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Complicated calcified alloplastic implants in the nasal dorsum:A clinical analysis
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作者 Yong-Seon Hwang Taek-Kyun Kim +2 位作者 Dong-Jun Yang Si-Hyong Jang Da-Woon Lee 《World Journal of Clinical Cases》 SCIE 2024年第18期3351-3359,共9页
BACKGROUND In rhinoplasty,calcification around silicone implants is frequently observed in the tip dorsum(TD)area.Additionally,based on a review of various literature,it is presumed that calcification in silicone impl... BACKGROUND In rhinoplasty,calcification around silicone implants is frequently observed in the tip dorsum(TD)area.Additionally,based on a review of various literature,it is presumed that calcification in silicone implants occurs due to both inflammatory chemical reactions and physical friction against the tissue.The calcification of nasal silicone implants not only results in the functional loss of the implants,but also leads to material deformation.However,there is a lack of research on calcification of nasal silicone implants in the current literature.AIM To elucidate various clinical characteristics of calcification around nasal silicone implants,using histological and radiological analysis.METHODS This study analyzed data from 16 patients of calcified nasal implants,who underwent revision rhinoplasty for various reasons after undergoing augmentation rhinoplasty with silicone implants.The collected data included information on implant duration,implant types,location of calcification,presence of inflammatory reactions,and computed tomography(CT)scans.RESULTS The most common location of calcification,as visually analyzed,was in the TD area,accounting for 56%.Additionally,the analysis of CT scans revealed a trend of increasing Hounsfield Unit values for calcification with the duration of implantation,although this trend was not statistically significant(P=0.139).CONCLUSION Our study shows that reducing the frequency of calcification may be achievable by using softer silicone implants and by minimizing the damage to perioperative tissues. 展开更多
关键词 silicone implants RHINOPLASTY CALCIFICATION COMPLICATION Hounsfield unit
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Photoluminescence evolution in self-ion-implanted and annealed silicon 被引量:1
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作者 杨宇 王茺 +3 位作者 杨瑞东 李亮 熊飞 Bao Ji-Ming 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第11期4906-4911,共6页
Si^+ ion-implanted silicon wafers are annealed at different temperatures from room temperature to 950℃ and then characterized by using the photoluminescence (PL) technique at different recorded temperatures (RETs... Si^+ ion-implanted silicon wafers are annealed at different temperatures from room temperature to 950℃ and then characterized by using the photoluminescence (PL) technique at different recorded temperatures (RETs). Plentiful optical features are observed and identified clearly in these PL curves. The PL spectra of these samples annealed in different temperature ranges are correspondingly dominated by different emission peaks. Several characteristic features, such as an R line, S bands, a W line, the phonon-assistant WTA and SiTO peaks, can be detected in the PL spectra of samples annealed at different temperatures. For the samples annealed at 800℃, emission peaks from the dislocations bounded at the deep energy levels of the forbidden band, such as D1 and D2 bands, can be observed at a temperature as high as 280 K. These data strongly indicate that a severe transformation of defect structures could be manipulated by the annealing and recorded temperatures. The deactivation energies of the main optical features are extracted from the PL data at different temperatures. 展开更多
关键词 PHOTOLUMINESCENCE silicon self-ion-implanted defects
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Dopant Implantation into the Silicon Substrate with Non-Planar Surface 被引量:1
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作者 Gennady A. Tarnavsky Evgenii V. Vorozhtsov 《Energy and Power Engineering》 2010年第2期73-77,共5页
The influence of technological process parameters (aiming angle and implantation energy) on the distributions of dopant concentrations in a silicon substrate is investigated by computer modeling.
关键词 Computer Modeling silicon DOPING implantATION DONOR ACCEPTOR DOPANTS
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Improvement of total-dose irradiation hardness of silicon-on-insulator materials by modifying the buried oxide layer with ion implantation 被引量:1
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作者 张恩霞 钱聪 +8 位作者 张正选 林成鲁 王曦 王英民 王晓荷 赵桂茹 恩云飞 罗宏伟 师谦 《Chinese Physics B》 SCIE EI CAS CSCD 2006年第4期792-797,共6页
The hardening of the buried oxide (BOX) layer of separation by implanted oxygen (SIMOX) silicon-on-insulator (SOI) wafers against total-dose irradiation was investigated by implanting ions into the BOX layers. T... The hardening of the buried oxide (BOX) layer of separation by implanted oxygen (SIMOX) silicon-on-insulator (SOI) wafers against total-dose irradiation was investigated by implanting ions into the BOX layers. The tolerance to total-dose irradiation of the BOX layers was characterized by the comparison of the transfer characteristics of SOI NMOS transistors before and after irradiation to a total dose of 2.7 Mrad(SiO2). The experimental results show that the implantation of silicon ions into the BOX layer can improve the tolerance of the BOX layers to total-dose irradiation. The investigation of the mechanism of the improvement suggests that the deep electron traps introduced by silicon implantation play an important role in the remarkable improvement in radiation hardness of SIMOX SOI wafers. 展开更多
关键词 separation-by-implanted-oxygen silicon-ON-INSULATOR total-dose irradiation effect ion implantation
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Study on the defect-related emissions in the light self-ion-implanted Si films by a silicon-on-insulator structure 被引量:3
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作者 王茺 杨宇 +2 位作者 杨瑞东 李亮 熊飞 《Chinese Physics B》 SCIE EI CAS CSCD 2011年第2期395-401,共7页
This paper reports that the Si+ self-ion-implantation are conducted on the silicon-on-insulator wafers with the 2SSi+ doses of 7 ×1012, 1 × 1013, 4 × 1013, and 3× 1014 cm-2, respectively. After t... This paper reports that the Si+ self-ion-implantation are conducted on the silicon-on-insulator wafers with the 2SSi+ doses of 7 ×1012, 1 × 1013, 4 × 1013, and 3× 1014 cm-2, respectively. After the suitable annealing, these samples are characterized by using the photoluminescence technique at different recorded temperatures. Plentiful emission peaks are observed in these implanted silicon-on-insulator samples, including the unwonted intense P~ band which exhibits a great potential in the optoelectronic application. These results indicate that severe transformation of the interstitial clusters can be manipulated by the implanting dose at suitable annealing temperatures. The high critical temperatures for the photoluminescence intensity growth of the two signatures are well discussed based on the thermal ionization model of free exciton. 展开更多
关键词 self-ion-implantation PHOTOLUMINESCENCE interstitial cluster silicon-ON-INSULATOR
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Thermal annealing induced photocarrier radiometry enhancement for ion implanted silicon wafers 被引量:1
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作者 刘显明 李斌成 黄秋萍 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第9期519-524,共6页
An experimental study on the photocarrier radiometry signals of As^+ ion implanted silicon wafers before and after rapid thermal annealing is performed. The dependences of photocarrier radiometry amplitude on ion imp... An experimental study on the photocarrier radiometry signals of As^+ ion implanted silicon wafers before and after rapid thermal annealing is performed. The dependences of photocarrier radiometry amplitude on ion implantation dose (1×10^11-1×10^16/cm^2), implantation energy (20-140 keV) and subsequent isochronical annealing temperature (500- 1100℃ are investigated. The results show that photocarrier radiometry signals are greatly enhanced for implanted samples annealed at high temperature, especially for those with a high implantation dose. The reduced surface recombination rate resulting from a high built-in electric field generated by annealing-activated impurities in the pn junction is believed to be responsible for the photocarrier radiometry signal enhancement. Photocarrier radiometry is contactless and can therefore be used as an effective in-line tool for the thermal annealing process monitoring of the ion-implanted wafers in semiconductor industries. 展开更多
关键词 photocarrier radiometry ion implantation thermal annealing silicon
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Influence of nitrogen implantation into the buried oxide on the radiation hardness of silicon-on-insulator wafers 被引量:1
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作者 唐海马 郑中山 +3 位作者 张恩霞 于芳 李宁 王宁娟 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第10期380-385,共6页
In order to improve the total-dose radiation hardness of the buried oxide of separation by implanted oxygen silicon- on-insulator wafers, nitrogen ions were implanted into the buried oxide with a dose of 1016 cm-2, an... In order to improve the total-dose radiation hardness of the buried oxide of separation by implanted oxygen silicon- on-insulator wafers, nitrogen ions were implanted into the buried oxide with a dose of 1016 cm-2, and subsequent annealing was performed at 1100 ℃. The effect of annealing time on the radiation hardness of the nitrogen implanted wafers has been studied by the high frequency capacitance-voltage technique. The results suggest that the improvement of the radiation hardness of the wafers can be achieved through a shorter time annealing after nitrogen implantation. The nitrogen-implanted sample with the shortest annealing time 0.5 h shows the highest tolerance to total-dose radiation. In particular, for the 1.0 and 1.5 h annealing samples, both total dose responses were unusual. After 300-krad(Si) irradiation, both the shifts of capacitance-voltage curve reached a maximum, respectively, and then decreased with increasing total dose. In addition, the wafers were analysed by the Fourier transform infrared spectroscopy technique, and some useful results have been obtained. 展开更多
关键词 silicon-on-insulator wafers radiation hardness nitrogen implantation
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An Impact of Different Silicone Breast Implants on the Bacterial Attachment and Growth
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作者 Sun Young Nam Xinrui Zhang +3 位作者 Omar Faruq Pham Ngoc Chien Nilsu Dönmez Chan Yeong Heo 《Journal of Biomaterials and Nanobiotechnology》 2021年第3期21-33,共13页
Bacterial biofilms have been implicated with breast implant complications including capsular contracture, double-capsule formation, and breast implant-associated anaplastic large cell lymphoma. However, the relationsh... Bacterial biofilms have been implicated with breast implant complications including capsular contracture, double-capsule formation, and breast implant-associated anaplastic large cell lymphoma. However, the relationship between implant surface texture and microbial biofilm formation is insufficiently evaluated. In the present study, we examined the antimicrobial activities of different types of silicone breast implant. The growth of bacterial including <em>Staphylococcus aureus</em>, <em>Staphylococcus epidermidis</em>, and <em>Pseudomonas aeruginosa</em> was compared using implants with various surface textures, including Hans Smooth, Hans SmoothFine, Allergan Smooth, Eurosilicone Smooth, Eurosilicone Texture, Sebbin Smooth, Sebbin Micro, Sebbin Texture, and Motiva Smooth. Microbial investigation revealed the increased growth of <em>S. aureus</em> on breast implants after 48 h, except Eurosilicone Smooth, Eurosilicone Texture, Hans SmoothFine and Sebbin Smooth material. At 48 hours, there was no major difference between the <em>S. aureus</em> attachment on smooth and textured implants. The results of <em>S. epidermis</em> attachment on the implant after 48 h showed that their growth decreased on surfaces of Motiva Smooth, Sebbin Smooth, and Eurosilicone Smooth. These results indicated that <em>S. epidermis</em> was unable to survive on these breast implants. Eventually, <em>P. aeruginosa</em> count had showed decrease of bacterial count after 48 hours compared to 24 hours in most of the implants except for Eurosilicone Texture, Sebbin Smooth and Sebbin Micro, where the count of <em>P. aeruginosa</em> slightly increased. This indicated that <em>P. aeruginosa</em> was unable to exist on the smooth surfaces. Our results show that the in vitro assay revealed no significant difference between smooth and textured surfaces and showed variable interactions and needed further molecular analysis to assess their adherence nature. 展开更多
关键词 silicone implants Surface Texture BIOFILM Staphylococcus epidermidis Staphylococcus aureus Pseudomonas aeruginosa Bacterial Attachment
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Surgical Treatment of Penile Deformity Due to Curvature Using a Subcutaneous Soft Silicone Implant: Case Report
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作者 James J. Elist Vaheh Shirvanian Gottfried Lemperle 《Open Journal of Urology》 2014年第7期91-97,共7页
Introduction: Congenital and acquired penile curvature has a negative impact on penile aesthetics, sexual capabilities, and male psychology. Surgical procedures yield satisfactory correction of curvature, but are usua... Introduction: Congenital and acquired penile curvature has a negative impact on penile aesthetics, sexual capabilities, and male psychology. Surgical procedures yield satisfactory correction of curvature, but are usually associated with penile shortening and palpable suture material and nodules under the skin, resulting in patient dissatisfaction. Aims: To present a novel technique using a subcutaneous soft silicone implant for surgical treatment of penile soft tissue deformities with curvature, with prevention of surgery-associated penile shortening and subcutaneous “bumps”, and with additional gains in overall penile length and girth. Method: 3 patients who complained about congenital, post-traumatic, and post-penile surgery associated penile curvature, with concerns about their penile aesthetics and associated negative psychosocial effects, were treated with the insertion of a subcutaneous soft silicone penile implant. Results: During a follow up period of 2 - 12 months (mean: 6.7 ± 3.6 months) all three patients expressed objective and subjective satisfaction regarding the corrective results of the surgery. Penile length and girth measurements during follow-up showed a mean increase in length of 4.3 cm (±1.4 cm) and a mean increase in girth of 3.0 cm (±1.0 cm). Conclusion: The insertion of the subcutaneous soft silicone implant in addition to corporeal fibrotic tissue removal in patients with congenital or acquired penile curvature is an effective option that provides the patient with aesthetic improvements by correcting penile deviation, preventing post-surgical subcutaneous nodule formation that results from the technique and suture material used, and adding penile length and girth. Further prospective studies are required to validate our initial experience. 展开更多
关键词 PENILE CURVATURE Peyronie’s Disease PENILE Prosthesis PENILE Shortening PENILE Length PENILE Girth PENILE Augmentation SUBCUTANEOUS SOFT siliconE implant Elist siliconE implant
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Realization of conformal doping on multicrystalline silicon solar cells and black silicon solar cells by plasma immersion ion implantation 被引量:1
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作者 沈泽南 夏洋 +3 位作者 刘邦武 刘金虎 李超波 李勇滔 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第11期661-665,共5页
Emitted multi-crystalline silicon and black silicon solar cells are conformal doped by ion implantation using the plasma immersion ion implantation (PⅢ) technique. The non-uniformity of emitter doping is lower than... Emitted multi-crystalline silicon and black silicon solar cells are conformal doped by ion implantation using the plasma immersion ion implantation (PⅢ) technique. The non-uniformity of emitter doping is lower than 5 %. The secondary ion mass spectrometer profile indicates that the PⅢ technique obtained 100-rim shallow emitter and the emitter depth could be impelled by furnace annealing to 220 nm and 330 nm at 850 ℃ with one and two hours, respectively. Furnace annealing at 850 ℃ could effectively electrically activate the dopants in the silicon. The efficiency of the black silicon solar cell is 14.84% higher than that of the mc-silicon solar cell due to more incident light being absorbed. 展开更多
关键词 solar cells plasma immersion ion implantation conformal doping black silicon
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Granulomatous Inflammatory Reaction in Breast Silicone Implants
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作者 Tammaro A. Giulianelli V. +5 位作者 NarcisiA. Abruzzese C. Cortesi G. Parisella F.R. Persechino S. Grippaudo F.R. 《Journal of Life Sciences》 2014年第6期558-562,共5页
Introduction: breast implants have been used to correct the size and the form of a breast in post-mastectomy breast reconstruction, for correcting congenital defects and deformities or for purely aesthetic breast aug... Introduction: breast implants have been used to correct the size and the form of a breast in post-mastectomy breast reconstruction, for correcting congenital defects and deformities or for purely aesthetic breast augmentation. Silicone breast implants were introduced in the 1960s. They are non without complications, like rupture is or silicone gel bleeding. Materials and methods: the authors present the case of 50 patients, aged 45-55, who presented to our attention after 15 (+ 5) years of the application of silicone breast implant for the appearance of lumps under the skin in the armpit area. These were palpable, painless except on palpation. The patients reported burning in the affected area, but no other symptoms. Results: considering the presence in each of them of silicone implants, and assuming a possible allergic basis, the authors performed a patch test series S1DAPA produced by F.I.R.M.A Spa, Firenze, ultrasound and MR and blood tests. In all patients the allergy test (patch test) were negative, ultrasound and MR have shown that no hearing was damaged or broken. Blood test showed no abnormalities. Discussion: comparing the authors' study with other similar works in the literature, they noted that the reported cases of hypersensitivity type 4 silicone prosthesis was not only initially accompanied by specific symptoms such as urticaria and blistering, but mostly it was found to be a net positive patch test. The absence of urticaria, the low values of lgE and total negativity of patch test confirmed the purely inflammatory nature of the lesions in our patients. 展开更多
关键词 silicone breast implant INFLAMMATION siliconoma patch test.
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Repeated Hemorrhage after Repair of Orbital Floor Fracture with a Silicone Implant
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作者 Hirohiko Kakizaki Akihiro Ichinose +3 位作者 Yasuhiro Takahashi Nobutada Katori Alejandra A. Valenzuela Masayoshi Iwaki 《Surgical Science》 2011年第8期414-417,共4页
A 16-year-old girl was accidentally kicked in her right eye by her cheerleading teammate in an exercise. Upward gaze ability of her right eye was severely impaired and computed tomography (CT) showed a trapdoor fractu... A 16-year-old girl was accidentally kicked in her right eye by her cheerleading teammate in an exercise. Upward gaze ability of her right eye was severely impaired and computed tomography (CT) showed a trapdoor fracture of the right orbital floor. After surgical exploration, a silicone implant was inserted. No bleeding was confirmed at this time. The next day, CT detected a hematoma on the right orbital floor. The hematoma was drained and meticulous cautery was used to control any potential bleeding. The same silicone implant was re-inserted. Irrespective of attempts to avoid hemorrhage, this occurred twice after the respective evacuations. During a fourth operation, we removed the silicone implant simultaneously with hematoma evacuation. No hematoma has occurred since, and the patient’s ocular movement has dramatically improved to a normal binocular single vision field. When repeated hemorrhages occur after an orbital floor fracture repair with insertion of a silicone implant, removal of the implant is an effective strategy to resolve the hemorrhage. 展开更多
关键词 TRAPDOOR Fracture ORBITAL Floor siliconE implant HEMATOMA HEMORRHAGE Removal
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Damage Enhancement Effect in Silicon Implanted With Molecular Ions
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作者 林成鲁 杨根庆 +4 位作者 方子韦 李晓勤 邹世昌 J.Gyulai R.G.Elliman 《Science China Mathematics》 SCIE 1993年第2期235-242,共8页
This paper reports a comparison between the two kinds of damage behavior in silicon implanted with P_2^+ molecular ions and P^+ atomic ions. The dependence of damage enhancement effect of P_2^+ implanted silicon on io... This paper reports a comparison between the two kinds of damage behavior in silicon implanted with P_2^+ molecular ions and P^+ atomic ions. The dependence of damage enhancement effect of P_2^+ implanted silicon on ion doses, energies and target temperatures, and their annealing behavior in subsequent thermal anneal process are investigated systematically. A multiple collision model has been developed to elucidate the mechanism of the damage enhancement effect. 展开更多
关键词 silicon MOLECULAR ION implantATION DAMAGE enhancement.
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Total dose radiation response of modified commercial silicon-on-insulator materials with nitrogen implanted buried oxide 被引量:2
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作者 郑中山 刘忠立 +1 位作者 于芳 李宁 《Chinese Physics B》 SCIE EI CAS CSCD 2012年第11期361-366,共6页
Nitrogen ions of various doses are implanted into the buried oxide (BOX) of commercial silicon-on-insulator (SOI) materials, and subsequent annealings are carried out at various temperatures. The total dose radiat... Nitrogen ions of various doses are implanted into the buried oxide (BOX) of commercial silicon-on-insulator (SOI) materials, and subsequent annealings are carried out at various temperatures. The total dose radiation responses of the nitrogen-implanted SOI wafers are characterized by the high frequency capacitance-voltage (C-V) technique after irradi- ation using a Co-60 source. It is found that there exist relatively complex relationships between the radiation hardness of the nitrogen implanted BOX and the nitrogen implantation dose at different irradiation doses. The experimental results also suggest that a lower dose nitrogen implantation and a higher post-implantation annealing temperature are suitable for improving the radiation hardness of SOI wafer. Based on the measured C V data, secondary ion mass spectrometry (SIMS), and Fourier transform infrared (FTIR) spectroscopy, the total dose responses of the nitrogen-implanted SOI wafers are discussed. 展开更多
关键词 silicon-ON-INSULATOR total dose radiation hardness nitrogen implantation
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Trocar opening: silicone oil removal with phacoemulsification and intraocular lens implantation 被引量:1
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作者 Xu Zhang Ya-Jie Pan Zheng-Yu Song 《International Journal of Ophthalmology(English edition)》 SCIE CAS 2019年第11期1720-1724,共5页
AIM: To evaluate the efficacy and safety of a modified technique [trocar opening(TO)] for silicone oil removal(SOR) in combination with phacoemulsification and intraocular lens(IOL) implantation.METHODS: A total of 60... AIM: To evaluate the efficacy and safety of a modified technique [trocar opening(TO)] for silicone oil removal(SOR) in combination with phacoemulsification and intraocular lens(IOL) implantation.METHODS: A total of 60 eyes of 60 patients with cataract and silicone oil-filled eyes were enrolled in this study. The patients were divided into two groups: the patients in the control group underwent 23-gauge pars plana active SOR surgery with phacoemulsification and IOL implantation, while the patients in the TO group underwent TO methods during surgery. Best corrected visual acuity(BCVA), surgery time, intraocular pressure, and operative complications were observed 6 mo after surgery.RESULTS: There was no significant difference between the two groups in terms of age, gender, preoperative, intraocular pressure, or time of silicone oil stay. Prior to surgery, the mean BCVA for the control and TO groups was 1.34±0.44 and 1.36±0.42. At 6 mo following surgery, the mean BCVA improved to 0.74±0.36 and 0.77±0.32, respectively(P<0.001). There was no significant difference between the two groups. The mean SOR time was 6.9±2.3 min and 4.8±1.2 min in the control and TO groups(P=0.008). The total operation time was 28.2±8.5 min and 24.6±6.4 min, respectively(P=0.035). Posterior capsule rupture occurred in four eyes of control and none of TO group(P<0.01). Late recurrent retinal detachment occurred in one eye in the control group(2 mo after surgery) and in one eye in the TO group(4 mo after surgery). CONCLUSION: TO is a simple, effective, time-saving, and safe method for SOR combined with phacoemulsification and IOL implantation. 展开更多
关键词 INTRAOCULAR lens implantation PHACOEMULSIFICATION POSTERIOR CAPSULE rupture siliconE oil removal
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Study of the lateral distribution of neodymium ions implanted in silicon
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作者 秦希峰 李洪珍 +4 位作者 李双 梁毅 王凤翔 付刚 季艳菊 《Chinese Physics B》 SCIE EI CAS CSCD 2011年第8期293-296,共4页
Due to the need to reduce electronic device sizes, it is very important to consider the depth and lateral distribution of ions implanted into a crystalline target. This paper reports that Nd ions with energies of 200 ... Due to the need to reduce electronic device sizes, it is very important to consider the depth and lateral distribution of ions implanted into a crystalline target. This paper reports that Nd ions with energies of 200 keV to 500 keV and dose of 5× 10^15 ions/cm2 are implanted into Si single crystals at room temperature under the angles of 0°, 30°, and 45°, respectively. The lateral spreads of 200 keV-500 keV Nd ions implanted in Si sample are measured by Rutherford backscattering technique. The results show that the measured values are in good agreement with those obtained from the prediction of SRIM2010 codes. 展开更多
关键词 Nd ion implantation silicon lateral distribution Rutherford backscattering technique
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Investigation of the lateral spread of erbium ions implanted in silicon crystal
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作者 秦希峰 陈明 +2 位作者 王雪林 梁毅 张少梅 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第11期336-339,共4页
The erbium ions at energy of 400 keV and dose of 5× 10^15 ions/cm^2 were implanted into silicon single crystals at room temperature at the angles of 0°,45° and 60°. The lateral spread of 400 keV er... The erbium ions at energy of 400 keV and dose of 5× 10^15 ions/cm^2 were implanted into silicon single crystals at room temperature at the angles of 0°,45° and 60°. The lateral spread of 400 keV erbium ions implanted in silicon sample was measured by the Rutherford backscattering technique. The results show that the measured values were in good agreement with those obtained from the prediction of TRIM'98 (Transport of Ions in Matter) and SRIM2006 (Stopping and Range of Ions in Matter) codes. 展开更多
关键词 erbium ion implantation silicon Rutherford backscattering technique lateral spread
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Characteristics of Si^+/B^+ dual implanted silicon wafers
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作者 周继承 黄伯云 《中国有色金属学会会刊:英文版》 CSCD 2001年第5期753-755,共3页
Thin p + layers with good electrical properties were fabricated by RTA (rapid thermal annealing) with post FA (furance annealing) of Si +/B + dual implanted silicon wafers. The electrical and structural characteristic... Thin p + layers with good electrical properties were fabricated by RTA (rapid thermal annealing) with post FA (furance annealing) of Si +/B + dual implanted silicon wafers. The electrical and structural characteristics of thin p + layers have been measured by FPP (four point probe), SRP (spreading resistance probe), RBS/channelling. Optimizing the implantation and annealing processes, especially using the thermal cycle of RTA followed by FA, shallow p +n junctions can be fabricated, which shows excellent I V characteristics with revers bias leakage current densities of 1.8?nA/cm 2 at -1.4?V. 展开更多
关键词 rapid thermal annealing dual ion implantation silicon thin p + layers
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Surface bioactivity of plasma implanted silicon and amorphous carbon
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作者 Paul KCHU 《Nuclear Science and Techniques》 SCIE CAS CSCD 2004年第3期144-154,共11页
Plasma immersion ion implantation and deposition (PIII&D) has been shown to be an effective tech- nique to enhance the surface bioactivity of materials. In this paper, recent progress made in our laboratory on pla... Plasma immersion ion implantation and deposition (PIII&D) has been shown to be an effective tech- nique to enhance the surface bioactivity of materials. In this paper, recent progress made in our laboratory on plasma surface modification single-crystal silicon and amorphous carbon is reviewed. Silicon is the most important material in the integrated circuit industry but its surface biocompatibility has not been investigated in details. We have re- cently performed hydrogen PIII into silicon and observed the biomimetic growth of apatite on its surface in simulated body fluid. Diamond-like carbon (DLC) is widely used in the industry due to its excellent mechanical properties and chemical inertness. The use of this material in biomedical engineering has also attracted much attention. It has been observed in our laboratory that doping DLC with nitrogen by means of PIII can improve the surface blood compati- bility. The properties as well as in vitro biological test results will be discussed in this article. 展开更多
关键词 表面生物活性 等离子体 非晶体碳 类金刚石碳 单晶硅
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Combined frequency- and time-domain photocarrier radiometry characterization of ion-implanted and thermally annealed silicon wafers
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作者 任胜东 李斌成 +1 位作者 高丽峰 王谦 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第5期462-466,共5页
A combined frequency-swept and quasi-time-domain photocarrier radiometry (PCR) technique was developed to characterize thermally annealed silicon wafers with B+, P+, and As+ ion implantation at doses ranging from... A combined frequency-swept and quasi-time-domain photocarrier radiometry (PCR) technique was developed to characterize thermally annealed silicon wafers with B+, P+, and As+ ion implantation at doses ranging from 1 ×1011 cm-2 to 1 ×1016 cm-2. The implantation dose dependence of the PCR amplitude, the frequency dependencies of the PCR amplitude and phase, as well as the quasi-time-domain PCR waveforms were simultaneously employed to analyze all the ion-implanted silicon samples. The dependence of the effective lifetime on the implantation dose has been investigated and shown to be related to the trap density and the lifetime extracted from the transient PCR signals. 展开更多
关键词 photocarrier radiometry ion implantation effective lifetime silicon
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