This paper presents a short review for phase measuring deflectometry (PMD). PMD isa phase calculation based technique for three-dimensional (3D) measurement ofspecular surfaces. PMD can achieve nano-scale form measure...This paper presents a short review for phase measuring deflectometry (PMD). PMD isa phase calculation based technique for three-dimensional (3D) measurement ofspecular surfaces. PMD can achieve nano-scale form measurement accuracy with theadvantages of high dynamic range, non-contact, full field measurement which makesit a competitive method for specular surface measurement. With the development ofcomputer science, display and imaging technology, there has been an advancementin speed for PMD in recent years. This paper discusses PMD focusing on the difference onits system configuration. Measurement principles, progress, advantages and problems arediscussed for each category. The challenges and future development of PMD are alsodiscussed.展开更多
基金funded by the Engineering and Physical Sciences Research Council(EPSRC)of the UK with the funding of the EPSRC Centre for Innovative Manufacturing in Advanced Metrology(Grand Ref:EP/I033424/1)the EPSRC Future Advanced Metrology Hub(EP/P006930/1).
文摘This paper presents a short review for phase measuring deflectometry (PMD). PMD isa phase calculation based technique for three-dimensional (3D) measurement ofspecular surfaces. PMD can achieve nano-scale form measurement accuracy with theadvantages of high dynamic range, non-contact, full field measurement which makesit a competitive method for specular surface measurement. With the development ofcomputer science, display and imaging technology, there has been an advancementin speed for PMD in recent years. This paper discusses PMD focusing on the difference onits system configuration. Measurement principles, progress, advantages and problems arediscussed for each category. The challenges and future development of PMD are alsodiscussed.
