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OptoGPT: A foundation model for inverse design in optical multilayer thin film structures 被引量:1
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作者 Taigao Ma Haozhu Wang L.Jay Guo 《Opto-Electronic Advances》 SCIE EI CAS CSCD 2024年第7期4-16,共13页
Optical multilayer thin film structures have been widely used in numerous photonic applications.However,existing inverse design methods have many drawbacks because they either fail to quickly adapt to different design... Optical multilayer thin film structures have been widely used in numerous photonic applications.However,existing inverse design methods have many drawbacks because they either fail to quickly adapt to different design targets,or are difficult to suit for different types of structures,e.g.,designing for different materials at each layer.These methods also cannot accommodate versatile design situations under different angles and polarizations.In addition,how to benefit practical fabrications and manufacturing has not been extensively considered yet.In this work,we introduce OptoGPT(Opto Generative Pretrained Transformer),a decoder-only transformer,to solve all these drawbacks and issues simultaneously. 展开更多
关键词 multilayer thin film structure inverse design foundation models deep learning structural color
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Development of in situ characterization techniques in molecular beam epitaxy 被引量:1
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作者 Chao Shen Wenkang Zhan +7 位作者 Manyang Li Zhenyu Sun Jian Tang Zhaofeng Wu Chi Xu Bo Xu Chao Zhao Zhanguo Wang 《Journal of Semiconductors》 EI CAS CSCD 2024年第3期9-32,共24页
Ex situ characterization techniques in molecular beam epitaxy(MBE)have inherent limitations,such as being prone to sample contamination and unstable surfaces during sample transfer from the MBE chamber.In recent years... Ex situ characterization techniques in molecular beam epitaxy(MBE)have inherent limitations,such as being prone to sample contamination and unstable surfaces during sample transfer from the MBE chamber.In recent years,the need for improved accuracy and reliability in measurement has driven the increasing adoption of in situ characterization techniques.These techniques,such as reflection high-energy electron diffraction,scanning tunneling microscopy,and X-ray photoelectron spectroscopy,allow direct observation of film growth processes in real time without exposing the sample to air,hence offering insights into the growth mechanisms of epitaxial films with controlled properties.By combining multiple in situ characterization techniques with MBE,researchers can better understand film growth processes,realizing novel materials with customized properties and extensive applications.This review aims to overview the benefits and achievements of in situ characterization techniques in MBE and their applications for material science research.In addition,through further analysis of these techniques regarding their challenges and potential solutions,particularly highlighting the assistance of machine learning to correlate in situ characterization with other material information,we hope to provide a guideline for future efforts in the development of novel monitoring and control schemes for MBE growth processes with improved material properties. 展开更多
关键词 epitaxial growth thin film in situ characterization molecular beam epitaxy(MBE)
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Impact of oxygen incorporation on interface optimization and defect suppression for efficiency enhancement in Cu_(2)ZnSn(S,Se)_(4)solar cells
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作者 Shicheng Deng Songfan Wang +7 位作者 Yuanyuan Wang Qian Xiao Yuena Meng Dongxing Kou Wenhui Zhou Zhengji Zhou Zhi Zheng Sixin Wu 《Journal of Energy Chemistry》 SCIE EI CAS CSCD 2024年第8期77-85,I0003,共10页
Kesterite Cu_(2)ZnSn(S,Se)_(4)(CZTSSe)solar cells suffer from severe carrier recombination,limiting the photovoltaic performance.Unfavorable energy band alignment at the p-n junction and defective front interface are ... Kesterite Cu_(2)ZnSn(S,Se)_(4)(CZTSSe)solar cells suffer from severe carrier recombination,limiting the photovoltaic performance.Unfavorable energy band alignment at the p-n junction and defective front interface are two main causes.Herein,oxygen incorporation in CZTSSe via absorber air-annealing was developed as a strategy to optimize its surface photoelectric property and reduce the defects.With optimized oxygen incorporation conditions,the carrier separation and collection behavior at the front interface of the device is improved.In particular,it is found that oxygen incorporated absorber exhibits increased band bending,larger depletion region width,and suppressed absorber defects.These indicate the dynamic factors for carrier separation become stronger.Meanwhile,the increased potential difference between grain boundaries and intra grains combined with the decreased concentration of interface deep level defect in the absorber provide a better path for carrier transport.As a consequence,the champion efficiency of CZTSSe solar cells has been improved from 9.74%to 12.04%with significantly improved open-circuit voltage after optimized air-annealing condition.This work provides a new insight for interface engineering to improve the photoelectric conversion efficiency of CZTSSe devices. 展开更多
关键词 KESTERITE Thin film solar cell Interface optimization Surface oxidation Defect suppression
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Effects of gallium surfactant on AlN thin films by microwave plasma chemical vapor deposition
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作者 Lu Wang Xulei Qin +8 位作者 Li Zhang Kun Xu Feng Yang Shaoqian Lu Yifei Li Bosen Liu Guohao Yu Zhongming Zeng Baoshun Zhang 《Journal of Semiconductors》 EI CAS CSCD 2024年第9期53-60,共8页
In this work, AlN films were grown using gallium (Ga) as surfactant on 4° off-axis 4H-SiC substrates via microwave plasma chemical vapor deposition (MPCVD). We have found that AlN growth rate can be greatly impro... In this work, AlN films were grown using gallium (Ga) as surfactant on 4° off-axis 4H-SiC substrates via microwave plasma chemical vapor deposition (MPCVD). We have found that AlN growth rate can be greatly improved due to the catalytic effect of trimethyl-gallium (TMGa), but AlN crystal structure and composition are not affected. When the proportion of TMGa in gas phase was low, crystal quality of AlN can be improved and three-dimensional growth mode of AlN was enhanced with the increase of Ga source. When the proportion of TMGa in gas phase was high, two-dimensional growth mode of AlN was presented, with the increase of Ga source results in the deterioration of AlN crystal quality. Finally, employing a two-step growth approach, involving the initial growth of Ga-free AlN nucleation layer followed by Ga-assisted AlN growth, high quality of AlN film with flat surface was obtained and the full width at half maximum (FWHM) values of 415 nm AlN (002) and (102) planes were 465 and 597 arcsec. 展开更多
关键词 AlN thin film MPCVD gallium surfactant nucleation layer LASER
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Ultrafast carrier dynamics in GeSn thin film based on time-resolved terahertz spectroscopy
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作者 黄盼盼 张有禄 +3 位作者 胡凯 齐静波 张岱南 程亮 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第1期164-169,共6页
We measure the time-resolved terahertz spectroscopy of GeSn thin film and studied the ultrafast dynamics of its photo-generated carriers.The experimental results show that there are photo-generated carriers in GeSn un... We measure the time-resolved terahertz spectroscopy of GeSn thin film and studied the ultrafast dynamics of its photo-generated carriers.The experimental results show that there are photo-generated carriers in GeSn under femtosecond laser excitation at 2500 nm,and its pump-induced photoconductivity can be explained by the Drude–Smith model.The carrier recombination process is mainly dominated by defect-assisted Auger processes and defect capture.The firstand second-order recombination rates are obtained by the rate equation fitting,which are(2.6±1.1)×10^(-2)ps^(-1)and(6.6±1.8)×10^(-19)cm^(3)·ps^(-1),respectively.Meanwhile,we also obtain the diffusion length of photo-generated carriers in GeSn,which is about 0.4μm,and it changes with the pump delay time.These results are important for the GeSn-based infrared optoelectronic devices,and demonstrate that Ge Sn materials can be applied to high-speed optoelectronic detectors and other applications. 展开更多
关键词 GeSn thin film time-resolved THz spectroscopy ultrafast dynamics carrier recombination
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Structural and magnetic properties of micropolycrystalline cobalt thin films fabricated by direct current magnetron sputtering
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作者 Kerui Song Zhou Li +2 位作者 Mei Fang Zhu Xiao Qian Lei 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 2024年第2期384-394,共11页
Pure cobalt(Co)thin films were fabricated by direct current magnetron sputtering,and the effects of sputtering power and pres-sure on the microstructure and electromagnetic properties of the films were investigated.As... Pure cobalt(Co)thin films were fabricated by direct current magnetron sputtering,and the effects of sputtering power and pres-sure on the microstructure and electromagnetic properties of the films were investigated.As the sputtering power increases from 15 to 60 W,the Co thin films transition from an amorphous to a polycrystalline state,accompanied by an increase in the intercrystal pore width.Simultaneously,the resistivity decreases from 276 to 99μΩ·cm,coercivity increases from 162 to 293 Oe,and in-plane magnetic aniso-tropy disappears.As the sputtering pressure decreases from 1.6 to 0.2 Pa,grain size significantly increases,resistivity significantly de-creases,and the coercivity significantly increases(from 67 to 280 Oe),which can be attributed to the increase in defect width.Corres-pondingly,a quantitative model for the coercivity of Co thin films was formulated.The polycrystalline films sputtered under pressures of 0.2 and 0.4 Pa exhibit significant in-plane magnetic anisotropy,which is primarily attributable to increased microstress. 展开更多
关键词 cobalt thin film magnetron sputtering microstructure electromagnetic properties
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Film Flow of Nano-Micropolar Fluid with Dissipation Effect
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作者 Abuzar Abid Siddiqui Mustafa Turkyilmazoglu 《Computer Modeling in Engineering & Sciences》 SCIE EI 2024年第9期2487-2512,共26页
The physical problem of the thin film flow of a micropolar fluid over a dynamic and inclined substrate under the influence of gravitational and thermal forces in the presence of nanoparticles is formulated.Five differ... The physical problem of the thin film flow of a micropolar fluid over a dynamic and inclined substrate under the influence of gravitational and thermal forces in the presence of nanoparticles is formulated.Five different types of nanoparticle samples are accounted for in this current study,namely gold Au,silver Ag,molybdenum disulfide MoS_(2),aluminum oxide Al_(2)O_(3),and silicon dioxide SiO_(2).Blood,a micropolar fluid,serves as the common base fluid.An exact closed-form solution for this problem is derived for the first time in the literature.The results are particularly validated against those for the Newtonian fluid and show excellent agreement.It was found that increasing values of the spin boundary condition and micropolarity lead to a reduction in both the thermal and momentum boundary layers.A quantitative decay in the Nusselt number for a micropolar fluid,as compared to a Newtonian one for all the tested nanoparticles,is anticipated.Gold and silver nanoparticles(i)intensify in the flow parameter as the concentration of nanoparticles increases(ii)yield a higher thermal transfer rate,whereas molybdenum disulfide,aluminum oxide,and silicon dioxide exhibit a converse attitude for both Newtonian and micropolar fluids.The reduction in film thickness for fluid comprising gold particles,as compared to the rest of the nanoparticles,is remarkable. 展开更多
关键词 Thin film flow micropolar fluid NANOPARTICLES molybdenum disulfide inclined substrate
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Exploring negative ion behaviors and their influence on properties of DC magnetron sputtered ITO films under varied power and pressure conditions
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作者 Maoyang Li Chaochao Mo +6 位作者 Peiyu Ji Xiaoman Zhang Jiali Chen Lanjian Zhuge Xuemei Wu Haiyun Tan Tianyuan Huang 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第10期442-449,共8页
We deposited indium-tin-oxide(ITO)films on silicon and quartz substrates by magnetron sputtering technology in pure argon.Using electrostatic quadrupole plasma diagnostic technology,we investigate the effects of disch... We deposited indium-tin-oxide(ITO)films on silicon and quartz substrates by magnetron sputtering technology in pure argon.Using electrostatic quadrupole plasma diagnostic technology,we investigate the effects of discharge power and discharge pressure on the ion flux and energy distribution function of incidence on the substrate surface,with special attention to the production of high-energy negative oxygen ions,and elucidate the mechanism behind its production.At the same time,the structure and properties of ITO films are systematically characterized to understand the potential effects of high energy oxygen ions on the growth of ITO films.Combining with the kinetic property analysis of sputtering damage mechanism of transparent conductive oxide(TCO)thin films,this study provides valuable physical understanding of optimization of TCO thin film deposition process. 展开更多
关键词 magnetron sputtering ion energy ITO thin film high energy oxygen anion
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Liquid Metal Grid Patterned Thin Film Devices Toward Absorption‑Dominant and Strain‑Tunable Electromagnetic Interference Shielding
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作者 Yuwen Wei Priyanuj Bhuyan +9 位作者 Suk Jin Kwon Sihyun Kim Yejin Bae Mukesh Singh Duy Thanh Tran Minjeong Ha Kwang‑Un Jeong Xing Ma Byeongjin Park Sungjune Park 《Nano-Micro Letters》 SCIE EI CAS CSCD 2024年第11期541-553,共13页
The demand of high-performance thin-film-shaped deformable electromagnetic interference(EMI)shielding devices is increasing for the next generation of wearable and miniaturized soft electronics.Although highly reflect... The demand of high-performance thin-film-shaped deformable electromagnetic interference(EMI)shielding devices is increasing for the next generation of wearable and miniaturized soft electronics.Although highly reflective conductive materials can effectively shield EMI,they prevent deformation of the devices owing to rigidity and generate secondary electromagnetic pollution simultaneously.Herein,soft and stretchable EMI shielding thin film devices with absorption-dominant EMI shielding behavior is presented.The devices consist of liquid metal(LM)layer and LM grid-patterned layer separated by a thin elastomeric film,fabricated by leveraging superior adhesion of aerosol-deposited LM on elastomer.The devices demonstrate high electromagnetic shielding effectiveness(SE)(SE_(T) of up to 75 dB)with low reflectance(SER of 1.5 dB at the resonant frequency)owing to EMI absorption induced by multiple internal reflection generated in the LM grid architectures.Remarkably,the excellent stretchability of the LM-based devices facilitates tunable EMI shielding abilities through grid space adjustment upon strain(resonant frequency shift from 81.3 to 71.3 GHz@33%strain)and is also capable of retaining shielding effectiveness even after multiple strain cycles.This newly explored device presents an advanced paradigm for powerful EMI shielding performance for next-generation smart electronics. 展开更多
关键词 Absorption-dominant electromagnetic interference shielding Liquid metals Soft and stretchable electronics Thin film devices Tunable electromagnetic interference shielding
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Effect of substrate temperature and oxygen plasma treatment on the properties of magnetron-sputtered CdS for solar cell applications
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作者 Runxuan Zang Haolin Wang +9 位作者 Xiaoqi Peng Ke Li Yuehao Gu Yizhe Dong Zhihao Yan Zhiyuan Cai Huihui Gao Shuwei Sheng Rongfeng Tang Tao Chen 《中国科学技术大学学报》 CAS CSCD 北大核心 2024年第6期22-33,I0010,共13页
Cadmium sulfide(CdS)is an n-type semiconductor with excellent electrical conductivity that is widely used as an electron transport material(ETM)in solar cells.At present,numerous methods for preparing CdS thin films h... Cadmium sulfide(CdS)is an n-type semiconductor with excellent electrical conductivity that is widely used as an electron transport material(ETM)in solar cells.At present,numerous methods for preparing CdS thin films have emerged,among which magnetron sputtering(MS)is one of the most commonly used vacuum techniques.For this type of technique,the substrate temperature is one of the key deposition parameters that affects the interfacial properties between the target film and substrate,determining the specific growth habits of the films.Herein,the effect of substrate temperature on the microstructure and electrical properties of magnetron-sputtered CdS(MS-CdS)films was studied and applied for the first time in hydrothermally deposited antimony selenosulfide(Sb_(2)(S,Se)_(3))solar cells.Adjusting the substrate temperature not only results in the design of the flat and dense film with enhanced crystallinity but also leads to the formation of an energy level arrangement with a Sb_(2)(S,Se)_(3)layer that is more favorable for electron transfer.In addition,we developed an oxygen plasma treatment for CdS,reducing the parasitic absorption of the device and resulting in an increase in the short-circuit current density of the solar cell.This study demonstrates the feasibility of MS-CdS in the fabrication of hydrothermal Sb_(2)(S,Se)_(3)solar cells and provides interface optimization strategies to improve device performance. 展开更多
关键词 magnetron sputtering CDS substrate heating plasma treatment Sb_(2)(S Se)_(3) thin film solar cell
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Enhanced Electrical Properties of Bi_(2−x)Sb_(x)Te_(3)Nanoflake Thin Films Through Interface Engineering
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作者 Xudong Wu Junjie Ding +8 位作者 Wenjun Cui Weixiao Lin Zefan Xue Zhi Yang Jiahui Liu Xiaolei Nie Wanting Zhu Gustaaf Van Tendeloo Xiahan Sang 《Energy & Environmental Materials》 SCIE EI CAS CSCD 2024年第6期359-366,共8页
The structure–property relationship at interfaces is difficult to probe for thermoelectric materials with a complex interfacial microstructure.Designing thermoelectric materials with a simple,structurally-uniform int... The structure–property relationship at interfaces is difficult to probe for thermoelectric materials with a complex interfacial microstructure.Designing thermoelectric materials with a simple,structurally-uniform interface provides a facile way to understand how these interfaces influence the transport properties.Here,we synthesized Bi_(2−x)Sb_(x)Te_(3)(x=0,0.1,0.2,0.4)nanoflakes using a hydrothermal method,and prepared Bi_(2−x)Sb_(x)Te_(3)thin films with predominantly(0001)interfaces by stacking the nanoflakes through spin coating.The influence of the annealing temperature and Sb content on the(0001)interface structure was systematically investigated at atomic scale using aberration-corrected scanning transmission electron microscopy.Annealing and Sb doping facilitate atom diffusion and migration between adjacent nanoflakes along the(0001)interface.As such it enhances interfacial connectivity and improves the electrical transport properties.Interfac reactions create new interfaces that increase the scattering and the Seebeck coefficient.Due to the simultaneous optimization of electrical conductivity and Seebeck coefficient,the maximum power factor of the Bi_(1.8)Sb_(0.2)Te_(3)nanoflake films reaches 1.72 mW m^(−1)K^(−2),which is 43%higher than that of a pure Bi_(2)Te_(3)thin film. 展开更多
关键词 Bi_(2)Te_(3)nanoflakes interface engineering scanning transmission electron microscopy thermoelectric thin film
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Effects of Prandtl and Jacob Numbers and Dimensionless Thermal Conductivity on Velocity Profiles in Media (Porous and Liquid)
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作者 Momath Ndiaye Madialène Sene Goumbo Ndiaye 《Journal of Modern Physics》 2024年第10期1603-1614,共12页
In this present study, we analyzed the effects of Prandtl and Jacob numbers and dimensionless thermal conductivity on the velocity profiles in media (porous and liquid). The transfers in the porous medium and the liqu... In this present study, we analyzed the effects of Prandtl and Jacob numbers and dimensionless thermal conductivity on the velocity profiles in media (porous and liquid). The transfers in the porous medium and the liquid film are described respectively by the improved Wooding model and the classical boundary layer equations. The mesh of the digital domain is considered uniform in the transverse and longitudinal directions. The advection and diffusion terms are discretized with a back-centered and centered scheme respectively. The coupled systems of algebraic equations thus obtained are solved numerically using an iterative line-by-line relaxation method of the Gauss-Seidel type. The results show that the parameters relating to the thermal problem (the dimensionless thermal conductivity, the Prandtl (Pr) and Jacob (Ja) numbers) have no influence on the dimensionless speed, although the thermal and hydrodynamic problems are coupled. Via the heat balance equation. The results obtained show that the parameters relating to the thermal problem have no influence on the dimensionless speed, although the thermal and hydrodynamic problems are coupled via the heat balance equation. So, at first approximation with the chosen constants, we can solve the hydrodynamic problem independently of the thermal problem. 展开更多
关键词 CONDENSATION Implicit Finite Difference Thin Film Porous Material Model Wooding Vertical Wall
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Annealing Temperature-Dependent Luminescence Color Coordination in Eu-Doped AlN Thin Films
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作者 Yingda Qian Mariko Murayama +1 位作者 Sujun Guan Xinwei Zhao 《Journal of Materials Science and Chemical Engineering》 2024年第1期20-28,共9页
AlN was used as a host material and doped with Eu grown on Si substrate by pulsed laser deposition (PLD) with low substrate temperature. The X-ray diffraction (XRD) data revealed the orientation and the composition of... AlN was used as a host material and doped with Eu grown on Si substrate by pulsed laser deposition (PLD) with low substrate temperature. The X-ray diffraction (XRD) data revealed the orientation and the composition of the thin film. The surface morphology was studied by scanning electron microscope (SEM). While raising the annealing temperatures from 300˚C to 900˚C, the emission was observed from AlN: Eu under excitation of 260 nm excitation. The photoluminescence (PL) was integrated over the visible light wavelength shifted from the blue to the red zone in the CIE 1931 chromaticity coordinates. The luminescence color coordination of AlN: Eu depending on the annealing temperatures guides the further study of Eu-doped nitrides manufacturing on white light emitting diode (LED) and full color LED devices. 展开更多
关键词 Low-Temperature PLD Growth Eu-Doped AlN Thin Film White Light Emitting Diode
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Biological Tissue-Inspired Ultrasoft,Ultrathin,and Mechanically Enhanced Microfiber Composite Hydrogel for Flexible Bioelectronics 被引量:2
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作者 Qiang Gao Fuqin Sun +10 位作者 Yue Li Lianhui Li Mengyuan Liu Shuqi Wang Yongfeng Wang Tie Li Lin Liu Simin Feng Xiaowei Wang Seema Agarwal Ting Zhang 《Nano-Micro Letters》 SCIE EI CAS CSCD 2023年第9期175-189,共15页
Hydrogels offer tissue-like softness,stretchability,fracture toughness,ionic conductivity,and compatibility with biological tissues,which make them promising candidates for fabricating flexible bioelectronics.A soft h... Hydrogels offer tissue-like softness,stretchability,fracture toughness,ionic conductivity,and compatibility with biological tissues,which make them promising candidates for fabricating flexible bioelectronics.A soft hydrogel film offers an ideal interface to directly bridge thin-film electronics with the soft tissues.However,it remains difficult to fabricate a soft hydrogel film with an ultrathin configuration and excellent mechanical strength.Here we report a biological tissue-inspired ultrasoft microfiber composite ultrathin(<5μm)hydrogel film,which is currently the thinnest hydrogel film as far as we know.The embedded microfibers endow the composite hydrogel with prominent mechanical strength(tensile stress~6 MPa)and anti-tearing property.Moreover,our microfiber composite hydrogel offers the capability of tunable mechanical properties in a broad range,allowing for matching the modulus of most biological tissues and organs.The incorporation of glycerol and salt ions imparts the microfiber composite hydrogel with high ionic conductivity and prominent anti-dehydration behavior.Such microfiber composite hydrogels are promising for constructing attaching-type flexible bioelectronics to monitor biosignals. 展开更多
关键词 Fiber HYDROGEL Flexible electronics Thin film ELECTROSPINNING
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Atomic layer deposition for nanoscale oxide semiconductor thin film transistors:review and outlook 被引量:4
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作者 Hye-Mi Kim Dong-Gyu Kim +2 位作者 Yoon-Seo Kim Minseok Kim Jin-Seong Park 《International Journal of Extreme Manufacturing》 SCIE EI CAS CSCD 2023年第1期153-180,共28页
Since the first report of amorphous In–Ga–Zn–O based thin film transistors,interest in oxide semiconductors has grown.They offer high mobility,low off-current,low process temperature,and wide flexibility for compos... Since the first report of amorphous In–Ga–Zn–O based thin film transistors,interest in oxide semiconductors has grown.They offer high mobility,low off-current,low process temperature,and wide flexibility for compositions and processes.Unfortunately,depositing oxide semiconductors using conventional processes like physical vapor deposition leads to problematic issues,especially for high-resolution displays and highly integrated memory devices.Conventional approaches have limited process flexibility and poor conformality on structured surfaces.Atomic layer deposition(ALD)is an advanced technique which can provide conformal,thickness-controlled,and high-quality thin film deposition.Accordingly,studies on ALD based oxide semiconductors have dramatically increased recently.Even so,the relationships between the film properties of ALD-oxide semiconductors and the main variables associated with deposition are still poorly understood,as are many issues related to applications.In this review,to introduce ALD-oxide semiconductors,we provide:(a)a brief summary of the history and importance of ALD-based oxide semiconductors in industry,(b)a discussion of the benefits of ALD for oxide semiconductor deposition(in-situ composition control in vertical distribution/vertical structure engineering/chemical reaction and film properties/insulator and interface engineering),and(c)an explanation of the challenging issues of scaling oxide semiconductors and ALD for industrial applications.This review provides valuable perspectives for researchers who have interest in semiconductor materials and electronic device applications,and the reasons ALD is important to applications of oxide semiconductors. 展开更多
关键词 atomic layer deposition(ALD) oxide semiconductor thin film transistor(TFT)
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Low-temperature conformal vacuum deposition of OLED devices using close-space sublimation 被引量:2
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作者 Bryan Siu Ting Tam Shou-Cheng Dong Ching W.Tang 《Journal of Semiconductors》 EI CAS CSCD 2023年第9期62-67,共6页
Close-space sublimation(CSS)has been demonstrated as an alternative vacuum deposition technique for fabricating organic light-emitting diodes(OLEDs).CSS utilizes a planar donor plate pre-coated with organic thin films... Close-space sublimation(CSS)has been demonstrated as an alternative vacuum deposition technique for fabricating organic light-emitting diodes(OLEDs).CSS utilizes a planar donor plate pre-coated with organic thin films as an area source to rapidly transfer the donor film to a device substrate at temperatures below 200℃.CSS is also conformal and capable of depositing on odd-shaped substrates using flexible donor media.The evaporation behaviors of organic donor films under CSS were fully characterized using model OLED materials and CSS-deposited films exhibited comparable device performances in an OLED stack to films deposited by conventional point sources.The low temperature and conformal nature of CSS,along with its high material utilization and short process time,make it a promising method for fabricating flexible OLED displays. 展开更多
关键词 close-space sublimation OLED thin film low temperature vacuum deposition
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Uniform deposition of ultra-thin TiO_(2) film on mica substrate by atmospheric pressure chemical vapor deposition: Effect of precursor concentration 被引量:2
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作者 Ming Liu Ying Li +4 位作者 Rui Wang Guoqiang Shao Pengpeng Lv Jun Li Qingshan Zhu 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2023年第8期99-107,共9页
The performance of pearlescent pigment significantly affected by the grain size and the roughness of deposited film. The effect of TiCl_(4) concentration on the initial deposition of TiO_(2) on mica by atmospheric pre... The performance of pearlescent pigment significantly affected by the grain size and the roughness of deposited film. The effect of TiCl_(4) concentration on the initial deposition of TiO_(2) on mica by atmospheric pressure chemical vapor deposition(APCVD) was investigated. The precursor concentration significantly affected the deposition and morphology of TiO_(2) grains assembling the film. The deposition time for fully covering the surface of mica decreased from 120 to 10 s as the TiCl_(4) concentration increased from 0.38%to 2.44%. The grain size increased with the TiCl_(4) concentration. The AFM and TEM analysis demonstrated that the aggregation of TiO_(2) clusters at the initial stage finally result to the agglomeration of fine TiO_(2) grains at high TiCl_(4) concentrations. Following the results, it was suggested that the nucleation density and size was easy to be adjusted when the TiCl_(4) concentration is below 0.90%. 展开更多
关键词 Chemical vapor deposition TiO_(2)thin film Nucleation reaction Precursor concentration Pearlescent pigment
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The growth and expansive applications of amorphous Ga_(2)O_(3) 被引量:1
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作者 奚昭颖 杨莉莉 +6 位作者 舒林聪 张茂林 李山 史丽 刘增 郭宇锋 唐为华 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第8期52-68,共17页
As a promising ultra-wide bandgap semiconductor material,gallium oxide(Ga_(2)O_(3))is attracting extensive attention of researchers due to its feasible growth process,appropriate bandgap of 4.4 e V-5.3 e V allowing fo... As a promising ultra-wide bandgap semiconductor material,gallium oxide(Ga_(2)O_(3))is attracting extensive attention of researchers due to its feasible growth process,appropriate bandgap of 4.4 e V-5.3 e V allowing for deep-ultraviolet(deepUV)detection,good physical and chemical stability,high breakdown field strength and electron mobility,etc.Different from the strict processes for controllable crystalline Ga_(2)O_(3)(usually refer to as stable monoclinicβ-Ga_(2)O_(3)),amorphous Ga_(2)O_(3)(a-Ga_(2)O_(3))film can be prepared uniformly at low temperature on a large-area deposition substrate,suggesting great advantages such as low manufacturing cost and excellent flexibility,dispensing with high-temperature and high vacuum techniques.Thus,a-Ga_(2)O_(3)extremely facilitates important applications in various applied fields.Therefore,in this concise review,we summarize several major deposition methods for a-Ga_(2)O_(3)films,of which the characteristics are discussed.Additionally,potential methods to optimize the film properties are proposed by right of the inspiration from some recent studies.Subsequently,the applications of a-Ga_(2)O_(3)thin films,e.g.,in photodetectors,resistive random access memories(RRAMs)and gas sensors,are represented with a fruitful discussion of their structures and operating mechanisms. 展开更多
关键词 amorphous-Ga_(2)O_(3) thin film functional application
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Ultraviolet photodetectors based on ferroelectric depolarization field
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作者 Xiaoyu Zhou Qingqing Ke +2 位作者 Silin Tang Jilong Luo Zihan Lu 《Journal of Energy Chemistry》 SCIE EI CAS CSCD 2023年第2期487-498,I0013,共13页
Ultraviolet(UV)photodetectors are extensively adopted in the fields of the Internet of Things,optical communications and imaging.Nowadays,with broadening the application scope of UV photodetectors,developing integrate... Ultraviolet(UV)photodetectors are extensively adopted in the fields of the Internet of Things,optical communications and imaging.Nowadays,with broadening the application scope of UV photodetectors,developing integrated devices with more functionalities rather than basic photo-detecting ability are highly required and have been triggered ever-growing interest in scientific and industrial communities.Ferroelectric thin films have become a potential candidate in the field of UV detection due to their wide bandgap and unique photovoltaic characteristics.Additionally,ferroelectric thin films perform excellent dielectric,piezoelectric,pyroelectric,acousto-optic effects,etc.,which can satisfy the demand for the diversified development of UV detectors.In this review,according to the different roles of ferroelectric thin films in the device,the UV photodetectors based on ferroelectric films are classified into ferroelectric depolarization field driven type,ferroelectric depolarization field and built-in electric field co-driven type,and ferroelectric field enhanced type.These three types of ferroelectric UV photodetectors have great potential and are expected to promote the development of a new generation of UV detection technology.At the end of the paper,the advantages and challenges of three types of ferroelectric UV photodetectors are summarized,and the possible development direction in the future is proposed. 展开更多
关键词 UV photodetector FERROELECTRIC Thin film Depolarization field Built-in electric field
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Exploring heteroepitaxial growth and electrical properties of α-Ga_(2)O_(3) films on differently oriented sapphire substrates
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作者 Wei Wang Shudong Hu +7 位作者 Zilong Wang Kaisen Liu Jinfu Zhang Simiao Wu Yuxia Yang Ning Xia Wenrui Zhang Jichun Ye 《Journal of Semiconductors》 EI CAS CSCD 2023年第6期46-51,共6页
This study explores the epitaxial relationship and electrical properties of α-Ga_(2)O_(3) thin films deposited on a-plane, mplane, and r-plane sapphire substrates. We characterize the thin films by X-ray diffraction ... This study explores the epitaxial relationship and electrical properties of α-Ga_(2)O_(3) thin films deposited on a-plane, mplane, and r-plane sapphire substrates. We characterize the thin films by X-ray diffraction and Raman spectroscopy, and elucidate thin film epitaxial relationships with the underlying sapphire substrates. The oxygen vacancy concentration of α-Ga_(2)O_(3) thin films on m-plane and r-plane sapphire substrates are higher than α-Ga_(2)O_(3) thin film on a-plane sapphire substrates. All three thin films have a high transmission of over 80% in the visible and near-ultraviolet regions, and their optical bandgaps stay around 5.02–5.16 eV. Hall measurements show that the α-Ga_(2)O_(3) thin film grown on r-plane sapphire has the highest conductivity of 2.71 S/cm, which is at least 90 times higher than the film on a-plane sapphire. A similar orientation-dependence is seen in their activation energy as revealed by temperature-dependent conductivity measurements, with 0.266, 0.079, and 0.075eV for the film on a-, m-, r-plane, respectively. The origin of the distinct transport behavior of films on differently oriented substrates is suggested to relate with the distinct evolution of oxygen vacancies at differently oriented substrates. This study provides insights for the substrate selection when growing α-Ga_(2)O_(3) films with tunable transport properties. 展开更多
关键词 gallium oxide thin film epitaxy ORIENTATION oxygen vacancy electrical properties
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