Growth of high-quality large-sized crystals using the traditional chemical vapor transport(CVT)or vertical Bridgman(VB)technique is costly and time-consuming,limiting its practical industrial application.Here,we propo...Growth of high-quality large-sized crystals using the traditional chemical vapor transport(CVT)or vertical Bridgman(VB)technique is costly and time-consuming,limiting its practical industrial application.Here,we propose an ultrafast crystal growth process with low energy consumption and capability of producing crystals of excellent quality,and demonstrate that large-sized GaSe crystals with a lateral size of 0.5 to 1 cm can be obtained within a short period of 5 min.X-ray diffraction(XRD)and scanning transmission electron microscopy(STEM)studies clearly indicate that the as-grown crystals have a good crystallinity.To further show the potential application of the resulting GaSe crystals,we fabricate the few-layer GaSe-based photodetector,which exhibits low dark current of 21 pA and fast response of 34 ms under 405 nm illumination.Our proposed technique for rapid crystal growth could be further extended to other metallenes with low-melting point,such as Bi-,Sn-,In-,Pb-based crystals,opening up a new avenue in fulfilling diverse potential optoelectronics applications of two-dimensional(2D)crystals.展开更多
Two-dimensional(2D)semiconductors have attracted great attention to extend Moore’s law,which motivates the quest for fast growth of high-quality materials.However,taking MoS_(2) as an example,current methods yield 2D...Two-dimensional(2D)semiconductors have attracted great attention to extend Moore’s law,which motivates the quest for fast growth of high-quality materials.However,taking MoS_(2) as an example,current methods yield 2D MoS_(2) with a low growth rate and poor quality with vacancy concentrations three to five orders of magnitude higher than silicon and other commercial semiconductors.Here,we develop a strategy of using an intermediate product of iodine as a transport agent to carry metal precursors efficiently for ultrafast growth of high-quality MoS_(2).The grown MoS_(2) has the lowest density of sulfur vacancies(~1.41×10^(12) cm^(−2))reported so far and excellent electrical properties with high on/off current ratios of 108 and carrier mobility of 175 cm^(2) V^(−1) s^(−1).Theoretical calculations show that by incorporating iodine,the nucleation barrier of MoS_(2) growth with sulfur-terminated edges reduces dramatically.The sufficient supply of precursor and low nucleation energy together boost the ultrafast growth of sub-millimeter MoS_(2) domains within seconds.This work provides an effective method for the ultrafast growth of 2D semiconductors with high quality,which will promote their applications.展开更多
Bilayer graphene provides a versatile platform for exploring a variety of intriguing phenomena and shows much promise for applications in electronics,optoelectronics,etc.Controlled growth of large-area bilayer graphen...Bilayer graphene provides a versatile platform for exploring a variety of intriguing phenomena and shows much promise for applications in electronics,optoelectronics,etc.Controlled growth of large-area bilayer graphene is therefore highly desired yet still suffers from a slow growth rate and poor layer uniformity.Meanwhile,graphene wrinkles,including folds and ripples,form during cooling due to the thermal contraction mismatch between graphene and the metal substrates,and have been far from suppressed or eliminated,especially in bilayer graphene,which would greatly degrade the extraordinary properties of graphene.Here we report the ultrafast growth of wafer-scale fold-free bilayer graphene by chemical vapor deposition.Through well-tuning the alloy thickness and strain regulation of the single-crystal CuNi(111)/sapphire,the full coverage of a 2-inch fold-free bilayer graphene wafer via mainly isothermal segregation has been achieved as fast as 30 s.The tensile-strained CuNi(111)film reduces the thermal contraction mismatch and suppresses the formation of graphene folds during cooling,which is directly observed through in situ optical microscopy.The ultraflat bilayer graphene exhibits wafer-scale uniformity in electrical performance and enhanced mechanical property comparable to the exfoliated ones.Our results offer a promising route for largescale production of bilayer graphene and enable its various applications.展开更多
The scalable growth of wafer-sized single-crystal graphene in an energy-efficient manner and compatible with wafer process is critical for the killer applications of graphene in high-performance electronics and optoel...The scalable growth of wafer-sized single-crystal graphene in an energy-efficient manner and compatible with wafer process is critical for the killer applications of graphene in high-performance electronics and optoelectronics. Here, ultrafast epitaxial growth of single-crystal graphene wafers is realized on singlecrystal Cu90Ni10(1 1 1) thin films fabricated by a tailored two-step magnetron sputtering and recrystallization process. The minor nickel(Ni) content greatly enhances the catalytic activity of Cu, rendering the growth of a 4 in. single-crystal monolayer graphene wafer in 10 min on Cu90Ni10(1 1 1), 50 folds faster than graphene growth on Cu(1 1 1). Through the carbon isotope labeling experiments, graphene growth on Cu90Ni10(1 1 1) is proved to be exclusively surface-reaction dominated, which is ascribed to the Cu surface enrichment in the Cu Ni alloy, as indicated by element in-depth profile. One of the best benefits of our protocol is the compatibility with wafer process and excellent scalability. A pilot-scale chemical vapor deposition(CVD) system is designed and built for the mass production of single-crystal graphene wafers, with productivity of 25 pieces in one process cycle. Furthermore, we demonstrate the application of single-crystal graphene in electrically controlled liquid-crystal microlens arrays(LCMLA), which exhibit highly tunable focal lengths near 2 mm under small driving voltages. By integration of the graphene based LCMLA and a CMOS sensor, a prototype camera is proposed that is available for simultaneous light-field and light intensity imaging. The single-crystal graphene wafers could hold great promising for highperformance electronics and optoelectronics that are compatible with wafer process.展开更多
基金This work was supported by the National Natural Science Foundation of China(Nos.62104073,51402219,11904412,and 6210031084)the Postdoctoral Science Foundation(No.2021M691088)+2 种基金Y.S.acknowledges the support from the National Natural Science Foundation of China(Nos.51602200 and 61874074)the(Key)Project of Department of Education of Guangdong Province(No.2016KZDXM008)This project was supported by Shenzhen Peacock Plan(No.KQTD2016053112042971).
文摘Growth of high-quality large-sized crystals using the traditional chemical vapor transport(CVT)or vertical Bridgman(VB)technique is costly and time-consuming,limiting its practical industrial application.Here,we propose an ultrafast crystal growth process with low energy consumption and capability of producing crystals of excellent quality,and demonstrate that large-sized GaSe crystals with a lateral size of 0.5 to 1 cm can be obtained within a short period of 5 min.X-ray diffraction(XRD)and scanning transmission electron microscopy(STEM)studies clearly indicate that the as-grown crystals have a good crystallinity.To further show the potential application of the resulting GaSe crystals,we fabricate the few-layer GaSe-based photodetector,which exhibits low dark current of 21 pA and fast response of 34 ms under 405 nm illumination.Our proposed technique for rapid crystal growth could be further extended to other metallenes with low-melting point,such as Bi-,Sn-,In-,Pb-based crystals,opening up a new avenue in fulfilling diverse potential optoelectronics applications of two-dimensional(2D)crystals.
基金This work was supported by the National Key R&D Program(2018YFA0307300)the National Natural Science Foundation of China(51991343,51991340,52188101 and 51920105002)+3 种基金the China Postdoctoral Science Foundation(2021M701948)the National Science Fund for Distinguished Young Scholars(52125309)Guangdong Innovative and Entrepreneurial Research Team Program(2017ZT07C341)Shenzhen Basic Research Project(JCYJ20200109144616617 and JCYJ20220818101014029).
文摘Two-dimensional(2D)semiconductors have attracted great attention to extend Moore’s law,which motivates the quest for fast growth of high-quality materials.However,taking MoS_(2) as an example,current methods yield 2D MoS_(2) with a low growth rate and poor quality with vacancy concentrations three to five orders of magnitude higher than silicon and other commercial semiconductors.Here,we develop a strategy of using an intermediate product of iodine as a transport agent to carry metal precursors efficiently for ultrafast growth of high-quality MoS_(2).The grown MoS_(2) has the lowest density of sulfur vacancies(~1.41×10^(12) cm^(−2))reported so far and excellent electrical properties with high on/off current ratios of 108 and carrier mobility of 175 cm^(2) V^(−1) s^(−1).Theoretical calculations show that by incorporating iodine,the nucleation barrier of MoS_(2) growth with sulfur-terminated edges reduces dramatically.The sufficient supply of precursor and low nucleation energy together boost the ultrafast growth of sub-millimeter MoS_(2) domains within seconds.This work provides an effective method for the ultrafast growth of 2D semiconductors with high quality,which will promote their applications.
基金This work was supported by the National Natural Science Foundation of China(Nos.52021006,T2188101,and 22105009)Beijing National Laboratory for Molecular Sciences(No.BNLMSCXTD-202001)+1 种基金the Tencent Foundation(No.XPLORER PRIZE)We acknowledge Molecular Materials and Nanofabrication Laboratory(MMNL)in the College of Chemistry at Peking University for the use of instruments.
文摘Bilayer graphene provides a versatile platform for exploring a variety of intriguing phenomena and shows much promise for applications in electronics,optoelectronics,etc.Controlled growth of large-area bilayer graphene is therefore highly desired yet still suffers from a slow growth rate and poor layer uniformity.Meanwhile,graphene wrinkles,including folds and ripples,form during cooling due to the thermal contraction mismatch between graphene and the metal substrates,and have been far from suppressed or eliminated,especially in bilayer graphene,which would greatly degrade the extraordinary properties of graphene.Here we report the ultrafast growth of wafer-scale fold-free bilayer graphene by chemical vapor deposition.Through well-tuning the alloy thickness and strain regulation of the single-crystal CuNi(111)/sapphire,the full coverage of a 2-inch fold-free bilayer graphene wafer via mainly isothermal segregation has been achieved as fast as 30 s.The tensile-strained CuNi(111)film reduces the thermal contraction mismatch and suppresses the formation of graphene folds during cooling,which is directly observed through in situ optical microscopy.The ultraflat bilayer graphene exhibits wafer-scale uniformity in electrical performance and enhanced mechanical property comparable to the exfoliated ones.Our results offer a promising route for largescale production of bilayer graphene and enable its various applications.
基金supported by the National Basic Research Program of China(2016YFA0200101 and 2014CB932500)the National Natural Science Foundation of China(21525310,51432002,51520105003,61432007,and 61176052)Beijing Municipal Science&Technology Commission(Z161100002116021 and Z181100004818001)
文摘The scalable growth of wafer-sized single-crystal graphene in an energy-efficient manner and compatible with wafer process is critical for the killer applications of graphene in high-performance electronics and optoelectronics. Here, ultrafast epitaxial growth of single-crystal graphene wafers is realized on singlecrystal Cu90Ni10(1 1 1) thin films fabricated by a tailored two-step magnetron sputtering and recrystallization process. The minor nickel(Ni) content greatly enhances the catalytic activity of Cu, rendering the growth of a 4 in. single-crystal monolayer graphene wafer in 10 min on Cu90Ni10(1 1 1), 50 folds faster than graphene growth on Cu(1 1 1). Through the carbon isotope labeling experiments, graphene growth on Cu90Ni10(1 1 1) is proved to be exclusively surface-reaction dominated, which is ascribed to the Cu surface enrichment in the Cu Ni alloy, as indicated by element in-depth profile. One of the best benefits of our protocol is the compatibility with wafer process and excellent scalability. A pilot-scale chemical vapor deposition(CVD) system is designed and built for the mass production of single-crystal graphene wafers, with productivity of 25 pieces in one process cycle. Furthermore, we demonstrate the application of single-crystal graphene in electrically controlled liquid-crystal microlens arrays(LCMLA), which exhibit highly tunable focal lengths near 2 mm under small driving voltages. By integration of the graphene based LCMLA and a CMOS sensor, a prototype camera is proposed that is available for simultaneous light-field and light intensity imaging. The single-crystal graphene wafers could hold great promising for highperformance electronics and optoelectronics that are compatible with wafer process.