We report the near-stoichiometric Ti:LiNbO3 strip waveguides fabricated by vapour transport equilibration (VTE) at 1060~^{/circ}C for 12 h and co-diffusion of 4--8~/mu m wide, 115-nm thick Ti-strips. Optical stud...We report the near-stoichiometric Ti:LiNbO3 strip waveguides fabricated by vapour transport equilibration (VTE) at 1060~^{/circ}C for 12 h and co-diffusion of 4--8~/mu m wide, 115-nm thick Ti-strips. Optical studies show that these waveguides are monomode at 1.5~/mu m and have losses of 1.3 and 1.1~dB/cm for the TM and TE modes, respectively. In the waveguide width/depth direction, the mode field follows a Gauss/Hermite--Gauss profile. A secondary ion mass spectrometry study reveals that the Ti profile follows a sum of two error functions along the width direction and a complementary error function in the depth direction. Micro-Raman analysis shows that the Li-composition in the depth direction also follows a complementary error function. The mean Li/Nb ratio in the waveguide layer is about 0.98. The inhomogeneous Li-composition profile results in a varied substrate index in the guiding layer, and the refractive index profile in the guiding layer is given.展开更多
Electro-optic modulators,which convert electrical signals onto the transmission light,are key devices in electro-optic modulating systems.Modulation efficiency is one of the most important parameters of an electro-opt...Electro-optic modulators,which convert electrical signals onto the transmission light,are key devices in electro-optic modulating systems.Modulation efficiency is one of the most important parameters of an electro-optic modulator,which directly determines the footprint and power consumption of the device.Generally,modulation efficiency strongly depends on the electro-optic response of the crystal.The Pb(In_(1/2)Nb_(1/2))O_(3)-Pb(Mg_(1/3)Nb_(2/3))O_(3)-PbTiO_(3)(PIN-PMN-PT)single crystal with giant electro-optic coefficient(λ_(c))and high transparency indicates the potential to achieve greatly enhanced modulation efficiency.In this study,a prototype PIN-PMN-PT phase modulator was fabricated based on a titanium(Ti)in-diffusion waveguide,which is reported for the first time.The influences of titanium in-diffusion on the composition and domain structure of the PIN-PMN-PT single crystal were studied by transmission electron microscopy(TEM)and piezoelectric force microscopy(PFM),respectively.Finally,a half-wave voltage(V_(π))of 2.3 V was obtained using a device with 6-mm-long(L)electrodes.Furthermore,the electro-optic modulation efficiency(V_(π)L)was calculated as 1.38 V-cm,which was approximately one order of magnitude lower than that of commercial lithium niobate(LiNbO_(3),LN)phase modulators.Such enhanced modulation efficiency indicates more compact device and lower power consumption,which is of great significance for electro-optic modulation systems used in micro-fiber gyroscope,integrated photonic devices,etc.展开更多
Reactive ion etching(RIE) of LiNbO_3(LN) in SF_6 plasma atmosphere was studied for optimizing the preparation conditions for LN ridge waveguides.The samples to be etched are Ti-diffused LN slab waveguides overlaid...Reactive ion etching(RIE) of LiNbO_3(LN) in SF_6 plasma atmosphere was studied for optimizing the preparation conditions for LN ridge waveguides.The samples to be etched are Ti-diffused LN slab waveguides overlaid with a chromium film mask that has a Mach-Zehnder interferometer(MZI) array pattern.The experimental results indicate that the LN-etching rate(R_(LN)) and the Cr-etching rate(R_(Cr)) as well as the rate ratio R_(LN)/R_(Cr) increase with either increasing the radio-frequency(RF) power at a given SF_6 flow rate or increasing the SF_6 flow rate at a fixed RF power.The maximum values of R_(LN) = 43.2 nm/min and R_(LN)/R_(Cr) = 3.27 were achieved with 300 W RF power and 40 sccm SF_6 flow.When the SF_6 flow rate exceeds 40 sccm,an increase in the flow rate causes the etching rates and the rate ratio to decrease.The scanning electron microscope images of the LN ridge prepared after~20 min etching show that the ridge height is 680 nm and the sidewall slope angle is about 60°.展开更多
An iterative procedure is proposed for the variational analysis of Ti:LiNbO3 optical waveguides. A trial solution for the dominant electric field profile of arbitrary-order eigenmodes in strip waveguides and two coupl...An iterative procedure is proposed for the variational analysis of Ti:LiNbO3 optical waveguides. A trial solution for the dominant electric field profile of arbitrary-order eigenmodes in strip waveguides and two coupled waveguides is proposed and its parameters are determined using the variational method. The results calculated using this method agree well with those obtained using the finite-element method. The present method has been used to check the accuracy of the effective index method as well as a quasi-analytical technique based on the effective index method. The results show that the effective index method is generally accurate for the fundamental mode and becomes less accurate for higher-order vertical modes.展开更多
系统地研究 Z切 L i Nb O3晶体中质子交换波导和退火质子交换波导的特性 ,得到了质子交换过程中的扩散常数和激活能 ,发现了质子交换波导的折射率呈线性阶跃型的折射率分布。通过连续退火 ,波导的折射率分布由线性阶跃型向高斯型过渡。...系统地研究 Z切 L i Nb O3晶体中质子交换波导和退火质子交换波导的特性 ,得到了质子交换过程中的扩散常数和激活能 ,发现了质子交换波导的折射率呈线性阶跃型的折射率分布。通过连续退火 ,波导的折射率分布由线性阶跃型向高斯型过渡。退火可分为两个阶段 ,波导深度的增加在第一阶段随退火时间成指数关系 ,第二阶段与退火时间的平方根成线性关系。展开更多
基金supported by the National Natural Science Foundation of China (Grant Nos. 50872089 and 60577012)the Research Grants Council of the Hong Kong Special Administrative Region, China (Grant No. CityU 1194/07)
文摘We report the near-stoichiometric Ti:LiNbO3 strip waveguides fabricated by vapour transport equilibration (VTE) at 1060~^{/circ}C for 12 h and co-diffusion of 4--8~/mu m wide, 115-nm thick Ti-strips. Optical studies show that these waveguides are monomode at 1.5~/mu m and have losses of 1.3 and 1.1~dB/cm for the TM and TE modes, respectively. In the waveguide width/depth direction, the mode field follows a Gauss/Hermite--Gauss profile. A secondary ion mass spectrometry study reveals that the Ti profile follows a sum of two error functions along the width direction and a complementary error function in the depth direction. Micro-Raman analysis shows that the Li-composition in the depth direction also follows a complementary error function. The mean Li/Nb ratio in the waveguide layer is about 0.98. The inhomogeneous Li-composition profile results in a varied substrate index in the guiding layer, and the refractive index profile in the guiding layer is given.
基金supported by the National Natural Science Foundation of China(Grant Nos.52102143,51772239,62001369,62075088,and 51761145024)Shaanxi Province Project(Grant Nos.2017ktpt-21 and 2018TD-024)Jiangxi Technological Innovation Guidance Science and Technology Plan(Grant No.S20212BDH80017).
文摘Electro-optic modulators,which convert electrical signals onto the transmission light,are key devices in electro-optic modulating systems.Modulation efficiency is one of the most important parameters of an electro-optic modulator,which directly determines the footprint and power consumption of the device.Generally,modulation efficiency strongly depends on the electro-optic response of the crystal.The Pb(In_(1/2)Nb_(1/2))O_(3)-Pb(Mg_(1/3)Nb_(2/3))O_(3)-PbTiO_(3)(PIN-PMN-PT)single crystal with giant electro-optic coefficient(λ_(c))and high transparency indicates the potential to achieve greatly enhanced modulation efficiency.In this study,a prototype PIN-PMN-PT phase modulator was fabricated based on a titanium(Ti)in-diffusion waveguide,which is reported for the first time.The influences of titanium in-diffusion on the composition and domain structure of the PIN-PMN-PT single crystal were studied by transmission electron microscopy(TEM)and piezoelectric force microscopy(PFM),respectively.Finally,a half-wave voltage(V_(π))of 2.3 V was obtained using a device with 6-mm-long(L)electrodes.Furthermore,the electro-optic modulation efficiency(V_(π)L)was calculated as 1.38 V-cm,which was approximately one order of magnitude lower than that of commercial lithium niobate(LiNbO_(3),LN)phase modulators.Such enhanced modulation efficiency indicates more compact device and lower power consumption,which is of great significance for electro-optic modulation systems used in micro-fiber gyroscope,integrated photonic devices,etc.
基金supported by the National Natural Science Foundation of China(No.61078039)
文摘Reactive ion etching(RIE) of LiNbO_3(LN) in SF_6 plasma atmosphere was studied for optimizing the preparation conditions for LN ridge waveguides.The samples to be etched are Ti-diffused LN slab waveguides overlaid with a chromium film mask that has a Mach-Zehnder interferometer(MZI) array pattern.The experimental results indicate that the LN-etching rate(R_(LN)) and the Cr-etching rate(R_(Cr)) as well as the rate ratio R_(LN)/R_(Cr) increase with either increasing the radio-frequency(RF) power at a given SF_6 flow rate or increasing the SF_6 flow rate at a fixed RF power.The maximum values of R_(LN) = 43.2 nm/min and R_(LN)/R_(Cr) = 3.27 were achieved with 300 W RF power and 40 sccm SF_6 flow.When the SF_6 flow rate exceeds 40 sccm,an increase in the flow rate causes the etching rates and the rate ratio to decrease.The scanning electron microscope images of the LN ridge prepared after~20 min etching show that the ridge height is 680 nm and the sidewall slope angle is about 60°.
基金Project supported in part by the National Natural Science Foundation of China,Science Foundation of Guangdong Province,Zhongshan University,Chinese Post-doctoral Committee.
文摘An iterative procedure is proposed for the variational analysis of Ti:LiNbO3 optical waveguides. A trial solution for the dominant electric field profile of arbitrary-order eigenmodes in strip waveguides and two coupled waveguides is proposed and its parameters are determined using the variational method. The results calculated using this method agree well with those obtained using the finite-element method. The present method has been used to check the accuracy of the effective index method as well as a quasi-analytical technique based on the effective index method. The results show that the effective index method is generally accurate for the fundamental mode and becomes less accurate for higher-order vertical modes.
文摘系统地研究 Z切 L i Nb O3晶体中质子交换波导和退火质子交换波导的特性 ,得到了质子交换过程中的扩散常数和激活能 ,发现了质子交换波导的折射率呈线性阶跃型的折射率分布。通过连续退火 ,波导的折射率分布由线性阶跃型向高斯型过渡。退火可分为两个阶段 ,波导深度的增加在第一阶段随退火时间成指数关系 ,第二阶段与退火时间的平方根成线性关系。