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Chemical Mechanical Polishing of Glass Substrate with α-Alumina-g-Polystyrene Sulfonic Acid Composite Abrasive 被引量:9
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作者 LEI Hong BU Naijing ZHANG Zefang CHEN Ruling 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2010年第3期276-281,共6页
Abrasive is the one of key influencing factors during chemical mechanical polishing(CMP) process. Currently, α-Alumina (α-Al2O3) particle, as a kind of abrasive, has been widely used in CMP slurries, but their h... Abrasive is the one of key influencing factors during chemical mechanical polishing(CMP) process. Currently, α-Alumina (α-Al2O3) particle, as a kind of abrasive, has been widely used in CMP slurries, but their high hardness and poor dispersion stability often lead to more surface defects. After being polished with composite particles, the surface defects of work pieces decrease obviously. So the composite particles as abrasives in slurry have been paid more attention. In order to reduce defect caused by pure α-Al2O3 abrasive, α-alumina-g-polystyrene sulfonic acid (α-Al2O3-g-PSS) composite abrasive was prepared by surface graft polymerization. The composition, structure and morphology of the product were characterized by Fourier transform infrared spectroscopy(FTIR), X-ray photoelectron spectroscopy(XPS), time-of-flight secondary ion mass spectroscopy(TOF-SIMS), and scanning electron microscopy(SEM), respectively. The results show that polystyrene sulfonic acid grafts onto α-Al2O3, and has well dispersibility. Then, the chemical mechanical polishing performances of the composite abrasive on glass substrate were investigated with a SPEEDFAM-16B-4M CMP machine. Atomic force microscopy(AFM) images indicate that the average roughness of the polished glass substrate surface can be decreased from 0.835 nm for pure α-Al2O3 abrasive to 0.583 nm for prepared α-Al2O3-g-PSS core-shell abrasive. The research provides a new and effect way to improve the surface qualities during CMP. 展开更多
关键词 chemical mechanical polishing glass substrate α-alumina graft polymerization composite abrasive
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Thin Film of Mesoporous MCM-41 Grown on Indium-Tin-Oxide Glass Substrate 被引量:1
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作者 Zhang, J Xiong, HM +3 位作者 Ding, H Cai, Q Chen, JS Pang, WQ 《Chinese Chemical Letters》 SCIE CAS CSCD 1999年第4期335-338,共4页
From a basic solution containing celyltrimethylammonium cations as the template, thin film of mesoporous MCM-41 has been grown on the surface of a pre-treated indium-tin-oxide conducting glass substrate. The channel a... From a basic solution containing celyltrimethylammonium cations as the template, thin film of mesoporous MCM-41 has been grown on the surface of a pre-treated indium-tin-oxide conducting glass substrate. The channel axis of the film is oriented parallel with the surface plane of the substrate, and the film is stable after careful removal of template in vacuum. 展开更多
关键词 MESOPOROUS MCM-41 film ITO glass substrate basic medium SYNTHESIS
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In-situ growth of silver nanostructure on quartz glass substrates 被引量:1
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作者 易早 张建波 +5 位作者 牛高 陈艳 罗江山 吴卫东 易有根 唐永建 《Journal of Central South University》 SCIE EI CAS 2012年第2期312-318,共7页
Silver nanostructure compact aggregates on the surface of quartz glass substrates were synthesized by small gold seeds with the assistance of poly vinypyrrolidone (PVP) and irradiation of fluorescent lamp. The formati... Silver nanostructure compact aggregates on the surface of quartz glass substrates were synthesized by small gold seeds with the assistance of poly vinypyrrolidone (PVP) and irradiation of fluorescent lamp. The formation mechanism of silver nanostructure was proposed. The results show that both the PVP and the light irradiation are the keys to in-situ growth of silver nanostructure on quartz glass substrates. The silver nanostructure of the substrates which finally grow up to 150 nm after 20 h irradiation exhibits irregular shape, and some of nanoparticles stack to form bilayer. A new broad band appears in the absorption spectra of the substrates due to the interparticle dipole?dipole coupling of surface plasmon resonance response of the triangular silver nanoplate particles, which red shifts 600?800 nm as the particles grow up. The substrates have an emission band centered at 400 nm on their fluorescence spectra, and the fluorescence intensity shrinks as the average size of the silver nanostructure increases. The strongest SERS signal of SERS-active substrate is fabricated after 16 h. 展开更多
关键词 silver nanostrucatre seed-mediated method glass substrate surface plasmon resonance FLUORESCENCE surface enhanced Raman scattering
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Influencing Factors of Reheating Shrinkage Rate of Glass Substrate on LTPS Process 被引量:1
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作者 WANG Weilai TIAN Yingliang +4 位作者 WANG Wei LIU Yaru SUN Shibing LüFeng CHEN Xinxin 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2020年第4期682-685,共4页
Different heating treatments with the variation of heating rates,holding temperatures and holding time were used to simulate the LTPS procedure.The experimental results show that the reheating shrinkage rates of glass... Different heating treatments with the variation of heating rates,holding temperatures and holding time were used to simulate the LTPS procedure.The experimental results show that the reheating shrinkage rates of glass substrates are rarely changed with increasing the heating rate,but strongly enhanced by raising the holding temperature and time,which shows that the reheating shrinkage of glass is closely related to heat treatment and structural relaxation.The production process of glass is critical to the reheating shrinkage of glass. 展开更多
关键词 low temperature ploy-silicon(LTPS) glass substrates reheating shrinkage rate structural relaxation
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Development of a High-PerformanceFlexible Substrate for Flexible Electronics:Joining TAC Films and an Ultra-Thin Glassby Using TEOS-DAC Synthesized by the Sol-Gel Method 被引量:1
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作者 Tomoji Ohishi Hiroaki Kawada +1 位作者 Tsutomu Yoshida Takeshi Ohwada 《Materials Sciences and Applications》 2015年第12期1100-1110,共11页
A new flexible substrate for flexible electronics has been developed. The developed substrate consists of an ultra thin glass and TAC (triacethyl cellulose) film. An ultra thin glass and TAC film were joined with TEOS... A new flexible substrate for flexible electronics has been developed. The developed substrate consists of an ultra thin glass and TAC (triacethyl cellulose) film. An ultra thin glass and TAC film were joined with TEOS-DAC (TEOS: tetraethyl orthosilicate, DAC: diacethy cellulose) adhesive resin synthesized by sol-gel method by means of thermo-compression bonding. This substrate has high transparency in visible-light region (90%), high flexibility (torsion strength and bending strength) and high gas barrier characteristics due to an ultra thin glass. The newly-developed substrate is superior to the substrates fabricated with commercially available adhesive resin in the same way in characteristics of heat resistance, transparency and flexibility. 展开更多
关键词 FLEXIBLE Electronics FLEXIBLE substrate Ultra Thin glass Triacethyl CELLULOSE Film
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Effects of Substrate Temperatures on the Structure and UV-shielding Properties of TiO_2-CeO_2 Films Deposited on Glass by Radio-frequency Magnetron Sputtering
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作者 赵青南 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2005年第4期7-9,共3页
TiO2-CeO2 films were deposited on soda-lime glass substrates at varied substrate temperatures by rf magnetron sputtering using 40% molar TiO2-60% molar CeO2 ceramic target in Ar:O2=95:5 atmosphere.The structure,surf... TiO2-CeO2 films were deposited on soda-lime glass substrates at varied substrate temperatures by rf magnetron sputtering using 40% molar TiO2-60% molar CeO2 ceramic target in Ar:O2=95:5 atmosphere.The structure,surface composition,UV-visible spectra of the films were measured by scanning electron microscopy and X-ray diffraction,and X-ray photoelectron spectroscopy,respectively.The experimental results show that the films are amorphous,there are only Ti^4+ and Ce^4+ on the surface of the films,the obtained TiO2-CeO2 films shou a good uniformity and high densification,and the films deposited on the glass can shield ultraviolet light without significant absorpition of visible light,the films deposited on substrates at room temperature and 220℃ absorb UV effectively. 展开更多
关键词 rf sputtering TiO2-CeO2 films ultraviolet-shielding coating glass substrate temperatures
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Role of Bismuth and Substrate Temperature on the Optical Properties of Some Flash Evaporated Se<SUB>100-X</SUB>Bi<SUB>X</SUB>Glassy System
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作者 Austine A. Mulama Julius M. Mwabora +4 位作者 Andrew O. Oduor Cosmas M. Muiva Boniface Muthoka Betty N. Amukayia Drinold A. Mbete 《New Journal of Glass and Ceramics》 2015年第2期16-24,共9页
Chalcogenide glasses are very important in the modern technology especially selenium-based. These glasses are sensitive to electromagnetic radiation useful in the infrared optics. The study investigated the effect of ... Chalcogenide glasses are very important in the modern technology especially selenium-based. These glasses are sensitive to electromagnetic radiation useful in the infrared optics. The study investigated the effect of substrate temperature on the as-deposited selenium-bismuth thin films in addition to bismuth content. The films were deposited by flash evaporation method. Thickness of the films was measured on a surface profiler and confirmed through calculation based on the Swanepoel method. The spectral range of study was between 200 - 3000 nm. It is found that the effect of increasing bismuth content on the as-deposited films led to increased absorption coefficient, reflectance, refractive index and extinction coefficient while transmittance and optical band gap energy decreased. On the other hand, reflectance, absorption coefficient, extinction coefficient, refractive index, real and imaginary parts of dielectric constant increased with increase in substrate temperature but transmittance and optical band gap energy decreased. 展开更多
关键词 CHALCOGENIDE glass Selenium-Bismuth Alloy substrate Temperature
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Crystallization Kinetics of Nanophase Glass-Ceramics as Magnetic Disk Substrate
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作者 Shengyu JIANG Jiancheng ZHANG Feng GU Yue SHEN Hua WANG 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2006年第2期211-214,共4页
Glass-ceramics containing β-quartz as a main crystal phase based on the system of SiO2-Al2O3-Li2O-K2O-MgO-ZnO were investigated for the application to magnetic storage substrate for higher storage capacity. Parent gl... Glass-ceramics containing β-quartz as a main crystal phase based on the system of SiO2-Al2O3-Li2O-K2O-MgO-ZnO were investigated for the application to magnetic storage substrate for higher storage capacity. Parent glasses were prepared, then nucleated and crystallized at certain temperatures for 3-4 h. The crystallization kinetics of glass-ceramics was also studied. The grain size was estimated by Scherrer formula and image treatment of transmission electron microscopy (TEM). The results showed that the Avrami exponent was determined to be 3.88, the activation energy 189.3+7 k J/tool and the grain size 30-60 nm. A detailed microstructure of the glass-ceramics, including grain distribution and the morphology of nano-crystalline was characterized by TEM, X-ray diffraction (XRD), differential scanning calorimeter (DSC), differential thermal analysis (DTA). The relationship between microstructure and mechanical properties was also discussed. 展开更多
关键词 glass-CERAMICS KINETICS Disk substrate
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TFT-LCD基板玻璃磨削废水回收再利用系统
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作者 曹海勇 张占永 《玻璃搪瓷与眼镜》 CAS 2024年第2期31-35,共5页
在生产TFT-LCD基板玻璃的过程中,为了消除玻璃边部锐角、降低边部应力,需要对玻璃四边进行磨削加工。磨削过程会瞬时集聚大量的热量,因此需采用大量水冷却防止烧边、掉片等品质缺陷。为了保证冷却效果,避免玻璃表面污染,磨削用冷却水采... 在生产TFT-LCD基板玻璃的过程中,为了消除玻璃边部锐角、降低边部应力,需要对玻璃四边进行磨削加工。磨削过程会瞬时集聚大量的热量,因此需采用大量水冷却防止烧边、掉片等品质缺陷。为了保证冷却效果,避免玻璃表面污染,磨削用冷却水采用价格高昂的10 MΩ纯水。为了降低纯水消耗,开发了1套废水回收再利用系统,并改造G5代基板玻璃生产线。通过对比改造前后的纯水水质与玻璃加工品质,发现纯水用量显著降低,回收再利用水没有污染玻璃表面,边部满足品质管控要求,生产成本大幅缩减。该系统具有实际应用价值。 展开更多
关键词 基板玻璃 磨削 冷却水 纯水
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TFT-LCD及触摸屏玻璃基板激光断切现象研究
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作者 代冬生 《现代制造技术与装备》 2024年第6期22-24,共3页
激光切割技术已经成为玻璃生产及加工领域中的一种成熟的工业加工技术,具备高精度、高速度、高质量、高效率的优点。断切现象是薄膜晶体管液晶显示器(ThinFilmTransistorLiquid CrystalDisplay,TFT-LCD)及触摸屏玻璃基板激光切割的质量... 激光切割技术已经成为玻璃生产及加工领域中的一种成熟的工业加工技术,具备高精度、高速度、高质量、高效率的优点。断切现象是薄膜晶体管液晶显示器(ThinFilmTransistorLiquid CrystalDisplay,TFT-LCD)及触摸屏玻璃基板激光切割的质量问题之一。文章从设备接地、激光器出光功率稳定性、光路和软体系统信号对接4个方面分析短切现象产生的原因,并给出相应的处理方法,以期为常见激光切割质量问题的处理提供参考。 展开更多
关键词 薄膜晶体管液晶显示器(tft-lcd) 触摸屏 玻璃基板 激光切割 断切
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玻璃基板性能对TFT-LCD面板TP的影响
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作者 何流 闵蛟 +1 位作者 陆仕银 李纲 《玻璃》 2023年第6期29-34,共6页
平板显示技术不断更新迭代,TFT-LCD技术是目前市场上显示器使用的主流显示技术。TFT-LCD面板生产中关于TP不稳定的反馈也非常频繁,尤其是随着显示面板技术升级,图形精度要求越来越高,TP的问题日益突出。通过实验,从玻璃基板的密度、膨... 平板显示技术不断更新迭代,TFT-LCD技术是目前市场上显示器使用的主流显示技术。TFT-LCD面板生产中关于TP不稳定的反馈也非常频繁,尤其是随着显示面板技术升级,图形精度要求越来越高,TP的问题日益突出。通过实验,从玻璃基板的密度、膨胀系数、再热收缩率等物理性能角度,研究玻璃基板的性能对TP的影响。 展开更多
关键词 玻璃基板 TP 密度 膨胀系数 再热收缩率
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TFT-LCD玻璃基板板面划伤管控措施
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作者 何旭 闵蛟 《玻璃》 2023年第4期54-58,62,共6页
液晶玻璃基板生产过程中会产生各种板面缺陷,划伤为其代表性一种,这类缺陷与制造过程中所接触的设备零部件及介质有很大关联。为保证高品质玻璃基板产品,通过对TFT-LCD玻璃基板板面划伤产生机理分析、发生的风险识别,重点进行玻璃基板... 液晶玻璃基板生产过程中会产生各种板面缺陷,划伤为其代表性一种,这类缺陷与制造过程中所接触的设备零部件及介质有很大关联。为保证高品质玻璃基板产品,通过对TFT-LCD玻璃基板板面划伤产生机理分析、发生的风险识别,重点进行玻璃基板接触设备零部件及介质所引发板面划伤评估,制定相关的应对措施。摸索出了适合板面高品质要求的玻璃基板生产设备管控措施,达到了有效降低玻璃基板划伤产生的目的。 展开更多
关键词 tft-lcd玻璃基板 划伤 板面品质 管控措施
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TFT-LCD基板玻璃化学组成的发展状况与展望 被引量:42
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作者 田英良 张磊 +1 位作者 戴琳 程金树 《硅酸盐通报》 CAS CSCD 北大核心 2010年第6期1348-1352,1362,共6页
TFT-LCD基板玻璃是组成TFT-LCD的重要材料,其物理化学性能是由基板玻璃的化学组成来决定。文中介绍了典型商用TFT-LCD基板玻璃的化学组成及其物理化学性能,并对TFT-LCD基板玻璃的发展状况进行了展望。
关键词 tft-lcd 基板玻璃 化学组成
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残余应力分布对基板玻璃落球冲击强度影响的数值模拟研究
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作者 朱经纬 舒众众 +5 位作者 金良茂 曹志强 张冲 郑际杰 刘涌 韩高荣 《硅酸盐通报》 CAS 北大核心 2024年第4期1267-1273,1291,共8页
落球冲击强度是电子基板玻璃力学性能的重要指标,而残余应力对基板玻璃落球冲击强度有极大的影响。本文结合真实落球冲击试验,使用有限元方法对电子基板玻璃在不同残余应力分布模式下的落球冲击强度进行了数值模拟计算。结果表明,有限... 落球冲击强度是电子基板玻璃力学性能的重要指标,而残余应力对基板玻璃落球冲击强度有极大的影响。本文结合真实落球冲击试验,使用有限元方法对电子基板玻璃在不同残余应力分布模式下的落球冲击强度进行了数值模拟计算。结果表明,有限元数值模拟能够准确地反映落球冲击试验中的真实响应和基板玻璃破碎形貌。数值模拟中电子基板玻璃的落球冲击强度(通过残余质量率表征)和受冲击区域的残余张应力之间存在非线性关系,当残余张应力数值超过阈值时,落球冲击强度迅速下降。冲击区域存在的残余张应力对落球冲击产生的应力具有明显的放大作用,仅1.0 MPa的残余张应力就能使冲击产生的应力较无残余应力时提高约10 MPa,这是造成电子基板玻璃落球冲击强度下降的重要原因。 展开更多
关键词 电子基板玻璃 落球冲击强度 残余应力 数值模拟 落球冲击试验
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TFT-LCD基板玻璃熔窑与供料道设计原理与结构浅析 被引量:8
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作者 田英良 孙诗兵 +2 位作者 梁新辉 张磊 程金树 《玻璃与搪瓷》 CAS 2010年第4期4-7,共4页
基板玻璃已经成为薄膜晶体管液晶显示器(TFT-LCD)的关键材料之一,针对TFT-LCD基板玻璃的熔化成形要求,探讨了TFT-LCD基板玻璃熔窑的设计原理和结构,同时对供料道在玻璃熔制过程中的澄清和均化作用的原理进行了分析,藉此对我国TFT-LCD... 基板玻璃已经成为薄膜晶体管液晶显示器(TFT-LCD)的关键材料之一,针对TFT-LCD基板玻璃的熔化成形要求,探讨了TFT-LCD基板玻璃熔窑的设计原理和结构,同时对供料道在玻璃熔制过程中的澄清和均化作用的原理进行了分析,藉此对我国TFT-LCD基板玻璃的开发工作提供帮助和借鉴。 展开更多
关键词 tft-lcd 基板玻璃 熔窑结构 供料道
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TFT-LCD玻璃基板的本构参数研究及其切割过程分析 被引量:3
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作者 赵靖超 王建花 轧刚 《现代制造工程》 CSCD 北大核心 2013年第9期79-82,共4页
为解决切割TFT-LCD玻璃基板过程中裂纹动态扩展的不确定性,利用MATLAB软件建立切割过程的计算模型并融入JHC本构模型、玻璃基板材料力学性能和脆性材料力学特性,得出玻璃基板本构参数,并通过实际切割效果与理论仿真结果相结合的方法进... 为解决切割TFT-LCD玻璃基板过程中裂纹动态扩展的不确定性,利用MATLAB软件建立切割过程的计算模型并融入JHC本构模型、玻璃基板材料力学性能和脆性材料力学特性,得出玻璃基板本构参数,并通过实际切割效果与理论仿真结果相结合的方法进一步完善本构参数,模拟切割过程,分析切割过程中影响刀轮受力与裂纹动态扩展的因素,为合理选择切割参数及刀具几何参数、保证玻璃切割质量提供了理论依据。 展开更多
关键词 切割 玻璃基板 JHC模型 脆性材料 本构参数
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平板显示器基板玻璃标准分析
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作者 钱文冰 孙新乐 +1 位作者 王振宇 赵梦晗 《信息技术与标准化》 2024年第4期90-95,共6页
为充分发挥标准对支持、规范和引领产业发展的重要作用,对我国平板显示器基板玻璃的国家标准和行业标准按基础通用、产品、方法进行分类梳理,详细阐述了我国平板显示器基板玻璃标准的具体内容、使用范围与发展趋势等方面,分析了超薄基... 为充分发挥标准对支持、规范和引领产业发展的重要作用,对我国平板显示器基板玻璃的国家标准和行业标准按基础通用、产品、方法进行分类梳理,详细阐述了我国平板显示器基板玻璃标准的具体内容、使用范围与发展趋势等方面,分析了超薄基板玻璃的力学性能和热学性能标准,为未来我国平板显示器基板玻璃标准的发展提供参考。 展开更多
关键词 标准 平板显示器 基板玻璃 超薄玻璃
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基于相似原理的基板玻璃铂金通道澄清物理模拟试验研究 被引量:1
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作者 俞超 徐剑 +2 位作者 杨威 王梦龙 王苍龙 《玻璃》 2024年第3期8-13,共6页
玻璃液澄清作为基板玻璃生产关键工艺环节,其运行环境温度高且有耐火材料包覆,包括一系列物理与化学反应,过程非常复杂,无法进行在线研究。为实现对基板玻璃澄清排泡过程的研究,基于相似原理,构建铂金通道澄清物理模拟试验模型,借助澄... 玻璃液澄清作为基板玻璃生产关键工艺环节,其运行环境温度高且有耐火材料包覆,包括一系列物理与化学反应,过程非常复杂,无法进行在线研究。为实现对基板玻璃澄清排泡过程的研究,基于相似原理,构建铂金通道澄清物理模拟试验模型,借助澄清物理试验模型对玻璃液澄清排泡过程进行试验验证,为大流量下铂金本体设计和澄清工艺探究提供参考依据。 展开更多
关键词 基板玻璃 相似原理 物理模拟 澄清排泡
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封装用玻璃基板的热应力翘曲研究 被引量:1
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作者 闫伟伟 朱泽力 李景明 《电子与封装》 2024年第1期1-5,共5页
通过理论分析、仿真模拟、实验验证相结合的方法对封装用玻璃基板的热应力翘曲进行研究。结果表明,相较于传统的有机化合物基板,玻璃基板降低热应力翘曲的效果十分显著。以双材料板模型为研究对象,通过对不同模型进行分析对比,总结了不... 通过理论分析、仿真模拟、实验验证相结合的方法对封装用玻璃基板的热应力翘曲进行研究。结果表明,相较于传统的有机化合物基板,玻璃基板降低热应力翘曲的效果十分显著。以双材料板模型为研究对象,通过对不同模型进行分析对比,总结了不同因素对热应力翘曲的影响。增加玻璃基板的厚度对降低翘曲的效果最为显著。提高玻璃基板的热膨胀系数(CTE),使其接近堆积膜的CTE,有助于降低翘曲。对堆积膜进行较多的分区可以显著改善翘曲。同时,重力也是不可忽略的影响因素,产品的放置方式决定了翘曲方向并影响翘曲值的大小。 展开更多
关键词 热应力翘曲 玻璃基板 仿真实验 双材料板
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中国TFT-LCD基板玻璃产业发展概述 被引量:2
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作者 田英良 《玻璃搪瓷与眼镜》 CAS 2022年第12期31-35,共5页
结合我国薄膜晶体管液晶显示(TFT-LCD)产业发展,按照时间顺序和产业参与主体回顾了我国LCD基板玻璃产业发展历史。在国家政策支持和企业努力下,整个LCD基板玻璃产业经历三十余年的探索与磨砺,终于在“十三五”期间突破了基板玻璃G8.5系... 结合我国薄膜晶体管液晶显示(TFT-LCD)产业发展,按照时间顺序和产业参与主体回顾了我国LCD基板玻璃产业发展历史。在国家政策支持和企业努力下,整个LCD基板玻璃产业经历三十余年的探索与磨砺,终于在“十三五”期间突破了基板玻璃G8.5系列的技术壁垒,实现了高世代、大尺寸LCD面板用基板玻璃国产化配套。LCD基板玻璃产业做大做强还需政产学研用多方共同努力补链和强链,才能尽早实现我国LCD基板玻璃产业的自主可控。 展开更多
关键词 薄膜晶体管液晶显示 基板玻璃 产业发展 自主可控
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