甚长波红外(VLWIR)波段富含大气湿度、CO_2含量及云层结构和温度轮廓等大量信息,是大气遥感的重要组成部分。为了满足现阶段甚长波红外探测器对读出电路高注入效率、大动态范围、稳定的探测器偏压、长积分时间等需求,设计了一种具有记...甚长波红外(VLWIR)波段富含大气湿度、CO_2含量及云层结构和温度轮廓等大量信息,是大气遥感的重要组成部分。为了满足现阶段甚长波红外探测器对读出电路高注入效率、大动态范围、稳定的探测器偏压、长积分时间等需求,设计了一种具有记忆功能背景抑制结构的共享型读出电路。该电路采用2×2四个相邻的探测器像元共用一个读出电路单元的共享缓冲直接注入级(SBDI)结构,增大了单元电路的面积,在单元内实现了具有记忆功能背景抑制结构的设计,其总积分电容达到8.8 p F,有效延长了积分时间和红外焦平面的信噪比(SNR),并改善了动态范围和对比度。基于HHNEC CZ6H 0.35μm 1P4M标准CMOS工艺,完成了电路的流片制造。仿真及测试结果表明:在50 K温度下电路功能正常,其动态范围大于90 d B,线性度优于99.9%,积分时间可达74μs,达到了设计要求。该读出电路适用于甚长波红外探测器。展开更多
The etching and passivation processes of very long wavelength infrared(VLWIR)detector based on the InAs/GaSb/AlSb type-II superlattice have been studied.By studying the effect of each component in the citric acid solu...The etching and passivation processes of very long wavelength infrared(VLWIR)detector based on the InAs/GaSb/AlSb type-II superlattice have been studied.By studying the effect of each component in the citric acid solution(citric acid,phosphoric acid,hydrogen peroxide,deionized water),the best solution ratio is obtained.After comparing different passivation materials such as sulfide+SiO_(2),Al_(2)O_(3),Si_(3)N_(4) and SU8,it is found that SU8 passivation can reduce the dark current of the device to a greater degree.Combining this wet etching and SU8 passivation,the of VLWIR detector with a mesa diameter of 500μm is about 3.6Ω·cm^(2) at 77 K.展开更多
文摘甚长波红外(VLWIR)波段富含大气湿度、CO_2含量及云层结构和温度轮廓等大量信息,是大气遥感的重要组成部分。为了满足现阶段甚长波红外探测器对读出电路高注入效率、大动态范围、稳定的探测器偏压、长积分时间等需求,设计了一种具有记忆功能背景抑制结构的共享型读出电路。该电路采用2×2四个相邻的探测器像元共用一个读出电路单元的共享缓冲直接注入级(SBDI)结构,增大了单元电路的面积,在单元内实现了具有记忆功能背景抑制结构的设计,其总积分电容达到8.8 p F,有效延长了积分时间和红外焦平面的信噪比(SNR),并改善了动态范围和对比度。基于HHNEC CZ6H 0.35μm 1P4M标准CMOS工艺,完成了电路的流片制造。仿真及测试结果表明:在50 K温度下电路功能正常,其动态范围大于90 d B,线性度优于99.9%,积分时间可达74μs,达到了设计要求。该读出电路适用于甚长波红外探测器。
基金supported by the National Basic Research Program of China(Grant Nos.2018YFA0209102 and 2019YFA070104)the National Natural Science Foundation of China(Grant Nos.61790581 and 61274013)the Key Research Program of the Chinese Academy of Sciences(Grant No.XDPB22)。
文摘The etching and passivation processes of very long wavelength infrared(VLWIR)detector based on the InAs/GaSb/AlSb type-II superlattice have been studied.By studying the effect of each component in the citric acid solution(citric acid,phosphoric acid,hydrogen peroxide,deionized water),the best solution ratio is obtained.After comparing different passivation materials such as sulfide+SiO_(2),Al_(2)O_(3),Si_(3)N_(4) and SU8,it is found that SU8 passivation can reduce the dark current of the device to a greater degree.Combining this wet etching and SU8 passivation,the of VLWIR detector with a mesa diameter of 500μm is about 3.6Ω·cm^(2) at 77 K.
