非掺杂型Si/SiGe异质结外延与表征

以自旋为编码单元的硅基半导体量子计算与传统微电子工艺兼容,易拓展且可以同位素纯化提高退相干时间,因而备受关注.本研究工作通过分子束外延生长了高质量非掺杂型Si/SiGe异质结并测试了二维电子气迁移率.球差电镜观察到原子级尖锐界面,原子力显微镜表征显示其表面均方根粗糙度仅为0.44 nm,低温下迁移率达到20.21×10^(4)cm^(2)·V^(–1)·s^(–1).不同栅压下载流子浓度和迁移率的幂指数为1.026,材料丁格比值在7—12之间,表明载流子主要受到背景杂质散射和半导体/氧化物的界面散射.

Effect of interface-roughness scattering on mobility degradation in SiGe p-MOSFETs with a high-k dielectric/SiO2 gate stack＊

A physical model for mobility degradation by interface-roughness scattering and Coulomb scattering is proposed for SiGe p-MOSFET with a high-k dielectric/SiO2 gate stack. Impacts of the two kinds of scatterings on mobility degradation are investigated. Effects of interlayer （SiO2） thickness and permittivities of the high-k dielectric and interlayer on carrier mobility are also discussed. It is shown that a smooth interface between high-k dielectric and interlayer, as well as moderate permittivities of high-k dielectrics, is highly desired to improve carriers mobility while keeping alow equivalent oxide thickness. Simulated results agree reasonably with experimental data.

Nano silica aerogel-induced formation of an organic/alloy biphasic interfacial layer enables construction of stable high-energy lithium metal batteries

Lithium metal batteries represent promising candidates for high-energy-density batteries, however, many challenges must still be overcome,e.g., interface instability and dendrite growth. In this work, nano silica aerogel was employed to generate a hybrid film with high lithium ion conductivity(0.6 mS cm^(-1)at room temperature) via an in situ crosslinking reaction. TOF-SIMS profile analysis has revealed conversion mechanism of hybrid film to Li–Si alloy/Li F biphasic interface layer, suggesting that the Li–Si alloy and Li F-rich interface layer promoted rapid Li+transport and shielded the Li anodes from corrosive reactions with electrolyte-derived products. When coupled with nickel-cobalt-manganese-based cathodes, the batteries achieve outstanding capacity retention over 1000 cycles at 1 C. Additionally the developed film coated on Li enabled high coulombic efficiency(99.5%) after long-term cycling when coupled with S cathodes. Overall, the results presented herein confirm an effective strategy for the development of high-energy batteries.

Multiple SiGe/Si layers epitaxy and SiGe selective etching for vertically stacked DRAM

Fifteen periods of Si/Si_(0.7)Ge_(0.3)multilayers(MLs)with various Si Ge thicknesses are grown on a 200 mm Si substrate using reduced pressure chemical vapor deposition(RPCVD).Several methods were utilized to characterize and analyze the ML structures.The high resolution transmission electron microscopy(HRTEM)results show that the ML structure with 20 nm Si_(0.7)Ge_(0.3)features the best crystal quality and no defects are observed.Stacked Si_(0.7)Ge_(0.3)ML structures etched by three different methods were carried out and compared,and the results show that they have different selectivities and morphologies.In this work,the fabrication process influences on Si/Si Ge MLs are studied and there are no significant effects on the Si layers,which are the channels in lateral gate all around field effect transistor(L-GAAFET)devices.For vertically-stacked dynamic random access memory(VS-DRAM),it is necessary to consider the dislocation caused by strain accumulation and stress release after the number of stacked layers exceeds the critical thickness.These results pave the way for the manufacture of high-performance multivertical-stacked Si nanowires,nanosheet L-GAAFETs,and DRAM devices.

Theoretical Studies on the Si(001)-SiO_2 Interface Structure

Novel models （2× 1） of Si（001）-SiO2 interface structure have been established. The method of the first-principle General Gradient Approximation （GGA） is employed to structurally optimize the established theoretical models under the K-point space of periodic boundary condition. The structures after optimization have been analyzed, and the results show that the interfaces present in disordered state and both Si-O-Si and Si=O structures exist. Meanwhile, the bonding of surface structure is analyzed via the graphics of electron localization function（ELF）.

Primary Mg_(2)Si phase and Mg_(2)Si/α-Mg interface modified by Sn and Sb elements in a Mg-5Sn-2Si-1.5Al-1Zn-0.8Sb alloy

The microstructure of primary Mg_(2)Si and the interface of Mg_(2)Si/α-Mg modified by Sn and Sb elements in an as-cast Mg-5Sn-2Si-1.5Al-1Zn-0.8Sb(wt.%) alloy were investigated.In the primary Mg_(2)Si phase not only the Si atoms but also the Mg atoms could be substituted by Sn and Sb atoms,resulting in the slightly reduced lattice constant a of 0.627 nm.An OR of Mg_(2)Si phase and α-Mg in the form of[001]Mg_(2)Si‖[01■1]α,(220)Mg_(2)Si‖(0■12)αwas discovered.Between primary Mg_(2)Si phase and α-Mg matrix two transitional nano-particle layers were formed.In the rim region of primary Mg_(2)Si particle,Mg_(2)Sn precipitates sizing from 5 nm to 50 nm were observed.Adjacent to the boundary of primary Mg_(2)Si particle,luxuriant columnar crystals of primary Mg_(2)Sn phase with width of about 25 nm and length of about100 nm were distributed on the α-Mg matrix.The lattice constant of the Mg_(2)Sn precipitate in primary Mg_(2)Si particle was about 0.756 nm.Three ORs between Mg_(2)Sn and Mg_(2)Si were found,in which the Mg_(2)Sn precipitates had strong bonding interfaces with Mg_(2)Si phase.Three new minor ORs between Mg_(2)Sn phase and α-Mg were found.The lattice constant of primary Mg_(2)Sn phase was enlarged to 0.813 nm owing to the solution of Sn and Sb atoms.Primary Mg_(2)Sn had edge-to-edge interfaces with α-Mg.Therefore,the primary Mg_(2)Si particle and α-Mg were united and the interfacial adhesion was improved by the two nano-particles layers of Mg_(2)Sn phase.

Forward and reverse electron transport properties across a CdS/Si multi-interface nanoheterojunction

The electron transport behavior across the interface plays an important role in determining the performance of op- toelectronic devices based on heterojunctions. Here through growing CdS thin film on silicon nanoporous pillar array, an untraditional, nonplanar, and multi-interface CdS/Si nanoheterojunction is prepared. The current density versus voltage curve is measured and an obvious rectification effect is observed. Based on the fitting results and model analyses on the forward and reverse conduction characteristics, the electron transport mechanism under low forward bias, high forward bias, and reverse bias are attributed to the Ohmic regime, space-charge-limited current regime, and modified Poole-Frenkel regime respectively. The forward and reverse electrical behaviors are found to be highly related to the distribution of inter- facial trap states and the existence of localized electric field respectively. These results might be helpful for optimizing the preparing procedures to realize high-performance silicon-based CdS optoelectronic devices.

First-principles calculations of the hole-induced depassivation of SiO2/Si interface defects

The holes induced by ionizing radiation or carrier injection can depassivate saturated interface defects.The depassivation of these defects suggests that the deep levels associated with the defects are reactivated,affecting the performance of devices.This work simulates the depassivation reactions between holes and passivated amorphous-SiO_(2)/Si interface defects(HP_(b)+h→P_(b)+H^(+)).The climbing image nudged elastic band method is used to calculate the reaction curves and the barriers.In addition,the atomic charges of the initial and final structures are analyzed by the Bader charge method.It is shown that more than one hole is trapped by the defects,which is implied by the reduction in the total number of valence electrons on the active atoms.The results indicate that the depassivation of the defects by the holes actually occurs in three steps.In the first step,a hole is captured by the passivated defect,resulting in the stretching of the Si-H bond.In the second step,the defect captures one more hole,which may contribute to the breaking of the Si-H bond.The H atom is released as a proton and the Si atom is three-coordinated and positively charged.In the third step,an electron is captured by the Si atom,and the Si atom becomes neutral.In this step,a Pb-type defect is reactivated.

Passivation and dissociation of P_(b)-type defects at a-SiO_(2)/Si interface

It is well known that in the process of thermal oxidation of silicon,there are P_(b)-type defects at amorphous silicon dioxide/silicon(a-SiO_(2)/Si)interface due to strain.These defects have a very important impact on the performance and reliability of semiconductor devices.In the process of passivation,hydrogen is usually used to inactivate P_(b)-type defects by the reaction P_(b)+H_(2)→P_(b)H+H.At the same time,P_(b)H centers dissociate according to the chemical reaction P_(b)H→P_(b)+H.Therefore,it is of great significance to study the balance of the passivation and dissociation.In this work,the reaction mechanisms of passivation and dissociation of the P_(b)-type defects are investigated by first-principles calculations.The reaction rates of the passivation and dissociation are calculated by the climbing image-nudged elastic band(CI-NEB)method and harmonic transition state theory(HTST).By coupling the rate equations of the passivation and dissociation reactions,the equilibrium density ratio of the saturated interfacial dangling bonds and interfacial defects(P_(b),P_(b)0,and P_(b)1)at different temperatures is calculated.

Effect of Metallurgical Behaviour at the Interface between Ceramic and Interlayer on the Si_3N_4/1.25Cr-0.5Mo Steel Joint Strength

By using newly developed CuNi5~25Ti16~28 B rapldly solidifled brazing filler the joining of Si3 N4/1.25Cr-0.5Mo steel has been carried out with interlayer method. If employing the interlayer structure of steel (0.2 mm)/W (2.0 mm)/Ni(0.2 mm), the joint strength can be increased greatly compared with employing that of Ni/W/Ni, and the three point bend strength of the Joint shows the value of 261 MPa. The metallurgical behaviour at the interface between Si3N4 and the interlayer has been studied. It is found that Fe participated in the interfacial reactions between Si3N4 and the brazing filler at the Si3N4/steel (0.2 mm) interface and the compound Fe5Si3 was produced. However, since the reactions of Fe with the active Ti are weaker than those of Ni with Ti, the normal inter facial reactions were still assured at the interface of Si3N4/steel (0.2 mm) instead of Si3N4/Ni (0.2 mm), resulting in the improvement of the joint strength. The mechanism of the formation of Fe5Si3 is also discussed. Finally, some ideas to further ameliorate and simplify the interlayer structure are put forward.

Microstructure of interaction interface between Al-Si,Zn-Al alloys and Al_2O_(3p)/6061Al composite

Interaction behaviors between Al-Si, Zn-Al alloys and Al2O)3p)/6061Al composite at different heating temperatures were investigated. It is found that Al2O)3p)/6061Al composite can be wetted well by AlSi-1, AlSi-4 and Zn-Al alloys and an interaction layer forms between the alloy and composite during interaction. Little Al-Si alloys remain on the surface when they fully wet the composite and Si element in Al-Si alloy diffuses into composite entirely and assembles in the composite near the interface of Al-Si alloy/composite to form a Si-rich zone. The microstructure in interaction layer with Si penetration is still dense. Much more residual Zn-Al alloy exists on the surface of composite when it wets the composite, and porosities appear at the interface of Zn-Al alloy/composite. The penetration of elements Zn, Cu of Zn-Al alloy into composite leads to the generation of shrinkage cavities in the interaction layer and makes the microstructure of Al2O)3p)/6061Al composite loose.

电子辐照SiGe HBT和SiBJT的直流特性分析

研究了 1 MeV 不同剂量电子辐照前后 SiGe 异质结晶体管(HBT)的直流特性,并与 Si 双极晶体管(BJT)进行了比较。结果表明辐照后 SiGe HBT 的 IB基本不变,IC和β 都下降;随电子辐照剂量的增加,Ic和β 都减小。对 Si BJT 而言,IB和 IC与在相同辐照剂量辐照后的 SiGe HBT 相比都增大很多,β 下降幅度也很大。这说明 SiGe HBT 具有比 Si BJT 更好的抗辐照性能。对电子辐照后器件电学性能的变化机制进行了初步分析。

光化学气相淀积SiGe/Si材料的机制分析

本文对光化学气相淀积 Si Ge/Si过程中气相反应机制和表面反应历程进行了分析和讨论 .利用表面反应动力学的有关理论 ,结合光化学气相淀积的特点 ,推导出光化学气相淀积Si Ge/Si过程中的生长速率和生长压力的关系 .并给出该理论结果和实际实验结果的比较 .

太赫兹Si/SiGe量子级联激光器的能带设计

使用nextnano^3模拟软件计算Si／Si1-xGex／Si量子阱的能带结构，对Si／SiGe量子级联激光器有源区的能带结构进行设计，结果表明使用Ge组分为0．27～0．3，量子阱宽度为3nm的SiGe合金与垒宽为3nm的Si层构成对称应变级联异质结构，有利于优化THz Si／SiGe量子级联激光器结构。

新型SiGe/Si异质结开关功率二极管的特性分析及优化设计

将SiGe技术应用于功率半导体器件的特性改进 ,提出了新型SiGe/Si异质结p i n开关功率二极管结构 ,在分析器件结构机理的基础上 ,用Medici模拟了该器件的特性并进行了优化设计 .结果表明 ,该功率二极管具有低的正向压降 ,较少的存贮电荷 ,其性能远远超过Si的同类型结构 .这种性能的改进无需采用少子寿命控制技术 ,因而很容易集成于功率IC中 .

SiGe／Si量子阱结构材料的激子发光谱

在用分子束外延生长的ＳｉＧｅ／Ｓｉ多量子阱结构中，观察到激子发光光谱，从无声子参与的或ＴＯ－声子参与的激子发光峰位能量，计算了量子阱中合金的组份，并与通过Ｘ－射线衍射谱得到的结果作了比较，发现在Ｇｅ的组份比较小时，利用激子发光峰位能量确定合金组份比利用Ｘ－射线衍射谱更为方便和精确．

SiGe／Si异质结光电器件

SiGe／Si异质结光电器件及其光电集成(OEIC)是硅基光电研究的一个非常引人注目的领域。综述了SiGe／Si异质结材料的基本性质,SiGe／Si异质结光电器件的结构、性能、应用及其光电集成。重点介绍了SiGe／Si光电探测器及其与其他相关器件的集成。

Si/SiGe-OI应变异质结构的高分辨电子显微分析

为了研究失配应变的弛豫机理 ,利用高分辨电子显微镜 (HREM)对超高真空化学气相沉积 (U HVCVD) Si/Si Ge- OI材料横截面的完整形貌和不同层及各层之间界面区的高分辨晶格像进行观察 .发现此多层结构中存在 6 0°位错和堆垛层错 .结合 Matthews和 Blakeslee提出的临界厚度的模型和相关的研究结果对 6 0°位错组态的形成和存在原因进行了分析 .在具有帽层结构的 Si1 - x Gex 应变层靠近基体一侧的界面中仅存在单一位错 ,验证了

具有高电流增益-击穿电压优值的新型应变Si/SiGeHBT

为了改善器件的高压大电流处理能力,利用SILVACOTCAD建立了应变Si/SiGe HBT模型,分析了虚拟衬底设计对电流增益的影响.虚拟衬底可在保持基区-集电区界面应力不变的情况下实现基区Ge组分的高掺杂,进而增大电流增益.但器件的击穿电压仍然较低,不利于输出功率的提高和系统信噪比的改善.考虑到集电区设计对电流增益影响不大但与器件击穿电压密切相关,在采用虚拟衬底结构的同时,对器件的集电区进行选择性注入设计.该设计可在集电区引入横向电场,进而提高击穿电压.结果表明:与传统的SiGe HBT相比,新器件的电流增益和击穿电压均得到显著改善,其优值β·V_(CEO)。改善高达14.2倍,有效拓展了微波功率SiGe HBT的高压大电流工作范围.

一种新型n^-区多层渐变掺杂SiGe/Si功率开关二极管

n- 区掺杂浓度采用多层渐变式结构的p+ (SiGe) n- n+ 异质结功率二极管 ,对该新结构的反向恢复特性及正反向I -V特性进行了模拟 ,从器件运行机理上对模拟结果做出了详细的分析。与n- 区固定掺杂的普通p+ (SiGe) n- n+ 二极管相比 ,在正向压降基本不发生变化的前提下 ,渐变掺杂后的器件反向恢复时间可缩短一半 ,反向峰值电流能降低 33% ,反向恢复软度因子可提高 1 5倍。并且 ,随着n- 区渐变掺杂的层数增多 ,反向恢复特性越好。