In integrated circuit-grade single silicon Czochralski growth, the position and material of heat shield are main parameters affecting the heat exchange and crystal growth condition. By optimizing the above parameters,...In integrated circuit-grade single silicon Czochralski growth, the position and material of heat shield are main parameters affecting the heat exchange and crystal growth condition. By optimizing the above parameters, we attempted to increase the growth rate and crystal quality. Numerical simulation proved to verify the results before and after optimization. Through analyses of the temperature and microdefect distribution, it is found that the optimized heat shield can further increase the pulling rate and decrease the melt/crystal interface deflection, increase the average velocity of argon flow from ~2 to ~5 m·s-1, which is in favor of the transportation of SiO, and obtain the low defects concentration crystal and that the average temperature along the melt-free surface is 8 °C higher than before avoiding supercooled melt effectively. ? The Nonferrous Metals Society of China and Springer-Verlag Berlin Heidelberg 2012.展开更多
Simultaneous thermal analysis(STA) was used to investigate the effects of silicon content on the oxidation kinetics of silicon-containing steels under an atmosphere and heating procedures similar to those used in in...Simultaneous thermal analysis(STA) was used to investigate the effects of silicon content on the oxidation kinetics of silicon-containing steels under an atmosphere and heating procedures similar to those used in industrial reheating furnaces for the production of hot-rolled strips. Our results show that when the heating temperature was greater than the melting point of Fe2SiO4, the oxidation rates of steels with different silicon contents were the same; the total mass gain decreased with increasing silicon content, whereas it increased with increasing oxygen content. The oxidation rates for steels with different silicon contents were constant with respect to time under isothermal conditions. In addition, the starting oxidation temperature, the intense oxidation temperature, and the finishing oxidation temperature increased with increasing silicon content; the intense oxidation temperature had no correlation with the melting of Fe2SiO4. Moreover, the silicon distributed in two forms: as Fe2SiO4 at the interface between the innermost layer of oxide scale and the iron matrix, and as particles containing silicon in grains and grain boundaries in the iron matrix.展开更多
We present a study on the single event transient (SET) induced by a pulsed laser in different silicon-germanium (SiGe) heterojunction bipolar transistors (HBTs) with the structure of local oxidation of silicon ...We present a study on the single event transient (SET) induced by a pulsed laser in different silicon-germanium (SiGe) heterojunction bipolar transistors (HBTs) with the structure of local oxidation of silicon (LOCOS) and deep trench isolation (DTI). The experimental results are discussed in detail and it is demonstrated that a SiGe HBT with the structure of LOCOS is more sensitive than the DTI SiGe HBT in the SET. Because of the limitation of the DTI structure, the charge collection of diffusion in the DTI SiGe HBT is less than that of the LOCOS SiGe HBT. The SET sensitive area of the LOCOS SiGe HBT is located in the eollector-substrate (C/S) junction, while the sensitive area of the DTI SiGe HBT is located near to the collector electrodes.展开更多
Nafion/Silicon oxide composite membranes were produced via in situ sol-gel reaction of tetraethylorthosilicate (TEOS) in Nafion membranes. The physicochemical properties of the membranes were studied by FT-IR,TG-DSC...Nafion/Silicon oxide composite membranes were produced via in situ sol-gel reaction of tetraethylorthosilicate (TEOS) in Nafion membranes. The physicochemical properties of the membranes were studied by FT-IR,TG-DSC and tensile strength. The results show that the silicon oxide is compatible with the Nation membrane and the thermo stability of Nation/Silicon oxide composite membrane is higher than that of Nation membrane. Furthermore, the tensile strength of Nation/Silicon oxide composite membrane is similar to that of the Nation membrane. The proton conductivity of Nation/Silicon oxide composite membrane is higher than that of Nation membrane. When the Nation/Silicon oxide composite membrane was employed as an electrolyte in H2/O2 PEMFC, a higher current density value (1 000 mA/cm^2 at 0.38 V) than that of the Nafion1135 membrane (100 mA/cm^2 at 0.04 V) was obtained at 110 ℃.展开更多
The surface oxidation of silicon (Si) wafers by atomic oxygen radical anions (O- anions) and the preparation of metal-oxide-semiconductor (MOS) capacitors on the O-oxidized Si substrates have been examined for t...The surface oxidation of silicon (Si) wafers by atomic oxygen radical anions (O- anions) and the preparation of metal-oxide-semiconductor (MOS) capacitors on the O-oxidized Si substrates have been examined for the first time. The O- anions are generated from a recently developed O- storage-emission material of [Ca24Al2sO64]^4+·4O^- (Cl2A7-O^- for short). After it has been irradiated by an O- anion bean: (0.5 μA/cm^2) at 300℃ for 1-10 hours, the Si wafer achieves an oxide layer with a thickness ranging from 8 to 32 nm. X-ray photoelectron spectroscopy (XPS) results reveal that the oxide layer is of a mixture of SiO2, Si2 O3, and Si2O distributed in different oxidation depths. The features of the MOS capacitor of 〈Al electrode/SiOx/Si〉 are investigated by measuring capacitance-voltage (C - V) and current-voltage (I - V) curves. The oxide charge density is about 6.0 × 10^1 cm^-2 derived from the (C - V curves. The leakage current density is in the order of 10^-6 A/cm^2 below 4 MV/cm, obtained from the I - V curves. The O- anions formed by present method would have potential applications to the oxidation and the surface-modification of materials together with the preparation of semiconductor devices.展开更多
In this work, n-type amorphous silicon oxide thin films were deposited by RF-PECVD method using a gas mixture of SiH4, CO2, H2, and PHy The deposition rate, refractive index, band gap, crystalline volume fraction, and...In this work, n-type amorphous silicon oxide thin films were deposited by RF-PECVD method using a gas mixture of SiH4, CO2, H2, and PHy The deposition rate, refractive index, band gap, crystalline volume fraction, and conductivity of the silicon oxide thin films were determined and analyzed. The film with refractive index of 1.99, band gap of 2.6eV and conductivity of 10-7 S/cm was obtained, which was suitable for the intermediate reflector layer.展开更多
Photoluminescence (PL) characteristics of Tb-doped silicon rich oxide (SRO) films prepared by DC-sputtering and post-annealing processes were studied. The silicon richness of the SRO film could be controlled by va...Photoluminescence (PL) characteristics of Tb-doped silicon rich oxide (SRO) films prepared by DC-sputtering and post-annealing processes were studied. The silicon richness of the SRO film could be controlled by varying the sputtering power and oxygen concentration in the sputtering chamber. PL emission from the as-deposited sample was found to be composed of Th^3 + intra 4f transition-related emission and the silicon nano particle-related broad bandwidth emission. Thermal annealing could significantly improve the material properties as well as the PL signals. PL properties depended strongly upon the annealing scheme and silicon richness. Annealing at high temperatures (900- 1050℃) enhanced Tbrelated emission and suppressed the silicon nano particle-related emission. For samples with different silicon richness, annealing at 950 ℃ was found to produce higher PL signals than at other temperatures. It was attributed more to lifetime quenching than to concentration quenching. Electroluminescent (EL) devices with a capacitor structure were fabricated, the optimized process condition for the EL device was found to be different from that of PL emission. Among the annealing schemes that were used, wet oxidation was found to improve device performance the most, whereas, dry oxidation was found to improve material property the most. Wet oxidation allowed the breakdown electrical field to increase significantly and to reach above 10 mV·cm^-1. The EL spectra showed a typical Th^3+ emission, agreeing well with the PL spectra. The I-V measurements indicated that for 100 nm thick film, the Fowler-Nordheim tunneling started at an electrical field of around 6 mV·cm^-1 and the light emission became detectable at a current density of around 10-4 A·cm^-2 and higher. Strong electroluminescence light emission was detected when the electrical field was close to 10 mV·cm^-1.展开更多
Anovel silicon containing carbon precursor was synthesised by reacting a petroleum pitchfraction and polydimethylsilane. The precursor containing about 26wt% Si was meltspunintofibresand then oxidativelystabilised in...Anovel silicon containing carbon precursor was synthesised by reacting a petroleum pitchfraction and polydimethylsilane. The precursor containing about 26wt% Si was meltspunintofibresand then oxidativelystabilised in airto renderthefibresinfusiblebefore pyrolysisat1200℃underinertatmospheretoproduceC Sialloy( CSA) fibres. Theextentofstabili sation wasfoundto becriticalto the development of mechanicalstrength of thefibres which varied with heattreatmenttemperature, showing a maximum at 1200 ℃when thestrength was 1 4 1 6 GPa. Thesestrengthsareremarkably goodconsideringthelow modulus whichis duetothe quite high failurestrains. Thefibrescanshow excellentresistanceto oxidation if given an initialshortexposureto oxygen athigh temperature duetotheformation of an im perceptiblelayer of silica. CSAfibreshavethe advantagesof both carbon fibresand SiCfi bres,thusextended application areascan beenvisaged .展开更多
The stability of the photoluminescence (PS) has evidently improvedby HNO3 chemical oxidation The PL intensity and peak wavelength of PS were changed with theHNO3 of HNO3 concentration and oxidation time. Being diff...The stability of the photoluminescence (PS) has evidently improvedby HNO3 chemical oxidation The PL intensity and peak wavelength of PS were changed with theHNO3 of HNO3 concentration and oxidation time. Being different from other oxidation time. Being different from other oxidized ways, the PSoxidized by HNO3 remains remains sensitive to adsorbates. FTTR spectroscopic data suggest that these phenomena are attributed to the presence of HSi(SiaO30a)(a≤3)layer on PS surface.展开更多
Experiments and simulation studies on 283 MeV I ion induced single event effects of silicon carbide(SiC) metal–oxide–semiconductor field-effect transistors(MOSFETs) were carried out. When the cumulative irradiation ...Experiments and simulation studies on 283 MeV I ion induced single event effects of silicon carbide(SiC) metal–oxide–semiconductor field-effect transistors(MOSFETs) were carried out. When the cumulative irradiation fluence of the SiC MOSFET reached 5×10^(6)ion·cm^(-2), the drain–gate channel current increased under 200 V drain voltage, the drain–gate channel current and the drain–source channel current increased under 350 V drain voltage. The device occurred single event burnout under 800 V drain voltage, resulting in a complete loss of breakdown voltage. Combined with emission microscope, scanning electron microscope and focused ion beam analysis, the device with increased drain–gate channel current and drain–source channel current was found to have drain–gate channel current leakage point and local source metal melt, and the device with single event burnout was found to have local melting of its gate, source, epitaxial layer and substrate. Combining with Monte Carlo simulation and TCAD electrothermal simulation, it was found that the initial area of single event burnout might occur at the source–gate corner or the substrate–epitaxial interface, electric field and current density both affected the lattice temperature peak. The excessive lattice temperature during the irradiation process appeared at the local source contact, which led to the drain–source channel damage. And the excessive electric field appeared in the gate oxide layer, resulting in drain–gate channel damage.展开更多
Severe mechanical fractu re and unstable interphase,associated with the large volumetric expansion/contraction,significantly hinder the application of high-capacity SiO_(x)materials in lithium-ion batteries.Herein,we ...Severe mechanical fractu re and unstable interphase,associated with the large volumetric expansion/contraction,significantly hinder the application of high-capacity SiO_(x)materials in lithium-ion batteries.Herein,we report the design and facile synthesis of a layer stacked SiO_(x)microparticle(LS-SiO_(x))material,which presents a stacking structure of SiO_(x)layers with abundant disconnected interstices.This LS-SiO_(x)microparticle can effectively accommodate the volume expansion,while ensuring negligible particle expansion.More importantly,the interstices within SiO_(x)microparticle are disconnected from each other,which efficiently prevent the electrolyte from infiltration into the interior,achieving stable electrode/-electrolyte interface.Accordingly,the LS-SiO_(x)material without any coating delivers ultrahigh average Coulombic efficiency,outstanding cycling stability,and full-cell applicability.Only 6 cycles can attain>99.92%Coulombic efficiency and the capacity retention at 0.05 A g^(-1)for 100 cycles exceeds99%.After 800 cycles at 1 A g^(-1),the thickness swelling of LS-SiO_(x)electrode is as low as 0.87%.Moreover,the full cell with pure LS-SiO_(x)anode exhibits capacity retention of 91.2%after 300 cycles at 0.2 C.This work provides a novel concept and effective approach to rationally design silicon-based and other electrode materials with huge volume variation for electrochemical energy storage applications.展开更多
Radiation effects of silicon carbide metal–oxide–semiconductor field-effect transistors(SiC MOSFETs)induced by 20 MeV proton under drain bias(V_(D)=800 V,V_(G)=0 V),gate bias(V_(D)=0 V,V_(G)=10 V),turn-on bias(V_(D)...Radiation effects of silicon carbide metal–oxide–semiconductor field-effect transistors(SiC MOSFETs)induced by 20 MeV proton under drain bias(V_(D)=800 V,V_(G)=0 V),gate bias(V_(D)=0 V,V_(G)=10 V),turn-on bias(V_(D)=0.5 V,V_(G)=4 V)and static bias(V_(D)=0 V,V_(G)=0 V)are investigated.The drain current of SiC MOSFET under turn-on bias increases linearly with the increase of proton fluence during the proton irradiation.When the cumulative proton fluence reaches 2×10^(11)p·cm^(-2),the threshold voltage of SiC MOSFETs with four bias conditions shifts to the left,and the degradation of electrical characteristics of SiC MOSFETs with gate bias is the most serious.In the deep level transient spectrum test,it is found that the defect energy level of SiC MOSFET is mainly the ON2(E_(c)-1.1 eV)defect center,and the defect concentration and defect capture cross section of SiC MOSFET with proton radiation under gate bias increase most.By comparing the degradation of SiC MOSFET under proton cumulative irradiation,equivalent 1 MeV neutron irradiation and gamma irradiation,and combining with the defect change of SiC MOSFET under gamma irradiation and the non-ionizing energy loss induced by equivalent 1 MeV neutron in SiC MOSFET,the degradation of SiC MOSFET induced by proton is mainly caused by ionizing radiation damage.The results of TCAD analysis show that the ionizing radiation damage of SiC MOSFET is affected by the intensity and direction of the electric field in the oxide layer and epitaxial layer.展开更多
As potential alternatives to graphite,silicon(Si)and silicon oxides(SiO_(x))received a lot of attention as anode materials for lithiumion batteries owing to their relatively low working potentials,high theoretical spe...As potential alternatives to graphite,silicon(Si)and silicon oxides(SiO_(x))received a lot of attention as anode materials for lithiumion batteries owing to their relatively low working potentials,high theoretical specific capacities,and abundant resources.However,the commercialization of Si-based anodes is greatly hindered by their massive volume expansion,low conductivity,unstable solid electrolyte interface(SEI),and low initial Coulombic efficiency(ICE).Continuous endeavors have been devoted to overcoming these challenges to achieve practical usage.This review is centered on the major challenges and latest developments in the modification strategies of Si-based anodes,including structure optimization,surface/interface regulation,novel binders,and innovative design of electrolyte.Finally,outlooks and perspectives of Si-based anodes for future development are presented.展开更多
Geopolymers are three-dimensional aluminosilicates formed in a short time at low temperature by geopolymerization. In this pa-per, alkali-activated foam geopolymers were fabricated from circulating fluidized bed fly a...Geopolymers are three-dimensional aluminosilicates formed in a short time at low temperature by geopolymerization. In this pa-per, alkali-activated foam geopolymers were fabricated from circulating fluidized bed fly ash (CFA), and the effect of SiO2/Na2O mole ratio (0.91-1.68) on their properties was studied. Geopolymerization products were characterized by mechanical testing, scanning electron mi-croscopy (SEM), energy-dispersive X-ray spectroscopy (EDX), and X-ray diffraction (XRD). The results show that SiO2/Na2O mole ratio plays an important role in the mechanical and morphological characteristics of geopolymers. Foam samples prepared in 28 d with a SiO2/Na2O mole ratio of 1.42 exhibit the greatest compressive strength of 2.52 MPa. Morphological analysis reveals that these foam geo-polymers appear the relatively optimized pore structure and distribution, which are beneficial to the structure stability. Moreover, a combina-tion of the Si/Al atomic ratio ranging between 1.47 and 1.94 with the Na/Al atomic ratio of about 1 produces the samples with high strength.展开更多
A series of CeO2/SiO2 and SixCe1–xO2 complex oxides supported on an activated Al2TiO5-TiO2-SiO2 complex phase (ATS) ceramics were prepared by step impregnation and co-impregnation methods, and characterized by N2-BET...A series of CeO2/SiO2 and SixCe1–xO2 complex oxides supported on an activated Al2TiO5-TiO2-SiO2 complex phase (ATS) ceramics were prepared by step impregnation and co-impregnation methods, and characterized by N2-BET, XRD, SEM and NH3-TPD techniques. The effects of reaction temperature, CeO2/SiO2 loadings and Si/Ce molar ratio on the granular catalysts for NO selective catalytic reduction with ammonia (NH3-SCR) were studied. Results indicated that both CeO2/SiO2/ATS and CeO2/ATS catalysts showed the same ac...展开更多
In this paper, we reported nano-scale SiOx coatings deposited on polyethylene terephthalate (PET) webs by microwave surface-wave assisted plasma enhanced chemical vapor deposition for the purpose of improving their ...In this paper, we reported nano-scale SiOx coatings deposited on polyethylene terephthalate (PET) webs by microwave surface-wave assisted plasma enhanced chemical vapor deposition for the purpose of improving their barrier properties. Oxygen (O2) and hexamethyl- disiloxane (HMDSO) were employed as oxidant gas and Si monomer during SiOx deposition, re- spectively. Analysis by Fourier transform infrared spectroscope (FTIR) for chemical structure and observation by atomic force microscopy (AFM) for surface morphology of SiO~ coatings demon- strated that both chemical compounds and surface feature of coatings have a remarkable influence on the coating barrier properties. It is noted that the processing parameters play a critical role in the barrier properties of coatings. After optimization of the SiOx coatings deposition conditions, i.e. the discharge power of 1500 W, 2 : 1 of O2 : HMDSO ratio and working pressure of 20 Pa, a better barrier property was achieved in this work.展开更多
An improved method of fitting point-by-point is proposed to determine the absorption coefficient from infrared (IR) transmittance. With no necessity of empirical correction factors, the absorption coefficient can be...An improved method of fitting point-by-point is proposed to determine the absorption coefficient from infrared (IR) transmittance. With no necessity of empirical correction factors, the absorption coefficient can be accurately determined for the films with thin thicknesses. Based on this method, the structural properties of the hydrogenated amorphous silicon oxide materials (a-SiOx:H) are investigated. The oxygen-concentration-dependent variation of the Si-O-Si and the Si-H related modes in a-SiOx:H materials is discussed in detail.展开更多
Stimulated photoluminescence (PL) emission has been observed from an oxide structure of silicon when optically excited by a radiation of 514nm laser. Sharp twin peaks at 694 and 692nm are dominated by stimulated emi...Stimulated photoluminescence (PL) emission has been observed from an oxide structure of silicon when optically excited by a radiation of 514nm laser. Sharp twin peaks at 694 and 692nm are dominated by stimulated emission, which can be demonstrated by its threshold behaviour and linear transition of emission intensity as a function of pump power. The oxide structure is formed by laser irradiation on silicon and its annealing treatment. A model for explaining the stimulated emission is proposed, in which the trap states of the interface between an oxide of silicon and porous nanocrystal play an important role.展开更多
Fe3O4@SiO2 core–shell composite nanoparticles were successfully prepared by a one-pot process. Tetraethyl-orthosilicate was used as a surfactant to synthesize Fe3O4@SiO2 core–shell structures from prepared Fe3O4 nan...Fe3O4@SiO2 core–shell composite nanoparticles were successfully prepared by a one-pot process. Tetraethyl-orthosilicate was used as a surfactant to synthesize Fe3O4@SiO2 core–shell structures from prepared Fe3O4 nanoparticles. The properties of the Fe3O4 and Fe3O4@SiO2 composite nanoparticles were studied by X-ray diffraction, transmission electron microscopy, energy dispersive spectroscopy, and Fourier transform infrared spectroscopy. The prepared Fe3O4 particles were approximately 12 nm in size, and the thickness of the SiO2 coating was approximately 4 nm. The magnetic properties were studied by vibrating sample magnetometry. The results show that the maximum saturation magnetization of the Fe3O4@SiO2 powder(34.85 A·m^2·kg^–1) was markedly lower than that of the Fe3O4 powder(79.55 A·m^2·kg^–1), which demonstrates that Fe3O4 was successfully wrapped by SiO2. The Fe3O4@SiO2 composite nanoparticles have broad prospects in biomedical applications; thus, our next study will apply them in magnetic resonance imaging.展开更多
The annealing of Au particles deposited onto the ultrathin layers of SiO 2 on Si(111) has been studied in real time with a high temperature scanning tunnelling microscopy. Annealing did not create significant changes...The annealing of Au particles deposited onto the ultrathin layers of SiO 2 on Si(111) has been studied in real time with a high temperature scanning tunnelling microscopy. Annealing did not create significant changes to the morphology of the surface until the surface was heated up to more than 920 K when the gold particles started to display a preference for the step edge. Further heating caused the decomposition of the oxide layer with the formation of voids on the surface in the surface step edge area. Comparison between the gold assisted oxide decomposition and pure oxide decomposition indicates that the two decomposition routes proceed with different mechanisms.展开更多
基金supported by the Major National Science & Technology Program of China(No.2009ZX02011)
文摘In integrated circuit-grade single silicon Czochralski growth, the position and material of heat shield are main parameters affecting the heat exchange and crystal growth condition. By optimizing the above parameters, we attempted to increase the growth rate and crystal quality. Numerical simulation proved to verify the results before and after optimization. Through analyses of the temperature and microdefect distribution, it is found that the optimized heat shield can further increase the pulling rate and decrease the melt/crystal interface deflection, increase the average velocity of argon flow from ~2 to ~5 m·s-1, which is in favor of the transportation of SiO, and obtain the low defects concentration crystal and that the average temperature along the melt-free surface is 8 °C higher than before avoiding supercooled melt effectively. ? The Nonferrous Metals Society of China and Springer-Verlag Berlin Heidelberg 2012.
基金the financial support from the National Natural Science Foundation of China(NSFC)(No.51274154)the State Key Laboratory of Development and Application Technology of Automotive Steels(Baosteel Group)
文摘Simultaneous thermal analysis(STA) was used to investigate the effects of silicon content on the oxidation kinetics of silicon-containing steels under an atmosphere and heating procedures similar to those used in industrial reheating furnaces for the production of hot-rolled strips. Our results show that when the heating temperature was greater than the melting point of Fe2SiO4, the oxidation rates of steels with different silicon contents were the same; the total mass gain decreased with increasing silicon content, whereas it increased with increasing oxygen content. The oxidation rates for steels with different silicon contents were constant with respect to time under isothermal conditions. In addition, the starting oxidation temperature, the intense oxidation temperature, and the finishing oxidation temperature increased with increasing silicon content; the intense oxidation temperature had no correlation with the melting of Fe2SiO4. Moreover, the silicon distributed in two forms: as Fe2SiO4 at the interface between the innermost layer of oxide scale and the iron matrix, and as particles containing silicon in grains and grain boundaries in the iron matrix.
基金Supported by the National Natural Science Foundation of China under Grant Nos 61274106
文摘We present a study on the single event transient (SET) induced by a pulsed laser in different silicon-germanium (SiGe) heterojunction bipolar transistors (HBTs) with the structure of local oxidation of silicon (LOCOS) and deep trench isolation (DTI). The experimental results are discussed in detail and it is demonstrated that a SiGe HBT with the structure of LOCOS is more sensitive than the DTI SiGe HBT in the SET. Because of the limitation of the DTI structure, the charge collection of diffusion in the DTI SiGe HBT is less than that of the LOCOS SiGe HBT. The SET sensitive area of the LOCOS SiGe HBT is located in the eollector-substrate (C/S) junction, while the sensitive area of the DTI SiGe HBT is located near to the collector electrodes.
基金the National Natural Science Foundation of China(No.50632050)
文摘Nafion/Silicon oxide composite membranes were produced via in situ sol-gel reaction of tetraethylorthosilicate (TEOS) in Nafion membranes. The physicochemical properties of the membranes were studied by FT-IR,TG-DSC and tensile strength. The results show that the silicon oxide is compatible with the Nation membrane and the thermo stability of Nation/Silicon oxide composite membrane is higher than that of Nation membrane. Furthermore, the tensile strength of Nation/Silicon oxide composite membrane is similar to that of the Nation membrane. The proton conductivity of Nation/Silicon oxide composite membrane is higher than that of Nation membrane. When the Nation/Silicon oxide composite membrane was employed as an electrolyte in H2/O2 PEMFC, a higher current density value (1 000 mA/cm^2 at 0.38 V) than that of the Nafion1135 membrane (100 mA/cm^2 at 0.04 V) was obtained at 110 ℃.
基金Project supported by the National Natural Science Foundation of China (Grant No 50772107)the National High Technology Development Program of China (Grant No 2006AA05Z118)
文摘The surface oxidation of silicon (Si) wafers by atomic oxygen radical anions (O- anions) and the preparation of metal-oxide-semiconductor (MOS) capacitors on the O-oxidized Si substrates have been examined for the first time. The O- anions are generated from a recently developed O- storage-emission material of [Ca24Al2sO64]^4+·4O^- (Cl2A7-O^- for short). After it has been irradiated by an O- anion bean: (0.5 μA/cm^2) at 300℃ for 1-10 hours, the Si wafer achieves an oxide layer with a thickness ranging from 8 to 32 nm. X-ray photoelectron spectroscopy (XPS) results reveal that the oxide layer is of a mixture of SiO2, Si2 O3, and Si2O distributed in different oxidation depths. The features of the MOS capacitor of 〈Al electrode/SiOx/Si〉 are investigated by measuring capacitance-voltage (C - V) and current-voltage (I - V) curves. The oxide charge density is about 6.0 × 10^1 cm^-2 derived from the (C - V curves. The leakage current density is in the order of 10^-6 A/cm^2 below 4 MV/cm, obtained from the I - V curves. The O- anions formed by present method would have potential applications to the oxidation and the surface-modification of materials together with the preparation of semiconductor devices.
基金Funded partially by the National Basic Research Program of China(No.2011CBA00700)
文摘In this work, n-type amorphous silicon oxide thin films were deposited by RF-PECVD method using a gas mixture of SiH4, CO2, H2, and PHy The deposition rate, refractive index, band gap, crystalline volume fraction, and conductivity of the silicon oxide thin films were determined and analyzed. The film with refractive index of 1.99, band gap of 2.6eV and conductivity of 10-7 S/cm was obtained, which was suitable for the intermediate reflector layer.
文摘Photoluminescence (PL) characteristics of Tb-doped silicon rich oxide (SRO) films prepared by DC-sputtering and post-annealing processes were studied. The silicon richness of the SRO film could be controlled by varying the sputtering power and oxygen concentration in the sputtering chamber. PL emission from the as-deposited sample was found to be composed of Th^3 + intra 4f transition-related emission and the silicon nano particle-related broad bandwidth emission. Thermal annealing could significantly improve the material properties as well as the PL signals. PL properties depended strongly upon the annealing scheme and silicon richness. Annealing at high temperatures (900- 1050℃) enhanced Tbrelated emission and suppressed the silicon nano particle-related emission. For samples with different silicon richness, annealing at 950 ℃ was found to produce higher PL signals than at other temperatures. It was attributed more to lifetime quenching than to concentration quenching. Electroluminescent (EL) devices with a capacitor structure were fabricated, the optimized process condition for the EL device was found to be different from that of PL emission. Among the annealing schemes that were used, wet oxidation was found to improve device performance the most, whereas, dry oxidation was found to improve material property the most. Wet oxidation allowed the breakdown electrical field to increase significantly and to reach above 10 mV·cm^-1. The EL spectra showed a typical Th^3+ emission, agreeing well with the PL spectra. The I-V measurements indicated that for 100 nm thick film, the Fowler-Nordheim tunneling started at an electrical field of around 6 mV·cm^-1 and the light emission became detectable at a current density of around 10-4 A·cm^-2 and higher. Strong electroluminescence light emission was detected when the electrical field was close to 10 mV·cm^-1.
文摘Anovel silicon containing carbon precursor was synthesised by reacting a petroleum pitchfraction and polydimethylsilane. The precursor containing about 26wt% Si was meltspunintofibresand then oxidativelystabilised in airto renderthefibresinfusiblebefore pyrolysisat1200℃underinertatmospheretoproduceC Sialloy( CSA) fibres. Theextentofstabili sation wasfoundto becriticalto the development of mechanicalstrength of thefibres which varied with heattreatmenttemperature, showing a maximum at 1200 ℃when thestrength was 1 4 1 6 GPa. Thesestrengthsareremarkably goodconsideringthelow modulus whichis duetothe quite high failurestrains. Thefibrescanshow excellentresistanceto oxidation if given an initialshortexposureto oxygen athigh temperature duetotheformation of an im perceptiblelayer of silica. CSAfibreshavethe advantagesof both carbon fibresand SiCfi bres,thusextended application areascan beenvisaged .
文摘The stability of the photoluminescence (PS) has evidently improvedby HNO3 chemical oxidation The PL intensity and peak wavelength of PS were changed with theHNO3 of HNO3 concentration and oxidation time. Being different from other oxidation time. Being different from other oxidized ways, the PSoxidized by HNO3 remains remains sensitive to adsorbates. FTTR spectroscopic data suggest that these phenomena are attributed to the presence of HSi(SiaO30a)(a≤3)layer on PS surface.
基金supported by the National Natural Science Foundation of China (Grant No. 12075065)。
文摘Experiments and simulation studies on 283 MeV I ion induced single event effects of silicon carbide(SiC) metal–oxide–semiconductor field-effect transistors(MOSFETs) were carried out. When the cumulative irradiation fluence of the SiC MOSFET reached 5×10^(6)ion·cm^(-2), the drain–gate channel current increased under 200 V drain voltage, the drain–gate channel current and the drain–source channel current increased under 350 V drain voltage. The device occurred single event burnout under 800 V drain voltage, resulting in a complete loss of breakdown voltage. Combined with emission microscope, scanning electron microscope and focused ion beam analysis, the device with increased drain–gate channel current and drain–source channel current was found to have drain–gate channel current leakage point and local source metal melt, and the device with single event burnout was found to have local melting of its gate, source, epitaxial layer and substrate. Combining with Monte Carlo simulation and TCAD electrothermal simulation, it was found that the initial area of single event burnout might occur at the source–gate corner or the substrate–epitaxial interface, electric field and current density both affected the lattice temperature peak. The excessive lattice temperature during the irradiation process appeared at the local source contact, which led to the drain–source channel damage. And the excessive electric field appeared in the gate oxide layer, resulting in drain–gate channel damage.
基金the support of the National Natural Science Foundation of China(51634003)。
文摘Severe mechanical fractu re and unstable interphase,associated with the large volumetric expansion/contraction,significantly hinder the application of high-capacity SiO_(x)materials in lithium-ion batteries.Herein,we report the design and facile synthesis of a layer stacked SiO_(x)microparticle(LS-SiO_(x))material,which presents a stacking structure of SiO_(x)layers with abundant disconnected interstices.This LS-SiO_(x)microparticle can effectively accommodate the volume expansion,while ensuring negligible particle expansion.More importantly,the interstices within SiO_(x)microparticle are disconnected from each other,which efficiently prevent the electrolyte from infiltration into the interior,achieving stable electrode/-electrolyte interface.Accordingly,the LS-SiO_(x)material without any coating delivers ultrahigh average Coulombic efficiency,outstanding cycling stability,and full-cell applicability.Only 6 cycles can attain>99.92%Coulombic efficiency and the capacity retention at 0.05 A g^(-1)for 100 cycles exceeds99%.After 800 cycles at 1 A g^(-1),the thickness swelling of LS-SiO_(x)electrode is as low as 0.87%.Moreover,the full cell with pure LS-SiO_(x)anode exhibits capacity retention of 91.2%after 300 cycles at 0.2 C.This work provides a novel concept and effective approach to rationally design silicon-based and other electrode materials with huge volume variation for electrochemical energy storage applications.
基金Project supported by the National Natural Science Foundation of China(Grant No.12075065)。
文摘Radiation effects of silicon carbide metal–oxide–semiconductor field-effect transistors(SiC MOSFETs)induced by 20 MeV proton under drain bias(V_(D)=800 V,V_(G)=0 V),gate bias(V_(D)=0 V,V_(G)=10 V),turn-on bias(V_(D)=0.5 V,V_(G)=4 V)and static bias(V_(D)=0 V,V_(G)=0 V)are investigated.The drain current of SiC MOSFET under turn-on bias increases linearly with the increase of proton fluence during the proton irradiation.When the cumulative proton fluence reaches 2×10^(11)p·cm^(-2),the threshold voltage of SiC MOSFETs with four bias conditions shifts to the left,and the degradation of electrical characteristics of SiC MOSFETs with gate bias is the most serious.In the deep level transient spectrum test,it is found that the defect energy level of SiC MOSFET is mainly the ON2(E_(c)-1.1 eV)defect center,and the defect concentration and defect capture cross section of SiC MOSFET with proton radiation under gate bias increase most.By comparing the degradation of SiC MOSFET under proton cumulative irradiation,equivalent 1 MeV neutron irradiation and gamma irradiation,and combining with the defect change of SiC MOSFET under gamma irradiation and the non-ionizing energy loss induced by equivalent 1 MeV neutron in SiC MOSFET,the degradation of SiC MOSFET induced by proton is mainly caused by ionizing radiation damage.The results of TCAD analysis show that the ionizing radiation damage of SiC MOSFET is affected by the intensity and direction of the electric field in the oxide layer and epitaxial layer.
基金supported by the National Natural Science Foundation of China(Nos.52122209,52111530050,and 51772147)Postgraduate Research&Practice Innovation Program of Jiangsu Province(No.SJCX22_0433)the Research Foundation of State Key Lab(Nos.ZK201906 and ZK201805).
文摘As potential alternatives to graphite,silicon(Si)and silicon oxides(SiO_(x))received a lot of attention as anode materials for lithiumion batteries owing to their relatively low working potentials,high theoretical specific capacities,and abundant resources.However,the commercialization of Si-based anodes is greatly hindered by their massive volume expansion,low conductivity,unstable solid electrolyte interface(SEI),and low initial Coulombic efficiency(ICE).Continuous endeavors have been devoted to overcoming these challenges to achieve practical usage.This review is centered on the major challenges and latest developments in the modification strategies of Si-based anodes,including structure optimization,surface/interface regulation,novel binders,and innovative design of electrolyte.Finally,outlooks and perspectives of Si-based anodes for future development are presented.
基金financially supported by the Research Fund for the Doctoral Program of Higher Education of China(No.20120023110011)the Fundamental Research Funds for the Central Universities of China(Nos.2009KH09 and 2009QH02)
文摘Geopolymers are three-dimensional aluminosilicates formed in a short time at low temperature by geopolymerization. In this pa-per, alkali-activated foam geopolymers were fabricated from circulating fluidized bed fly ash (CFA), and the effect of SiO2/Na2O mole ratio (0.91-1.68) on their properties was studied. Geopolymerization products were characterized by mechanical testing, scanning electron mi-croscopy (SEM), energy-dispersive X-ray spectroscopy (EDX), and X-ray diffraction (XRD). The results show that SiO2/Na2O mole ratio plays an important role in the mechanical and morphological characteristics of geopolymers. Foam samples prepared in 28 d with a SiO2/Na2O mole ratio of 1.42 exhibit the greatest compressive strength of 2.52 MPa. Morphological analysis reveals that these foam geo-polymers appear the relatively optimized pore structure and distribution, which are beneficial to the structure stability. Moreover, a combina-tion of the Si/Al atomic ratio ranging between 1.47 and 1.94 with the Na/Al atomic ratio of about 1 produces the samples with high strength.
基金Project supported by the National High-Tech Research and Development Program of China (2009AA05Z313)National Natural Science Foundation of China (50872052)Foundation of Jiangsu Province of China for College Postgraduate Students in Innovation Engineering (CX07B_083z)
文摘A series of CeO2/SiO2 and SixCe1–xO2 complex oxides supported on an activated Al2TiO5-TiO2-SiO2 complex phase (ATS) ceramics were prepared by step impregnation and co-impregnation methods, and characterized by N2-BET, XRD, SEM and NH3-TPD techniques. The effects of reaction temperature, CeO2/SiO2 loadings and Si/Ce molar ratio on the granular catalysts for NO selective catalytic reduction with ammonia (NH3-SCR) were studied. Results indicated that both CeO2/SiO2/ATS and CeO2/ATS catalysts showed the same ac...
基金supported financially by National Natural Science Foundation of China(Nos.1117502411375031)+8 种基金Beijing Natural Science Foundation(No.1112012)the National Science & Technology Pillar Program for the 12th Five-year Plan2011BAD24B01Beijing Education Committee Foundation of Science and Technology(Nos.KM2011100015008KM201010015005)BIGC Key Project(No.23190113051)PHR20110516PHR201107145Fujian Provincial Department of Science and Technology Key Project of China(No.2012H0008)
文摘In this paper, we reported nano-scale SiOx coatings deposited on polyethylene terephthalate (PET) webs by microwave surface-wave assisted plasma enhanced chemical vapor deposition for the purpose of improving their barrier properties. Oxygen (O2) and hexamethyl- disiloxane (HMDSO) were employed as oxidant gas and Si monomer during SiOx deposition, re- spectively. Analysis by Fourier transform infrared spectroscope (FTIR) for chemical structure and observation by atomic force microscopy (AFM) for surface morphology of SiO~ coatings demon- strated that both chemical compounds and surface feature of coatings have a remarkable influence on the coating barrier properties. It is noted that the processing parameters play a critical role in the barrier properties of coatings. After optimization of the SiOx coatings deposition conditions, i.e. the discharge power of 1500 W, 2 : 1 of O2 : HMDSO ratio and working pressure of 20 Pa, a better barrier property was achieved in this work.
基金supported by the National Basic Research Program of China(Grant Nos.2011CBA00705,2011CBA00706,and 2011CBA00707)the National Natural Science Foundation of China(Grant No.60976051)the Program for New Century Excellent Talents in University of China(Grant No.NCET-08-0295)
文摘An improved method of fitting point-by-point is proposed to determine the absorption coefficient from infrared (IR) transmittance. With no necessity of empirical correction factors, the absorption coefficient can be accurately determined for the films with thin thicknesses. Based on this method, the structural properties of the hydrogenated amorphous silicon oxide materials (a-SiOx:H) are investigated. The oxygen-concentration-dependent variation of the Si-O-Si and the Si-H related modes in a-SiOx:H materials is discussed in detail.
基金supported by the National Natural Science Foundation of China (Grant No 10764002)
文摘Stimulated photoluminescence (PL) emission has been observed from an oxide structure of silicon when optically excited by a radiation of 514nm laser. Sharp twin peaks at 694 and 692nm are dominated by stimulated emission, which can be demonstrated by its threshold behaviour and linear transition of emission intensity as a function of pump power. The oxide structure is formed by laser irradiation on silicon and its annealing treatment. A model for explaining the stimulated emission is proposed, in which the trap states of the interface between an oxide of silicon and porous nanocrystal play an important role.
基金the National Natural Science Foundation of China (No.51274039)the State Key Lab of Advanced Metals and Materials (No.2013-ZD05)the Guangdong Foundation of Research (No.2014B090901003)
文摘Fe3O4@SiO2 core–shell composite nanoparticles were successfully prepared by a one-pot process. Tetraethyl-orthosilicate was used as a surfactant to synthesize Fe3O4@SiO2 core–shell structures from prepared Fe3O4 nanoparticles. The properties of the Fe3O4 and Fe3O4@SiO2 composite nanoparticles were studied by X-ray diffraction, transmission electron microscopy, energy dispersive spectroscopy, and Fourier transform infrared spectroscopy. The prepared Fe3O4 particles were approximately 12 nm in size, and the thickness of the SiO2 coating was approximately 4 nm. The magnetic properties were studied by vibrating sample magnetometry. The results show that the maximum saturation magnetization of the Fe3O4@SiO2 powder(34.85 A·m^2·kg^–1) was markedly lower than that of the Fe3O4 powder(79.55 A·m^2·kg^–1), which demonstrates that Fe3O4 was successfully wrapped by SiO2. The Fe3O4@SiO2 composite nanoparticles have broad prospects in biomedical applications; thus, our next study will apply them in magnetic resonance imaging.
文摘The annealing of Au particles deposited onto the ultrathin layers of SiO 2 on Si(111) has been studied in real time with a high temperature scanning tunnelling microscopy. Annealing did not create significant changes to the morphology of the surface until the surface was heated up to more than 920 K when the gold particles started to display a preference for the step edge. Further heating caused the decomposition of the oxide layer with the formation of voids on the surface in the surface step edge area. Comparison between the gold assisted oxide decomposition and pure oxide decomposition indicates that the two decomposition routes proceed with different mechanisms.