Photo-responsive slippery lubricant-infused porous surface(SLIPS) for droplet manipulation is flexible, noncontact and non-destructive in droplet manipulation, which has promising applications in flexible robotics, mi...Photo-responsive slippery lubricant-infused porous surface(SLIPS) for droplet manipulation is flexible, noncontact and non-destructive in droplet manipulation, which has promising applications in flexible robotics, microfluidics,biomedicine, and chemical analysis. However, the repeated manipulations for droplets of SLIPSs are quite limited in the works reported so far, the poor durability of droplet manipulation severely limits the practical application of the surfaces. In this paper, an Fe3O4-doped polydimethylsiloxane(PDMS)-based SLIPS is proposed and implemented to achieve ultra-high repeated droplet manipulation numbers under near-infrared ray(NIR) laser irradiation. Firstly, a micron columnar array structure with micro-pits on the top side, as well as, a wall structure out of the array is designed on SLIPS to reserve the lubricant. Secondly, the prototype of the SLIPS is fabricated by a 3-step ultraviolet(UV) lithography, and subsequently immersed in silicone oil for more than 96 h to obtain the ultra-high durability slippery lubricant-infused porous surface(UD-SLIPS). With a power of 25 m W–85 m W NIR laser, the repeated manipulation of microdroplets(≤ 5 μL) in the scale of 1 cm can exceed more than 3000 times which is far beyond that in previous reports. Finally, the droplet manipulation performance of this photo-responsive UD-SLIPS and the influence of infusion time on durability are investigated. The mechanism of the PDMS swelling effect is found to be the key factor in improving the droplet manipulation durability of SLIPS. The findings of this work would be of great significance for the development of highly durable photo-responsive functional surfaces for droplet manipulation.展开更多
Contact exposure is expected to occur in conventional lithography, and can be a source of process deviations (such as shrinking and distortion of templates) during reactive ion etching and inductively coupled plasma...Contact exposure is expected to occur in conventional lithography, and can be a source of process deviations (such as shrinking and distortion of templates) during reactive ion etching and inductively coupled plasma etching, as these deviations are induced by ion bombardment. This typically results in undesired sidewall effects, such as lower sidewall angles. Here we report a novel hanging bowlshaped lithography mask that can effectively minimize sidewall effects in lithography applications. As a test case, standard silicon carbide pillars with vertical sidewalls are fabricated using this mask. The mask could be used for fabrication of high-aspect-ratio structures with ultra-violet lithography.展开更多
基金Project supported by the National Major Scientific Research Instrument Development Project of China (Grant No. 51927804)the National Natural Science Foundation of China (Grant No. 62275216)the Science and Technology Innovation Team Project of Shaanxi Province (Grant Nos. S2018-ZC-TD-0061 and 2023-CX-TD-06)。
文摘Photo-responsive slippery lubricant-infused porous surface(SLIPS) for droplet manipulation is flexible, noncontact and non-destructive in droplet manipulation, which has promising applications in flexible robotics, microfluidics,biomedicine, and chemical analysis. However, the repeated manipulations for droplets of SLIPSs are quite limited in the works reported so far, the poor durability of droplet manipulation severely limits the practical application of the surfaces. In this paper, an Fe3O4-doped polydimethylsiloxane(PDMS)-based SLIPS is proposed and implemented to achieve ultra-high repeated droplet manipulation numbers under near-infrared ray(NIR) laser irradiation. Firstly, a micron columnar array structure with micro-pits on the top side, as well as, a wall structure out of the array is designed on SLIPS to reserve the lubricant. Secondly, the prototype of the SLIPS is fabricated by a 3-step ultraviolet(UV) lithography, and subsequently immersed in silicone oil for more than 96 h to obtain the ultra-high durability slippery lubricant-infused porous surface(UD-SLIPS). With a power of 25 m W–85 m W NIR laser, the repeated manipulation of microdroplets(≤ 5 μL) in the scale of 1 cm can exceed more than 3000 times which is far beyond that in previous reports. Finally, the droplet manipulation performance of this photo-responsive UD-SLIPS and the influence of infusion time on durability are investigated. The mechanism of the PDMS swelling effect is found to be the key factor in improving the droplet manipulation durability of SLIPS. The findings of this work would be of great significance for the development of highly durable photo-responsive functional surfaces for droplet manipulation.
基金Acknowledgements This research was supported by tile National Natural Science Foundation of China (Grant No. 10974037), the CAS Strategy Pilot program (Grant No. XAD 09020300), and the National Basic Research Program of China (Grant No. 2010CB934102).
文摘Contact exposure is expected to occur in conventional lithography, and can be a source of process deviations (such as shrinking and distortion of templates) during reactive ion etching and inductively coupled plasma etching, as these deviations are induced by ion bombardment. This typically results in undesired sidewall effects, such as lower sidewall angles. Here we report a novel hanging bowlshaped lithography mask that can effectively minimize sidewall effects in lithography applications. As a test case, standard silicon carbide pillars with vertical sidewalls are fabricated using this mask. The mask could be used for fabrication of high-aspect-ratio structures with ultra-violet lithography.