加。

化学气相沉积SiC涂层反应特性及沉积过程的模拟研究

借助基于有限元原理的COMSOL软件和分子动力学模拟原理的Reax FF软件对化学气相沉积技术制备SiC涂层的反应特性及沉积过程进行模拟研究,为高温抗氧化复合涂层体系中SiC中间层的工艺优化及制备提供理论支持。结果表明,化学气相沉积SiC涂层过程包括前驱体三氯甲基硅烷(CH_(3)SiCl_(3))的扩散过程和热解反应过程,SiC涂层在扩散过程不会生长,仅从10^(−4)s后的热解反应过程开始生长,沉积生长过程同时伴随涂层的解离。随着入射粒子能量的增大,单位时间内沉积到基底表面的Si和C粒子数不断增加。提高粒子入射能量有利于提高SiC涂层的致密度,当入射粒子能量大于2 eV时可以实现SiC涂层的均匀生长,而当入射能量高于6 eV时,解离的Si和C粒子数量增大,不利于SiC涂层的生长。综合而言,当入射能量为3 eV时,化学气相沉积的SiC涂层综合性能最佳。

考虑驱动电压与开关时序协同调控的Si/SiC混合器件开关策略

硅基(Si)绝缘栅双极晶体管(insulated gate bipolar transistor,IGBT)和碳化硅基(SiC)金属氧化物半导体场效应晶体管(metal oxide semiconductor field effect transistor,MOSFET)并联组成的Si/SiC混合器件,已被证实具有SiC MOSFET的高开关频率、低开关损耗特性和Si IGBT的大载流能力、低成本的优势。然而,目前Si/SiC混合器件性能提升的研究并未兼顾效率和可靠性,且存在调控手段单一的劣势。基于此,该文详细分析不同负载电流下驱动电压、开关时序等调控参数对Si/SiC混合器件损耗和电应力的影响,提出一种考虑驱动电压与开关时序协同调控的Si/SiC混合器件开关策略。所提开关策略通过不同电流区间采用驱动电压与开关时序相配合的方式,在保障Si/SiC混合器件可靠性的前提下,提高其运行效率。该文搭建双脉冲测试实验平台与稳态参数测量实验平台对所提开关策略进行验证。实验结果表明,相较于传统开关策略,Si/SiC混合器件采用本文所提开关策略在开通损耗、关断损耗以及导通损耗方面分别减少13%、21%和32%。

基于热网络分区等效策略的Si/SiC混合器件耦合热参数辨识方法

由硅(Si)绝缘栅双极型晶体管(IGBT)与碳化硅(SiC)金属氧化物半导体场效应晶体管(MOSFET)并联构成的混合器件可打破单一Si基器件和SiC基器件的局限性,实现损耗和成本间的有效均衡。结温估计对于Si/SiC混合器件的可靠运行至关重要,然而,目前针对热监测的研究往往需满足热稳态平衡和功率损耗可测两大条件,在实际变流器中实用性较低。基于此,该文以零输入响应法为切入点,首先,对Si/SiC混合器件热结构特性进行分析,详细阐述零输入响应法直接应用于混合器件时所带来的高阶热约束条件难以表征的问题;其次,通过对SiIGBT与SiC MOSFET进行热网络分区处理实现模型的降阶,构建出壳温降温曲线时间常数与热参数之间的约束关系,提出了基于热网络分区等效思想的混合器件耦合热参数辨识方法,所提方法简化了功率损耗测量步骤与热平衡态条件,在并联器件耦合热参数辨识研究中具有简单、通用、流程化高的应用优势;最后,通过实验验证了该文所提方法的准确性和有效性。

连续SiC纤维表面铂涂层的制备及抗氧化性研究

采用金属有机化合物化学气相沉积法(MOCVD)在连续SiC纤维表面沉积了约0.8μm厚的Pt涂层,用扫描电镜对涂层的形貌进行观察,用EDS能谱和XRD对涂层的成分进行了分析,并对沉积涂层后的纤维在不同温度和时间下的抗氧化性能进行了测试。结果表明,制备得到的铂涂层光滑致密,与纤维结合牢固,有效弥补了纤维表面缺陷;对沉积涂层后的纤维进行力学表征和抗氧化测试,发现铂涂层不仅增加了SiC纤维的抗拉强度,而且经700~1400℃氧化1h后纤维的抗氧化性能大幅提高。

硅基SiC薄膜制备与应用研究进展

碳化硅(SiC)材料具有极为优良的物理、化学及电学性能,可满足在高温、高腐蚀等极端条件下的应用,碳化硅还是极端工作条件下微机电系统(MEMS)的主要候选材料,成为国际上新材料、微电子和光电子领域研究的热点。同时,碳化硅有与硅同属立方晶系的同质异形体,可与硅工艺技术相结合制备出适应大规模集成电路需要的硅基器件,因此用硅晶片作为衬底制备碳化硅薄膜的工作受到研究人员的特别重视。本文综述了近年来国内外硅基碳化硅薄膜的研究现状,就其制备方法进行了系统的介绍,主要包括各种化学气相沉积(Chemical vapor deposition,CVD)法和物理气相沉积(Physical vapor deposition,PVD)法,并归纳了对硅基碳化硅薄膜性能的研究,包括杨氏模量、硬度、薄膜反射率、透射率、发光性能、电阻、压阻、电阻率和电导率等,以及其在微机电系统传感器、生物传感器和太阳能电池等领域的应用,最后对硅基碳化硅薄膜未来的发展进行了展望。

高温燃气环境下SiCf/SiC和SiC_(f)/SiC-EBC复合材料力学性能及损伤

航空发动机中的碳化硅纤维增强碳化硅陶瓷基复合材料(SiC_(f)/SiC)因承受高温高速燃烧气体的氧化腐蚀而发生损伤甚至失效。本工作利用燃气发生装置模拟航空发动机中复杂燃气环境,将以一定比例混合后的航空煤油与液氧燃料点燃,形成高温高速燃烧气体对材料进行考核。对SiC_(f)/SiC复合材料分别进行1200℃燃气环境10 h氧化实验和1000次热冲击实验,探究环境屏障涂层(environmental barrier coating,EBC)对SiC_(f)/SiC复合材料的防护作用。对燃气环境考核后的SiC_(f)/SiC复合材料和SiC_(f)/SiC-EBC复合材料进行单轴拉伸强度测试,并利用扫描电镜对其断口及截面微观形貌进行观察。结果表明:在燃气环境下氧化10 h后,SiC_(f)/SiC复合材料和SiC_(f)/SiC-EBC复合材料内部没有发生明显的界面层及纤维氧化,单轴拉伸强度下降不到2%;在燃气环境下经过1000次热冲击后,在SiC_(f)/SiC复合材料内部形成多处微裂纹并发生了界面层的氧化腐蚀,单轴拉伸强度下降41.3%;EBC涂层可以有效保护SiC_(f)/SiC复合材料免受高温燃气的氧化腐蚀,SiC_(f)/SiC-EBC复合材料在经过1000次热冲击后的单轴拉伸强度下降16.6%。

Al_(2)O_(3)膜对高温环境下NiCrAlY-SiC复合镀层内部反应的阻隔及涂层耐磨性研究

为了解决以SiC颗粒为磨料的叶尖耐磨复合镀层在高温工况下SiC与涂层中Ni元素反应导致涂层耐磨性下降等问题,采用化学气相沉积(chemicalvapor deposition,CVD)工艺方法在SiC颗粒表面制备了Al_(2)O_(3)膜以阻隔SiC与涂层中Ni元素的反应。研究了0.5~1.0μm和5.0~10.0μm这2种厚度范围的Al_(2)O_(3)膜对NiCrAlY-SiC@Al_(2)O_(3)叶尖耐磨镀层中SiC颗粒与NiCrAlY镀层在1100℃高温环境下反应的阻隔效果,并测试了2种Al_(2)O_(3)膜厚度的NiCrAlY-SiC@Al_(2)O_(3)叶尖耐磨镀层在1100℃高温环境下保温500 h后的耐磨性。结果显示,5.0~10.0μm厚度的Al_(2)O_(3)膜可有效阻隔SiC颗粒与NiCrAlY镀层的高温反应,使NiCrAlY-SiC@Al_(2)O_(3)涂层在1100℃高温环境下保持良好的耐磨性,并与ZrO2陶瓷封严涂层形成良好的对磨匹配效果。

Ni-P/纳米SiC复合镀层制备及性能研究

以45钢为基体材料,在其表面制备了Ni-P/纳米SiC复合镀层,研究了复合镀层的微观结构及热处理性能。结果表明:Ni-P/纳米SiC复合镀层由细小的胞状物构成,胞状物均匀致密,完全包覆于基体表面,复合镀层表面未见孔洞等缺陷。镀层由Ni、P、Si、C等元素构成,弥散分布Si元素、C元素来自镀层中SiC粒子。热处理后,复合镀层显微硬度、耐腐蚀性优于热处理前的复合镀层。

Effect of SiC whiskers on the oxidation protective properties of SiC coatings for carbon/carbon composites

In order to effectively employ the unique high temperature mechanical properties of carbon/carbon composite substrates, SiC coatings reinforced by SiC whiskers were prepared by pack cementation method. The effect of SiC whiskers on the oxidation resistance properties of the single-layer coating and double-layer coating was investigated. SiC whiskers in the single-layer SiC coating have little effect on the anti-oxidation property but obviously improve the thermal shock property. The double-layer coating with inner-layer reinforced coating exhibits more perfect anti-oxidation ability than the double-layer coating with SiC inner-layer coating.

MICROSTRUCTURE OF ELECTRODEPOSITED Ni-W-P-SiC COMPOSITE COATINGS

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Effects of addition of rare earth on properties and structures of Ni-W-B-SiC composite coatings

The effects of rare earth (RE) on the composition, phase structures, surface morphologies and hardness of electrodeposited RE Ni W B SiC composite coatings were discussed. The results show that W and SiC contents in the coatings increase with the increase of RE in the bath. When RE is added in the coatings, the grains are refined and the trend of formation of amorphous coatings is increased. Moreover, the thermal stability of the RE Ni W B SiC composite coatings is enhanced. The hardness of the coatings is increased with the increase of heat treatment temperature, and it reaches the peak value when heated at 400 ℃. Besides, the hardness of the RE Ni W B SiC coatings is higher than that of the Ni W B SiC coatings.

Thermodynamics of electrodeposited Ni-B-SiC composite coatings

The φ pH diagram of Ni B H 2O system was drawn, and the mechanism of electrodepositing Ni B SiC composite coatings was discussed. The results show that the deposition of Ni and B occurs prior to that of H 2 because of the over potential of H 2 evolution on the Fe substrate. Boron can not singly deposit in aqueous solution. Nickel and boron can co deposit in the form of Ni 4B 3 without evolution of hydrogen when the cathodical potential is kept to be -1.415 ～ -1.700?V.

Anti-oxidation behavior of chemical vapor reaction SiC coatings on different carbon materials at high temperatures

To protect carbon materials from oxidation,SiC coatings were prepared on carbon/carbon(C/C)composites and graphite by chemical vapor reaction.SEM and XRD analyses show that the coatings obtained are composed of SiC grains and micro-crystals. The influence of different carbon substrates on oxidation behavior of coated samples was investigated,and then their oxidation mechanisms were studied.Oxidation test shows that the SiC coated graphite has a better oxidation resistance than SiC coated C/C composites at high temperatures(1 623 K and 1 823 K).In the oxidation process,the oxidation curves of SiC coated C/C composites are linear,while those of SiC coated graphite follow a quasi-parabolic manner.The oxidation mechanism of the former is controlled by chemical reaction while the latter is controlled by oxygen diffusion based on the experimental results.The variation of oxidation behavior and mechanism of SiC coatings on two kinds of carbon substrates are primarily contributed to their structure differences.

Incorporation of nano/micron-SiC particles in Ni-based composite coatings towards enhanced mechanical and anti-corrosion properties

Ni-based composite coatings incorporated with nano/micron SiC particles were fabricated via electrochemical co-deposition in Watts bath,followed by the evaluation of their mechanical and anti-corrosion properties.The micrographic observations suggest that the SiC particles with various sizes can be well incorporated to the Ni substrate.X-ray diffraction(XRD)patterns indicate that SiC particles with smaller sizes could weaken the preferential growth of Ni along(200)facet.In addition,it is found that the incorporated SiC particles with medium micron sizes(8 and 1.5μm)could significantly enhance the micro-hardness of the Ni composite coatings.Nevertheless,electrochemical measurements demonstrate that micron-sized SiC particles would weaken the corrosion resistance of Ni composite coatings ascribed to the structure defects induced.In contrast,the combined incorporation of nanosized(50 nm)SiC particles with medium micron(1.5μm)ones is capable of promoting the compactness of the composite coatings,which is beneficial to the long-term corrosion resistance with negligible micro-hardness loss.

PROPERTIES OF ELECTRODEPOSITED AMORPHOUS Ni-W-P-SiC COMPOSITE COATINGS

The Effects of heat treatment temperature on the hardness,wear resistance and structure of the amorphous Ni-W-P-SiC composite coatings have been investigated.The results show that Ni-W-P-SiC composite coatings are amorphous under 300℃, partially crystalline at 300-400℃,and crystalline when heat treatment temperature reaches 400℃,the crystals being fine Ni3P phase particles.The hardness,wear resistance and the crystallization temperature of the composite coatings increase when an additive is added into the bath.The hardness and wear resistance of the coatings increase with increasing heat treatment temperature,and they will reach their peak values when the heat treatment temperature reaches 400℃.Corrosion experiment indicates that the corrosion resistance of amorphous Ni-W-P-SiC composite coatings in various kinds of corrosive media except nitric acid is better than that of stainless steel 1Cr18Ni9Ti.Scanning electron microscopy observation shows that the additive has no effect on the surface appearance of the coatings,but the current density and the pH value have considerable effects on the surface appearance.

Preparation and Anti-oxidation Mechanism of Mullite/Yttrium Silicate Coatings on C/SiC Composites

In order to enhance the oxidation resistance of C/Si C composites, mullite/yttrium silicate coatings were fabricated on C/Si C composites through dip-coating route. Al_2O_3-SiO_2 sol with high solid content was selected as the raw material for mullite and ＂silicone resin ＋ Y_2O_3 powder＂ slurry was used to synthesize yttrium silicate. The microstructure and phase composition of coatings were characterized, and the investigation on oxidation resistance and anti-oxidation mechanism was emphasized. The as-fabricated coatings consisting of SiO_2-rich mullite phase and Y_2Si_2O_7 phase show high density and favorable bonding to C/Si C composites. After oxidized at 1 400 ℃ and 1 500 ℃ for 30 min in static air, the coating-containing C/Si C composites possess 91.9% and 102.4% of the original flexural strength, respectively. The desirable thermal stability of coatings and the further densification of coatings due to viscous flow of rich SiO_2 and Y-Si-Al-O glass are responsible for the excellent oxidation resistance. In addition, the coating-containing composites retain 99.0% of the original flexural strength and the coatings exhibit no cracking and desquamation after 12 times of thermal shock from 1 400 ℃ to room temperature, which are ascribed to the combination of anti-oxidation mechanism and preferable physical and chemical compatibility among C/Si C composites, mullite and Y_2Si_2O_7. The carbothermal reaction at 1 600 ℃ between free carbon in C/Si C substrate and rich SiO_2 in mullite results in severe frothing and desquamation of coatings and obvious degradation in oxidation resistance.

STUDY ON PROPERTIES OF PULSE ELECTRODEPOSITED RE-Ni-W-P-SiC COMPOSITE COATINGS

The effects of pulse frequency f and duty cycle r on the deposition rate, composition, morphology, and hardness of pulse electrodeposited RE （rare earth）-Ni-W-P-SiC composite coatings have been studied. The results indicate that pulse current can improve the deposition rate of RE-Ni-W-P-SiC composite coatings; W, P, and SiC contents in the coating decrease with the increase of pulse frequency and reach the lowest value at f = 33Hz, whereas the RE content in the composite coatings increases with the increase of pulse frequency. SiC content decreases with the increase of duty cycle, W content reaches the lowest value, and P content reaches the highest value at r = 0.4; pulse current and RE can lead to smaller size of the crystalline grains; however, the effects of different pulse frequency and duty cycle on the morphologies of RE-Ni-W-P-SiC composite coatings are not obvious. The hardness of RE-Ni-W-P-SiC composite coatings is the highest when the duty cycle is at 0.6 and 0.8 and pulse frequency is at 50Hz. At the same pulse frequency, the hardness of RE-Ni-W-P-SiC composite coatings at r= 0.8 is higher than that at r= 0.6.

PROCESS AND PROPERTIES OF ELECTROLESS PLATING RE-Ni-B-SiC COMPOSITE COATINGS

Technology and properties of electroless composite RE-Ni-B-SiC coatings have been investigated.Results show that stabilizer plys a decisive role in electroless composite Ni-B-SiC,the addition of appropriate quantity of RE(rare earth) into the Ni-B-SiC bath not only increases SiC content in composite coatings,their hardness and wear resistance but also improves crystalline fineness,Wear resistance increases with the increase of SiC.Hardness and wear resistance of composite coatings reach peak values a fter heat treatment at 4OO and 500℃ for 1h respectively.

Oxidation behavior of oxidation protective coatings for C/C-SiC composites at 1500 ℃

Porous carbon/carbon preforms were infiltrated with melted silicon to form C/C-SiC composites. Three-layer Si-Mo coating prepared by slurry painting and SiC/Si-Mo multilayer coating prepared by chemical vapor deposition(CVD) alternated with slurry painting were applied on C/C-SiC composites, respectively. The oxidation of three samples at 1 500 ℃ was compared. The results show that the C/C-SiC substrate is distorted quickly. Three-layer Si-Mo coating is out of service soon due to the formation of many bubbles on surface. The mass loss of coated sample is 0.76% after 1 h oxidation. The sample with SiC/Si-Mo multilayer coating gains mass even after 105 h oxidation. SiC/Si-Mo multilayer coating can provide longtime protection for C/C-SiC composites and has excellent thermal shock resistance. This is attributed to the combination of dense SiC layer and porous Si-Mo layer. Dense SiC layer plays the dual role of physical and chemical barrier, and resists the oxidation of porous Si-Mo layer. Porous Si-Mo layer improves the thermal shock resistance of the coating.