A series of TbDyFe films were prepared by DC magnetron sputtering. The effects of substrate temperature and annealing temperature on the phase structure and the magnetic properties of the sample films were investigate...A series of TbDyFe films were prepared by DC magnetron sputtering. The effects of substrate temperature and annealing temperature on the phase structure and the magnetic properties of the sample films were investigated. The an-nealing treatment has a significant influence on the microstructure and the magnetic properties of the sample. The results obtained by XRD indicate that the films deposited at a temperature lower than 525℃ are amorphous and have an easy magnetization direction perpendicular to the film plane. An RFe2 phase is formed in the sample annealed at 550℃ and the residual phases observed are Fe and rare earth oxide. The magnetic properties Hc and Mr/Ms of the film annealed at 550℃ obtain the maximum values,for which the formation of the RFe2 phase is mainly responsible. An annealing treatment leads to a rotation of the sample’s easy axis from being parallel to the film surface to becoming vertical.展开更多
为实现高灵敏度、低温漂的高性能电流传感器,提出将声表面波技术与磁致伸缩效应相结合的电流检测方法,分析了其敏感机理并改善其温度特性。这种声表面波电流传感器采用128°YX-Li Nb O3作为压电基片,表面覆盖SiO_2薄膜来改善器件温...为实现高灵敏度、低温漂的高性能电流传感器,提出将声表面波技术与磁致伸缩效应相结合的电流检测方法,分析了其敏感机理并改善其温度特性。这种声表面波电流传感器采用128°YX-Li Nb O3作为压电基片,表面覆盖SiO_2薄膜来改善器件温度稳定性,并溅射超磁致伸缩Tb Dy Fe薄膜以响应电流。在电流作用下,Tb Dy Fe薄膜会发生磁致伸缩效应和ΔE效应,引起声表面波相速度的改变。结合层状介质中声传播理论,分析了给定电流下层状结构中声表面波的传播特性,特别分析了Tb Dy Fe和SiO_2膜厚对传感器响应的影响。计算结果表明,Tb Dy Fe和SiO_2薄膜厚度分别为0.5μm、2μm时,该声表面波电流传感器具有最大检测灵敏度58.2 k Hz/A,有良好温度稳定性和较高的灵敏度,从而为高性能声表面波电流传感器的研制奠定理论基础。展开更多
基金the National Natural Science Foundation of China (No. 50271017).
文摘A series of TbDyFe films were prepared by DC magnetron sputtering. The effects of substrate temperature and annealing temperature on the phase structure and the magnetic properties of the sample films were investigated. The an-nealing treatment has a significant influence on the microstructure and the magnetic properties of the sample. The results obtained by XRD indicate that the films deposited at a temperature lower than 525℃ are amorphous and have an easy magnetization direction perpendicular to the film plane. An RFe2 phase is formed in the sample annealed at 550℃ and the residual phases observed are Fe and rare earth oxide. The magnetic properties Hc and Mr/Ms of the film annealed at 550℃ obtain the maximum values,for which the formation of the RFe2 phase is mainly responsible. An annealing treatment leads to a rotation of the sample’s easy axis from being parallel to the film surface to becoming vertical.
文摘为实现高灵敏度、低温漂的高性能电流传感器,提出将声表面波技术与磁致伸缩效应相结合的电流检测方法,分析了其敏感机理并改善其温度特性。这种声表面波电流传感器采用128°YX-Li Nb O3作为压电基片,表面覆盖SiO_2薄膜来改善器件温度稳定性,并溅射超磁致伸缩Tb Dy Fe薄膜以响应电流。在电流作用下,Tb Dy Fe薄膜会发生磁致伸缩效应和ΔE效应,引起声表面波相速度的改变。结合层状介质中声传播理论,分析了给定电流下层状结构中声表面波的传播特性,特别分析了Tb Dy Fe和SiO_2膜厚对传感器响应的影响。计算结果表明,Tb Dy Fe和SiO_2薄膜厚度分别为0.5μm、2μm时,该声表面波电流传感器具有最大检测灵敏度58.2 k Hz/A,有良好温度稳定性和较高的灵敏度,从而为高性能声表面波电流传感器的研制奠定理论基础。
