Abrasive is the one of key influencing factors during chemical mechanical polishing（CMP） process. Currently, α-Alumina （α-Al2O3） particle, as a kind of abrasive, has been widely used in CMP slurries, but their h...Abrasive is the one of key influencing factors during chemical mechanical polishing（CMP） process. Currently, α-Alumina （α-Al2O3） particle, as a kind of abrasive, has been widely used in CMP slurries, but their high hardness and poor dispersion stability often lead to more surface defects. After being polished with composite particles, the surface defects of work pieces decrease obviously. So the composite particles as abrasives in slurry have been paid more attention. In order to reduce defect caused by pure α-Al2O3 abrasive, α-alumina-g-polystyrene sulfonic acid （α-Al2O3-g-PSS） composite abrasive was prepared by surface graft polymerization. The composition, structure and morphology of the product were characterized by Fourier transform infrared spectroscopy（FTIR）, X-ray photoelectron spectroscopy（XPS）, time-of-flight secondary ion mass spectroscopy（TOF-SIMS）, and scanning electron microscopy（SEM）, respectively. The results show that polystyrene sulfonic acid grafts onto α-Al2O3, and has well dispersibility. Then, the chemical mechanical polishing performances of the composite abrasive on glass substrate were investigated with a SPEEDFAM-16B-4M CMP machine. Atomic force microscopy（AFM） images indicate that the average roughness of the polished glass substrate surface can be decreased from 0.835 nm for pure α-Al2O3 abrasive to 0.583 nm for prepared α-Al2O3-g-PSS core-shell abrasive. The research provides a new and effect way to improve the surface qualities during CMP.展开更多
From a basic solution containing celyltrimethylammonium cations as the template, thin film of mesoporous MCM-41 has been grown on the surface of a pre-treated indium-tin-oxide conducting glass substrate. The channel a...From a basic solution containing celyltrimethylammonium cations as the template, thin film of mesoporous MCM-41 has been grown on the surface of a pre-treated indium-tin-oxide conducting glass substrate. The channel axis of the film is oriented parallel with the surface plane of the substrate, and the film is stable after careful removal of template in vacuum.展开更多
Silver nanostructure compact aggregates on the surface of quartz glass substrates were synthesized by small gold seeds with the assistance of poly vinypyrrolidone (PVP) and irradiation of fluorescent lamp. The formati...Silver nanostructure compact aggregates on the surface of quartz glass substrates were synthesized by small gold seeds with the assistance of poly vinypyrrolidone (PVP) and irradiation of fluorescent lamp. The formation mechanism of silver nanostructure was proposed. The results show that both the PVP and the light irradiation are the keys to in-situ growth of silver nanostructure on quartz glass substrates. The silver nanostructure of the substrates which finally grow up to 150 nm after 20 h irradiation exhibits irregular shape, and some of nanoparticles stack to form bilayer. A new broad band appears in the absorption spectra of the substrates due to the interparticle dipole?dipole coupling of surface plasmon resonance response of the triangular silver nanoplate particles, which red shifts 600?800 nm as the particles grow up. The substrates have an emission band centered at 400 nm on their fluorescence spectra, and the fluorescence intensity shrinks as the average size of the silver nanostructure increases. The strongest SERS signal of SERS-active substrate is fabricated after 16 h.展开更多
Different heating treatments with the variation of heating rates,holding temperatures and holding time were used to simulate the LTPS procedure.The experimental results show that the reheating shrinkage rates of glass...Different heating treatments with the variation of heating rates,holding temperatures and holding time were used to simulate the LTPS procedure.The experimental results show that the reheating shrinkage rates of glass substrates are rarely changed with increasing the heating rate,but strongly enhanced by raising the holding temperature and time,which shows that the reheating shrinkage of glass is closely related to heat treatment and structural relaxation.The production process of glass is critical to the reheating shrinkage of glass.展开更多
A new flexible substrate for flexible electronics has been developed. The developed substrate consists of an ultra thin glass and TAC (triacethyl cellulose) film. An ultra thin glass and TAC film were joined with TEOS...A new flexible substrate for flexible electronics has been developed. The developed substrate consists of an ultra thin glass and TAC (triacethyl cellulose) film. An ultra thin glass and TAC film were joined with TEOS-DAC (TEOS: tetraethyl orthosilicate, DAC: diacethy cellulose) adhesive resin synthesized by sol-gel method by means of thermo-compression bonding. This substrate has high transparency in visible-light region (90%), high flexibility (torsion strength and bending strength) and high gas barrier characteristics due to an ultra thin glass. The newly-developed substrate is superior to the substrates fabricated with commercially available adhesive resin in the same way in characteristics of heat resistance, transparency and flexibility.展开更多
TiO2-CeO2 films were deposited on soda-lime glass substrates at varied substrate temperatures by rf magnetron sputtering using 40% molar TiO2-60% molar CeO2 ceramic target in Ar：O2=95：5 atmosphere.The structure,surf...TiO2-CeO2 films were deposited on soda-lime glass substrates at varied substrate temperatures by rf magnetron sputtering using 40% molar TiO2-60% molar CeO2 ceramic target in Ar：O2=95：5 atmosphere.The structure,surface composition,UV-visible spectra of the films were measured by scanning electron microscopy and X-ray diffraction,and X-ray photoelectron spectroscopy,respectively.The experimental results show that the films are amorphous,there are only Ti^4＋ and Ce^4＋ on the surface of the films,the obtained TiO2-CeO2 films shou a good uniformity and high densification,and the films deposited on the glass can shield ultraviolet light without significant absorpition of visible light,the films deposited on substrates at room temperature and 220℃ absorb UV effectively.展开更多
Chalcogenide glasses are very important in the modern technology especially selenium-based. These glasses are sensitive to electromagnetic radiation useful in the infrared optics. The study investigated the effect of ...Chalcogenide glasses are very important in the modern technology especially selenium-based. These glasses are sensitive to electromagnetic radiation useful in the infrared optics. The study investigated the effect of substrate temperature on the as-deposited selenium-bismuth thin films in addition to bismuth content. The films were deposited by flash evaporation method. Thickness of the films was measured on a surface profiler and confirmed through calculation based on the Swanepoel method. The spectral range of study was between 200 - 3000 nm. It is found that the effect of increasing bismuth content on the as-deposited films led to increased absorption coefficient, reflectance, refractive index and extinction coefficient while transmittance and optical band gap energy decreased. On the other hand, reflectance, absorption coefficient, extinction coefficient, refractive index, real and imaginary parts of dielectric constant increased with increase in substrate temperature but transmittance and optical band gap energy decreased.展开更多
Glass-ceramics containing β-quartz as a main crystal phase based on the system of SiO2-Al2O3-Li2O-K2O-MgO-ZnO were investigated for the application to magnetic storage substrate for higher storage capacity. Parent gl...Glass-ceramics containing β-quartz as a main crystal phase based on the system of SiO2-Al2O3-Li2O-K2O-MgO-ZnO were investigated for the application to magnetic storage substrate for higher storage capacity. Parent glasses were prepared, then nucleated and crystallized at certain temperatures for 3-4 h. The crystallization kinetics of glass-ceramics was also studied. The grain size was estimated by Scherrer formula and image treatment of transmission electron microscopy （TEM）. The results showed that the Avrami exponent was determined to be 3.88, the activation energy 189.3＋7 k J/tool and the grain size 30-60 nm. A detailed microstructure of the glass-ceramics, including grain distribution and the morphology of nano-crystalline was characterized by TEM, X-ray diffraction （XRD）, differential scanning calorimeter （DSC）, differential thermal analysis （DTA）. The relationship between microstructure and mechanical properties was also discussed.展开更多
基金supported by National Natural Science Foundation of China (Grant No. 60773080, Grant No. 90923016)Innovation Program of Shanghai Municipal Education Commission, China (Grant No. 09ZZ86)Leading Academic Discipline Project of Shanghai Municipal Education Commission, China (Grant No. J50102)
文摘Abrasive is the one of key influencing factors during chemical mechanical polishing（CMP） process. Currently, α-Alumina （α-Al2O3） particle, as a kind of abrasive, has been widely used in CMP slurries, but their high hardness and poor dispersion stability often lead to more surface defects. After being polished with composite particles, the surface defects of work pieces decrease obviously. So the composite particles as abrasives in slurry have been paid more attention. In order to reduce defect caused by pure α-Al2O3 abrasive, α-alumina-g-polystyrene sulfonic acid （α-Al2O3-g-PSS） composite abrasive was prepared by surface graft polymerization. The composition, structure and morphology of the product were characterized by Fourier transform infrared spectroscopy（FTIR）, X-ray photoelectron spectroscopy（XPS）, time-of-flight secondary ion mass spectroscopy（TOF-SIMS）, and scanning electron microscopy（SEM）, respectively. The results show that polystyrene sulfonic acid grafts onto α-Al2O3, and has well dispersibility. Then, the chemical mechanical polishing performances of the composite abrasive on glass substrate were investigated with a SPEEDFAM-16B-4M CMP machine. Atomic force microscopy（AFM） images indicate that the average roughness of the polished glass substrate surface can be decreased from 0.835 nm for pure α-Al2O3 abrasive to 0.583 nm for prepared α-Al2O3-g-PSS core-shell abrasive. The research provides a new and effect way to improve the surface qualities during CMP.
文摘From a basic solution containing celyltrimethylammonium cations as the template, thin film of mesoporous MCM-41 has been grown on the surface of a pre-treated indium-tin-oxide conducting glass substrate. The channel axis of the film is oriented parallel with the surface plane of the substrate, and the film is stable after careful removal of template in vacuum.
基金Projects(10804101,60908023)supported by the National Natural Science Foundation of ChinaProject(2007CB815102)supported by the National Basic Research Program of ChinaProject(2007B08007)supported by the Science and Technology Development Foundation of Chinese Academy of Engineering Physics
文摘Silver nanostructure compact aggregates on the surface of quartz glass substrates were synthesized by small gold seeds with the assistance of poly vinypyrrolidone (PVP) and irradiation of fluorescent lamp. The formation mechanism of silver nanostructure was proposed. The results show that both the PVP and the light irradiation are the keys to in-situ growth of silver nanostructure on quartz glass substrates. The silver nanostructure of the substrates which finally grow up to 150 nm after 20 h irradiation exhibits irregular shape, and some of nanoparticles stack to form bilayer. A new broad band appears in the absorption spectra of the substrates due to the interparticle dipole?dipole coupling of surface plasmon resonance response of the triangular silver nanoplate particles, which red shifts 600?800 nm as the particles grow up. The substrates have an emission band centered at 400 nm on their fluorescence spectra, and the fluorescence intensity shrinks as the average size of the silver nanostructure increases. The strongest SERS signal of SERS-active substrate is fabricated after 16 h.
基金Funded by the National Key R&D Program of China(2017YFB0310201-04)。
文摘Different heating treatments with the variation of heating rates,holding temperatures and holding time were used to simulate the LTPS procedure.The experimental results show that the reheating shrinkage rates of glass substrates are rarely changed with increasing the heating rate,but strongly enhanced by raising the holding temperature and time,which shows that the reheating shrinkage of glass is closely related to heat treatment and structural relaxation.The production process of glass is critical to the reheating shrinkage of glass.
文摘A new flexible substrate for flexible electronics has been developed. The developed substrate consists of an ultra thin glass and TAC (triacethyl cellulose) film. An ultra thin glass and TAC film were joined with TEOS-DAC (TEOS: tetraethyl orthosilicate, DAC: diacethy cellulose) adhesive resin synthesized by sol-gel method by means of thermo-compression bonding. This substrate has high transparency in visible-light region (90%), high flexibility (torsion strength and bending strength) and high gas barrier characteristics due to an ultra thin glass. The newly-developed substrate is superior to the substrates fabricated with commercially available adhesive resin in the same way in characteristics of heat resistance, transparency and flexibility.
文摘TiO2-CeO2 films were deposited on soda-lime glass substrates at varied substrate temperatures by rf magnetron sputtering using 40% molar TiO2-60% molar CeO2 ceramic target in Ar：O2=95：5 atmosphere.The structure,surface composition,UV-visible spectra of the films were measured by scanning electron microscopy and X-ray diffraction,and X-ray photoelectron spectroscopy,respectively.The experimental results show that the films are amorphous,there are only Ti^4＋ and Ce^4＋ on the surface of the films,the obtained TiO2-CeO2 films shou a good uniformity and high densification,and the films deposited on the glass can shield ultraviolet light without significant absorpition of visible light,the films deposited on substrates at room temperature and 220℃ absorb UV effectively.
文摘Chalcogenide glasses are very important in the modern technology especially selenium-based. These glasses are sensitive to electromagnetic radiation useful in the infrared optics. The study investigated the effect of substrate temperature on the as-deposited selenium-bismuth thin films in addition to bismuth content. The films were deposited by flash evaporation method. Thickness of the films was measured on a surface profiler and confirmed through calculation based on the Swanepoel method. The spectral range of study was between 200 - 3000 nm. It is found that the effect of increasing bismuth content on the as-deposited films led to increased absorption coefficient, reflectance, refractive index and extinction coefficient while transmittance and optical band gap energy decreased. On the other hand, reflectance, absorption coefficient, extinction coefficient, refractive index, real and imaginary parts of dielectric constant increased with increase in substrate temperature but transmittance and optical band gap energy decreased.
基金The work was supported by the National Natural Science Foundation of China(Grant No.90206017)the High Tech.Program of Ministry of Science and Technology of China(Grant No.2003BA301A21)+2 种基金the Science and Technology Development Foundation of University of Shanghai(Grant No.02AK26)the Applied Materials(AM)Foundation(Grant No.0208)the Key Subject Construction Project(Material Science)of Shanghai Educational Committee.
文摘Glass-ceramics containing β-quartz as a main crystal phase based on the system of SiO2-Al2O3-Li2O-K2O-MgO-ZnO were investigated for the application to magnetic storage substrate for higher storage capacity. Parent glasses were prepared, then nucleated and crystallized at certain temperatures for 3-4 h. The crystallization kinetics of glass-ceramics was also studied. The grain size was estimated by Scherrer formula and image treatment of transmission electron microscopy （TEM）. The results showed that the Avrami exponent was determined to be 3.88, the activation energy 189.3＋7 k J/tool and the grain size 30-60 nm. A detailed microstructure of the glass-ceramics, including grain distribution and the morphology of nano-crystalline was characterized by TEM, X-ray diffraction （XRD）, differential scanning calorimeter （DSC）, differential thermal analysis （DTA）. The relationship between microstructure and mechanical properties was also discussed.
