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Structures and optical properties of tungsten oxide thin films deposited by magnetron sputtering of WO_3 bulk:Effects of annealing temperatures 被引量:1
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作者 张锋 王海千 +3 位作者 王松 汪竟阳 钟志成 金叶 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第9期509-514,共6页
Tungsten oxide thin films were deposited on glass substrates by the magnetron sputtering of WO3 bulk at room temperature. The deposited films were annealed at different temperatures in air. The structural measurements... Tungsten oxide thin films were deposited on glass substrates by the magnetron sputtering of WO3 bulk at room temperature. The deposited films were annealed at different temperatures in air. The structural measurements indicate that the films annealed below 300℃ were amorphous, while the films annealed at 400 ℃ were mixed crystalline with hexagonal and triclinic phases of WO3. It was observed that the crystallization of the annealed films becomes more and more distinct with an increase in the annealing temperature. At 400 ℃, nanorod-like structures were observed on the film surface when the annealing time was increased from 60 min to 180 min. The presence of W=O stretching, W-O-W stretching, W-O-W bending and various lattice vibration modes were observed in Raman measurements. The optical absorption behaviors of the films in the range of 450-800 nm are very different with changing annealing temperatures from the room temperature to 400 ℃. After annealing at 400 ℃, the film becomes almost transparent. Increasing annealing time at 400 ℃ can lead to a small blue shift of the optical gap of the film. 展开更多
关键词 tungsten oxide film magnetron sputtering structure optical property
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Synthesis of mesostructured thin films by ionic wind assisted electrostatic spray deposition
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作者 S. Khodadadi G.M.H. Meesters G. Biskos 《Particuology》 SCIE EI CAS CSCD 2016年第4期128-132,共5页
Thin films produced by electrostatic spray deposition (ESD) have nanometer-sized structures despite the initial sprayed droplets being typically a few tens of microns in diameter. The size and morphology of the resu... Thin films produced by electrostatic spray deposition (ESD) have nanometer-sized structures despite the initial sprayed droplets being typically a few tens of microns in diameter. The size and morphology of the resulting structures is not only affected by the solvent properties and drying kinetics, hut also by Coulomb fission owing to the high surface charge density that the droplets build up upon evaporation. In this work we modulate the charge density of the droplets by inducing ionic wind along the spray, and produce mesoscopic structures. Using WO3 as an example, we show that the technique provides a practical way to control the morphology of thin films produced by ESD. 展开更多
关键词 Electrohydrodynamic atomization Electrospray Aerosol tungsten oxide Porous thin film
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