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去除外延用掺Fe磷化铟晶片表面Si残留的清洗方法
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作者 赵茂旭 刘汉保 +6 位作者 韦华 杨春柳 孙清 赵兴凯 刘建良 杨绍楠 李晓宏 《云南化工》 CAS 2024年第2期174-178,共5页
使用常规的清洗工艺清洗后磷化铟衬底晶片在外延后会出现迁移率低的表现,对缺陷的外延晶片进行分析,发现衬底与外延层界面Si元素的含量较大。针对该问题提出了优化的清洗工艺,对常规的SC1清洗工艺进行浓度优化并使用两步清洗,以及在过... 使用常规的清洗工艺清洗后磷化铟衬底晶片在外延后会出现迁移率低的表现,对缺陷的外延晶片进行分析,发现衬底与外延层界面Si元素的含量较大。针对该问题提出了优化的清洗工艺,对常规的SC1清洗工艺进行浓度优化并使用两步清洗,以及在过程中增加柠檬酸溶液清洗来解决Si元素的残留。对优化工艺前后晶片的氧化层厚度、晶片表面颗粒残留、晶片表面粗糙度、晶片的XRD和PL谱图进行了对比分析,并对优化清洗工艺清洗的晶片表面和外延界面Si元素含量进行了测试,结果表明优化清洗工艺能明显提高晶片表面洁净度并降低晶片表面Si元素的残留,最终解决由于Si元素含量较高造成的外延迁移率低的问题。 展开更多
关键词 磷化铟晶片 迁移率低 高洁净表面 si残留
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Effect of Si content on laser welding performance of Al-Mn-Mg alloy
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作者 赵丕植 刘婧 迟之东 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2014年第7期2208-2213,共6页
The correlation between Si content (0.1%-0.5%, mass fraction) and pulse laser welding performance of AI-Mn-Mg aluminum alloy sheets was studied. The sheets were fabricated in the laboratory, with gauge of 0.45 mm, H... The correlation between Si content (0.1%-0.5%, mass fraction) and pulse laser welding performance of AI-Mn-Mg aluminum alloy sheets was studied. The sheets were fabricated in the laboratory, with gauge of 0.45 mm, H16 temper by pulse laser welding. It was found that no cracking existed in the welding pool as Si content was below 0.34%. However, when the Si content increased to 0.47%, cracking formed in the welding pool. Microstructure observations indicated that residual eutectic phases distributed at the grain boundaries were discontinuous and appeared to be small particles in lower Si content alloys; the residual eutectic phases distributed at the grain boundaries were partially continuous and appeared to be films in higher Si content alloys. These phenomena could explain why Si content adversely affected the laser welding performance. 展开更多
关键词 Al-Mn-Mg alloy laser welding performance si content CRACK residual eutectic phase
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