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Poisoning of MoO_3 Precursor on Monolayer MoS_2 Nanosheets Growth by Tellurium-Assisted Chemical Vapor Deposition
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作者 王志刚 庞斐 《Chinese Physics Letters》 SCIE CAS CSCD 2017年第8期137-140,共4页
We obtain molybdenum disulfide (MoS2) nanosheets (NSs) with edge sizes of 18μm by direct sulfuration of MoO3 powder spread on the SiO2/Si substrates. However, the undesirable MoO3 nanoparticles (NPs) left on th... We obtain molybdenum disulfide (MoS2) nanosheets (NSs) with edge sizes of 18μm by direct sulfuration of MoO3 powder spread on the SiO2/Si substrates. However, the undesirable MoO3 nanoparticles (NPs) left on the surface of MoS22 NSs poison the MoO3 precursor. Introducing Te vapors to react with MoS2 to form low melting point intermediate MoSxTe2-x, the evaporations of MoO3 precursor recover and MoO3 NPs disappear. Thus Te vapor is effective to suppress poisoning of the MoO3 precursor. Selecting the appropriate amount of Te vapor, we fabricate monolayer MoS22 NSs up to 70μm in edge length. This finding can be significant to understand the role of Te in the Te-assisted chemical vapor deposition growth process of layered chalcogenide materials. 展开更多
关键词 NS NP Te Poisoning of MoO3 Precursor on Monolayer MoS2 Nanosheets Growth by tellurium-assisted Chemical Vapor Deposition
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