The aim of this paper is to investigate the dynamic characteristics of a valve-less micropump. A dynamic mathe- matical model of the micropump based on a hydraulic analogue system and a simulation method using AMESim ...The aim of this paper is to investigate the dynamic characteristics of a valve-less micropump. A dynamic mathe- matical model of the micropump based on a hydraulic analogue system and a simulation method using AMESim software are developed. By using the finite-element analysis method, the static analysis of the diaphragm is carried out to ob- tain the maximum deflection and volumetric displacement. Dynamic characteristics of the valve-less micropump under different excitation voltages and frequencies are simulated and tested. Because of the discrepancy between simulation results and experimental data at frequencies other than the natural frequency, the revised model for the diaphragm maximum volumetric displacement is presented. Comparison between the simulation results based on the revised model and experimental data shows that the dynamic mathematical model based on the hydraulic analogue system is capable of predicting dynamic characteristics of the valve-less micropump at any excitation voltage and frequency.展开更多
BACKGROUND Diabetes,a globally escalating health concern,necessitates innovative solutions for efficient detection and management.Blood glucose control is an essential aspect of managing diabetes and finding the most ...BACKGROUND Diabetes,a globally escalating health concern,necessitates innovative solutions for efficient detection and management.Blood glucose control is an essential aspect of managing diabetes and finding the most effective ways to control it.The latest findings suggest that a basal insulin administration rate and a single,highconcentration injection before a meal may not be sufficient to maintain healthy blood glucose levels.While the basal insulin rate treatment can stabilize blood glucose levels over the long term,it may not be enough to bring the levels below the post-meal limit after 60 min.The short-term impacts of meals can be greatly reduced by high-concentration injections,which can help stabilize blood glucose levels.Unfortunately,they cannot provide long-term stability to satisfy the postmeal or pre-meal restrictions.However,proportional-integral-derivative(PID)control with basal dose maintains the blood glucose levels within the range for a longer period.AIM To develop a closed-loop electronic system to pump required insulin into the patient's body automatically in synchronization with glucose sensor readings.METHODS The proposed system integrates a glucose sensor,decision unit,and pumping module to specifically address the pumping of insulin and enhance system effectiveness.Serving as the intelligence hub,the decision unit analyzes data from the glucose sensor to determine the optimal insulin dosage,guided by a pre-existing glucose and insulin level table.The artificial intelligence detection block processes this information,providing decision instructions to the pumping module.Equipped with communication antennas,the glucose sensor and micropump operate in a feedback loop,creating a closed-loop system that eliminates the need for manual intervention.RESULTS The incorporation of a PID controller to assess and regulate blood glucose and insulin levels in individuals with diabetes introduces a sophisticated and dynamic element to diabetes management.The simulation not only allows visualization of how the body responds to different inputs but also offers a valuable tool for predicting and testing the effects of various interventions over time.The PID controller's role in adjusting insulin dosage based on the discrepancy between desired setpoints and actual measurements showcases a proactive strategy for maintaining blood glucose levels within a healthy range.This dynamic feedback loop not only delays the onset of steady-state conditions but also effectively counteracts post-meal spikes in blood glucose.CONCLUSION The WiFi-controlled voltage controller and the PID controller simulation collectively underscore the ongoing efforts to enhance efficiency,safety,and personalized care within the realm of diabetes management.These technological advancements not only contribute to the optimization of insulin delivery systems but also have the potential to reshape our understanding of glucose and insulin dynamics,fostering a new era of precision medicine in the treatment of diabetes.展开更多
Existing researches on no-moving part valves in valve-less piezoelectric pumps mainly concentrate on pipeline valves and chamber bottom valves, which leads to the complex structure and manufacturing process of pump ch...Existing researches on no-moving part valves in valve-less piezoelectric pumps mainly concentrate on pipeline valves and chamber bottom valves, which leads to the complex structure and manufacturing process of pump channel and chamber bottom. Furthermore, position fixed valves with respect to the inlet and outlet also makes the adjustability and controllability of flow rate worse. In order to overcome these shortcomings, this paper puts forward a novel implantable structure of valve-less piezoelectric pump with hemisphere-segments in the pump chamber. Based on the theory of flow around bluff-body, the flow resistance on the spherical and round surface of hemisphere-segment is different when fluid flows through, and the macroscopic flow resistance differences thus formed are also different. A novel valve-less piezoelectric pump with hemisphere-segment bluff-body (HSBB) is presented and designed. HSBB is the no-moving part valve. By the method of volume and momentum comparison, the stress on the bluff-body in the pump chamber is analyzed. The essential reason of unidirectional fluid pumping is expounded, and the flow rate formula is obtained. To verify the theory, a prototype is produced. By using the prototype, experimental research on the relationship between flow rate, pressure difference, voltage, and frequency has been carried out, which proves the correctness of the above theory. This prototype has six hemisphere-segments in the chamber filled with water, and the effective diameter of the piezoelectric bimorph is 30mm. The experiment result shows that the flow rate can reach 0.50 mL/s at the frequency of 6 Hz and the voltage of 110 V. Besides, the pressure difference can reach 26.2 mm H20 at the frequency of 6 Hz and the voltage of 160 V. This research proposes a valve-less piezoelectric pump with hemisphere-segment bluff-body, and its validity and feasibility is verified through theoretical analysis and experiment.展开更多
This paper presents the design, fabrication, and experimental characterization of a peristaltic micropump. The micropump is composed of two layers fabricated from Polydimethylsiloxane (PDMS) material. The first laye...This paper presents the design, fabrication, and experimental characterization of a peristaltic micropump. The micropump is composed of two layers fabricated from Polydimethylsiloxane (PDMS) material. The first layer has a rectangular channel and two valve seals. Three rectangular mini lightweight piezo-composite actuators are integrated in the second layer, and used as actuation parts. Two layers are bonded, and covered by two Polymethyl Methacrylate (PMMA) plates, which help increase the stiffness of the micropump. A maximum flow rate of 900μL.min 1 and a maximum backpressure of 1.8 kPa are recorded when water is used as pump liquid. We measured the power consumption of the micropump. The micropump is found to be a promising candidate for bio-medical application due to its bio-compatibility, portability, bidirectionality, and simple effective design.展开更多
This paper employs the integral-averaged method of thickness to approximate the periodical flows in a piezoelectric micropump, with a shallow water equation including nonlinearity and viscous damp presented to charact...This paper employs the integral-averaged method of thickness to approximate the periodical flows in a piezoelectric micropump, with a shallow water equation including nonlinearity and viscous damp presented to characterize the flows in micropump. The finite element method is used to obtain a matrix equation of fluid pressure. The fluid pressure equation is combined with the vibration equation of a silicon diaphragm to construct a liquid-solid coupled equation for reflecting the interaction between solid diaphragm and fluid motion in a micropump. Numerical results of a mode analysis of the coupled system indicate that the natural frequencies of the coupled system are much lower than those of the non-coupled system. The influence of additional mass and viscous damp of fluid on the natural frequencies of the coupled system is more significant as the pump thickness is small. It is found that the vibration shape functions of silicon diaphragm of the coupled system are almost the same as those of the non-coupled system. This paper also gives the first-order amplitude-frequency relationship of the silicon diaphragm, which is necessary for the flow-rate-frequency analysis of a micropump.展开更多
The concept and structure of serial-connection multi-chamber (SCMC) micropumps with cantilever valves is introduced. The SCMC micropump, which can be manufactured using conventional production techniques and materials...The concept and structure of serial-connection multi-chamber (SCMC) micropumps with cantilever valves is introduced. The SCMC micropump, which can be manufactured using conventional production techniques and materials, has a multi-layer circular planar structure. The border-upon piezoelectric actuators of a SCMC micropump work in anti-phase, as a result the pumping performance is similar to that of several single-chamber pumps running in series. The theoretical analysis shows that the pumping performance of a SCMC micropump depends not only on the characteristic and geometrical parameters of the piezoelectric actuators, but also on the number of pump chambers. Both flowrate and pressure of a SCMC pump can be enhanced to a certain extent. Four piezoelectric micropumps with different chambers were fabricated and tested. The testing results show that the enhancing extents of the flowrate and pressure of a SCMC piezoelectric micropump are different. The maximum flowrate and pressure of the four-chamber pump achieved are 2.5 times and 3.6 times those of the single-chamber pump achieved.展开更多
PZT-based valveless micropump is a microactuator that can be used for controlling and delivering tiny amounts of fluids,and diffuser/nozzle plays an important role when this type of micropump drives the fluid flowing ...PZT-based valveless micropump is a microactuator that can be used for controlling and delivering tiny amounts of fluids,and diffuser/nozzle plays an important role when this type of micropump drives the fluid flowing along a specific direction.In this paper,a numerical model of micropump has been proposed,and the fluidic properties of diffuser/nozzle have been simulated with ANSYS.With the method of finite-element analysis,the increased pressure drop between inlet and outlet of diffuser/nozzle induces the increment of flow rate in both diffuser and nozzle simultaneously,but the increasing rate of diffuser is faster than that of nozzle.The L/R,ratio of L(length of cone pipe) and R(radius of minimal cross section of cone pipe) plays an important role in fluidic performance of diffuser and nozzle as well,and the mean flow rate will decrease with increment of L/R.The mean flow rate reaches its peak value when L/R with the value of 10 regardless the divergence angle of diffuser or nozzle.The simulation results indicate that the fluidic properties of diffuser/nozzle can be defined by its geometric structure,and accordingly determine the efficiency of micropump.展开更多
According to the'elastic buffer mechanism'and the'variable gap mechanism',a new device,which is both micropump and active microvalve actuated by PZT bimorph cantilever,was fabricated with polydimethyis...According to the'elastic buffer mechanism'and the'variable gap mechanism',a new device,which is both micropump and active microvalve actuated by PZT bimorph cantilever,was fabricated with polydimethyisiloxane (PDMS) and silicon chip.The thickness of the micropump membrance is about 180μm.The diameter and the depth of micropump chamber cavity are 6 mm and 40μm,respectively.The performances of the micropump,such as pump rate and backpressure,were characterized.As a flow-rectifying element,the diffusers and active valve were used instead of passive check valves.The flow rate and the backpressure of the micropump are about 420μL/min and 2 kPa when applying a 100 V square wave driving voltage at frequency of 35 Hz.展开更多
The fabrication and characterization of a hybrid Silicon-PDMS micropump based on MEMS technology is presented. The micropump consists of one chamber,two passive valves and one PDMS diaphragm.A PZT bimorph working as t...The fabrication and characterization of a hybrid Silicon-PDMS micropump based on MEMS technology is presented. The micropump consists of one chamber,two passive valves and one PDMS diaphragm.A PZT bimorph working as the actuator is mounted on the PDMS diaphragm.The use of the PDMS diaphragm and the PZT bimorph can give rise to large displacements of the pump diaphragm,making the micropump more efficient and easier to be fabricated.The flow rate of the micropump is a function to the voltage and frequency of the applied square wave.When a square wave of 100V is applied,a maximum flow rate of 317μL/min and a back-pressure of 2 kPa are achieved at 20 Hz.展开更多
Piezoelectric transducers of different external diameters are designed and fabricated and incorporated into micropumps. Through finite element analysis, it is shown that the volume efficiency of the micropump reaches ...Piezoelectric transducers of different external diameters are designed and fabricated and incorporated into micropumps. Through finite element analysis, it is shown that the volume efficiency of the micropump reaches its maximum value for the first mode of vibration. The variation of maximum displacement with frequency is determined under free and forced vibration. Results demonstrate that this variation shows the same trend for different driving waves at the same driving voltage. The maximum displacement under forced vibration is less than that under free vibration. The displacement increases with decreasing distance from the center of the transducer. The maximum displacement is inversely proportional to the diameter of the transducer and proportional to the driving voltage under both free and forced vibrations. Finally, the micropump flow rate and pressure are measured and are found to manifest the same trend as the maximum displacement under the same driving conditions. For a piezoelectric transducer of 12 mm external diameter, the maximum flow rate and pressure value are 150 μL/min and 346 Pa, respectively, under sine-wave driving at 100 Vpp driving voltage.展开更多
This paper presents a novel working mechanism of a micropump using micropaddles(MPs)to actively manipulate fluid based on 3 D printing technology.The novel working principle is systematically discussed using analysis,...This paper presents a novel working mechanism of a micropump using micropaddles(MPs)to actively manipulate fluid based on 3 D printing technology.The novel working principle is systematically discussed using analysis,computation and experiment methods.A theoretical model is established to research the working mechanism and crucial parameters for driving ability,such as MPs shape,size,vibration amplitude and frequency.Two different 3 D printing techniques that simplify the multi-step process into only one step are introduced to manufacture the prototype pump for investigating the principle experimentally.A testing system is designed to evaluate the flow rate of pumps with eight different vibrating paddles.A maximum flux of 127.9 mL/min is obtained at an applied voltage of 9 V.These experiments show that the active-type mechanical pump could not only freely control flow direction but also change flux by adopting different shapes or distribution ways.The advantage of the novel micropump is the application of the MP structure into the micropump system to actively manipulate fluid with flexibility and high driving ability at fairly low power.展开更多
In this paper,we propose a new prototype model of a micro pump using ICPF(Ionic Conducting Polymer Film)actuator as the servo actuator.This micro pump consists of two active one- way valves that make use of the same I...In this paper,we propose a new prototype model of a micro pump using ICPF(Ionic Conducting Polymer Film)actuator as the servo actuator.This micro pump consists of two active one- way valves that make use of the same ICPF actuator.The overall size of this micro pump prototype is 12mm in diameter and 20mm in length.The actuating mechanism is as follows:(1)The ICPF actuator as the diaphragm is bent into anode side by application of electricity.Then the volume of the pump chamber increases,resulting in the inflow of liquid from the inlet to the chamber.(2)By changing the current direction,the volume of the pump chamber decreases,resulting in the liquid flow from the chamber to the outlet.(3)The ICPF actuator is put on a sine voltage,the micro pump provides liquid flow from the inlet to the outlet continuously.Characteristic of the micro pump is measured.The experimental results indicate that the micro pump has the satisfactory responses.展开更多
A parallel dynamic passive valveless micropump was designed, which consists of three layers-valve, diaphragm and electromagnetic coil. The valve was wetly etched in a silicon wafer, the diaphragm was a PDMS (polydime...A parallel dynamic passive valveless micropump was designed, which consists of three layers-valve, diaphragm and electromagnetic coil. The valve was wetly etched in a silicon wafer, the diaphragm was a PDMS (polydimethyl siloxane) film spun on a silicon wafer with embedded permanent magnet posts, and the coil was electroplated on a silicon substrate. Under the actuation of the magnetic field generated by coils, the flexible diaphragm could be displaced upwards and downwards. After analyzing magnetic and mechanical characteristic of the flexible membrane and direction-dependence of the nozzle, a micropump was designed. And the relative length (L/d) of the micropump nozzle was taken 4. A 7 × 7 array of permanent magnetic posts was embedded in the PDMS film. Two diaphragms worked in an anti-step mode, which could relieve the liquid shock and increase the discharge of the micropump. The ANSYS and Matlab were adopted to analyze the actuation effect of the coil and the flow characteristic of the micropump. Results show that when actuated under a 0.3 A, 100 Hz current, the displacement of the diaphragm is more than 30 μm, and the discharge of the micropump is about 6 μL/s.展开更多
基金Project supported by the Scientific Research Foundation for the Returned Overseas Chinese Scholars, Ministry of Education of China (Grant No. 24403604)the Fundamental Research Funds for the Central Universities, China (Grant No. ZYGX2011J083)
文摘The aim of this paper is to investigate the dynamic characteristics of a valve-less micropump. A dynamic mathe- matical model of the micropump based on a hydraulic analogue system and a simulation method using AMESim software are developed. By using the finite-element analysis method, the static analysis of the diaphragm is carried out to ob- tain the maximum deflection and volumetric displacement. Dynamic characteristics of the valve-less micropump under different excitation voltages and frequencies are simulated and tested. Because of the discrepancy between simulation results and experimental data at frequencies other than the natural frequency, the revised model for the diaphragm maximum volumetric displacement is presented. Comparison between the simulation results based on the revised model and experimental data shows that the dynamic mathematical model based on the hydraulic analogue system is capable of predicting dynamic characteristics of the valve-less micropump at any excitation voltage and frequency.
文摘BACKGROUND Diabetes,a globally escalating health concern,necessitates innovative solutions for efficient detection and management.Blood glucose control is an essential aspect of managing diabetes and finding the most effective ways to control it.The latest findings suggest that a basal insulin administration rate and a single,highconcentration injection before a meal may not be sufficient to maintain healthy blood glucose levels.While the basal insulin rate treatment can stabilize blood glucose levels over the long term,it may not be enough to bring the levels below the post-meal limit after 60 min.The short-term impacts of meals can be greatly reduced by high-concentration injections,which can help stabilize blood glucose levels.Unfortunately,they cannot provide long-term stability to satisfy the postmeal or pre-meal restrictions.However,proportional-integral-derivative(PID)control with basal dose maintains the blood glucose levels within the range for a longer period.AIM To develop a closed-loop electronic system to pump required insulin into the patient's body automatically in synchronization with glucose sensor readings.METHODS The proposed system integrates a glucose sensor,decision unit,and pumping module to specifically address the pumping of insulin and enhance system effectiveness.Serving as the intelligence hub,the decision unit analyzes data from the glucose sensor to determine the optimal insulin dosage,guided by a pre-existing glucose and insulin level table.The artificial intelligence detection block processes this information,providing decision instructions to the pumping module.Equipped with communication antennas,the glucose sensor and micropump operate in a feedback loop,creating a closed-loop system that eliminates the need for manual intervention.RESULTS The incorporation of a PID controller to assess and regulate blood glucose and insulin levels in individuals with diabetes introduces a sophisticated and dynamic element to diabetes management.The simulation not only allows visualization of how the body responds to different inputs but also offers a valuable tool for predicting and testing the effects of various interventions over time.The PID controller's role in adjusting insulin dosage based on the discrepancy between desired setpoints and actual measurements showcases a proactive strategy for maintaining blood glucose levels within a healthy range.This dynamic feedback loop not only delays the onset of steady-state conditions but also effectively counteracts post-meal spikes in blood glucose.CONCLUSION The WiFi-controlled voltage controller and the PID controller simulation collectively underscore the ongoing efforts to enhance efficiency,safety,and personalized care within the realm of diabetes management.These technological advancements not only contribute to the optimization of insulin delivery systems but also have the potential to reshape our understanding of glucose and insulin dynamics,fostering a new era of precision medicine in the treatment of diabetes.
基金Supported by National Natural Science Foundation of China(Grant No.51375227)Major Research Plan of National Natural Science Foundation of China(Grant No.91223201)Independent Projects Fund of State Key Lab of Mechanics and Control of Mechanical Structures of China(Grant No.0313G01)
文摘Existing researches on no-moving part valves in valve-less piezoelectric pumps mainly concentrate on pipeline valves and chamber bottom valves, which leads to the complex structure and manufacturing process of pump channel and chamber bottom. Furthermore, position fixed valves with respect to the inlet and outlet also makes the adjustability and controllability of flow rate worse. In order to overcome these shortcomings, this paper puts forward a novel implantable structure of valve-less piezoelectric pump with hemisphere-segments in the pump chamber. Based on the theory of flow around bluff-body, the flow resistance on the spherical and round surface of hemisphere-segment is different when fluid flows through, and the macroscopic flow resistance differences thus formed are also different. A novel valve-less piezoelectric pump with hemisphere-segment bluff-body (HSBB) is presented and designed. HSBB is the no-moving part valve. By the method of volume and momentum comparison, the stress on the bluff-body in the pump chamber is analyzed. The essential reason of unidirectional fluid pumping is expounded, and the flow rate formula is obtained. To verify the theory, a prototype is produced. By using the prototype, experimental research on the relationship between flow rate, pressure difference, voltage, and frequency has been carried out, which proves the correctness of the above theory. This prototype has six hemisphere-segments in the chamber filled with water, and the effective diameter of the piezoelectric bimorph is 30mm. The experiment result shows that the flow rate can reach 0.50 mL/s at the frequency of 6 Hz and the voltage of 110 V. Besides, the pressure difference can reach 26.2 mm H20 at the frequency of 6 Hz and the voltage of 160 V. This research proposes a valve-less piezoelectric pump with hemisphere-segment bluff-body, and its validity and feasibility is verified through theoretical analysis and experiment.
文摘This paper presents the design, fabrication, and experimental characterization of a peristaltic micropump. The micropump is composed of two layers fabricated from Polydimethylsiloxane (PDMS) material. The first layer has a rectangular channel and two valve seals. Three rectangular mini lightweight piezo-composite actuators are integrated in the second layer, and used as actuation parts. Two layers are bonded, and covered by two Polymethyl Methacrylate (PMMA) plates, which help increase the stiffness of the micropump. A maximum flow rate of 900μL.min 1 and a maximum backpressure of 1.8 kPa are recorded when water is used as pump liquid. We measured the power consumption of the micropump. The micropump is found to be a promising candidate for bio-medical application due to its bio-compatibility, portability, bidirectionality, and simple effective design.
基金Project supported by the National Natural Science Foundation of China (No. 10472036).
文摘This paper employs the integral-averaged method of thickness to approximate the periodical flows in a piezoelectric micropump, with a shallow water equation including nonlinearity and viscous damp presented to characterize the flows in micropump. The finite element method is used to obtain a matrix equation of fluid pressure. The fluid pressure equation is combined with the vibration equation of a silicon diaphragm to construct a liquid-solid coupled equation for reflecting the interaction between solid diaphragm and fluid motion in a micropump. Numerical results of a mode analysis of the coupled system indicate that the natural frequencies of the coupled system are much lower than those of the non-coupled system. The influence of additional mass and viscous damp of fluid on the natural frequencies of the coupled system is more significant as the pump thickness is small. It is found that the vibration shape functions of silicon diaphragm of the coupled system are almost the same as those of the non-coupled system. This paper also gives the first-order amplitude-frequency relationship of the silicon diaphragm, which is necessary for the flow-rate-frequency analysis of a micropump.
文摘The concept and structure of serial-connection multi-chamber (SCMC) micropumps with cantilever valves is introduced. The SCMC micropump, which can be manufactured using conventional production techniques and materials, has a multi-layer circular planar structure. The border-upon piezoelectric actuators of a SCMC micropump work in anti-phase, as a result the pumping performance is similar to that of several single-chamber pumps running in series. The theoretical analysis shows that the pumping performance of a SCMC micropump depends not only on the characteristic and geometrical parameters of the piezoelectric actuators, but also on the number of pump chambers. Both flowrate and pressure of a SCMC pump can be enhanced to a certain extent. Four piezoelectric micropumps with different chambers were fabricated and tested. The testing results show that the enhancing extents of the flowrate and pressure of a SCMC piezoelectric micropump are different. The maximum flowrate and pressure of the four-chamber pump achieved are 2.5 times and 3.6 times those of the single-chamber pump achieved.
基金Supported by′111′Project and Chongqing Natural Science Foundation(2006BB2043,2006BB2142)
文摘PZT-based valveless micropump is a microactuator that can be used for controlling and delivering tiny amounts of fluids,and diffuser/nozzle plays an important role when this type of micropump drives the fluid flowing along a specific direction.In this paper,a numerical model of micropump has been proposed,and the fluidic properties of diffuser/nozzle have been simulated with ANSYS.With the method of finite-element analysis,the increased pressure drop between inlet and outlet of diffuser/nozzle induces the increment of flow rate in both diffuser and nozzle simultaneously,but the increasing rate of diffuser is faster than that of nozzle.The L/R,ratio of L(length of cone pipe) and R(radius of minimal cross section of cone pipe) plays an important role in fluidic performance of diffuser and nozzle as well,and the mean flow rate will decrease with increment of L/R.The mean flow rate reaches its peak value when L/R with the value of 10 regardless the divergence angle of diffuser or nozzle.The simulation results indicate that the fluidic properties of diffuser/nozzle can be defined by its geometric structure,and accordingly determine the efficiency of micropump.
基金the financial support from the National Science Foundation of China(Grant No.20299030,60427001 and 60501020).
文摘According to the'elastic buffer mechanism'and the'variable gap mechanism',a new device,which is both micropump and active microvalve actuated by PZT bimorph cantilever,was fabricated with polydimethyisiloxane (PDMS) and silicon chip.The thickness of the micropump membrance is about 180μm.The diameter and the depth of micropump chamber cavity are 6 mm and 40μm,respectively.The performances of the micropump,such as pump rate and backpressure,were characterized.As a flow-rectifying element,the diffusers and active valve were used instead of passive check valves.The flow rate and the backpressure of the micropump are about 420μL/min and 2 kPa when applying a 100 V square wave driving voltage at frequency of 35 Hz.
基金The authors greatly acknowledge the financial support from the National Science Foundation of China (Grant number 20299030, 60427001 and 60501020).
文摘The fabrication and characterization of a hybrid Silicon-PDMS micropump based on MEMS technology is presented. The micropump consists of one chamber,two passive valves and one PDMS diaphragm.A PZT bimorph working as the actuator is mounted on the PDMS diaphragm.The use of the PDMS diaphragm and the PZT bimorph can give rise to large displacements of the pump diaphragm,making the micropump more efficient and easier to be fabricated.The flow rate of the micropump is a function to the voltage and frequency of the applied square wave.When a square wave of 100V is applied,a maximum flow rate of 317μL/min and a back-pressure of 2 kPa are achieved at 20 Hz.
基金funded by the National Natural Science Foundation of China(Grant No.51505128)supported by the Henan Key Technology Research and Development Program(Grant No.182102410061)
文摘Piezoelectric transducers of different external diameters are designed and fabricated and incorporated into micropumps. Through finite element analysis, it is shown that the volume efficiency of the micropump reaches its maximum value for the first mode of vibration. The variation of maximum displacement with frequency is determined under free and forced vibration. Results demonstrate that this variation shows the same trend for different driving waves at the same driving voltage. The maximum displacement under forced vibration is less than that under free vibration. The displacement increases with decreasing distance from the center of the transducer. The maximum displacement is inversely proportional to the diameter of the transducer and proportional to the driving voltage under both free and forced vibrations. Finally, the micropump flow rate and pressure are measured and are found to manifest the same trend as the maximum displacement under the same driving conditions. For a piezoelectric transducer of 12 mm external diameter, the maximum flow rate and pressure value are 150 μL/min and 346 Pa, respectively, under sine-wave driving at 100 Vpp driving voltage.
基金financial support from the Science and Technology Commission of Shanghai Municipality(STCSM,No.17DZ2291400 and No.17DZ2203100)
文摘This paper presents a novel working mechanism of a micropump using micropaddles(MPs)to actively manipulate fluid based on 3 D printing technology.The novel working principle is systematically discussed using analysis,computation and experiment methods.A theoretical model is established to research the working mechanism and crucial parameters for driving ability,such as MPs shape,size,vibration amplitude and frequency.Two different 3 D printing techniques that simplify the multi-step process into only one step are introduced to manufacture the prototype pump for investigating the principle experimentally.A testing system is designed to evaluate the flow rate of pumps with eight different vibrating paddles.A maximum flux of 127.9 mL/min is obtained at an applied voltage of 9 V.These experiments show that the active-type mechanical pump could not only freely control flow direction but also change flux by adopting different shapes or distribution ways.The advantage of the novel micropump is the application of the MP structure into the micropump system to actively manipulate fluid with flexibility and high driving ability at fairly low power.
文摘In this paper,we propose a new prototype model of a micro pump using ICPF(Ionic Conducting Polymer Film)actuator as the servo actuator.This micro pump consists of two active one- way valves that make use of the same ICPF actuator.The overall size of this micro pump prototype is 12mm in diameter and 20mm in length.The actuating mechanism is as follows:(1)The ICPF actuator as the diaphragm is bent into anode side by application of electricity.Then the volume of the pump chamber increases,resulting in the inflow of liquid from the inlet to the chamber.(2)By changing the current direction,the volume of the pump chamber decreases,resulting in the liquid flow from the chamber to the outlet.(3)The ICPF actuator is put on a sine voltage,the micro pump provides liquid flow from the inlet to the outlet continuously.Characteristic of the micro pump is measured.The experimental results indicate that the micro pump has the satisfactory responses.
文摘A parallel dynamic passive valveless micropump was designed, which consists of three layers-valve, diaphragm and electromagnetic coil. The valve was wetly etched in a silicon wafer, the diaphragm was a PDMS (polydimethyl siloxane) film spun on a silicon wafer with embedded permanent magnet posts, and the coil was electroplated on a silicon substrate. Under the actuation of the magnetic field generated by coils, the flexible diaphragm could be displaced upwards and downwards. After analyzing magnetic and mechanical characteristic of the flexible membrane and direction-dependence of the nozzle, a micropump was designed. And the relative length (L/d) of the micropump nozzle was taken 4. A 7 × 7 array of permanent magnetic posts was embedded in the PDMS film. Two diaphragms worked in an anti-step mode, which could relieve the liquid shock and increase the discharge of the micropump. The ANSYS and Matlab were adopted to analyze the actuation effect of the coil and the flow characteristic of the micropump. Results show that when actuated under a 0.3 A, 100 Hz current, the displacement of the diaphragm is more than 30 μm, and the discharge of the micropump is about 6 μL/s.