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Si-SiO_2薄膜结构与光致发光的研究
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作者 梁昌振 吴雪梅 +1 位作者 欧阳义芳 诸葛兰剑 《苏州大学学报(自然科学版)》 CAS 2004年第1期54-57,共4页
采用射频磁控溅射复合靶技术制备了Si SiO2薄膜,并在各种温度下进行了退火处理.XRD分析表明Si SiO2薄膜为非晶结构,XPS分析表明样品主要是以SiO1.90的形式存在,它是富硅或者缺氧的结构.在室温下观察到了可见光致发光(PL)现象,探测到样... 采用射频磁控溅射复合靶技术制备了Si SiO2薄膜,并在各种温度下进行了退火处理.XRD分析表明Si SiO2薄膜为非晶结构,XPS分析表明样品主要是以SiO1.90的形式存在,它是富硅或者缺氧的结构.在室温下观察到了可见光致发光(PL)现象,探测到样品的峰位分别在370nm、410nm、470nm和510nm.结合激发谱对相应的激发与发光中心进行了讨论.另外,还研究了退火温度对其峰位与峰强的影响. 展开更多
关键词 si-sio2薄膜 薄膜结构 光致发光 射频磁控溅射 退火 半导体材料
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Transport and electroluminescence mechanism in Au/(Si/SiO_2)/P-Si film 被引量:1
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作者 ZHANG Kai-biao MA Shu-yi MA Zi-jun CHEN Hai-xia 《Optoelectronics Letters》 EI 2006年第1期48-50,共3页
The samples of Au/(Si/SiO2 )/p-Si structure were fabricated by using the R. F magnetron sputtering technique. Its carrier transport and electroluminescence mechanism were studied from the Ⅰ-Ⅴ curves and EL spectra... The samples of Au/(Si/SiO2 )/p-Si structure were fabricated by using the R. F magnetron sputtering technique. Its carrier transport and electroluminescence mechanism were studied from the Ⅰ-Ⅴ curves and EL spectra by using the Configuration Coordinate as a theoretical model. The result indicates that there are two defect centers in SiO2 films. The electron in Au and the hole in p-Si went into SiO2 film by the Fowler-Nordheim tunneling model at a high bias voltage and recombined through these defect centers in SiO2 film. 展开更多
关键词 光致发电 薄膜 Au/(Si/SiO2 )/p-Si 磁电管 电子散射
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