光刻仿真是SOC(System On Chip)光刻工艺的重要环节,为了实现仿真数据3D可视化,在光刻仿真程序SPLAT(Simulation of Projection Lens Aberrations via TCCs)基础上,提出了自动排序算法对SPLAT输出数据进行重新排列以便三维建模,建立了...光刻仿真是SOC(System On Chip)光刻工艺的重要环节,为了实现仿真数据3D可视化,在光刻仿真程序SPLAT(Simulation of Projection Lens Aberrations via TCCs)基础上,提出了自动排序算法对SPLAT输出数据进行重新排列以便三维建模,建立了光照强度与深度转换模型,将光照强度数值转变为3D可视化的深度数据,论文最后设计了3D实时图形仿真程序并进行了实验。实验证明了自动排序算法以及转换模型的正确性和先进性,为超大规模SOC数据的3D交互式实时显示奠定了基础。展开更多
To understand the effects of spray parameters on the splashing,cast iron particles were plasma-sprayed onto polished surfaces of aluminum substrate to form single splats.Various plasma arc powers and spray distances w...To understand the effects of spray parameters on the splashing,cast iron particles were plasma-sprayed onto polished surfaces of aluminum substrate to form single splats.Various plasma arc powers and spray distances were applied to adjust the morphology of the splats which was studied using a field emission scanning electron microscope（FESEM）.The experimentalresults showed that the splashing of impinging droplets was significantly restrained for the splats deposited with high arc power（30 k W）and short spray distance（80 mm）.This finding would be beneficialto improving the adhesive strength of the coating.展开更多
文摘光刻仿真是SOC(System On Chip)光刻工艺的重要环节,为了实现仿真数据3D可视化,在光刻仿真程序SPLAT(Simulation of Projection Lens Aberrations via TCCs)基础上,提出了自动排序算法对SPLAT输出数据进行重新排列以便三维建模,建立了光照强度与深度转换模型,将光照强度数值转变为3D可视化的深度数据,论文最后设计了3D实时图形仿真程序并进行了实验。实验证明了自动排序算法以及转换模型的正确性和先进性,为超大规模SOC数据的3D交互式实时显示奠定了基础。
基金Funded by the State Key Laboratory for Mechanical Behavior of Materials(20131312)the Special Fund for Basic Scientific Research of Central CollegesChang’an University(Nos.310831161018,2014G1311093,and 2014G1311082)
文摘To understand the effects of spray parameters on the splashing,cast iron particles were plasma-sprayed onto polished surfaces of aluminum substrate to form single splats.Various plasma arc powers and spray distances were applied to adjust the morphology of the splats which was studied using a field emission scanning electron microscope（FESEM）.The experimentalresults showed that the splashing of impinging droplets was significantly restrained for the splats deposited with high arc power（30 k W）and short spray distance（80 mm）.This finding would be beneficialto improving the adhesive strength of the coating.
