Compared with traditional mechanical seals,magnetic fluid seals have unique characters of high airtightness,minimal friction torque requirements,pollution-free and long life-span,widely used in vacuum robots.With the ...Compared with traditional mechanical seals,magnetic fluid seals have unique characters of high airtightness,minimal friction torque requirements,pollution-free and long life-span,widely used in vacuum robots.With the rapid development of Integrate Circuit（IC）,there is a stringent requirement for sealing wafer-handling robots when working in a vacuum environment.The parameters of magnetic fluid seals structure is very important in the vacuum robot design.This paper gives a magnetic fluid seal device for the robot.Firstly,the seal differential pressure formulas of magnetic fluid seal are deduced according to the theory of ferrohydrodynamics,which indicate that the magnetic field gradient in the sealing gap determines the seal capacity of magnetic fluid seal.Secondly,the magnetic analysis model of twin-shaft magnetic fluid seals structure is established.By analyzing the magnetic field distribution of dual magnetic fluid seal,the optimal value ranges of important parameters,including parameters of the permanent magnetic ring,the magnetic pole tooth,the outer shaft,the outer shaft sleeve and the axial relative position of two permanent magnetic rings,which affect the seal differential pressure,are obtained.A wafer-handling robot equipped with coaxial twin-shaft magnetic fluid rotary seals and bellows seal is devised and an optimized twin-shaft magnetic fluid seals experimental platform is built.Test result shows that when the speed of the two rotational shafts ranges from 0-500 r/min,the maximum burst pressure is about 0.24 MPa.Magnetic fluid rotary seals can provide satisfactory performance in the application of wafer-handling robot.The proposed coaxial twin-shaft magnetic fluid rotary seal provides the instruction to design high-speed vacuum robot.展开更多
As a key to improve the performance of the interbay automated material handling system （AMHS） in 300 mm semiconductor wafer fabrication system, the real- time overhead hoist transport （OHT） dispatching problem has...As a key to improve the performance of the interbay automated material handling system （AMHS） in 300 mm semiconductor wafer fabrication system, the real- time overhead hoist transport （OHT） dispatching problem has received much attention. This problem is first formu- lated as a special form of assignment problem and it is proved that more than one solution will be obtained by Hungarian algorithm simultaneously. Through proposing and strictly proving two propositions related to the char- acteristics of these solutions, a modified Hungarian algo- rithm is designed to distinguish these solutions. Finally, a new real-time OHT dispatching method is carefully designed by implementing the solution obtained by the modified Hungarian algorithm. The experimental results of discrete event simulations show that, compared with con- ventional Hungarian algorithm dispatching method, the proposed dispatching method that chooses the solution with the maximum variance respectively reduces on average 4 s of the average waiting time and average lead time of wafer lots, and its performance is rather stable in multiple dif- ferent scenarios of the interbay AMHS with different quantities of shortcuts. This research provides an efficient real-time OHT dispatching mechanism for the interbay AMHS with shortcuts and bypasses.展开更多
基金supported by National Natural Science Foundation of China (Grant No. 50675027)
文摘Compared with traditional mechanical seals,magnetic fluid seals have unique characters of high airtightness,minimal friction torque requirements,pollution-free and long life-span,widely used in vacuum robots.With the rapid development of Integrate Circuit（IC）,there is a stringent requirement for sealing wafer-handling robots when working in a vacuum environment.The parameters of magnetic fluid seals structure is very important in the vacuum robot design.This paper gives a magnetic fluid seal device for the robot.Firstly,the seal differential pressure formulas of magnetic fluid seal are deduced according to the theory of ferrohydrodynamics,which indicate that the magnetic field gradient in the sealing gap determines the seal capacity of magnetic fluid seal.Secondly,the magnetic analysis model of twin-shaft magnetic fluid seals structure is established.By analyzing the magnetic field distribution of dual magnetic fluid seal,the optimal value ranges of important parameters,including parameters of the permanent magnetic ring,the magnetic pole tooth,the outer shaft,the outer shaft sleeve and the axial relative position of two permanent magnetic rings,which affect the seal differential pressure,are obtained.A wafer-handling robot equipped with coaxial twin-shaft magnetic fluid rotary seals and bellows seal is devised and an optimized twin-shaft magnetic fluid seals experimental platform is built.Test result shows that when the speed of the two rotational shafts ranges from 0-500 r/min,the maximum burst pressure is about 0.24 MPa.Magnetic fluid rotary seals can provide satisfactory performance in the application of wafer-handling robot.The proposed coaxial twin-shaft magnetic fluid rotary seal provides the instruction to design high-speed vacuum robot.
基金Supported by National Natural Science Foundation of China(Grant No.51275307)
文摘As a key to improve the performance of the interbay automated material handling system （AMHS） in 300 mm semiconductor wafer fabrication system, the real- time overhead hoist transport （OHT） dispatching problem has received much attention. This problem is first formu- lated as a special form of assignment problem and it is proved that more than one solution will be obtained by Hungarian algorithm simultaneously. Through proposing and strictly proving two propositions related to the char- acteristics of these solutions, a modified Hungarian algo- rithm is designed to distinguish these solutions. Finally, a new real-time OHT dispatching method is carefully designed by implementing the solution obtained by the modified Hungarian algorithm. The experimental results of discrete event simulations show that, compared with con- ventional Hungarian algorithm dispatching method, the proposed dispatching method that chooses the solution with the maximum variance respectively reduces on average 4 s of the average waiting time and average lead time of wafer lots, and its performance is rather stable in multiple dif- ferent scenarios of the interbay AMHS with different quantities of shortcuts. This research provides an efficient real-time OHT dispatching mechanism for the interbay AMHS with shortcuts and bypasses.
