采用纳米级二氧化硅代替国际上惯用的三氧化二铝作磨料 ,解决了抛光液的悬浮问题 ,得到了很好的抛光表面 .采用无金属离子的有机碱作络合剂及 p H调制剂 ,使用了无金属离子的氧化剂解决了铜离子沾污问题和制约硅溶胶作磨料的凝胶问题 ....采用纳米级二氧化硅代替国际上惯用的三氧化二铝作磨料 ,解决了抛光液的悬浮问题 ,得到了很好的抛光表面 .采用无金属离子的有机碱作络合剂及 p H调制剂 ,使用了无金属离子的氧化剂解决了铜离子沾污问题和制约硅溶胶作磨料的凝胶问题 .从而得到一种适用于甚大规模集成电路 (U L SI)制备中铜互连线技术的化学机械抛光(CMP)展开更多
The effects of adjacent metal layers and space between metal lines on the temperature rise of multilevel ULSI interconnect lines are investigated by modeling a three-layer interconnect. The heat dissipation of various...The effects of adjacent metal layers and space between metal lines on the temperature rise of multilevel ULSI interconnect lines are investigated by modeling a three-layer interconnect. The heat dissipation of various metallization technologies concerning the metal and low-k dielectric employment is simulated in detail. The Joule heat generated in the interconnect is transferred mainly through the metal lines in each metal layer and through the path with the smallest thermal resistance in each Ield layer. The temperature rises of Al metallization are approximately pAl/pCu times higher than those of Cu metallization under the same conditions. In addition, a thermal problem in 0.13μm globe interconnects is studied for the worst case, in which there are no metal lines in the lower interconnect layers. Several types of dummy metal heat sinks are investigated and compared with regard to thermal efficiency,influence on parasitic capacitance,and optimal application by combined thermal and electrical simula- tion.展开更多
文摘采用纳米级二氧化硅代替国际上惯用的三氧化二铝作磨料 ,解决了抛光液的悬浮问题 ,得到了很好的抛光表面 .采用无金属离子的有机碱作络合剂及 p H调制剂 ,使用了无金属离子的氧化剂解决了铜离子沾污问题和制约硅溶胶作磨料的凝胶问题 .从而得到一种适用于甚大规模集成电路 (U L SI)制备中铜互连线技术的化学机械抛光(CMP)
文摘The effects of adjacent metal layers and space between metal lines on the temperature rise of multilevel ULSI interconnect lines are investigated by modeling a three-layer interconnect. The heat dissipation of various metallization technologies concerning the metal and low-k dielectric employment is simulated in detail. The Joule heat generated in the interconnect is transferred mainly through the metal lines in each metal layer and through the path with the smallest thermal resistance in each Ield layer. The temperature rises of Al metallization are approximately pAl/pCu times higher than those of Cu metallization under the same conditions. In addition, a thermal problem in 0.13μm globe interconnects is studied for the worst case, in which there are no metal lines in the lower interconnect layers. Several types of dummy metal heat sinks are investigated and compared with regard to thermal efficiency,influence on parasitic capacitance,and optimal application by combined thermal and electrical simula- tion.
