Transparent ZnO/glass surface acoustic wave based high performance ultraviolet light sensors

Surface acoustic wave （SAW） resonators are a type of ultraviolet （UV） light sensors with high sensitivity, and they have been extensively studied. Transparent SAW devices are very useful and can be developed into various sensors and microfluidics for sensing/monitoring and lab-on-chip applications. We report the fabrication of high sensitivity SAW UV sensors based on piezoelectric （PE） ZnO thin films deposited on glass substrates. The sensors were fabricated and their performances against the post-deposition annealing condition were investigated. It was found that the UV-light sensitivity is improved by more than one order of magnitude after annealing. The frequency response increases significantly and the response becomes much faster. The optimized devices also show a small temperature coefficient of frequency and excellent repeatability and stability, demonstrating its potential for UV-light sensing application.

Surface Acoustic Wave Humidity Sensors Based on(1120) ZnO Piezoelectric Films Sputtered on R-Sapphire Substrates

ZnO films on R-sapphire substrates are prepared and characterized by x-ray diffraction and scanning electron microscopy, which indicate that the thin films are well crystallized with （1120） texture. Love wave and Rayleigh wave are used for fabrications of humidity sensors, which are excited in [1100] and [0001] directions of the （1120） ZnO piezoelectric films, respectively. The experimental results show that both kinds of sensors have good humidity response and repeatability, and the performances of the Love wave sensors are better than those of the Rayleigh wave sensors at room temperature. Moreover, the theoretical calculations of the mass sensitivity of the sensors are a/so carried out and the calculated results are in good agreement with the experimental measurements.

Development of A Surface Acoustic Wave LB Membrane Immunity Sensor

Summary: A new kind of biosensor for immunology was developed by ultrasonic technique and LB membrane. A double delay-line resonator was made by using ST-cut quartz crystal with working frequency of 149. 7 MHz. Then a layer of LB membrane was covered on it. When anti-IgM anti- body of various concentrations was added to it, the sensor can be used to detect IgM antigen. The biosensor was highly sensitive, small and light. The experimental results showed that the working frequency change of the sensor was proportional to the concentration of antibody with its dilution ratio between 1: 10000 and 1: 100. It was also first observed that the frequency curve of the sen- sor resulting from the reaction of IgM antigen and antibody undulated in the experiment.

Viscoelastic Analysis of a Surface Acoustic Wave Gas Sensor Coated by a New Deposition Technique

与聚合物涂的声学的波浪传感器基于新涂层免职(自我装配、分子地印的技术) 拍摄的表面的反应的分析被描述，反应公式因此被推出。用真实部分砍模量，聚合物能被分类进三种类型：玻璃质的电影，玻璃质似橡胶的电影和似橡胶的电影。试验性的结果比在马丁的理论，而是速度反应不确切与计算一致的证明变细反应在有模拟的更好的坚固性。也许，它被试验性的方法和环境影响。另外，为聚合物电影的煤气的吸着的模拟被执行。，至于玻璃质似橡胶的电影和似橡胶的电影至于玻璃质的电影，有增加电影厚度的锯传感器反应增加，和在传感器反应和气体的集中之间的关系是相当线性的，在传感器敏感和气体的集中之间的关系是很复杂的。最终计算的结果显示在传感器反应和频率之间的关系不由于聚合物的粘弹性的性质总是是线性的。

Strain transfer mechanism of passive wireless surface acoustic wave torque sensors using shear lag theory

A shear-lag theory was developed to investigate the strain transfer from the metal substrate to the surface acoustic wave （SAW） resonator through a bonding layer. A three-layer model of host structure-adhesive layer-resonator layer was established. The strain transfer was theoretically analyzed, and the main factors impacting the SAW sensor measurement were studied. The relationship between the sensor response and the individual effect of all these factors under static loads was discussed. Results showed that better accuracy could be achieved with increase in the adhesive stiffness or resonator length, or decrease in the adhesive thickness. The values of the strain transfer rate calculated from the analytical model agreed well with that from the available experiment data.

Effect of Fluid Electrical Property Changes on Surface Transverse Wave Sensors

A fluid sensor based on the surface transverse wave (STW) delay line on ST-cut quartz has been developed and tested in a large number of fluids with different viscosity and permittivity levels.Influence of fluid mechanical and electrical properties on the sensor's response has been determined and the sensor's performance has been compared with a bulk acoustic wave (BAW) viscosity sensor.The result shows that the viscosity sensitivity of the developed STW sensor represented by the signal to noise ratio is lower than that of a 5 MHz BAW sensor.Applications of the sensor in detecting the quality of industrial fluids are discussed.

Bulk GaN-based SAW resonators with high quality factors for wireless temperature sensor

Surface acoustic wave(SAW)resonator with outstanding quality factors of 4829/6775 at the resonant/anti-resonant frequencies has been demonstrated on C-doped semi-insulating bulk GaN.The impact of device parameters including aspect ratio of length to width of resonators,number of interdigital transducers,and acoustic propagation direction on resonator performance have been studied.For the first time,we demonstrate wireless temperature sensing from 21.6 to 120℃ with a stable temperature coefficient of frequency of–24.3 ppm/℃ on bulk GaN-based SAW resonators.

A Novel Wireless PassiveTemperature-Pressure SAW-based Sensor

A novel wireless and passive surface acoustic wave(SAW)sensor is developed for measuring temperature and pressure.The sensor has two single-port resonators on a substrate.One resonator,acting as the temperature sensor,is located at the fixed end without pressure deformation,and the other one,acting as the pressure sensor,is located at the free end to detect pressure changes due to substrate deformation.Pressure at the free end bends the cantilever,causing a relative change in the acoustic propagation characteristics of the SAW traveling along the surface of the substrate and a relative change in the resonant frequency of the resulting signal.The temperature acts on the entire substrate,affecting the propagation speed of the SAW on the substrate and directly affecting the resonant frequency characteristic parameters.The temperature and pressure performance of this new antenna-connected sensor is tested by using a network analyzer,a constant temperature heating station,and a force gauge.A temperature sensitivity of 1.5015 kHz/℃and a pressure sensitivity of 10.6 kHz/gf at the ambient temperature have been observed by wireless measurements.This work should result in practical engineering applications for high-temperature devices.

UV light driven high-performance room temperature surface acoustic wave NH_(3) gas sensor using sulfur-doped g-C_(3)N_(4) quantum dots

Nanomaterials integrated surface acoustic wave(SAW)gas sensing technology has emerged as a promising candidate for realtime toxic gas sensing applications for environmental and human health safety.However,the development of novel chemical interface based on two-dimensional(2D)sensing materials for SAW sensors for the rapid and sensitive detection of NH_(3)gas at room temperature(RT)still remains challenging.Herein,we report a highly selective RT NH_(3)gas sensor based on sulfur-doped graphitic carbon nitride quantum dots(S@g-C_(3)N_(4)QD)coated langasite(LGS)SAW sensor with enhanced sensitivity and recovery rate under ultraviolet(UV)illumination.Fascinatingly,the sensitivity of the S@g-C_(3)N_(4)QD/LGS SAW sensor to NH_(3)(500 ppb)at RT is dramatically enhanced by~4.5-fold with a low detection limit(~85 ppb),high selectivity,excellent reproducibility,fast response/recovery time(70 s/79 s)under UV activation(365 nm)as compared to dark condition.Additionally,the proposed sensor exhibited augmented NH_(3)detection capability across the broad range of relative humidity(20%–80%).Such remarkable gas sensing performances of the as-prepared sensor to NH_(3)are attributed to the high surface area,enhanced functional groups,sulfur defects,UV photogenerated charge carriers,facile charge transfer in the S@g-C_(3)N_(4)QD sensing layer,which further helps to improve the gas molecules adsorption that causes the increase in conductivity,resulting in larger frequency responses.The gas sensing mechanism of S@g-C_(3)N_(4)QD/LGS SAW sensor is ascribed to the enhanced electroacoustic effect,which is supported by the correlation of resistive type and COMSOL Multiphysics simulation studies.We envisage that the present work paves a promising strategy to develop the next generation 2D g-C_(3)N_(4)based high responsive RT SAW gas sensors.

Surface acoustic wave devices for sensor applications

Surface acoustic wave （SAW） devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and have a high performance, among other advantages. SAW devices can work as filters, signal processing units, sensors and actuators. They can even work without batteries and operate under harsh environments. In this review, the operating principles of SAW sensors, including temperature sensors, pressure sensors, humidity sensors and biosensors, will be discussed. Several examples and related issues will be presented. Technological trends and future developments will also be discussed.

Langasite-based SAW high-temperature vibration sensor with temperature decoupling

Monitoring high-temperature vibrations is critical in aerospace engineering,industrial manufacturing,and energy production,where harsh conditions necessitate robust vibration sensors for detecting anomalous signals.However,the accuracy of such sensors is often compromised by crosstalk between temperature and vibration signals.This study introduces a high-temperature vibration sensor based on langasite(LGS)surface acoustic wave(SAW)technology,designed to withstand temperatures up to 500℃.The sensor demonstrates high sensitivity,ranging from 12.54 kHz/g at 25℃ to 15.63 k Hz/g at 500℃.A comprehensive mechanical and electrical coupling model for the SAW vibration sensor was developed by integrating theoretical equations with numerical simulations to optimize the sensor's performance.Additionally,a novel decoupling algorithm for temperature and vibration was established,achieving thermomechanical decoupling with precise vibration parameters.Experimental results indicated a maximum relative deviation of 4.67%for the algorithm.In conclusion,the proposed LGS SAW vibration sensor emerges as a promising solution for the accurate detection of multiple parameters in high-temperature vibration monitoring.

Surface acoustic wave sensor system applied to the kinetic study of urease in plant seeds

A new type of the surface acoustic wave (SAW) sensor system was delivered. Urease from several kinds of plant seeds was extracted with different extracting solvents. The urease activity, Michaelis constant and other kinetic parameters were estimated for the first time by means of the new device-SAW sensor system. Some factors such as pH, temperature, activators and inhibitors are also discussed. The method can be applied to the determination of urea content in human urine and the experimental results consist with those reported.

Development of a surface acoustic wave wireless and passive temperature sensor incorporating reflective delay line

based on optimal design on the core element of the sensor,a wireless and passive surface acoustic wave（SAW）temperature sensor integrated with ID Tag was presented.A reflective delay line,which consists of a transducer and eight reflectors on YZ LiNbO3 substrate.Was fabricated as the sensor element,in which,three reflectors were used for temperature sensing,and the other five were for the ID Tag using phase encoding.Single phase unidirectional transducers（SPUDTs）and shorted grating were used to structure the sAW device,leading to excellent signal to noise ratio（SNR）.The performance of the SAW device was simulated by the coupling of modes（COM）prior to fabrication.Using the network analyzer,the response in time domain of the fabricated 434 MHz SAW sensor was characterized,the measured S11 agrees well with the simulated one,sharp reflection peaks,high signal/noise,and low spurious noise between the reflection peaks were observed.Using the radar system based on FSCW as the reader unit.the developed SAW temperature sensors were evaluated wirelessly.Excellent1 inearity and good resolution of士1℃ were observed.

Integrated sensor based on acoustics-electricity-mechanics coupling effect for wireless passive gas detection

Integrated sensor combines multiple sensor functions into a single unit,which has the advantages of miniaturization and better application potential.However,limited by the sensing platforms of the sensor and the selectivity of the sensitive film,there are still challenges to realize multi-component gas detection in one unit.Herein,a principle integration method is proposed to achieve the multi-component gas detection based on the acoustics-electricity-mechanics coupling effect.The electrical and mechanical properties of the Bi_(2)S_(3)nanobelts materials in different atmospheres indicate the possibility of realizing the principle integration.At the same time,the surface acoustic wave(SAW)sensor as a multivariable physical transducer can sense both electrical and mechanical properties.Upon exposure to 10 ppm NO_(2),NH_(3),and their mixtures,the integrated SAW gas sensor shows a 4.5 kHz positive frequency shift(acoustoelectric effect),an 11 kHz negative frequency shift(mechanics effects),and a reduced 4 kHz negative frequency shift(acoustics-electricity-mechanics coupling effect),respectively.Moreover,we realize wireless passive detection of NO_(2)and NH_(3)based on the SAW sensor.Our work provides valuable insights that can serve as a guide to the design and fabrication of single sensors offering multi-component gas detection via different gas sensing mechanisms.

Surface Acoustic Wave Device with Reduced Insertion Loss by Electrospinning P(VDF–TrFE)/ZnO Nanocomposites

Surface acoustic wave(SAW) devices have been utilized for the sensing of chemical and biological phenomena in microscale for the past few decades. In this study, SAW device was fabricated by electrospinning poly(vinylidenefluoride-co-trifluoroethylene)(P(VDF-TrFE)) incorporated with zinc oxide(ZnO) nanoparticles over the delay line area of the SAW device. The morphology, composition, and crystallinity of P(VDF-TrFE)/ZnO nanocomposites were investigated. After measurement of SAW frequency response, it was found that the insertion loss of the SAW devices incorporated with ZnO nanoparticles was much less than that of the neat polymer-deposited device. The fabricated device was expected to be used in acoustic biosensors to detect and quantify the cell proliferation in cell culture systems.

Influence of the anisotropy on the magneto-acoustic response of magnetic surface acoustic wave resonators

One-port magnetic surface acoustic wave(MSAW) resonators are fabricated by stacking multilayered(FeCoSiB/SiO2)n films directly on top of interdigital electrodes. It is shown that the magneto-acoustic response of the MSAW resonators critically depends the hysteresis of △E effect. For the magnetic multilayer without induced magnetic anisotropy, the resonance frequency( fR) exhibits a butterfly-like dependence on the external field, therefore, enabling bipolar detection of magnetic field smaller than its coercive field. However, for the magnetic multilayers with induced magnetic anisotropy, butterfly-like or loop-like fR–H curves are measured along the interdigtial electrode fingers or the SAW propagation direction, which can be attributed to the competition between the magnetic field-induced anisotropy and the stress-induced or shape anisotropy.

面内传播方向对SAW滤波器性能的影响研究

为了满足窄带声表面波滤波器对品质因数Q值和带外抑制日益增长的需求,提出了一种窄带滤波器设计方法。在基于新型POI结构谐振器的基础上,通过旋转谐振器达到改变波传播角度的目的,并利用二维全模型得到准确的实验数据,与原结构谐振器分别代入滤波器设计中进行比较。实验结果表明,该方法在一定程度上能够有效地增加带外抑制,对过渡带抑制能力有2~4 dB的提升,且具有设计简便,占用空间小等优点。

基于软件无线电方案无线无源SAW温度阅读器设计

目前谐振型声表面波(SAW)阅读器射频电路大多采取分立器件设计,针对系统整体工作频段受限,硬件设计繁琐的问题,该文提出了一种软件无线电方案。软件无线电系统主体由ZYNQ和AD9361组成,射频收发端口添加LNA、PA进行信号功率放大,使用射频开关隔离收发。通过发射步进频率5 kHz、带宽1 MHz扫频信号,并对回波进行频谱分析求取最大值,最终得到谐振频率。针对SAW传感器回波持续时间较短而导致FFT计算分辨率的不足,使用重复采集增加数据长度,将阅读器的分辨率提高到468.75 Hz。实验结果表明,该阅读器能够正确探测传感器温度变化。

Fabrication and characterization of one-port surface acoustic wave resonators on semi-insulating GaN substrates

One-port surface acoustic wave resonators(SAWRs) are fabricated on semi-insulating high-quality bulk GaN and GaN film substrates, respectively. The semi-insulating GaN substrates are grown by hydride vapor phase epitaxy(HVPE)and doped with Fe. The anisotropy of Rayleigh propagation and the electromechanical coupling coefficient in Fe-doped GaN are investigated. The difference in resonance frequency between the SAWs between [1120] GaN and [1100] GaN is about 0.25% for the Rayleigh propagation mode, which is smaller than that of non-intentionally doped GaN film(~1%)reported in the literature. The electromechanical coupling coefficient of Fe-doped GaN is about 3.03%, which is higher than that of non-intentionally doped GaN film. The one-port SAWR fabricated on an 8-μm Fe-doped GaN/sapphire substrate has a quality factor of 2050, and that fabricated on Fe-doped bulk GaN has a quality factor as high as 3650. All of our results indicate that high-quality bulk GaN is a very promising material for application in SAW devices.

Temperature Characteristics of Surface Acoustic Waves Propagating on La_3Ga_5SiO_4 Substrates

Langasite (LGS) is a novel piezoelectric crystal. The authors numerically analyses the temperature stability of surface acoustic waves (SAW) and the relation of SAW propagation with temperature on certain optimal cuts on LGS in this paper. The results show that LGS has better temperature stability than traditional piezo crystals. The results also demonstrate that the velocity of SAW decrease with temperature, the electro-mechanical coupling constant (k2) and temperature coefficient of frequency increases parabolically and the power flow angle increases linearly on certain optimal cuts of LGS. The calculation result compared with the experimental and show good agreement.