A new design of stato magnetic System is Proposed for 3-phase & 12-pole HB stepper, and it features bet-ter distribution of magntic lield to incare Pullou tope and bopmve Operaonal stability of moor and minimummut...A new design of stato magnetic System is Proposed for 3-phase & 12-pole HB stepper, and it features bet-ter distribution of magntic lield to incare Pullou tope and bopmve Operaonal stability of moor and minimummutual inductance between phase windimp to make design of control circuit easier, and application proved it is as good as expected.展开更多
This paper presents the design and implementation of a Stepper Motor using Nexys2 circuit board based on a Xilinx Spartan 3E Field Programmable Gate Array (FPGA) device with VHDL code. The algorithm implemented on FPG...This paper presents the design and implementation of a Stepper Motor using Nexys2 circuit board based on a Xilinx Spartan 3E Field Programmable Gate Array (FPGA) device with VHDL code. The algorithm implemented on FPGA allows a substantial decrease of the equivalent processing time developed by different velocity controllers. The Stepper Speed control is achieved using VHDL code, and the hardware digital circuit is designed for a programmable rotational stepper motor using VHDL as a tool and FPGA as a target technology. The 50 MHZ provided by the starter kit is divided to obtain the necessary delay time between the motor phases that ranges between 2 - 10 m seconds. Though output selections, the direction of rotation of the stepper motor besides the magnitude of the angle of movement and the rotation speed can be controlled. The major advantage of using reconfigurable hardware (FPGA) in implementing the Stepper Motor instead of a discrete digital component is that it makes modifications to the design easy and quick and also, the total design hence represents an embedded system (works without computer). The total programmable hardware design that controlled on the stepper motor movement, occupied an area that did not exceed 12% of the chip resources.展开更多
This article discusses the transition of a form of nanoimprint lithography technology,known as Jet and Flash Imprint Lithography(J-FIL),from research to a commercial fabrication infrastructure for leading-edge semicon...This article discusses the transition of a form of nanoimprint lithography technology,known as Jet and Flash Imprint Lithography(J-FIL),from research to a commercial fabrication infrastructure for leading-edge semiconductor integrated circuits(ICs).Leadingedge semiconductor lithography has some of the most aggressive technology requirements,and has been a key driver in the 50-year history of semiconductor scaling.Introducing a new,disruptive capability into this arena is therefore a case study in a“highrisk-high-reward”opportunity.This article first discusses relevant literature in nanopatterning including advanced lithography options that have been explored by the IC fabrication industry,novel research ideas being explored,and literature in nanoimprint lithography.The article then focuses on the J-FIL process,and the interdisciplinary nature of risk,involving nanoscale precision systems,mechanics,materials,material delivery systems,contamination control,and process engineering.Next,the article discusses the strategic decisions that were made in the early phases of the project including:(i)choosing a step and repeat process approach;(ii)identifying the first target IC market for J-FIL;(iii)defining the product scope and the appropriate collaborations to share the risk-reward landscape;and(iv)properly leveraging existing infrastructure,including minimizing disruption to the widely accepted practices in photolithography.Finally,the paper discusses the commercial J-FIL stepper system and associated infrastructure,and the resulting advances in the key lithographic process metrics such as critical dimension control,overlay,throughput,process defects,and electrical yield over the past 5 years.This article concludes with the current state of the art in J-FIL technology for IC fabrication,including description of the high volume manufacturing stepper tools created for advanced memory manufacturing.展开更多
Stepper motor driven systems are widely used in industrial applications. They are mainly used for their low cost open-loop high performance. However, as dynamic systems need to be increasingly faster and their motion ...Stepper motor driven systems are widely used in industrial applications. They are mainly used for their low cost open-loop high performance. However, as dynamic systems need to be increasingly faster and their motion more precise, it is important to have an open-loop system which is accurate and reliable. In this paper, we present a novel technique in which a genetic algorithm （GA） based lookup table approach is used to find the optimal stepping sequence of an open-loop stepper motor system. The optimal sequence objective is to minimize residual vibration and to accurately follow trajectory. A genetic algorithm is used to find the best stepping sequence which minimizes the error and improves the system performance. Numerical simulation has showed the effectiveness of our approach to improve the system performance for both position and velocity. The optimized system reduced the residual vibration and was able to follow the trajectory with minimal error.展开更多
文摘A new design of stato magnetic System is Proposed for 3-phase & 12-pole HB stepper, and it features bet-ter distribution of magntic lield to incare Pullou tope and bopmve Operaonal stability of moor and minimummutual inductance between phase windimp to make design of control circuit easier, and application proved it is as good as expected.
文摘This paper presents the design and implementation of a Stepper Motor using Nexys2 circuit board based on a Xilinx Spartan 3E Field Programmable Gate Array (FPGA) device with VHDL code. The algorithm implemented on FPGA allows a substantial decrease of the equivalent processing time developed by different velocity controllers. The Stepper Speed control is achieved using VHDL code, and the hardware digital circuit is designed for a programmable rotational stepper motor using VHDL as a tool and FPGA as a target technology. The 50 MHZ provided by the starter kit is divided to obtain the necessary delay time between the motor phases that ranges between 2 - 10 m seconds. Though output selections, the direction of rotation of the stepper motor besides the magnitude of the angle of movement and the rotation speed can be controlled. The major advantage of using reconfigurable hardware (FPGA) in implementing the Stepper Motor instead of a discrete digital component is that it makes modifications to the design easy and quick and also, the total design hence represents an embedded system (works without computer). The total programmable hardware design that controlled on the stepper motor movement, occupied an area that did not exceed 12% of the chip resources.
基金This work was partially funded by DARPA Contract No.N66001-02-C-8011NIST Advanced Technology Program Contract No.70NANB4H3012+2 种基金US DoD Contract No.N66001-06-C-2003DARPA A2P Program administered by AFRL Contract No.FA8650-15-C-7542by the National Science Foundation under Cooperative Agreement No.EEC-1160494.
文摘This article discusses the transition of a form of nanoimprint lithography technology,known as Jet and Flash Imprint Lithography(J-FIL),from research to a commercial fabrication infrastructure for leading-edge semiconductor integrated circuits(ICs).Leadingedge semiconductor lithography has some of the most aggressive technology requirements,and has been a key driver in the 50-year history of semiconductor scaling.Introducing a new,disruptive capability into this arena is therefore a case study in a“highrisk-high-reward”opportunity.This article first discusses relevant literature in nanopatterning including advanced lithography options that have been explored by the IC fabrication industry,novel research ideas being explored,and literature in nanoimprint lithography.The article then focuses on the J-FIL process,and the interdisciplinary nature of risk,involving nanoscale precision systems,mechanics,materials,material delivery systems,contamination control,and process engineering.Next,the article discusses the strategic decisions that were made in the early phases of the project including:(i)choosing a step and repeat process approach;(ii)identifying the first target IC market for J-FIL;(iii)defining the product scope and the appropriate collaborations to share the risk-reward landscape;and(iv)properly leveraging existing infrastructure,including minimizing disruption to the widely accepted practices in photolithography.Finally,the paper discusses the commercial J-FIL stepper system and associated infrastructure,and the resulting advances in the key lithographic process metrics such as critical dimension control,overlay,throughput,process defects,and electrical yield over the past 5 years.This article concludes with the current state of the art in J-FIL technology for IC fabrication,including description of the high volume manufacturing stepper tools created for advanced memory manufacturing.
文摘Stepper motor driven systems are widely used in industrial applications. They are mainly used for their low cost open-loop high performance. However, as dynamic systems need to be increasingly faster and their motion more precise, it is important to have an open-loop system which is accurate and reliable. In this paper, we present a novel technique in which a genetic algorithm （GA） based lookup table approach is used to find the optimal stepping sequence of an open-loop stepper motor system. The optimal sequence objective is to minimize residual vibration and to accurately follow trajectory. A genetic algorithm is used to find the best stepping sequence which minimizes the error and improves the system performance. Numerical simulation has showed the effectiveness of our approach to improve the system performance for both position and velocity. The optimized system reduced the residual vibration and was able to follow the trajectory with minimal error.
