On account of the multiformity of MEMS devices, it is necessary to integrate with some optical measurement techniques for meeting static and dynamic unit test requirements. In this paper, an automated MEMS test system...On account of the multiformity of MEMS devices, it is necessary to integrate with some optical measurement techniques for meeting static and dynamic unit test requirements. In this paper, an automated MEMS test system is built of some commercially available components and instruments based on virtual instrument technology. The system is integrated with stroboscopic imaging, computer micro-vision, microscopic Mirau phase shifting interferometry, and laser Doppler vibrometer, and is used for the measurement of full-view in-plane and out-of-plane geometric parameters and periodical motions and single spot out-of-plane transient motion. The system configuration and measurement methods are analyzed, and some applications of the measurement of in-plane and out-of-plane dimensions and motions were described. The measurement accuracy of in-plane dimensions and out-of-plane dimensional is better than 0.2 um and 5 nm respectively. The resolution of measuring in-plane and out-of-plane motions is better than 15 nm and 2 nm respectively.展开更多
Using virtual instrument technology, digital signal processing technology and traditional optical radiation measuring technology to construct optical radiation measuring system breaks the construction methods of tradi...Using virtual instrument technology, digital signal processing technology and traditional optical radiation measuring technology to construct optical radiation measuring system breaks the construction methods of traditional instruments. Signal processing, collection, control and process of measuring system are implemented by the software LabVIEW8.2. And they are integrated in a computer. The computer not only is data processing center, but also is instrument control center. While measuring, the user uses the mouse to operate the handles including knobs, switch and buttons of virtual instrument panel to select instrument functions and set various parameters, which realizes measuring optical radiation with different wave bands and different intensity. And the user can change insmament operation panel, modify system software, transform instrument function, and customize instrument parameters, which embodies the idea that the software is the instnnnent.展开更多
A virtual instrument(Ⅵ) was developed to monitor the technological parameters in the process of brush plating, including coating thickness, brush-plating current, current density, deposition rate, and brush plating v...A virtual instrument(Ⅵ) was developed to monitor the technological parameters in the process of brush plating, including coating thickness, brush-plating current, current density, deposition rate, and brush plating voltage. Meanwhile two approaches were presented to improve the measurement accuracy of coating thickness. One of them aims at eliminating the random interferences by moving average filtering; while the other manages to calculate the quantity of electricity consumed accurately with rectangular integration. With these two approaches, the coating thickness can be measured in real time with higher accuracy than the voltage-frequency conversion method. During the process of plating all the technological parameters are displayed visually on the front panel of the Ⅵ. Once brush current or current density overruns the limited values, or when the coating thickness reaches the objective value, the virtual will alarm. With this Ⅵ, the solution consumption can be decreased and the operating efficiency is improved.展开更多
Experimental teaching plays a crucial role in the trainings of students＇ abilities to analyze and solve problems. Therefore, it is very necessary to continuously carry out experiment teaching reform, improve experime...Experimental teaching plays a crucial role in the trainings of students＇ abilities to analyze and solve problems. Therefore, it is very necessary to continuously carry out experiment teaching reform, improve experiment teaching methods and means, and comprehensively open laboratories so as to provide students with more opportunities of doing experiments. To improve the teaching effect of electronic information experimental courses, a network interactive virtual experimental platform is developed. This platform allows students to finish the construction of all kinds of circuit structures and test virtual instruments in a simulation environment, upload experimental data and also interactively communicate with teachers through the lnternet. The platform can be applied to the teaching activities of related electronic information experimental courses, and also can be used as an aid teaching method for theory teachers. Therefore, it possesses a very good interactivity, and makes up the disadvantages of the experimental teaching in hardware environment, so that a feasible solution is provided for the opening of laboratories.展开更多
A new concept called intelligent virtual control (IVC), which can be drivenby measuring functions, is put forward. This small 'intelligent measurement instrument unit (IMIU)',carrying with functions of instrum...A new concept called intelligent virtual control (IVC), which can be drivenby measuring functions, is put forward. This small 'intelligent measurement instrument unit (IMIU)',carrying with functions of instrument, consists of different types of intelligent virtualinstrument (IVI) through individual components together as building blocks and can be displayeddirectly on the computer screen. This is a new concept of measuring instrument, and also animportant breakthrough after virtual instrument (VI). Virtual control makes instrument resourcesobtain further exploitation. It brings about a fundamental change to the design and manufacturingmode. The instrument therefore, can not only be produced directly inside a PC, but the product isinvolved in the 'green product' system. So far, all the present digital instruments will grow to bereplaced by intelligent control with green characteristics.展开更多
Based on mobile devices as a solution for measurement faces interesting challenges, which involve poor human- computer interaction and limited computer capability. In this paper, we present the mobile sensing system ...Based on mobile devices as a solution for measurement faces interesting challenges, which involve poor human- computer interaction and limited computer capability. In this paper, we present the mobile sensing system （MSS） with func- tions of constructing, configuring and implementing measurement applications. MSS consists of a mobile device and a sensor probe, In the mobile device we install a pocket virtual instrument platform （PVIP）, which has object-oriented software ar- chitecture and can be configured through extensible markup language （XML） files. And these configuration files can be written to the probe. Therefore, the probe can produce the measurement of APP in the mobile device. This infrastructure has been illustrated by a sound signal acquisition task and a flexible force measurement task which are finished with an android smartphone and a probe. These examples suggest that MSS is reconfigurable, highly automatical and flexible.展开更多
基金Supported by National Natural Science Foundation of China (No.50505031)Tianjin Municipal Science and Technology Commission(No.043185911)Programfor NewCentury Excellent Talents in University
文摘On account of the multiformity of MEMS devices, it is necessary to integrate with some optical measurement techniques for meeting static and dynamic unit test requirements. In this paper, an automated MEMS test system is built of some commercially available components and instruments based on virtual instrument technology. The system is integrated with stroboscopic imaging, computer micro-vision, microscopic Mirau phase shifting interferometry, and laser Doppler vibrometer, and is used for the measurement of full-view in-plane and out-of-plane geometric parameters and periodical motions and single spot out-of-plane transient motion. The system configuration and measurement methods are analyzed, and some applications of the measurement of in-plane and out-of-plane dimensions and motions were described. The measurement accuracy of in-plane dimensions and out-of-plane dimensional is better than 0.2 um and 5 nm respectively. The resolution of measuring in-plane and out-of-plane motions is better than 15 nm and 2 nm respectively.
文摘Using virtual instrument technology, digital signal processing technology and traditional optical radiation measuring technology to construct optical radiation measuring system breaks the construction methods of traditional instruments. Signal processing, collection, control and process of measuring system are implemented by the software LabVIEW8.2. And they are integrated in a computer. The computer not only is data processing center, but also is instrument control center. While measuring, the user uses the mouse to operate the handles including knobs, switch and buttons of virtual instrument panel to select instrument functions and set various parameters, which realizes measuring optical radiation with different wave bands and different intensity. And the user can change insmament operation panel, modify system software, transform instrument function, and customize instrument parameters, which embodies the idea that the software is the instnnnent.
基金Project (50235030) supported by the National Natural Science Foundation of China
文摘A virtual instrument(Ⅵ) was developed to monitor the technological parameters in the process of brush plating, including coating thickness, brush-plating current, current density, deposition rate, and brush plating voltage. Meanwhile two approaches were presented to improve the measurement accuracy of coating thickness. One of them aims at eliminating the random interferences by moving average filtering; while the other manages to calculate the quantity of electricity consumed accurately with rectangular integration. With these two approaches, the coating thickness can be measured in real time with higher accuracy than the voltage-frequency conversion method. During the process of plating all the technological parameters are displayed visually on the front panel of the Ⅵ. Once brush current or current density overruns the limited values, or when the coating thickness reaches the objective value, the virtual will alarm. With this Ⅵ, the solution consumption can be decreased and the operating efficiency is improved.
文摘Experimental teaching plays a crucial role in the trainings of students＇ abilities to analyze and solve problems. Therefore, it is very necessary to continuously carry out experiment teaching reform, improve experiment teaching methods and means, and comprehensively open laboratories so as to provide students with more opportunities of doing experiments. To improve the teaching effect of electronic information experimental courses, a network interactive virtual experimental platform is developed. This platform allows students to finish the construction of all kinds of circuit structures and test virtual instruments in a simulation environment, upload experimental data and also interactively communicate with teachers through the lnternet. The platform can be applied to the teaching activities of related electronic information experimental courses, and also can be used as an aid teaching method for theory teachers. Therefore, it possesses a very good interactivity, and makes up the disadvantages of the experimental teaching in hardware environment, so that a feasible solution is provided for the opening of laboratories.
基金This project is supported by National Natural Science Foundation of China(No.50135050).
文摘A new concept called intelligent virtual control (IVC), which can be drivenby measuring functions, is put forward. This small 'intelligent measurement instrument unit (IMIU)',carrying with functions of instrument, consists of different types of intelligent virtualinstrument (IVI) through individual components together as building blocks and can be displayeddirectly on the computer screen. This is a new concept of measuring instrument, and also animportant breakthrough after virtual instrument (VI). Virtual control makes instrument resourcesobtain further exploitation. It brings about a fundamental change to the design and manufacturingmode. The instrument therefore, can not only be produced directly inside a PC, but the product isinvolved in the 'green product' system. So far, all the present digital instruments will grow to bereplaced by intelligent control with green characteristics.
基金The Ministry of Science and Technology of the People's Republic of China,Within the Framework of the Project the CNC Products innovation demonstration(No.2012BAF13B06)
文摘Based on mobile devices as a solution for measurement faces interesting challenges, which involve poor human- computer interaction and limited computer capability. In this paper, we present the mobile sensing system （MSS） with func- tions of constructing, configuring and implementing measurement applications. MSS consists of a mobile device and a sensor probe, In the mobile device we install a pocket virtual instrument platform （PVIP）, which has object-oriented software ar- chitecture and can be configured through extensible markup language （XML） files. And these configuration files can be written to the probe. Therefore, the probe can produce the measurement of APP in the mobile device. This infrastructure has been illustrated by a sound signal acquisition task and a flexible force measurement task which are finished with an android smartphone and a probe. These examples suggest that MSS is reconfigurable, highly automatical and flexible.
