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A COMPUTER SIMULATION OF HIGH-DOSE ION IMPLANTATION INTO AMORPHOUS MATERIALS
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作者 袁博 虞福春 《Nuclear Science and Techniques》 SCIE CAS CSCD 1990年第Z1期82-83,共2页
A computer program MACA was developed for simulating high-dose ion implantation into amorphous solids. The topology of amorphous solids was modelled by adjusting the free flight path distribution between collisions, s... A computer program MACA was developed for simulating high-dose ion implantation into amorphous solids. The topology of amorphous solids was modelled by adjusting the free flight path distribution between collisions, so that the radial distribution function will characterize the short - range order and long - range disorder of amorphous targets. A simulation example is given. 展开更多
关键词 simulation of high - dose ion implantation amorphous target topology modelling maca code
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