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沉积温度对SiC涂层微观结构及组成的影响 被引量:9
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作者 邓清 肖鹏 熊翔 《粉末冶金材料科学与工程》 EI 2006年第5期304-309,共6页
利用MTS-H2-Ar体系,用化学气相沉积法(CVD)在SiC基体材料表面沉积SiC涂层。用X射线衍射仪和扫描电镜分析涂层的晶体结构和表面形貌。研究温度对涂层的物相组成、微观结构和沉积速率的影响。结果表明:在1100~1400℃范围内,沉积产... 利用MTS-H2-Ar体系,用化学气相沉积法(CVD)在SiC基体材料表面沉积SiC涂层。用X射线衍射仪和扫描电镜分析涂层的晶体结构和表面形貌。研究温度对涂层的物相组成、微观结构和沉积速率的影响。结果表明:在1100~1400℃范围内,沉积产物均为单一的β-SiC结晶相;随温度升高,SiC晶粒尺寸增大,1400℃时择优生长由(110)晶面转变为(220)晶面;涂层形貌对温度十分敏感,在1200℃温度下沉积的涂层最为致密,且具有最大沉积速率,是制备SiC涂层的最佳温度。 展开更多
关键词 化学气相沉积 sic沉积温度 微观结构
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Formation mechanism and oxidation behavior of MoSi_2-SiC protective coating prepared by chemical vapor infiltration/reaction 被引量:5
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作者 何子博 李贺军 +2 位作者 史小红 付前刚 吴恒 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2013年第7期2100-2106,共7页
In order to protect C/C composites from oxidation, SiC-MoSi2 composite coating was synthesized by chemical vapor infiltration /reaction (CVI/CVR) technology. A porous Mo layer was prefabricated on SiC coated C/C com... In order to protect C/C composites from oxidation, SiC-MoSi2 composite coating was synthesized by chemical vapor infiltration /reaction (CVI/CVR) technology. A porous Mo layer was prefabricated on SiC coated C/C composites, and then MoSi2 and SiC were subsequently prepared in a CVI /CVR process using methyltrichlorosilane (MTS) as precursor. The deposition and reaction mechanism of the MoSi2-SiC composite coating was investigated by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The oxidation behavior of SiC-MoSi2 coated specimens was tested. The results show that the porous Mo layer can be densified with SiC phase decomposed from MTS, and transformed into SiC-MoSi2 by reacting with MTS as well. A dense composite coating was prepared with optimized deposition parameters. The coated specimen exhibits a good oxidation resistance with a little mass loss of 1.25% after oxidation at 1500 °C for 80 h. 展开更多
关键词 MoSi2-sic coating deposition temperature initial partial pressure of MTS oxidation resistance
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