脉冲磁控溅射MoS2-Ti涂层常温及高温真空摩擦磨损性能

利用脉冲磁控溅射法,以铝青铜合金(C63200)和硅片为基底,制作不同Ti含量的MoS2-Ti复合涂层。通过XRD、SEM、EDS、光学显微镜、多环境摩擦试验机等表征了涂层的结构成分和摩擦性能。结果表明:随Ti含量的增加,涂层致密度提升,S、Mo原子比上升。Ti的掺入使涂层由高度结晶态向非晶态转变。Ti含量增加,涂层摩擦磨损性能先上升再下降,常温真空下含3%Ti的涂层拥有稳定和低至0.015的摩擦系数,23%Ti的涂层失去润滑性。温度升高到400℃,涂层摩擦系数由0.015~0.04上升至0.07~0.1,含13%Ti的涂层高温真空下在800s后润滑失效。磨痕形貌显示,含3%Ti的涂层磨痕最窄,温度升高宽度增加不大,含13%Ti的涂层磨损严重,400℃真空环境下很快磨穿,纯MoS2和13%Ti涂层摩擦时发现大量磨粒和破碎磨屑。

Microstructural and tribological behavior of TiAlN/MoS_2-Ti coatings

A TIA1N/MoS2-Ti coating was developed to improve the tribological characteristics of a single TiAlN coating. The MoS2-Ti layer was deposited by a DC magnetron sputtering system on the hard TiAIN coated SKD-11 steel substrate. The titanium content in the MoS2-Ti layer was 11.3 at.% determined by EPMA. The surface morphology was observed by FE-SEM. The TiAlN layer exhibited excellent adhesion and hardness. However, the deposition of an MoS2-Zi layer on the TRAIN led to a significant improvement in tribological properties without affecting the adhesion to the substrate. The MoS2-Ti layer significantly decreased the friction coefficient of the TiAIN coating, and the drop was 48% after MoS2-Ti deposition. Also, the MoS2-Ti layer remarkably decreased the wear rate of the TtA1N coating.