An Electrostatic MEMS Actuator with Large Displacement Under Low Driving Voltage

A comb-drive actuator for lateral movement of over 100μm under low driving voltage is designed. Side stability is analyzed to improve the performance of the actuator. According to the analysis,a comb-drive actuator with small comb gap,high-stiffness-ratio prebent suspension beams, non-initial overlap, and linear-engaged-length comb teeth is proposed and the parameters of the actuator are derived. Experiments indicate that the actuator resonates at 573Hz with a Q factor of 35.88 and reaches a maximum displacement of over 100μm at a driving voltage of 7IV,which fulfills the design requirements and matches the analytical value to within 2.1%.

去杠杆:由虚拟经济转向实体经济的关键一役

以"去产能、去库存、去杠杆、降成本、补短板"为重点内容的供给侧结构性改革,经稳步推进取得了阶段性成效。在实体经济结构逐步优化,去产能、去库存有效进行的同时,各类资产价格却轮番出现大涨大跌的现象。文本从再平衡与信息技术革命导致传统制造业回报阶段性走弱,凯恩斯逆周期调控理论引发货币政策的"流动性陷阱",以及金融自由化单兵突进诱发制度套利三点阐述金融市场"脱实向虚"的原因,并提出在去杠杆过程中需要审慎处理的三大博弈风险和需要坚持的三大原则。我国要通过坚定不移的去杠杆创造稳健的金融市场,进一步深化供给侧结构性改革,确保我国经济稳中求进,以振兴实体经济,培育壮大新功能。