Objective Focusing on the problem such as slow scanning speed, complex system design and low light efficiency, a new parallel confocal 3D profile detecting method based on optical fiber technology, which realizes whol...Objective Focusing on the problem such as slow scanning speed, complex system design and low light efficiency, a new parallel confocal 3D profile detecting method based on optical fiber technology, which realizes whole-field confocal detecting, is proposed. Methods The optical fiber plate generates an 2D point light source array, which splits one light beam into N2 subbeams and act the role of pinholes as point source and point detecting to filter the stray light and reflect light. By introducing the construction and working principle of the multi-beam 3D detecting system, the feasibility is investigated. Results Experiment result indicates that the optical fiber technology is applicable in parallel confocal detecting. Conclusion The equipment needn't mechanical rotation. The measuring parameters that influence the detecting can easily be adapted to satisfy different requirments of measurement. Compared with the conventional confocal method, the parallel confocal detecting system using optical fiber plate is simple in the mechanism, the measuring field is larger and the speed is faster.展开更多
A whole-field 3D surface measurement system for semiconductor wafer inspection is described.The system consists of an optical fiber plate,which can split the light beam into N^2 subbeams to realize the whole-field ins...A whole-field 3D surface measurement system for semiconductor wafer inspection is described.The system consists of an optical fiber plate,which can split the light beam into N^2 subbeams to realize the whole-field inspection.A special prism is used to separate the illumination light and signal light.This setup is characterized by high precision,high speed and simple structure.展开更多
This research aims to use several kind of rare earth oxides, such as Nd2O3, Yb2O3, Ce2O3 and La2O3, to improve the electroless plating and electroplating processes for surface metallization of quartz optical fiber (si...This research aims to use several kind of rare earth oxides, such as Nd2O3, Yb2O3, Ce2O3 and La2O3, to improve the electroless plating and electroplating processes for surface metallization of quartz optical fiber (silicon fiber) for its practical uses. The effects of the rare earth oxides on the deposition rate of Ni-P-B, the stability of the plating solution and the surface property of the film were investigated and the comparisons of their behaviours were made. The effects of rare earth oxide of La2O3 on the hardness and surface property of the Ni film prepared by electroplating process were studied. The surface morphonogies, compositions and hardness of the Ni-P-B and Ni films were characterized and analyzed by SEM, MSM, ICP and DIMHM, respectively. The experimental results showed that Ce2O3 with the concentration of 4 mg·L-1 was the best one among the four rare earth oxides with suitable concentrations in increasing the deposition rate, enhancing the stability of the electroless plating solution and improving the surface property of the Ni-P-B film. The improvements of the hardness and surface property of the Ni film prepared by electroplating with adding La2O3 were discovered. No obvious influences of Ce2O3 and La2O3 on the compositions of Ni-P-B and Ce free in the Ni-P-B film were found because of its much more nagative deposition potential than those of the used reducing agents in this experiment. The total diameter of the quartz optical fiber with deposited Ni-P-B film and Ni film was about 1.7 mm, which could be satisfactorily for the practical uses of quartz optical fiber in many fields.展开更多
1/4λ wave plate is a key element in the fiber-optic current sensor system. When a retardation error or an orientation error of birefringence axes of 1/4λ wave plate with respect to the hi-bi fiber axes occurs in the...1/4λ wave plate is a key element in the fiber-optic current sensor system. When a retardation error or an orientation error of birefringence axes of 1/4λ wave plate with respect to the hi-bi fiber axes occurs in the 1/4λ wave plate, the sensor system will output a wrong result of the measured current. The contributions of these two errors to the final result of the whole system were studied and the errors functions were deduced by establishing the measurement function of the current sensor system with Jones matrixes of the optical elements. The results show that that the greater the orientation error or the retardation error, the larger the final error, and that these two errors cannot be compensated each other.展开更多
This paper presents a fiber optic temperature measuring system used for measuring the temperature in many occasions. The system is of reflective type and composed of thermostatic bimetal plate, lever piston framewo...This paper presents a fiber optic temperature measuring system used for measuring the temperature in many occasions. The system is of reflective type and composed of thermostatic bimetal plate, lever piston framework, optical grating and optical fiber probes. When the temperature changes, the thermostatic bimetal plate deforms. Through lever piston framework, the optical grating produces displacement in the upright direction. Thus the change of the temperature is transformed into the upright displacement of the optical grating. Optical fiber probes are used for detecting the number of streak lines of the optical grating′s displacement depending on the change of temperature. The detected signal can be transmitted to the control center through optical fiber cable up to distance of 1 km. The measurable range of this system reaches 100℃ with accuracy of ±0.2℃.展开更多
The suppression of polarization cross talk in lead zirconate titanate phase modulators as a key error source has been challenging for open-loop fiber optic gyroscopes(FOGs).We developed a polarization-diversity optica...The suppression of polarization cross talk in lead zirconate titanate phase modulators as a key error source has been challenging for open-loop fiber optic gyroscopes(FOGs).We developed a polarization-diversity optical frequency domain reflectometry(OFDR)to measure the distributed modulation polarization error in the modulator.The error contributes 8×10^(−6) rad to FOG’s bias instability.Using a UV-fabricated in-fiberλ/4 wave plate and polarization-mode converter with fiber taper technology,the modulation error has been suppressed by 15 dB in assembled FOGs.This approach reduced error with temperature from 25°/h to 0.7°/h,meeting the requirements of control-level gyroscopes with bias errors less than 1°/h.展开更多
By using mercaptopropyltrimethoxysilane （MPTS） self-assembled monolayers （SAMs）, electroless silver plating is developed for the metallization of near-field optical fiber probes. This method has the advantages of ...By using mercaptopropyltrimethoxysilane （MPTS） self-assembled monolayers （SAMs）, electroless silver plating is developed for the metallization of near-field optical fiber probes. This method has the advantages of controllability, no pinholes, convenience, low cost, and smooth tip surface. The metallized probes are characterized by optical microscopy, scanning electron microscopy （SEM）, and energy dispersive X-ray spectroscopy （EDXS）.展开更多
As a component of near-field scanning optical microscope （NSOM）, optical fiber probe is an important factor influncing the equipment resolution. Electroless nickel plating is introduced to metallize the optical fibe...As a component of near-field scanning optical microscope （NSOM）, optical fiber probe is an important factor influncing the equipment resolution. Electroless nickel plating is introduced to metallize the optical fiber probe. The optical fibers are etched by 40% HF with Turner etching method. Through pretreatment, the optical fiber probe is coated with Ni-P film by electroless plating in a constant temperature water tank. Atomic absorption spectrometry （AAS）, scanning electron microscopy （SEM）, and energy dispersive X-ray spectrometry （EDXS） are carried out to characterize the deposition on fiber probe. We have reproducibly fabricated two kinds of fiber probes with a Ni-P film： aperture probe and apertureless probe. In addition, reductive particle transportation on the surface of fiber probe is proposed to explain the cause of these probes.展开更多
文摘Objective Focusing on the problem such as slow scanning speed, complex system design and low light efficiency, a new parallel confocal 3D profile detecting method based on optical fiber technology, which realizes whole-field confocal detecting, is proposed. Methods The optical fiber plate generates an 2D point light source array, which splits one light beam into N2 subbeams and act the role of pinholes as point source and point detecting to filter the stray light and reflect light. By introducing the construction and working principle of the multi-beam 3D detecting system, the feasibility is investigated. Results Experiment result indicates that the optical fiber technology is applicable in parallel confocal detecting. Conclusion The equipment needn't mechanical rotation. The measuring parameters that influence the detecting can easily be adapted to satisfy different requirments of measurement. Compared with the conventional confocal method, the parallel confocal detecting system using optical fiber plate is simple in the mechanism, the measuring field is larger and the speed is faster.
文摘A whole-field 3D surface measurement system for semiconductor wafer inspection is described.The system consists of an optical fiber plate,which can split the light beam into N^2 subbeams to realize the whole-field inspection.A special prism is used to separate the illumination light and signal light.This setup is characterized by high precision,high speed and simple structure.
基金the State Special Programs for 973 Key Foundamental Pre-Research (2005cca04300)
文摘This research aims to use several kind of rare earth oxides, such as Nd2O3, Yb2O3, Ce2O3 and La2O3, to improve the electroless plating and electroplating processes for surface metallization of quartz optical fiber (silicon fiber) for its practical uses. The effects of the rare earth oxides on the deposition rate of Ni-P-B, the stability of the plating solution and the surface property of the film were investigated and the comparisons of their behaviours were made. The effects of rare earth oxide of La2O3 on the hardness and surface property of the Ni film prepared by electroplating process were studied. The surface morphonogies, compositions and hardness of the Ni-P-B and Ni films were characterized and analyzed by SEM, MSM, ICP and DIMHM, respectively. The experimental results showed that Ce2O3 with the concentration of 4 mg·L-1 was the best one among the four rare earth oxides with suitable concentrations in increasing the deposition rate, enhancing the stability of the electroless plating solution and improving the surface property of the Ni-P-B film. The improvements of the hardness and surface property of the Ni film prepared by electroplating with adding La2O3 were discovered. No obvious influences of Ce2O3 and La2O3 on the compositions of Ni-P-B and Ce free in the Ni-P-B film were found because of its much more nagative deposition potential than those of the used reducing agents in this experiment. The total diameter of the quartz optical fiber with deposited Ni-P-B film and Ni film was about 1.7 mm, which could be satisfactorily for the practical uses of quartz optical fiber in many fields.
文摘1/4λ wave plate is a key element in the fiber-optic current sensor system. When a retardation error or an orientation error of birefringence axes of 1/4λ wave plate with respect to the hi-bi fiber axes occurs in the 1/4λ wave plate, the sensor system will output a wrong result of the measured current. The contributions of these two errors to the final result of the whole system were studied and the errors functions were deduced by establishing the measurement function of the current sensor system with Jones matrixes of the optical elements. The results show that that the greater the orientation error or the retardation error, the larger the final error, and that these two errors cannot be compensated each other.
文摘This paper presents a fiber optic temperature measuring system used for measuring the temperature in many occasions. The system is of reflective type and composed of thermostatic bimetal plate, lever piston framework, optical grating and optical fiber probes. When the temperature changes, the thermostatic bimetal plate deforms. Through lever piston framework, the optical grating produces displacement in the upright direction. Thus the change of the temperature is transformed into the upright displacement of the optical grating. Optical fiber probes are used for detecting the number of streak lines of the optical grating′s displacement depending on the change of temperature. The detected signal can be transmitted to the control center through optical fiber cable up to distance of 1 km. The measurable range of this system reaches 100℃ with accuracy of ±0.2℃.
基金supported by the National Natural Science Foundation of China(Nos.61975166,62322510,and 62375223).
文摘The suppression of polarization cross talk in lead zirconate titanate phase modulators as a key error source has been challenging for open-loop fiber optic gyroscopes(FOGs).We developed a polarization-diversity optical frequency domain reflectometry(OFDR)to measure the distributed modulation polarization error in the modulator.The error contributes 8×10^(−6) rad to FOG’s bias instability.Using a UV-fabricated in-fiberλ/4 wave plate and polarization-mode converter with fiber taper technology,the modulation error has been suppressed by 15 dB in assembled FOGs.This approach reduced error with temperature from 25°/h to 0.7°/h,meeting the requirements of control-level gyroscopes with bias errors less than 1°/h.
基金This work was supported by the National Natural Science Foundation of China under Grants No.60171005 and 60121101.
文摘By using mercaptopropyltrimethoxysilane （MPTS） self-assembled monolayers （SAMs）, electroless silver plating is developed for the metallization of near-field optical fiber probes. This method has the advantages of controllability, no pinholes, convenience, low cost, and smooth tip surface. The metallized probes are characterized by optical microscopy, scanning electron microscopy （SEM）, and energy dispersive X-ray spectroscopy （EDXS）.
基金supported by the National "973" Program of China (No.2009CB930604)the Natural Science Foundation of Guangdong Province,China (No.8151064101000111)
文摘As a component of near-field scanning optical microscope （NSOM）, optical fiber probe is an important factor influncing the equipment resolution. Electroless nickel plating is introduced to metallize the optical fiber probe. The optical fibers are etched by 40% HF with Turner etching method. Through pretreatment, the optical fiber probe is coated with Ni-P film by electroless plating in a constant temperature water tank. Atomic absorption spectrometry （AAS）, scanning electron microscopy （SEM）, and energy dispersive X-ray spectrometry （EDXS） are carried out to characterize the deposition on fiber probe. We have reproducibly fabricated two kinds of fiber probes with a Ni-P film： aperture probe and apertureless probe. In addition, reductive particle transportation on the surface of fiber probe is proposed to explain the cause of these probes.
