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Ti-Si_(0.84)Ge_(0.16)和Ti-Si系统的温度特性研究
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作者 李翊 张伟 +6 位作者 许军 陈长春 单一林 熊小义 李希有 刘志弘 钱佩信 《微电子学》 CAS CSCD 北大核心 2006年第1期33-35,共3页
实验分别测量了Ti-Si0.84Ge0.16和Ti-Si系统在依次经历700℃及730~900℃两步退火后的方块电阻。对比结果表明,Ti的锗硅化物与Ti的硅化物具有不同的温度特性。造成这一差异的原因与Ge原子在高温下的行为有关。实验利用XRD,研究了Ti(S... 实验分别测量了Ti-Si0.84Ge0.16和Ti-Si系统在依次经历700℃及730~900℃两步退火后的方块电阻。对比结果表明,Ti的锗硅化物与Ti的硅化物具有不同的温度特性。造成这一差异的原因与Ge原子在高温下的行为有关。实验利用XRD,研究了Ti(SiGe)2从C49相到C54相的转变。物相分析结果显示,其相转变温度在760~800℃之间。结合实验结论,对采用Ti硅化物工艺的自对准SiGeHBT进行了退火温度的优化,其适合的高温退火温度为850℃左右。 展开更多
关键词 ti基硅化物 SIGE HBT RTA 温度特性
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Friction and wear behaviors of Nb-Ti-Si-Cr based ultrahigh temperature alloy and its Zr-Y jointly modified silicide coatings 被引量:3
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作者 李轩 郭喜平 乔彦强 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2016年第7期1892-1901,共10页
Zr-Y jointly modified silicide coatings were prepared on an Nb-Ti-Si-Cr based ultrahigh temperature alloy by pack cementation process. The wear behaviors of both the base alloy and coatings were comparatively studied ... Zr-Y jointly modified silicide coatings were prepared on an Nb-Ti-Si-Cr based ultrahigh temperature alloy by pack cementation process. The wear behaviors of both the base alloy and coatings were comparatively studied at room temperature and 800 ℃ using SiC balls as the counterpart. The Zr-Y jointly modified silicide coating is mainly composed of a thick (Nb,X)Si2 outer layer and a thin (Ti,Nb)5Si4 inner layer. The coatings possess much higher microhardness than the base alloy. The wear rates of both the base alloy and coatings increase with increasing the sliding loads. However, the coatings have much lower wear rates than the base alloy under the same sliding conditions. The coatings have superior anti-friction property, and can provide effective protection for the base alloy at both room temperature and 800 ℃ in air. 展开更多
关键词 Nb-ti-Si-Cr based alloy Zr-Y modified silicide coating friction and wear wear mechanism
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