A high-performance terahertz Schottky barrier diode(SBD)with an inverted trapezoidal epitaxial cross-sectional structure featuring high varactor characteristics and reverse breakdown characteristics is reported in thi...A high-performance terahertz Schottky barrier diode(SBD)with an inverted trapezoidal epitaxial cross-sectional structure featuring high varactor characteristics and reverse breakdown characteristics is reported in this paper.Inductively coupled plasma dry etching and dissolution wet etching are used to define the profile of the epitaxial layer,by which the voltage-dependent variation trend of the thickness of the metal-semiconductor contact depletion layer is modified.The simulation of the inverted trapezoidal epitaxial cross-section SBD is also conducted to explain the physical mechanism of the electric field and space charge region area.Compared with the normal structure,the grading coefficient M increases from 0.47 to 0.52,and the capacitance modulation ratio(C^(max)/C_(min))increases from 6.70 to 7.61.The inverted trapezoidal epitaxial cross-section structure is a promising approach to improve the variable-capacity ratio by eliminating the accumulation of charge at the Schottky electrode edge.A 190 GHz frequency doubler based on the inverted trapezoidal epitaxial cross-section SBD also shows a doubling efficiency of 35%compared to that 30%of a normal SBD.展开更多
太赫兹源的输出功率是限制太赫兹技术远距离应用的重要参数。为了实现高效的太赫兹倍频器,基于高频特性下肖特基二极管的有源区电气模型建模方法,利用指标参数不同的两种肖特基二极管,研制出了两种170 GHz平衡式倍频器。所采用的肖特基...太赫兹源的输出功率是限制太赫兹技术远距离应用的重要参数。为了实现高效的太赫兹倍频器,基于高频特性下肖特基二极管的有源区电气模型建模方法,利用指标参数不同的两种肖特基二极管,研制出了两种170 GHz平衡式倍频器。所采用的肖特基二极管有源结区模型完善地考虑了二极管IV特性,载流子饱和速率限制,直流串联电阻以及趋肤效应等特性。通过对两种倍频器仿真结果进行对比,完备地分析了二极管主要指标参数对倍频器性能的影响。最后测试结果显示两种平衡式170 GHz倍频器在155~178 GHz工作带宽内的最高倍频效率分别大于11%和24%,最高输出功率分别大于15 m W和25 m W。从仿真和测试结果表示,采用的肖特基二极管建模方法和平衡式倍频器结构适用于研制高效的太赫兹倍频器。展开更多
基于表面沟道型平面肖特基势垒二极管基本结构,采用GaAs 0.15μm伪高电子迁移率晶体管(pseudomorphic high electron mobility transistors,pHEMT)工艺制程,提出了一种垂直沟道长跨度空气桥的肖特基二极管模型.研究了不同阳极直径对肖...基于表面沟道型平面肖特基势垒二极管基本结构,采用GaAs 0.15μm伪高电子迁移率晶体管(pseudomorphic high electron mobility transistors,pHEMT)工艺制程,提出了一种垂直沟道长跨度空气桥的肖特基二极管模型.研究了不同阳极直径对肖特基二极管级联电阻的影响,对比分析了不同焊盘间距下肖特基二极管模型的S参数仿真结果,得到最优空气桥长度;仿真了最优焊盘间距下二极管肖特基结的TCAD模型,根据仿真得到的特性曲线提取肖特基二极管的SPICE参数.经实验测试,该二极管具有极低的零偏置结电容,截止频率高达9 THz,仿真结果与实测结果吻合度较高,可用于太赫兹频段上.展开更多
A bandwidth microwave second harmonic generator is successfully designed using composite right/left-handed non- linear transmission lines （CRLH NLTLs） in a GaAs monolithic microwave integrated circuit （MMIC） techn...A bandwidth microwave second harmonic generator is successfully designed using composite right/left-handed non- linear transmission lines （CRLH NLTLs） in a GaAs monolithic microwave integrated circuit （MMIC） technology. The structure parameters of CRLH NLTLs, e.g. host transmission line, rectangular spiral inductor, and nonlinear capacitor, have a great impact on the second harmonic performance enhancement in terms of second harmonic frequency, output power, and conversion efficiency. It has been experimentally demonstrated that the second harmonic frequency is deter- mined by the anomalous dispersion of CRLH NLTLs and can be significantly improved by effectively adjusting these structure parameters. A good agreement between the measured and simulated second harmonic performances of Ka-band CRLH NLTLs frequency multipliers is successfully achieved, which further validates the design approach of frequency multipliers on CRLH NLTLs and indicates the potentials of CRLH NLTLs in terms of the generation of microwave and millimeter-wave signal source.展开更多
基金Project supported by the National Natural Science Foundation of China (Grant No.61871072)。
文摘A high-performance terahertz Schottky barrier diode(SBD)with an inverted trapezoidal epitaxial cross-sectional structure featuring high varactor characteristics and reverse breakdown characteristics is reported in this paper.Inductively coupled plasma dry etching and dissolution wet etching are used to define the profile of the epitaxial layer,by which the voltage-dependent variation trend of the thickness of the metal-semiconductor contact depletion layer is modified.The simulation of the inverted trapezoidal epitaxial cross-section SBD is also conducted to explain the physical mechanism of the electric field and space charge region area.Compared with the normal structure,the grading coefficient M increases from 0.47 to 0.52,and the capacitance modulation ratio(C^(max)/C_(min))increases from 6.70 to 7.61.The inverted trapezoidal epitaxial cross-section structure is a promising approach to improve the variable-capacity ratio by eliminating the accumulation of charge at the Schottky electrode edge.A 190 GHz frequency doubler based on the inverted trapezoidal epitaxial cross-section SBD also shows a doubling efficiency of 35%compared to that 30%of a normal SBD.
文摘太赫兹源的输出功率是限制太赫兹技术远距离应用的重要参数。为了实现高效的太赫兹倍频器,基于高频特性下肖特基二极管的有源区电气模型建模方法,利用指标参数不同的两种肖特基二极管,研制出了两种170 GHz平衡式倍频器。所采用的肖特基二极管有源结区模型完善地考虑了二极管IV特性,载流子饱和速率限制,直流串联电阻以及趋肤效应等特性。通过对两种倍频器仿真结果进行对比,完备地分析了二极管主要指标参数对倍频器性能的影响。最后测试结果显示两种平衡式170 GHz倍频器在155~178 GHz工作带宽内的最高倍频效率分别大于11%和24%,最高输出功率分别大于15 m W和25 m W。从仿真和测试结果表示,采用的肖特基二极管建模方法和平衡式倍频器结构适用于研制高效的太赫兹倍频器。
文摘基于表面沟道型平面肖特基势垒二极管基本结构,采用GaAs 0.15μm伪高电子迁移率晶体管(pseudomorphic high electron mobility transistors,pHEMT)工艺制程,提出了一种垂直沟道长跨度空气桥的肖特基二极管模型.研究了不同阳极直径对肖特基二极管级联电阻的影响,对比分析了不同焊盘间距下肖特基二极管模型的S参数仿真结果,得到最优空气桥长度;仿真了最优焊盘间距下二极管肖特基结的TCAD模型,根据仿真得到的特性曲线提取肖特基二极管的SPICE参数.经实验测试,该二极管具有极低的零偏置结电容,截止频率高达9 THz,仿真结果与实测结果吻合度较高,可用于太赫兹频段上.
基金Project supported by the Young Scientists Fund of the National Natural Science Foundation of China(Grant No.61401373)the Research Fund for the Doctoral Program of Southwest University,China(Grant No.SWU111030)
文摘A bandwidth microwave second harmonic generator is successfully designed using composite right/left-handed non- linear transmission lines （CRLH NLTLs） in a GaAs monolithic microwave integrated circuit （MMIC） technology. The structure parameters of CRLH NLTLs, e.g. host transmission line, rectangular spiral inductor, and nonlinear capacitor, have a great impact on the second harmonic performance enhancement in terms of second harmonic frequency, output power, and conversion efficiency. It has been experimentally demonstrated that the second harmonic frequency is deter- mined by the anomalous dispersion of CRLH NLTLs and can be significantly improved by effectively adjusting these structure parameters. A good agreement between the measured and simulated second harmonic performances of Ka-band CRLH NLTLs frequency multipliers is successfully achieved, which further validates the design approach of frequency multipliers on CRLH NLTLs and indicates the potentials of CRLH NLTLs in terms of the generation of microwave and millimeter-wave signal source.
